The monolithic integrated micro sensor is an important direction in the fields of integrated circuits and micro sensors. In this paper,a monolithic thermal vacuum sensor based on a micro-hotplate （MHP） and operating...The monolithic integrated micro sensor is an important direction in the fields of integrated circuits and micro sensors. In this paper,a monolithic thermal vacuum sensor based on a micro-hotplate （MHP） and operating under constant bias voltage conditions was designed. A new monolithic integrating mode was proposed,in which the dielectric and passiva- tion layers in standard CMOS processes were used as sensor structure layers,gate polysilicon as the sacrificial layer,and the second polysilicon layer as the sensor heating resistor. Then, the fabricating processes were designed and the monolithic thermal vacuum sensor was fabricated with a 0. 6μm mixed signal CMOS process followed by sacrificial layer etching technology. The measurement results show that the fabricated monolithic vacuum sensor can measure the pressure range of 2- 10^5 Pa and the output voltage is adjustable.展开更多
Wide-range vacuum sensors(0.1–10^(5) Pa)are crucial for a variety of applications,particularly in semiconductor equipment.However,existing sensors often face a trade-off between measurement range and accuracy,with so...Wide-range vacuum sensors(0.1–10^(5) Pa)are crucial for a variety of applications,particularly in semiconductor equipment.However,existing sensors often face a trade-off between measurement range and accuracy,with some offering a wide range at the expense of low accuracy,and others providing high accuracy within a limited range.This restricts their applicability in advanced technologies.The primary challenge lies in the sensitivity constraints at medium vacuum,the accuracy limitations at low vacuum,and the dependence of gas types.In this study,a new paradigm of high-performance wide-range MEMS diaphragm-based vacuum sensor is proposed,which is inherently small volume and independent of gas types.The sensor measures the vacuum pressure based on a two degree of freedom weak-coupling resonator,which operates in two distinct modes.In the range from 0.3 Pa to 10^(3) Pa,it works in mode-localized mode,where amplitude ratio serves as the output to enhance sensitivity and resolution.For pressure ranging from 10^(3) Pa to 10^(5) Pa,it works in traditional resonance mode,with frequency serving as the output to achieve high accuracy.Experimental results demonstrate that the proposed sensor outperforms conventional vacuum sensors.展开更多
An on-chip microelectromechanical system was fabricated in a 0.5μm standard CMOS process for gas pressure detection. The sensor was based on a micro-hotplate （MHP） and had been integrated with a rail to rail operat...An on-chip microelectromechanical system was fabricated in a 0.5μm standard CMOS process for gas pressure detection. The sensor was based on a micro-hotplate （MHP） and had been integrated with a rail to rail operational amplifier and an 8-bit successive approximation register （SAR） A/D converter. A tungsten resistor was manufactured on the MHP as the sensing element, and the sacrificial layer of the sensor was made from polysilicon and etched by surface-micromachining technology. The operational amplifier was configured to make the sensor operate in constant current mode. A digital bit stream was provided as the system output. The measurement results demonstrate that the gas pressure sensitive range of the vacuum sensor extends from 1 to 105 Pa. In the gas pressure range from 1 to 100 Pa, the sensitivity of the sensor is 0.23 mV/Pa, the linearity is 4.95%, and the hysteresis is 8.69%. The operational amplifier can drive 200 Ω resistors distortionlessly, and the SAR A/D converter achieves a resolution of 7.4 bit with 100 kHz sample rate. The performance of the operational amplifier and the SAR A/D converter meets the requirements of the sensor system.展开更多
This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2μm×100μm, is deposited on the top of a ...This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2μm×100μm, is deposited on the top of a thin silicon nitride diaphragm and functioned as the thermal sensor element. By using vacuum anodic bonding and bulk-si anisotropic wet etching process instead of the sacrificial-layer technique, a cavity, functioned as the adiabatic vacuum chamber, 200μm×200μm×400μm, is placed between the silicon nitride diaphragm and glass （Corning 7740）. This method totally avoid adhesion problem which is a major issue of the sacrificial-layer technique.展开更多
Compression force sensors are indispensable to tactile sensors in humanoid robots. We are investigating the application of low-cost electrically conducting rubber sheets to force sensors, of which the biggest problem ...Compression force sensors are indispensable to tactile sensors in humanoid robots. We are investigating the application of low-cost electrically conducting rubber sheets to force sensors, of which the biggest problem is its poor reproducibility. We have found that the deposition of aluminum by a vacuum evaporation method shows such an excellent characteristic that the sensor can be used in a wide range under 10.33 N/cm2. In this article, we investigated time response of the sensors and also studied how the radiation heating during the vacuum evaporation process for Al deposition affected their sensing property. We found that the radiation heating induces deterioration from the point of view of standard deviation of the output voltage of the sensors at a transient region. We convince that a low-temperature Al deposition method should be developed to form electrodes on the electrical conducting rubber sensors.展开更多
This article proposes a novel "cathode-on-membrane" vacuum microelectronic (VME)pressure sensor. Compared with conventional VME pressure sensors, the package process of the new structured sensor is easier to...This article proposes a novel "cathode-on-membrane" vacuum microelectronic (VME)pressure sensor. Compared with conventional VME pressure sensors, the package process of the new structured sensor is easier to control, and therefore it enable greater potential of nass production and high productivity. The properties of the new sensor have been theoretically investigated by computer simulations; the practical structure has been designed and fabricated; and the package technique has been studied.展开更多
Tactile sensors are believed to be a key element in order to realize robotic fingers to catch a fragile object without damage. Force sensitive conductive rubber is a low-cost material and then attractive for the appli...Tactile sensors are believed to be a key element in order to realize robotic fingers to catch a fragile object without damage. Force sensitive conductive rubber is a low-cost material and then attractive for the application to tactile sensors. We have studied the effect of electrodes attached to the rubber sheets. We have tried four kinds of electrodes: vacuum deposited Al, adhesive Cu tape, Al thin film sheet and silver paste. It can be concluded that vacuum deposited Al has the highest potential from the practical point of view;it has the widest dynamic range and good precision at the same time.展开更多
文摘The monolithic integrated micro sensor is an important direction in the fields of integrated circuits and micro sensors. In this paper,a monolithic thermal vacuum sensor based on a micro-hotplate （MHP） and operating under constant bias voltage conditions was designed. A new monolithic integrating mode was proposed,in which the dielectric and passiva- tion layers in standard CMOS processes were used as sensor structure layers,gate polysilicon as the sacrificial layer,and the second polysilicon layer as the sensor heating resistor. Then, the fabricating processes were designed and the monolithic thermal vacuum sensor was fabricated with a 0. 6μm mixed signal CMOS process followed by sacrificial layer etching technology. The measurement results show that the fabricated monolithic vacuum sensor can measure the pressure range of 2- 10^5 Pa and the output voltage is adjustable.
基金supported in part by the National Key R&D Program of China under Grant 2023YFC2410600in part by the National Natural Science Foundation of China under Grant 62301536 and Grant 62121003+2 种基金in part by the Youth Innovation Promotion Association CAS Grant 2023134 and Grant 2022121in part by the Instrument Research and Development of CAS under Grant PTYQ2024BJ0009in part by Science and Technology Program of Shandong Province under Grant 2023TSGC0211.
文摘Wide-range vacuum sensors(0.1–10^(5) Pa)are crucial for a variety of applications,particularly in semiconductor equipment.However,existing sensors often face a trade-off between measurement range and accuracy,with some offering a wide range at the expense of low accuracy,and others providing high accuracy within a limited range.This restricts their applicability in advanced technologies.The primary challenge lies in the sensitivity constraints at medium vacuum,the accuracy limitations at low vacuum,and the dependence of gas types.In this study,a new paradigm of high-performance wide-range MEMS diaphragm-based vacuum sensor is proposed,which is inherently small volume and independent of gas types.The sensor measures the vacuum pressure based on a two degree of freedom weak-coupling resonator,which operates in two distinct modes.In the range from 0.3 Pa to 10^(3) Pa,it works in mode-localized mode,where amplitude ratio serves as the output to enhance sensitivity and resolution.For pressure ranging from 10^(3) Pa to 10^(5) Pa,it works in traditional resonance mode,with frequency serving as the output to achieve high accuracy.Experimental results demonstrate that the proposed sensor outperforms conventional vacuum sensors.
基金supported by the National Natural Science Foundation of China (No. 90607003).
文摘An on-chip microelectromechanical system was fabricated in a 0.5μm standard CMOS process for gas pressure detection. The sensor was based on a micro-hotplate （MHP） and had been integrated with a rail to rail operational amplifier and an 8-bit successive approximation register （SAR） A/D converter. A tungsten resistor was manufactured on the MHP as the sensing element, and the sacrificial layer of the sensor was made from polysilicon and etched by surface-micromachining technology. The operational amplifier was configured to make the sensor operate in constant current mode. A digital bit stream was provided as the system output. The measurement results demonstrate that the gas pressure sensitive range of the vacuum sensor extends from 1 to 105 Pa. In the gas pressure range from 1 to 100 Pa, the sensitivity of the sensor is 0.23 mV/Pa, the linearity is 4.95%, and the hysteresis is 8.69%. The operational amplifier can drive 200 Ω resistors distortionlessly, and the SAR A/D converter achieves a resolution of 7.4 bit with 100 kHz sample rate. The performance of the operational amplifier and the SAR A/D converter meets the requirements of the sensor system.
基金Project supported by the National Natural Science Foundation of China (Grant No 60576053)Technology Innovation of Chinese Academy of Sciences (Grant No CXJJ-176)
文摘This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2μm×100μm, is deposited on the top of a thin silicon nitride diaphragm and functioned as the thermal sensor element. By using vacuum anodic bonding and bulk-si anisotropic wet etching process instead of the sacrificial-layer technique, a cavity, functioned as the adiabatic vacuum chamber, 200μm×200μm×400μm, is placed between the silicon nitride diaphragm and glass （Corning 7740）. This method totally avoid adhesion problem which is a major issue of the sacrificial-layer technique.
文摘Compression force sensors are indispensable to tactile sensors in humanoid robots. We are investigating the application of low-cost electrically conducting rubber sheets to force sensors, of which the biggest problem is its poor reproducibility. We have found that the deposition of aluminum by a vacuum evaporation method shows such an excellent characteristic that the sensor can be used in a wide range under 10.33 N/cm2. In this article, we investigated time response of the sensors and also studied how the radiation heating during the vacuum evaporation process for Al deposition affected their sensing property. We found that the radiation heating induces deterioration from the point of view of standard deviation of the output voltage of the sensors at a transient region. We convince that a low-temperature Al deposition method should be developed to form electrodes on the electrical conducting rubber sensors.
基金Supported by the National High Technology R&D Program (863-512, project, number 9805-10)the National Natural Science Foundation of China (grant. number 69674030).
文摘This article proposes a novel "cathode-on-membrane" vacuum microelectronic (VME)pressure sensor. Compared with conventional VME pressure sensors, the package process of the new structured sensor is easier to control, and therefore it enable greater potential of nass production and high productivity. The properties of the new sensor have been theoretically investigated by computer simulations; the practical structure has been designed and fabricated; and the package technique has been studied.
文摘Tactile sensors are believed to be a key element in order to realize robotic fingers to catch a fragile object without damage. Force sensitive conductive rubber is a low-cost material and then attractive for the application to tactile sensors. We have studied the effect of electrodes attached to the rubber sheets. We have tried four kinds of electrodes: vacuum deposited Al, adhesive Cu tape, Al thin film sheet and silver paste. It can be concluded that vacuum deposited Al has the highest potential from the practical point of view;it has the widest dynamic range and good precision at the same time.
