摘要
本文主要阐述真空机械泵的运行原理,其中着重说明了泵发生安全事故的主要原因,并 提出了如何改善真空系统的建议。
In this paper,a brief introduction to the principle of the running mechanical vacuum pump.The emphasis is placed on the key-reason of the pump accident and how to inprove the structure of the vacuum system.
出处
《电子与封装》
2003年第2期54-56,共3页
Electronics & Packaging
关键词
油密封
自燃
硅烷
Oil-seal
Self-burning
SiH4
