摘要
MEMS器件在制造、运输和使用过程中不可避免地受到不同程度的冲击作用,分析和认识MEMS器件在冲击下的响应和失效模式,对提高器件的耐冲击和可靠性具有一定的指导意义。本文综述了MEMS器件的冲击测试和理论分析方法,对MEMS器件的可靠性设计具有一定参考价值。
Exposure of MEMS to shock environments can occur during fabrication,transportation and operation. Its very important for reliability design to identify the response of MEMS devices in shock environments. The methods of test and analysis in shock environments are outlined.
出处
《微纳电子技术》
CAS
2004年第7期31-34,共4页
Micronanoelectronic Technology
