摘要
用动态原位电镜观察方法研究了直流溅射Fe_(82)Si_(6)B_(12)非晶合金膜的晶化动力学过程结果表明:溅射Fe_(82)Si_6B_(12)非晶合金膜的晶化类型为初晶晶化,初晶产物为α(Fe,Si)长大以枝晶方式进行,长大方向沿<110>晶向.α(Fe,Si)初晶形核采取瞬态均匀形核,晶核初始的形状为圆形和多角形,并很快发展成枝晶.α(Fe,Si)枝晶的长大是由B原子在非晶合金中的长程扩散控制的,根据对长大过程的动力学分析,得到了B原子在溅射Fe_(82)Si_(6)B_(12)非晶合金膜中的自扩散系数,且扩散系数与退火温度之间符合Arrhenius关系.
In situ observation under TEM was carried out on the crystallization of prima-ry crystalline α(Fe, Si) in the sputtering Fe_(82)Si_6B_12 amorphous alloy film. The growth ofa(Fe,Si) is of dendritic morphology along <110> orientation. The nucleation of primarycrystalline a(Fe,Si) may be transient homogeneous, in circular or polygonal shape and to berapidly growing into dendrites. The growth of the α(Fe,Si) dendrites is controlled bylong-range diffusion of B atoms in the amorphous alloy. The self-diffusion coefficient of Batom in the sputtering Fe_(82)Si_6B_(12) amorphous alloy film together with the Arrhenius relationbetween diffusion coefficient and annealing temperature were obtained on the basis of kineticanalysis of its growing process.
出处
《金属学报》
SCIE
EI
CAS
CSCD
北大核心
1993年第11期B515-B520,共6页
Acta Metallurgica Sinica
关键词
金属玻璃
薄膜
晶化动力学
Fe_(82)Si_6B_(12) amorphous alloy
film
crystallization
diffusion
