A high precision detection technique is analyzed based on the optical micro electro-mechanical system(MEMS)accelerometer with double gratings for noise suppression and scale factor enhancement.The brief sensing model ...A high precision detection technique is analyzed based on the optical micro electro-mechanical system(MEMS)accelerometer with double gratings for noise suppression and scale factor enhancement.The brief sensing model and modulation detection model are built using the phase sensitive detection,and the relationship between stimulated acceleration and system output is given.The schematics of gap modulation and light intensity modulation are analyzed respectively,and the choice of modulation frequency in the optical MEMS accelerometer system is discussed.According to the experimental results,the scale factor is improved from 15.45 V/g with the gap modulation to 18.78 V/g with the light intensity modulation,and the signal to noise ratio is improved from 42.95 dB to 81.73 dB.The overall noise level in the optical MEMS accelerometer is effectively suppressed.展开更多
A calculation and test method for the natural frequency of a high-g micro accelerometer with complex structures is presented. A universal formula for natural frequency, which can significantly simplify the structural ...A calculation and test method for the natural frequency of a high-g micro accelerometer with complex structures is presented. A universal formula for natural frequency, which can significantly simplify the structural design process, is deduced and confirmed by experiment. A simplified analytical model is established to describe the accelerometer＇s mechanical behavior and deduce the formula for the natural frequency. Finite element modeling is also conducted to evaluate the natural frequency of the micro-accelerometer and verify the formula. The results obtained from the analytical model and the finite element simulation show good agreement. Finally, a shock comparison method designed for acquiring the high frequency characteristics of the accelerometer is introduced to verify the formula by testing its actual natural frequency.展开更多
For the purpose of improving the precision of the inertial guidance system,it is necessary to enhance the accuracy of the accelerometer.Combining the micro-fabrication processes with resonant sensor technology,a high-...For the purpose of improving the precision of the inertial guidance system,it is necessary to enhance the accuracy of the accelerometer.Combining the micro-fabrication processes with resonant sensor technology,a high-resolution inertial-grade novel micro resonant accelerometer is studied.Based on the detecting theory of the resonant sensors,the accelerometer is designed,fabricated,and tested.The accelerometer consists of one proofmass,two micro leverages and two double-ended-tuning-fork （DETF） resonators.The sensing principle of this accelerometer is based on that the natural frequency of the DETF resonator shifts with its axial load which is caused by inertial force.The push-pull configuration of the DETF is for temperature compensation.The two-stage micro leverage mechanisms are employed to amplify the force and increase the sensitivity of the accelerometer.The micro leverage and the resonator are modeled for static analysis and nonlinear modal analysis via theory method and finite element method （FEM）,respectively.The geometrical parameters of them are optimized.The amplification factor of the leverage is 102,and the sensitivity of the resonator on theory is about 62 Hz/g.The samples of the accelerometer are fabricated with deep reactive ion etching （DRIE） technology which can get a high-aspect ratio structure for contributing a greater sensing-capacitance.The measuring results of the samples by scanning electron microscopy （SEM） show that the process is feasible,because of the complete structure,the sound combs and micro leverages,and the acceptable errors.The frequency of the resonator and the sensitivity of the accelerometer are tested via printed circuit board （PCB）,respectively.The result of the test shows that the frequency of the push-resonator is about 54 530 Hz and the sensitivity of the accelerometer is about 55 Hz/g.The amplification factor of the leverage is calculated more accurately because the coupling of the two stages leverage is considered during derivation of the analysis formula.In addition,the novel differential structure of the accelerometer can greatly improve the sensitivity of the accelerometers.展开更多
Resonant tunnelling diodes （RTDs） have negative differential resistance effect, and the current-voltage characteristics change as a function of external stress, which is regarded as mesc-piezoresistance effect of RT...Resonant tunnelling diodes （RTDs） have negative differential resistance effect, and the current-voltage characteristics change as a function of external stress, which is regarded as mesc-piezoresistance effect of RTDs. In this paper, a novel micro-accelerometer based on AlAs/GaAs/In0.1Ga0.9As/GaAs/AlAs RTDs is designed and fabricated to be a four-beam-mass structure, and an RTD-Wheatstone bridge measurement system is established to test the basic properties of this novel accelerometer. According to the experimental results, the sensitivity of the RTD based micro-accelerometer is adjustable within a range of 3 orders when the bias voltage of the sensor changes. The largest sensitivity of this RTD based miero-accelerometer is 560.2025 mV/g which is about 10 times larger than that of silicon based micro piezoresistive accelerometer, while the smallest one is 1.49135 mV/g.展开更多
A vertically movable gate field effect transistor(VMGFET) is proposed and demonstrated for a microaccelerometer application. The VMGFET using air gap as an insulator layer allows the gate to move on the substrate vert...A vertically movable gate field effect transistor(VMGFET) is proposed and demonstrated for a microaccelerometer application. The VMGFET using air gap as an insulator layer allows the gate to move on the substrate vertically by external forces. Finite element analysis is used to simulate mechanical behaviors of the designed structure. For the simulation, the ground acceleration spectrum of the 1952 Kern County Earthquake is employed to investigate the structural integrity of the sensor in vibration. Based on the simulation, a prototype VMGFET accelerometer is fabricated from silicon on insulator wafer. According to current–voltage characteristics of the prototype VMGFET, the threshold voltage is measured to be 2.32 V, which determines the effective charge density and the mutual transconductance of1.545910-8C cm-2and 6.59 m A V-1, respectively. The device sensitivity is 9.36–9.42 m V g-1in the low frequency,and the first natural frequency is found to be 1230 Hz. The profile smoothness of the sensed signal is in 3 d B range up to1 k Hz.展开更多
To achieve a high precision capacitive closed-loop micro-accelerometer,a full differential CMOS based on switched-capacitor circuit was presented in this paper as the sensor interface circuit.This circuit consists of ...To achieve a high precision capacitive closed-loop micro-accelerometer,a full differential CMOS based on switched-capacitor circuit was presented in this paper as the sensor interface circuit.This circuit consists of a balance-bridge module,a charge sensitive amplifier,a correlated-double-sampling module,and a logic timing control module.A special two-path feedback circuit configuration was given to improve the system linearity.The quantitative analysis of error voltage and noise shows that there is tradeoff around circuit's noise,speed and accuracy.A detailed design method was given for this tradeoff.The noise performance optimized circuit has a noise root spectral density of 1.0 μV/Hz,equivalent to rms noise root spectral density of 1.63 μg/Hz.Therefore,the sensor's Brown noise becomes the main noise source in this design.This circuit is designed with 0.5 μm n-well CMOS process.Under a ±5 V supply,the Hspice simulation shows that the system sensitivity achieves 0.616 V/g,the system offset is as low as 1.456 mV,the non-linearity is below 0.03%,and the system linear range achieves ±5 g.展开更多
A new scheme is proposed to model 3D angular motion of a revolving regular object with miniature, low-cost micro electro mechanical systems(MEMS) accelerometers(instead of gyroscope),which is employed in 3D mouse syst...A new scheme is proposed to model 3D angular motion of a revolving regular object with miniature, low-cost micro electro mechanical systems(MEMS) accelerometers(instead of gyroscope),which is employed in 3D mouse system.To sense 3D angular motion,the static property of MEMS accelerometer,sensitive to gravity acceleration,is exploited.With the three outputs of configured accelerometers,the proposed model is implemented to get the rotary motion of the rigid object.In order to validate the effectiveness of the proposed model,an input device is developed with the configuration of the scheme.Experimental results show that a simulated 3D cube can accurately track the rotation of the input device.The result indicates the feasibility and effectiveness of the proposed model in the 3D mouse system.展开更多
This paper deals with the problem of accelerometer error estimation and compensation for a three-axis gyro-stabilized camera mount. In a dynamic environment, the aircraft motion acceleration affects the accelerome ：e...This paper deals with the problem of accelerometer error estimation and compensation for a three-axis gyro-stabilized camera mount. In a dynamic environment, the aircraft motion acceleration affects the accelerome ：er output and causes a degradation of attitude steady accuracy. In order to improve control accuracy, this paper proposes a proportional multiple-integral observer- based control strategy to estimate and compensate the accelerometer error. The basic idea of this paper is to approximate the error property by using a q-order polynomial function and extend the error and its derivatives as augmented states. Then a proportional multiple-integral observer is developed to estimate the error, with which the relationship between the error and the imbalance torque is formulated. The estimated value is compared to an angle threshold, the result of which is used to compen- sate the accelerometer output. Through static and vehicle-mounted experiments, it is demonstrated that compared with the tra- ditional method, the proposed method can improve the attitude steady accuracy effectively.展开更多
基金supported by the National Natural Science Foundation of China(62205377).
文摘A high precision detection technique is analyzed based on the optical micro electro-mechanical system(MEMS)accelerometer with double gratings for noise suppression and scale factor enhancement.The brief sensing model and modulation detection model are built using the phase sensitive detection,and the relationship between stimulated acceleration and system output is given.The schematics of gap modulation and light intensity modulation are analyzed respectively,and the choice of modulation frequency in the optical MEMS accelerometer system is discussed.According to the experimental results,the scale factor is improved from 15.45 V/g with the gap modulation to 18.78 V/g with the light intensity modulation,and the signal to noise ratio is improved from 42.95 dB to 81.73 dB.The overall noise level in the optical MEMS accelerometer is effectively suppressed.
基金the National Natural Science Foundation of China(No.50775209)NCET~~
文摘A calculation and test method for the natural frequency of a high-g micro accelerometer with complex structures is presented. A universal formula for natural frequency, which can significantly simplify the structural design process, is deduced and confirmed by experiment. A simplified analytical model is established to describe the accelerometer＇s mechanical behavior and deduce the formula for the natural frequency. Finite element modeling is also conducted to evaluate the natural frequency of the micro-accelerometer and verify the formula. The results obtained from the analytical model and the finite element simulation show good agreement. Finally, a shock comparison method designed for acquiring the high frequency characteristics of the accelerometer is introduced to verify the formula by testing its actual natural frequency.
文摘For the purpose of improving the precision of the inertial guidance system,it is necessary to enhance the accuracy of the accelerometer.Combining the micro-fabrication processes with resonant sensor technology,a high-resolution inertial-grade novel micro resonant accelerometer is studied.Based on the detecting theory of the resonant sensors,the accelerometer is designed,fabricated,and tested.The accelerometer consists of one proofmass,two micro leverages and two double-ended-tuning-fork （DETF） resonators.The sensing principle of this accelerometer is based on that the natural frequency of the DETF resonator shifts with its axial load which is caused by inertial force.The push-pull configuration of the DETF is for temperature compensation.The two-stage micro leverage mechanisms are employed to amplify the force and increase the sensitivity of the accelerometer.The micro leverage and the resonator are modeled for static analysis and nonlinear modal analysis via theory method and finite element method （FEM）,respectively.The geometrical parameters of them are optimized.The amplification factor of the leverage is 102,and the sensitivity of the resonator on theory is about 62 Hz/g.The samples of the accelerometer are fabricated with deep reactive ion etching （DRIE） technology which can get a high-aspect ratio structure for contributing a greater sensing-capacitance.The measuring results of the samples by scanning electron microscopy （SEM） show that the process is feasible,because of the complete structure,the sound combs and micro leverages,and the acceptable errors.The frequency of the resonator and the sensitivity of the accelerometer are tested via printed circuit board （PCB）,respectively.The result of the test shows that the frequency of the push-resonator is about 54 530 Hz and the sensitivity of the accelerometer is about 55 Hz/g.The amplification factor of the leverage is calculated more accurately because the coupling of the two stages leverage is considered during derivation of the analysis formula.In addition,the novel differential structure of the accelerometer can greatly improve the sensitivity of the accelerometers.
基金supported in part by the National Natural Science Foundation of China (Grant No 50775209)the Fork Ying Tung Education Foundation (Grant No 101052)Program for Excellent Talents by Ministry of Education of China
文摘Resonant tunnelling diodes （RTDs） have negative differential resistance effect, and the current-voltage characteristics change as a function of external stress, which is regarded as mesc-piezoresistance effect of RTDs. In this paper, a novel micro-accelerometer based on AlAs/GaAs/In0.1Ga0.9As/GaAs/AlAs RTDs is designed and fabricated to be a four-beam-mass structure, and an RTD-Wheatstone bridge measurement system is established to test the basic properties of this novel accelerometer. According to the experimental results, the sensitivity of the RTD based micro-accelerometer is adjustable within a range of 3 orders when the bias voltage of the sensor changes. The largest sensitivity of this RTD based miero-accelerometer is 560.2025 mV/g which is about 10 times larger than that of silicon based micro piezoresistive accelerometer, while the smallest one is 1.49135 mV/g.
基金supported by the National Research Foundation of Korea(NRF)funded by the Korea government(MSIP)(No.2012M2A8A5025825)
文摘A vertically movable gate field effect transistor(VMGFET) is proposed and demonstrated for a microaccelerometer application. The VMGFET using air gap as an insulator layer allows the gate to move on the substrate vertically by external forces. Finite element analysis is used to simulate mechanical behaviors of the designed structure. For the simulation, the ground acceleration spectrum of the 1952 Kern County Earthquake is employed to investigate the structural integrity of the sensor in vibration. Based on the simulation, a prototype VMGFET accelerometer is fabricated from silicon on insulator wafer. According to current–voltage characteristics of the prototype VMGFET, the threshold voltage is measured to be 2.32 V, which determines the effective charge density and the mutual transconductance of1.545910-8C cm-2and 6.59 m A V-1, respectively. The device sensitivity is 9.36–9.42 m V g-1in the low frequency,and the first natural frequency is found to be 1230 Hz. The profile smoothness of the sensed signal is in 3 d B range up to1 k Hz.
基金Sponsored by the National High Technology Research and Development Program of China(863Program)(Grant No.2008AA042201)
文摘To achieve a high precision capacitive closed-loop micro-accelerometer,a full differential CMOS based on switched-capacitor circuit was presented in this paper as the sensor interface circuit.This circuit consists of a balance-bridge module,a charge sensitive amplifier,a correlated-double-sampling module,and a logic timing control module.A special two-path feedback circuit configuration was given to improve the system linearity.The quantitative analysis of error voltage and noise shows that there is tradeoff around circuit's noise,speed and accuracy.A detailed design method was given for this tradeoff.The noise performance optimized circuit has a noise root spectral density of 1.0 μV/Hz,equivalent to rms noise root spectral density of 1.63 μg/Hz.Therefore,the sensor's Brown noise becomes the main noise source in this design.This circuit is designed with 0.5 μm n-well CMOS process.Under a ±5 V supply,the Hspice simulation shows that the system sensitivity achieves 0.616 V/g,the system offset is as low as 1.456 mV,the non-linearity is below 0.03%,and the system linear range achieves ±5 g.
文摘A new scheme is proposed to model 3D angular motion of a revolving regular object with miniature, low-cost micro electro mechanical systems(MEMS) accelerometers(instead of gyroscope),which is employed in 3D mouse system.To sense 3D angular motion,the static property of MEMS accelerometer,sensitive to gravity acceleration,is exploited.With the three outputs of configured accelerometers,the proposed model is implemented to get the rotary motion of the rigid object.In order to validate the effectiveness of the proposed model,an input device is developed with the configuration of the scheme.Experimental results show that a simulated 3D cube can accurately track the rotation of the input device.The result indicates the feasibility and effectiveness of the proposed model in the 3D mouse system.
基金supported by the National Natural Science Foundation of China(Grant Nos.61174121,61333005 and 61121003)the Ph.D Programs Foundations of the Ministry of Education China
文摘This paper deals with the problem of accelerometer error estimation and compensation for a three-axis gyro-stabilized camera mount. In a dynamic environment, the aircraft motion acceleration affects the accelerome ：er output and causes a degradation of attitude steady accuracy. In order to improve control accuracy, this paper proposes a proportional multiple-integral observer- based control strategy to estimate and compensate the accelerometer error. The basic idea of this paper is to approximate the error property by using a q-order polynomial function and extend the error and its derivatives as augmented states. Then a proportional multiple-integral observer is developed to estimate the error, with which the relationship between the error and the imbalance torque is formulated. The estimated value is compared to an angle threshold, the result of which is used to compen- sate the accelerometer output. Through static and vehicle-mounted experiments, it is demonstrated that compared with the tra- ditional method, the proposed method can improve the attitude steady accuracy effectively.
