摘要
从麦克斯韦方程组和电磁场的边界条件出发，用矢量衍射理论的模式匹配法对亚波长位相光栅的衍射进行了数值计算，在正入射的情况下，计算了反射波和透射波的场分布，并研究了光栅的结构参数（光栅深度、基底厚度、占空比等）对反射波和透射波各级衍射效率的影响。
From Maxwell′s equations and the boundary conditions of electromagnetic field,the numerical calculations have been carried out for the diffraction of sub wavelength phase gratings by means of the mode matching method of vector diffraction theory.Under the conditions of normal incidence,the field distributions of the reflecting wave and transmission wave have been calculated,and the influences of the structural parameters(grating depth,base thickness and duty ratio)on the diffraction efficiency of various orders of reflecting wave and transmission wave are investigated.
出处
《光电工程》
CAS
CSCD
1997年第S1期82-87,共6页
Opto-Electronic Engineering
基金
中国科学院光电技术研究所微细加工光学技术国家重点实验室和中国工程物理研究院激光物理和激光化学研究所资助
关键词
位相光栅
衍射效率
数值计算
Phase gratings,Diffraction efficiency,Numerical calculation.
