摘要
本文介绍了国际上硅超大规模集成电路技术和产品的发展状况,阐述了硅超大规模集成电路关键技术和产品特点及其发展趋势,对我国集成电路同行将起借鉴作用。
An overall review of the development of technology and producors for Si VLSI is made in this paper. The key technology and characteristic of the productions and developing trend for Si VLSI are also described.lt will be used for reference for IC engineers.
出处
《电子与封装》
2003年第5期48-57,共10页
Electronics & Packaging
关键词
硅集成电路
技术
产品
发展
Si Integrated Circuits, Technology, Productors, Development
