摘要
移相式相位轮廓术的关键在于相移量的检测、提取。只有正确地提取出相移量才能提高测量的精度,降低测量系统的复杂性。在对非定步长相移轮廓术研究的基础上,提出了一种新的投影栅相位测量方法———三步非定步长相移法,只需相移光栅两步并获取66幅条纹图,即可完成非定步长解调相位的工作。该方法无须精确的相移器,计算过程相对简单并且速度快。并且给出了与Kong Kim算法实验及计算结果的比较,证明该方法具有较高的精度。
The main process lies in the detection and extraction of the shifting phase in phase measurement profilometry. As long as we can get the shifting phase rightly, the measured accuracy of the measurement system will be increased, and the complexity of the measurement system will be decreased. This paper, based on the study of the undecided steps phase-shifting, proposes a novel method-three undecided step phase shifting profilometry. This method can complete detection of the phase by only resorting to shifting grating two steps and acquiring six shifted grating patterns. This method needn't the precision shifter, and the process of calculation is simple and fast. A comparison, which demonstrates the high accuracy of the new method, is made between the proposed the three-undecided step and the Kong-Kim algorithm.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2004年第8期967-970,共4页
Journal of Optoelectronics·Laser
