5LEE E S, LEE S G, CHOI W K, et al. Study on the effectof various machining speeds on the wafer polishing process [J]. Journal of Mechanical Science and Technology, 2013, 27(10): 3155-3160.
6GIVI M, TEHRANI A F, MOHAMMADI A. Polishing of the aluminum sheets with magnetic abrasive finishing method [J]. International Journal of Advanced Manufacturing Technology, 2012, 61(9-12): 989-998.
7LI M, LYU B H, YUAN J L, et al. Shear-thickening polishing method[J]. International Journal of Machine Tools & Manufacture, 2015, 94(7): 88-99.
8PAN R, WANG Z Z, WANG C J, et al. Research on control optimization for bonnet pofishing system [J]. International Journal of Precision Engineering and Manufacturing, 2014, 15(3): 483-488.
9ZENG S Y, BLUNT L. Experimental investigation and analytical modelling of the effects of process parameters on material removal rate for bonnet polishing of cobalt chrome alloy [J]. Precision Engineering, 2014, 38(2): 348"355.
10WANG Y Q, YIN S H., HUANG H, et al. Magnetorheological polishing using a permanent magnetic yoke with straight air gap for ultra-smooth surface planarization[J]. Precision Engneering, 2015, 40(1): 309-317.
