摘要
介绍了多晶硅微机械薄膜的制备工艺,叙述了它的基本结构和工艺的研究,并给出了试验结果。
The fabrication of polysilicon micro machine film is presented. Some approaches to the basic structure and processing technology are described, and The experimental results are also given.
出处
《传感器技术》
CSCD
1993年第6期38-39,55,共3页
Journal of Transducer Technology
