Chirped fiber grating was used in dispersion compensator. We tried to use the same phase mask to write fiber grating of different wavelength with two methods to reduce the price of the fiber grating.
文摘针对目前二元光学元件掩模制作工艺过程的诸多不足,对连续型平面衍射聚光透镜掩模的激光直写制作工艺进行了研究。基于基尔霍夫标量衍射理论,采用光线追迹法设计了连续型平面衍射聚光透镜掩模。采用激光直写技术,利用CLW S-300M/C极坐标激光直写设备、S1830光刻胶和M ICROPO S IT-351显影液,进行了刻写实验。实验表明,激光能量、预烘烤温度、显影液浓度以及预曝光对掩模微结构的制作均有影响。最后制作了掩模。与二元光学元件掩模的制作工艺相比,该技术具有工艺简单、制作周期短且易于操作的优点。
文摘Chirped fiber grating was used in dispersion compensator. We tried to use the same phase mask to write fiber grating of different wavelength with two methods to reduce the price of the fiber grating.
