摘要
采用低温等离子体法以无水四氯化锡为源物质制备了二氧化锡超微粉料,TEM照片显示粉料粒度均匀,粒径为10nm量级,并且阴极高压越高,粒径越小。用该粉料制备的气敏元件,测定了气体灵敏度与温度及浓度的关系,显示了比一般无渗杂氧化锡元件灵敏度高的特点,可望开发成为广普型气敏传感器。还讨论了元件的灵敏度和电导温度特性随不同热处理温度的变化。大的比表面积在这种类型传感器运行机制中起着重要作用.
The preparation of ultrafine powder of tin oxide by bw temperature plasma method with anhydrous stannic chloride as die source material was reported. The TEM pictures show mat the size of the powder is 10nm order and very even. The higher the anodic voltage is , the smaller the diameter of the powder. The relation of gas sensitivity-temperature or concentration were measured with a gas sensitive element based on thus powder. The gas sensitivity of this ultrafine powdr element is proved to be very high compared with other undoped stannic oxide elements. It is hoped that a vast gas sensors can be developed. The influence of heat treatment on gas sensitivity and conductance -temperature relation is also discussed. The large specific surface area plays an important rote in the operation mechanism of this kind of sensor.
出处
《传感器技术》
CSCD
1993年第6期19-22,共4页
Journal of Transducer Technology
基金
国家自然科学基金
