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HiPIMS频率对弧辉复合沉积TiZrN/TiN纳米多层膜微观结构和性能的影响 被引量:1
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作者 魏永强 张晓晓 +5 位作者 张华森 顾艳阳 杨佳乐 蒋志强 韦春贝 钟素娟 《中国表面工程》 北大核心 2025年第5期312-325,共14页
随着先进制造业的快速发展,单元单层氮化物涂层刀具很难满足苛刻工况条件下的高性能要求,通过设计多层结构,可以提高基体材料的硬度、耐摩擦磨损和耐腐蚀等综合性能,提高关键零部件的使用寿命。采用电弧离子镀(Arc ion plating,AIP)和... 随着先进制造业的快速发展,单元单层氮化物涂层刀具很难满足苛刻工况条件下的高性能要求,通过设计多层结构,可以提高基体材料的硬度、耐摩擦磨损和耐腐蚀等综合性能,提高关键零部件的使用寿命。采用电弧离子镀(Arc ion plating,AIP)和高功率脉冲磁控溅射(High power impulse magnetron sputtering,HiPIMS)复合技术,通过调控Hi PIMS频率在M2高速钢基体和单晶Si片上沉积TiZrN/TiN纳米多层膜,探究HiPIMS频率对TiZrN/TiN纳米多层膜微观结构和性能的影响规律。研究发现,HiPIMS频率的增加有助于改善TiZrN/TiN纳米多层薄膜表面质量,降低薄膜表面大颗粒数量,TiZrN/TiN纳米多层薄膜厚度呈先增大后减小趋势。不同HiPIMS频率下制备的TiZrN/TiN纳米多层薄膜均以(220)晶面为择优取向,平均晶粒尺寸为4.01~5.31 nm,膜基结合力等级均为HF1级,硬度均在30 GPa以上,稳定摩擦因数在0.79左右。在HiPIMS频率为600 Hz时,平均晶粒尺寸降低到最小4.01 nm。当HiPIMS频率为800 Hz时,硬度达到最大46.28 GPa,磨损率最小,为1.46×10^(-8)mm^(3)·N^(-1)·mm^(-1),此时薄膜的耐磨损性能较好。当HiPIMS频率为1000 Hz时,自腐蚀电位升高到最大-0.39 V(vs.SCE),自腐蚀电流密度降低到最小0.731μA/cm^(2),薄膜耐腐蚀性能最强,腐蚀速率最低。纳米多层结构提升TiZrN/TiN薄纳米多层薄膜的硬度、摩擦磨损和耐腐蚀性能,为薄膜工艺优化提供了试验依据和技术支撑,具有良好的应用前景。 展开更多
关键词 电弧离子镀(AIP) 高功率脉冲磁控溅射技术(hipims) hipims频率 TiZrN/TiN纳米多层膜 硬度 耐蚀性
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HiPIMS占空比对TiZrN/TiN纳米多层膜结构和性能的影响
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作者 魏永强 张晓晓 +5 位作者 张华森 顾艳阳 刘畅 吕怿东 韦春贝 钟素娟 《中国有色金属学报》 北大核心 2025年第10期3566-3580,共15页
本文采用电弧离子镀(Arc ion plating,AIP)和高功率脉冲磁控溅射(High power impulse magnetron sputtering,HiPIMS)复合方法,通过调控HiPIMS占空比在M2高速钢基体和单晶硅片上沉积TiZrN/TiN纳米多层膜,探究HiPIMS占空比对TiZrN/TiN纳... 本文采用电弧离子镀(Arc ion plating,AIP)和高功率脉冲磁控溅射(High power impulse magnetron sputtering,HiPIMS)复合方法,通过调控HiPIMS占空比在M2高速钢基体和单晶硅片上沉积TiZrN/TiN纳米多层膜,探究HiPIMS占空比对TiZrN/TiN纳米多层膜微观结构和性能的影响规律。结果表明:随着HiPIMS占空比的增加,TiZrN/TiN纳米多层膜表面大颗粒数量呈先减少后增加趋势,同时薄膜厚度呈先减小后增大趋势。随着HiPIMS占空比从2%增加10%,TiZrN/TiN纳米多层膜择优取向从(111)晶面转变为(220)晶面,膜基结合力等级均为HF1级,硬度均在33 GPa以上,稳定摩擦因数在0.79左右。当HiPIMS占空比为2%时,TiZrN/TiN纳米多层膜的磨损率达到最小,为1.73×10^(-8) mm^(3)/(N·mm),薄膜的耐磨损性能最好。当HiPIMS占空比为6%时,TiZrN/TiN纳米多层膜的硬度和弹性模量分别增加到43.73GPa和362.98 GPa,自腐蚀电位可达到-0.39 V(vs SCE),自腐蚀电流密度为0.731μA/cm^(2),薄膜耐腐蚀性能最强,腐蚀速率较低。综合对比可知,HiPIMS占空比为6%,是TiZrN/TiN纳米多层膜制备的最佳工艺参数。 展开更多
关键词 电弧离子镀 高功率脉冲磁控溅射技术 hipims占空比 耐磨性 耐腐蚀性
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Synthesis and properties of Cr-Al-Si-N films deposited by hybrid coating system with high power impulse magnetron sputtering (HIPIMS) and DC pulse sputtering 被引量:12
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作者 Min Su KANG Tie-gang WANG +2 位作者 Jung Ho SHIN Roman NOWAK Kwang Ho KIM 《中国有色金属学会会刊:英文版》 CSCD 2012年第S3期729-734,共6页
The CrN and Cr-Al-Si-N films were deposited on Si wafer and SUS 304 substrates by a hybrid coating system with high power impulse magnetron sputtering (HIPIMS) and a DC pulse sputtering using Cr and AlSi targets under... The CrN and Cr-Al-Si-N films were deposited on Si wafer and SUS 304 substrates by a hybrid coating system with high power impulse magnetron sputtering (HIPIMS) and a DC pulse sputtering using Cr and AlSi targets under N2/Ar atmosphere.By varying the sputtering current of the AlSi target in the range of 0-2.5 A,both the Al and Si contents in the films increased gradually from 0 to 19.1% and 11.1% (mole fraction),respectively.The influences of the AlSi cathode DC pulse current on the microstructure,phase constituents,mechanical properties,and oxidation behaviors of the Cr-Al-Si-N films were investigated systematically.The results indicate that the as-deposited Cr-Al-Si-N films possess the typical nanocomposite structure,namely the face centered cubic (Cr,Al)N nano-crystallites are embedded in the amorphous Si3N4 matrix.With increasing the Al and Si contents,the hardness of the film first increases from 20.8 GPa for the CrN film to the peak value of 29.4 GPa for the Cr0.23Al0.14Si0.07 N film,and then decreases gradually.In the meanwhile,the Cr0.23Al0.14Si0.07N film also possesses excellent high-temperature oxidation resistance that is much better than that of the CrN film at 900 or 1000 °C. 展开更多
关键词 Cr-Al-Si-N film high power IMPULSE MAGNETRON sputtering DC pulsed sputtering high-temperature oxidation resistance
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Microstructure and Properties of the Cr–Si–N Coatings Deposited by Combining High-Power Impulse Magnetron Sputtering(HiPIMS) and Pulsed DC Magnetron Sputtering 被引量:2
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作者 Tie-Gang Wang Yu Dong +3 位作者 Belachew Abera Gebrekidan Yan-Mei Liu Qi-Xiang Fan Kwang Ho Kim 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2017年第7期688-696,共9页
The Cr–Si–N coatings were prepared by combining system of high-power impulse magnetron sputtering and pulsed DC magnetron sputtering. The Si content in the coating was adjusted by changing the sputtering power of th... The Cr–Si–N coatings were prepared by combining system of high-power impulse magnetron sputtering and pulsed DC magnetron sputtering. The Si content in the coating was adjusted by changing the sputtering power of the Si target.By virtue of electron-probe microanalysis, X-ray diffraction analysis and scanning electron microscopy, the influence of the Si content on the coating composition, phase constituents, deposition rate, surface morphology and microstructure was investigated systematically. In addition, the change rules of micro-hardness, internal stress, adhesion, friction coefficient and wear rate with increasing Si content were also obtained. In this work, the precipitation of silicon in the coating was found.With increasing Si content, the coating microstructure gradually evolved from continuous columnar to discontinuous columnar and quasi-equiaxed crystals; accordingly, the coating inner stress first declined sharply and then kept almost constant. Both the coating hardness and the friction coefficient have the same change tendency with the increase of the Si content, namely increasing at first and then decreasing. The Cr–Si–N coating presented the highest hardness and average friction coefficient for an Si content of about 9.7 at.%, but the wear resistance decreased slightly due to the high brittleness.The above phenomenon was attributed to a microstructural evolution of the Cr–Si–N coatings induced by the silicon addition. 展开更多
关键词 Cr–Si–N coating High-power impulse magnetron sputteringhipims Pulsed DC magnetron sputtering Mechanical property Friction coefficient
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HiPIMS制备Cr/Cr_(x)C_(y)梯度过渡层对DLC薄膜结构及性能的影响 被引量:1
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作者 滑利强 苏峰华 +1 位作者 李吉 林松盛 《表面技术》 北大核心 2025年第1期62-73,共12页
目的探究高功率脉冲磁控溅射功率制备Cr/Cr_(x)C_(y)梯度过渡层对DLC薄膜性能的影响,以制备具有优良结合强度、摩擦磨损性能和耐腐蚀性能的DLC薄膜。方法利用高功率脉冲磁控溅射(HiPIMS)和直流磁控溅射(DCMS)在304不锈钢和YG6硬质合金... 目的探究高功率脉冲磁控溅射功率制备Cr/Cr_(x)C_(y)梯度过渡层对DLC薄膜性能的影响,以制备具有优良结合强度、摩擦磨损性能和耐腐蚀性能的DLC薄膜。方法利用高功率脉冲磁控溅射(HiPIMS)和直流磁控溅射(DCMS)在304不锈钢和YG6硬质合金表面制备具有Cr/Cr_(x)C_(y)梯度过渡层的DLC薄膜,研究不同HiPIMS电源功率下制备的Cr/Cr_(x)C_(y)过渡层对DLC薄膜的结构和性能的影响。采用SEM、AFM对薄膜的表面、截面形貌进行观察。利用UMT-Tribolab摩擦磨损划痕实验机测试薄膜的膜基结合强度和摩擦磨损性能,利用光学显微镜观察划痕,并测算结合力,分析磨损机制。利用电化学工作站对制备的DLC薄膜进行耐腐蚀试验。结果随着HiPIMS电源功率的提升,Cr/Cr_(x)C_(y)梯度过渡层的厚度随之增加,最厚为200 nm,薄膜的表面粗糙度随之下降,由对照组S1的4.69 nm降至S5的1.15 nm。薄膜的纳米硬度出现逐渐升高的现象,由S1的18.76 GPa升至S5的23.77 GPa。薄膜的膜基结合力表现出先减小后增大的趋势,S5组样品的膜基结合力最大,为22.19 N。薄膜的摩擦因数随着HiPIMS功率的升高而降低,最低为S5组的0.0322,对应薄膜的磨损率为4.2×10^(−7)mm^(3)/(N·m)。电化学试验结果表明,当HiPIMS电源功率为2.4 kW时,所制备的DLC薄膜具有最低的腐蚀电流密度和最高的界面电荷转移电阻,其耐腐蚀性能最优。结论利用高功率脉冲磁控溅射技术制备DLC薄膜的Cr/Cr_(x)C_(y)梯度过渡层可以有效提高薄膜的表面质量,提高薄膜的膜基结合力,降低薄膜的残余应力,同时降低薄膜的摩擦因数,提高薄膜的耐磨性。采用HiPIMS制备的Cr/Cr_(x)C_(y)梯度过渡层DLC薄膜具有较低的腐蚀电流密度和较高的界面电荷转移电阻,其耐腐蚀性能得到提升。 展开更多
关键词 hipims DLC薄膜 摩擦学性能 过渡层 耐磨性 耐腐蚀性能
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偏压对AEG辅助离子渗氮+HiPIMS沉积TiAlSiN涂层组织和力学性能的影响 被引量:1
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作者 曾琨 成永健 +3 位作者 李志荣 胡树兵 罗志明 刘纪元 《材料热处理学报》 北大核心 2025年第1期154-163,共10页
采用AEG(Arc electronic generator)弧光电子发生器辅助渗氮技术在H13(4Cr5MoSiV1)钢表面进行真空离子渗氮,通过X射线衍射仪、扫描电镜和维氏硬度计分析了偏压对渗氮层的微观组织和性能的影响。结果表明:渗氮层的物相主要为含氮马氏体α... 采用AEG(Arc electronic generator)弧光电子发生器辅助渗氮技术在H13(4Cr5MoSiV1)钢表面进行真空离子渗氮,通过X射线衍射仪、扫描电镜和维氏硬度计分析了偏压对渗氮层的微观组织和性能的影响。结果表明:渗氮层的物相主要为含氮马氏体α-Fe(N),随着偏压的增加,α-Fe(N)相向ε-Fe_(3)N相与γ′-Fe_(4)N相转变,渗氮层的厚度也随之增加,直到偏压增加到-600 V时渗氮层被刻蚀下来。在-400 V时,渗氮层的厚度最厚,为90μm,硬度最高约为1300 HV0.1。在-400 V偏压渗氮层的基础上,利用高功率脉冲磁控溅射(HiPIMS)技术沉积TiAlSiN涂层,采用X射线衍射仪、扫描电镜、划痕仪和纳米硬度计等分析了不同偏压下涂层的组织和性能。结果表明:TiAlSiN涂层基本以TiALN(200)相形式存在,随着偏压的增加,Ti元素的比例会增加;涂层的结合力随着偏压的增加而先增加后下降,在-120 V时,临界载荷LN,C2最高为85 N;TiAlSiN涂层的力学性能(H_(IT)/E_(IT)、H_(IT)^(3)/E_(IT)^(2))随着偏压的增加而先增加后下降,在-90 V时H_(IT)/E_(IT)最高约为0.093,H_(IT)^(3)/E_(IT)^(2)最高约为0.275。 展开更多
关键词 离子渗氮 AEG 偏压 hipims TiAlSiN 力学性能
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HiPIMS溅射AlCrN涂层结构对抗铝黏着性能的影响
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作者 秦亚东 高方圆 +1 位作者 许亿 夏原 《中国表面工程》 北大核心 2025年第1期216-227,共12页
一体化压铸模具在汽车产业轻量化和节能环保政策的背景下应时而生,在服役过程中受到高温、高速铝液冷热交替作用,传统的表面处理技术不能满足如此苛刻的服役条件,采用Hi PIMS技术制备Al Cr N涂层是提升一体化压铸模具表面抗铝黏着性能... 一体化压铸模具在汽车产业轻量化和节能环保政策的背景下应时而生,在服役过程中受到高温、高速铝液冷热交替作用,传统的表面处理技术不能满足如此苛刻的服役条件,采用Hi PIMS技术制备Al Cr N涂层是提升一体化压铸模具表面抗铝黏着性能的重要措施之一。基于等离子体发射光谱(OES),采用高能脉冲磁控溅射(Hi PIMS)技术在不同的N_(2)/Ar流量比下制备具有致密结构的高性能AlCrN涂层。利用数字示波器、高压探针、电流探针和等离子体发射监测器开展Hi PIMS放电特征和时间平均的OES光谱研究,采用X射线衍射仪和扫描电镜分析涂层的晶相结构、晶粒尺寸及表面截面形貌,采用纳米压痕仪测试薄膜的纳米硬度和弹性模量。设计进行抗铝黏着测试来观测涂层在铝液中的行为。结果表明,随着N_(2)/Ar流量比的增加,Hi PIMS下的峰值电流随之升高,峰值功率密度也随之升高;沉积速率先增大后降低;涂层的晶粒尺寸和微观结构也会出现明显变化;成膜环境出现大量的离子态,CrⅡ、AlⅡ、NⅡ的强度明显提升,且CrⅡ/CrⅠ强度上升,说明离化率也会随之上升;涂层结构随着N_(2)/Ar流量的变化主要呈现三种状态:非晶结构、hcp-AlN与fcc-AlCrN混合相、单一fcc-AlCrN相,实验中涂层氮含量始终保持较高水平且随着N_(2)/Ar流量比整体呈上升趋势,并最终在fcc-AlCrN结构中接近化学计量组成;在最高的N_(2)/Ar流量下制备出择优取向为(220)的fcc-AlCrN相涂层,具有最高的硬度和弹性模量,同时有着最高的H/E与H^(3)/E^(2)比值。在抗铝黏着测试中此结构也表现出无铝黏附的良好特性,且涂层相结构和成分均无明显变化,fcc-AlCrN结构在铝液中的稳定性是表现优异出抗铝黏着性能的关键。通过改变N_(2)/Ar流量比制备出高性能AlCrN涂层,给出提升一体化压铸模具表面抗铝黏着性能的可能性。 展开更多
关键词 hipims AlCrN涂层 氮氩流量比 光学发射光谱 铝液腐蚀
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偏压对HiPIMS制备DLC薄膜结构与性能的影响 被引量:1
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作者 吴勇 刘书洋 +3 位作者 陈辉 陶冠羽 杜建融 张钰 《金属热处理》 北大核心 2025年第5期228-235,共8页
采用高功率脉冲磁控溅射(HiPIMS)技术,在硬质合金YG8基体表面沉积TiAlSiN过渡层,并在0~-300 V的偏压下制备了类金刚石(DLC)薄膜。利用Raman光谱、XPS、SEM表征薄膜的组织结构与微观形貌,采用纳米压痕、划痕法、摩擦磨损试验研究薄膜的... 采用高功率脉冲磁控溅射(HiPIMS)技术,在硬质合金YG8基体表面沉积TiAlSiN过渡层,并在0~-300 V的偏压下制备了类金刚石(DLC)薄膜。利用Raman光谱、XPS、SEM表征薄膜的组织结构与微观形貌,采用纳米压痕、划痕法、摩擦磨损试验研究薄膜的力学性能。结果表明,随着负偏压的增加,DLC薄膜的I_(D)/I_(G)值先减小后增大,G峰半高宽先增大后减小,-200 V制备的薄膜I_(D)/I_(G)值最小、G峰半高宽最大,sp^(3)键含量最高,达到58.0%。不同偏压下DLC薄膜的截面形貌均无明显柱状结构,特别是偏压为-200 V与-300 V时,薄膜呈现致密的类玻璃态结构。不同偏压下薄膜的硬度(H)、相对弹性模量(E^(*))、H/E^(*)、H^(3)/E^(*2)与sp^(3)含量变化趋势基本一致,偏压为-200 V时,薄膜的综合力学性能最佳,硬度与相对弹性模量分别为23.91 GPa与260.45 GPa,H/E^(*)与H^(3)/E^(*2)分别为0.0918与0.2016 GPa。不同偏压下DLC薄膜的划痕形貌表明,-100 V与-200 V制备的DLC薄膜表现出优异的结合强度,临界载荷L_(c2)≥80 N。摩擦试验表明,DLC薄膜具有优异的摩擦学性能。特别是-200 V下沉积的DLC薄膜具有最低的平均摩擦因数与最低的磨损率,分别为0.09与5.75×10^(-16) m^(3)/(N·m)。 展开更多
关键词 高功率脉冲磁控溅射(hipims) 类金刚石薄膜 基体偏压 组织结构 力学性能
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工作气压对管内HiPIMS等离子体输运行为和Cr涂层性能的影响
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作者 胡天时 田修波 +3 位作者 巩春志 王本福 祝天放 张辉 《中国表面工程》 北大核心 2025年第2期27-35,共9页
受限于等离子体输运等问题,在细长管内壁进行物理气相沉积涂层制备面临极大挑战。通过自主设计的高真空条件下高功率脉冲磁控溅射系统实现了低气压下稳定放电,并探究了工作气压对平面Cr靶放电等离子体输运特性和管内Cr膜沉积的影响规律... 受限于等离子体输运等问题,在细长管内壁进行物理气相沉积涂层制备面临极大挑战。通过自主设计的高真空条件下高功率脉冲磁控溅射系统实现了低气压下稳定放电,并探究了工作气压对平面Cr靶放电等离子体输运特性和管内Cr膜沉积的影响规律。对沉积膜层厚度、组织结构、纳米硬度及耐磨性进行了研究。放电结果显示在保持放电功率和脉冲电压不变,降低工作气压会削弱气体放电作用,促进等离子体向管尾的输运。膜层沉积结果表明,随工作气压从1.2 Pa降低到0.1 Pa,四组涂层的膜厚不均匀度系数从310%降低到205%,膜层均匀性明显提高;管内位置1处晶粒尺寸从35.77 nm降低到27.1 nm,表面粗糙度从3.58 nm降低到2.29 nm,纳米硬度从6.37 GPa提高到8.36 GPa。同时,0.1 Pa时磨痕宽度和摩擦系数均降低,表现出最优的耐磨性能。低气压HiPIMS技术在等离子体远距离输运中表现出显著优势,有望进一步扩展磁控溅射技术在管内壁涂层制备等领域的应用。 展开更多
关键词 工作气压 磁控溅射 等离子体输运 管内膜层沉积 Cr膜
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Magnetron sputtering NiO_(x) for perovskite solar cells 被引量:1
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作者 Xiangyi Shen Xinwu Ke +2 位作者 Yingdong Xia Qingxun Guo Yonghua Chen 《Journal of Semiconductors》 2025年第5期48-63,共16页
Perovskite solar cells(PSCs) have become a hot topic in the field of renewable energy due to their excellent power conversion efficiency and potential for low-cost manufacturing. The hole transport layer(HTL), as a ke... Perovskite solar cells(PSCs) have become a hot topic in the field of renewable energy due to their excellent power conversion efficiency and potential for low-cost manufacturing. The hole transport layer(HTL), as a key component of PSCs,plays a crucial role in the cell's overall performance. Magnetron sputtering NiO_(x) has attracted widespread attention due to its high carrier mobility, excellent stability, and suitability for large-scale production. Herein, an insightful summary of the recent progress of magnetron sputtering NiO_(x) as the HTL of PSCs is presented to promote its further development. This review summarized the basic properties of magnetron sputtering NiO_(x) thin film, the key parameters affecting the optoelectronic properties of NiO_(x) thin films during the magnetron-sputtering process, and the performance of the corresponding PSCs. Special attention was paid to the interfacial issues between NiO_(x) and perovskites, and the modification strategies were systematically summarized. Finally, the challenges of sputtering NiO_(x) technology and the possible development opportunities were concluded and discussed. 展开更多
关键词 magnetron sputtering NiO_(x) PEROVSKITE solar cells
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同步脉冲偏压对HiPIMS制备DLC薄膜结构和性能的影响
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作者 李琪刚 陈仁德 +5 位作者 李昊 王振玉 郭鹏 崔丽 王梁 汪爱英 《中国表面工程》 北大核心 2025年第2期233-244,共12页
高功率脉冲磁控溅射(HiPIMS)技术在其放电过程中,由于阴极高负电压对离子的吸引,发生离子回吸现象,严重限制薄膜快速生长。为改善离子回吸问题,采用同步脉冲偏压方式,研究其对HiPIMS石墨靶沉积类金刚石(DLC)薄膜结构与性能的影响。通过... 高功率脉冲磁控溅射(HiPIMS)技术在其放电过程中,由于阴极高负电压对离子的吸引,发生离子回吸现象,严重限制薄膜快速生长。为改善离子回吸问题,采用同步脉冲偏压方式,研究其对HiPIMS石墨靶沉积类金刚石(DLC)薄膜结构与性能的影响。通过调控同步脉冲偏压的幅值与滞后时间,采用脉冲偏压同步HiPIMS的技术制备DLC薄膜。采用示波器对HiPIMS电源放电波形进行实时监控,同时利用Langmuir探针系统研究沉积过程中的等离子体特征。通过SEM、SPM、XPS和Raman等测试薄膜的表面形貌和微观结构,并利用纳米压痕仪、残余应力仪以及划痕仪,对比研究制备的DLC薄膜力学性能、应力和膜基结合力。结果发现:当同步脉冲偏压由-100 V增加至-900 V时,DLC薄膜的沉积速率和表面粗糙度均先增后减,在-500 V时沉积速率最大为352 nm/h,表面粗糙度最低达0.61±0.04 nm;sp^(3)含量从47%降低至34.8%,导致硬度从48.6 GPa下降至35.1 GPa,残余压应力相应由-3.39 GPa下降至-1.9 GPa。增加同步脉冲偏压滞后时间从0到40μs,DLC薄膜沉积速率单调增加,表面粗糙度变化不大,sp^(3)含量从38.3%略微增加至40.2%,但残余压应力和硬度增幅显著,分别由-1.92 GPa增加至-3.05 GPa和从37.7 GPa上升至45.4 GPa。增加同步脉冲偏压幅值能够提高沉积离子密度,减少靶表面的回吸和打弧,有利于表面光滑和高沉积速率,但偏压幅值过大会引起基体区的反溅射,降低薄膜表面质量和沉积速率,但因sp^(3)含量随偏压增加而减小,残余应力和硬度也随之下降。延长同步脉冲偏压的滞后时间,可获得高离子密度,同时提高薄膜沉积速率与sp^(3)含量,残余应力和硬度均相应上升。利用HiPIMS复合同步脉冲偏压大小和滞后时间调控,是实现高性能碳基薄膜设计制备的新思路。 展开更多
关键词 磁控溅射 同步脉冲偏压 DLC薄膜 微结构
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Influence of sputtering gases on the properties of Mg-doped NiO thin films prepared by radio-frequency magnetron co-sputtering method
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作者 WANG Xin LUO Minghai +2 位作者 CONG Fanchao CHEN Yili XIA Jinghan 《Optoelectronics Letters》 2025年第12期716-719,共4页
By doping with Mg atoms,the bandgap of Mg-doped NiO thin films can be adjusted larger.By using NiO and MgO as sputtering targets,Mg-doped NiO thin films were deposited using radio-frequency magnetron co-sputtering met... By doping with Mg atoms,the bandgap of Mg-doped NiO thin films can be adjusted larger.By using NiO and MgO as sputtering targets,Mg-doped NiO thin films were deposited using radio-frequency magnetron co-sputtering method in pure argon and pure oxygen gas,respectively.The crystal structure,morphological characteristics,composition and optical properties of the obtained films were compared by X-ray diffraction(XRD),scanning electron microscope(SEM),energy dispersive spectrometer(EDS)and ultraviolet(UV)-visible spectrophotometer.The properties of the thin films deposited in different sputtering gases are quite different.For the films deposited in pure argon gas,it is a polycrystalline thin film with(200)preferred orientation,while the film deposited in pure oxygen has no preferred orientation.The grain size,molar ratio of Mg to Ni atoms and optical bandgap are larger for the films deposited in pure argon gas than those deposited in oxygen gas. 展开更多
关键词 dispersive spectrometer eds crystal structuremorphological sputtering targetsmg doped oxygen gasrespectivelythe Mg doped NiO thin films radio frequency magnetron co sputtering bandgap sputtering gases
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Characteristics of radio-frequency magnetron sputtering with Ag target operated near the electron series resonance oscillation
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作者 Chao YE 《Plasma Science and Technology》 2025年第3期111-117,共7页
The discharge and plasma characteristics of Ag magnetron sputtering discharge operated near the electron series resonance(ESR)oscillation,which was excited using the driving frequency of 27.12 MHz,was investigated.The... The discharge and plasma characteristics of Ag magnetron sputtering discharge operated near the electron series resonance(ESR)oscillation,which was excited using the driving frequency of 27.12 MHz,was investigated.The imaginary part of impedance was found to undergo a transition from capacitive to inductive on varying radio-frequency(RF)power,and the conditions for the ESR excitation were satisfied.The current–voltage(I–V)characteristic of discharge showed that the lower discharge voltage with higher current was an important feature of RF magnetron sputtering operated near the ESR oscillation,which was caused by the small impedance Z originated from the mutual compensation between the sheath capacitive reactance and the plasma inductive reactance.The higher electron temperature,ion flux density and ion energy as well as the moderate electron density were obtained.The interaction of higher energy ions on substrate surface improved the crystallographic quality of Ag films.Therefore,the 27.12 MHz magnetron sputtering operated near the ESR oscillation has better deposition characteristics than that of commercial 13.56 MHz RF magnetron sputtering. 展开更多
关键词 electron series resonance magnetron sputtering radio-frequency discharge
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Solution for Environmentally Friendly Silver Surface Magnetron Sputtering Color Titanium Film Layer Technology
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作者 Huan Zhu Krisada Daoruang Chalisa Apiwathnasorn 《Journal of Environmental & Earth Sciences》 2025年第1期562-572,共11页
Silver is an elegant white precious metal,but it is easily oxidized by O3,SO2,and H2S in the air,turning yellow or dark,which affects its decorative effect.The existing silver coating,primarily prepared through the el... Silver is an elegant white precious metal,but it is easily oxidized by O3,SO2,and H2S in the air,turning yellow or dark,which affects its decorative effect.The existing silver coating,primarily prepared through the electroplating process,poses serious environmental pollution problems.It is necessary to seek new,green,and environmentally friendly coating processes while also enhancing the color palette of silver jewelry coatings.Titanium film layers were deposited on Ag925 and Ag999 surfaces using magnetron sputtering coating technology.The effects of sputtering time,substrate surface state,reaction gas type and time,and film thickness on the color of the film layers were studied,and the anti discoloration performance of the obtained film layers under the optimal process was tested.The experimental results show that when the sputtering time varies from 5 to 10 minutes,injecting argon,oxygen,and nitrogen into the coating chamber yields rich colors such as purple with a red tint,blue,yellow green,yellowish purple,and blue purple.The precise control of gas injection time has a significant impact on the color of the film layer.In terms of anti tarnish performance,the film showed good stability in the artificial sweat immersion test.From an environmental perspective,the magnetron sputtering titanium film process has no harmful gas or liquid emissions,which aligns with the sustainable development trend of the jewelry industry and holds great promise for application.This study has improved the visual effect and practical performance of the product,providing important theoretical basis and experimental data support for the application of environmentally friendly silver surface vacuum magnetron sputtering titanium thin film coating technology. 展开更多
关键词 Environmental Protection Magnetron sputtering SILVER Colored Film Titanium Film Layer
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基底偏压对HiPIMS沉积Cr/CrN/WC涂层结构和摩擦学性能的影响
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作者 吴美玲 酆毅 +6 位作者 姜其立 车智强 杜宇康 杨龙岗 郎小月 王克胜 欧伊翔 《材料保护》 2025年第11期53-61,共9页
为了系统探究基底偏压对高功率脉冲磁控溅射(HiPIMS)制备Cr/CrN/WC复合涂层的结构及性能的调控规律,采用高功率脉冲磁控溅射在AISI 304不锈钢基体上沉积Cr/CrN/WC复合涂层,系统探究基底偏压(0~-300 V)对涂层结构、力学及摩擦学性能的影... 为了系统探究基底偏压对高功率脉冲磁控溅射(HiPIMS)制备Cr/CrN/WC复合涂层的结构及性能的调控规律,采用高功率脉冲磁控溅射在AISI 304不锈钢基体上沉积Cr/CrN/WC复合涂层,系统探究基底偏压(0~-300 V)对涂层结构、力学及摩擦学性能的影响。通过X射线衍射仪(XRD)与扫描电子显微镜(SEM)表征发现,随偏压增至-200 V,β-WC1-x(200)晶面择优取向增强,颗粒细化且柱状结构弱化,致密度显著提升;而-300 V时因离子过轰击诱发晶格缺陷致密度下降。力学性能测试表明,-200 V涂层实现强韧协同优化,纳米硬度(43.25 GPa)与有效杨氏模量(474.77 GPa)达峰值,硬度/模量比(H/E*=0.091)与抗塑性变形参数(H3/E*2=0.359 GPa)较0 V样品分别提高19.7%和91.0%,洛氏C压痕测试进一步证实其结合力达HF1级(最优),压痕无裂纹分层,归因于高H/E*的弹性应变协调性及高H3/E*2的界面应力抑制。摩擦学性能测试结果显示:-200 V涂层因高硬度及低粗糙度,摩擦系数最低(0.42)且磨损率最小[1.39×10^(-7)mm^(3)/(N·m)],磨损机制为轻微氧化-黏着磨损;0 V与-300 V涂层磨损率较高[2.78×10^(-7)mm^(3)/(N·m),1.85×10^(-7)mm^(3)/(N·m)],磨损机制依次为磨粒-氧化复合磨损及软相诱导磨粒磨损。综上,-200 V偏压通过颗粒细化与结构致密化实现硬度-韧性-结合力-耐磨性的四元协同优化;过高偏压(-300 V)时则因晶格损伤与界面弱化导致涂层性能衰退。 展开更多
关键词 高功率脉冲磁控溅射 纳米涂层 微观结构 Cr/CrN/WC涂层 摩擦磨损
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Innovative surface modification strategy for ADN:PFOA-interlayered and vibrational magnetron sputtering for constructing anti-hygroscopic composite structures
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作者 Yinan Lyu Xiaoxia Ma +3 位作者 Xiaoting Ren Shuping Sun Lin Shi Li Yang 《Defence Technology(防务技术)》 2025年第10期295-305,共11页
Ammonium dinitramide(ADN),as a high-energy oxidizer widely applied in the field of rocket and missile propellants,has a prominent issue of high hygroscopicity due to its strong polarity.The previous coating encapsulat... Ammonium dinitramide(ADN),as a high-energy oxidizer widely applied in the field of rocket and missile propellants,has a prominent issue of high hygroscopicity due to its strong polarity.The previous coating encapsulation methods have struggled to address the problems of uneven coating and polarity mismatch.This research innovatively introduces perfluorooctanoic acid(PFOA)as a polar transition intermediate layer.Utilizing the polarity of one end of it to adsorb on the surface of ADN through hydrogen bonds,the problem of polarity mismatch is effectively overcome.Meanwhile,the vibrational magnetron sputtering process has been first applied in the energetic field,with a special vibrating abutment enhancing ADN particle fluidity to solve coating non-uniformity,thus preparing prilled ADN@PFOA@PTFE core-dual-shell composites.Performance tests reveal that this composite material possesses excellent hydrophobic and anti-hygroscopic properties.When left at 25℃and 75%RH for 3 days,moisture absorption was reduced by more than 90%compared to pure ADN.Simultaneously,its thermal stability,heat release performance,and combustion performance have been improved.The research achievements optimize the storage conditions of ADN in the application of rocket and missile propellants,providing solid support and broad development prospects for technological innovation in military fields. 展开更多
关键词 Ammonium dinitramide(ADN) Vibrational magnetron sputtering Core-dual-shell composites Hydrophobic Polarity matching
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Constructing high-entropy spinel oxide thin films via magnetron sputtering for efficiently electrocatalyzing alkaline oxygen evolution reaction
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作者 Yuhui Chen Congbao Guo +2 位作者 Yi Wang Kun Wang Shuqin Song 《Chinese Journal of Catalysis》 2025年第10期210-219,共10页
Ensuring high electrocatalytic performance simultaneously with low or even no precious-metal usage is still a big challenge for the development of electrocatalysts toward oxygen evolution reaction(OER)in anion exchang... Ensuring high electrocatalytic performance simultaneously with low or even no precious-metal usage is still a big challenge for the development of electrocatalysts toward oxygen evolution reaction(OER)in anion exchange membrane water electrolysis.Here,homogeneous high entropy oxide(HEO)film is in-situ fabricated on nickel foam(NF)substrate via magnetron sputtering technology without annealing process in air,which is composed of many spinel-structured(FeCoNiCrMo)_(3)O_(4) grains with an average particle size of 2.5 nm.The resulting HEO film(abbreviated as(FeCoNiCr-Mo)_(3)O_(4))exhibits a superior OER performance with a low OER overpotential of 216 mV at 10 mA cm^(–2) and steadily operates at 100 mA cm^(–2) for 200 h with a decay of only 272μV h^(–1),which is far better than that of commercial IrO_(2) catalyst(290 mV,1090μV h^(–1)).Tetramethylammonium cation(TMA^(+))probe experiment,activation energy analysis and theoretical calculations unveil that the OER on(FeCoNiCrMo)_(3)O_(4) follows an adsorbate evolution mechanism pathway,where the energy barrier of rate-determining step for OER on(FeCoNiCrMo)_(3)O_(4) is substantially lowered.Also,methanol molecular probe experiment suggests that a weakened ^(*)OH bonding on the(FeCoNiCrMo)_(3)O_(4) surface and a rapid deprotonation of ^(*)OH,further enhancing its OER performance.This work provides a feasible solution for designing efficient high entropy oxides electrocatalysts for OER,accelerating the practical process of water electrolysis for H2 production. 展开更多
关键词 High entropy spinel oxide Magnetron sputtering Alkaline water electrolysis Oxygen evolution reaction
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Status analysis on sputtering and erosion evaluation methods of ion optic systems
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作者 Long MIAO Tongxun YANG +3 位作者 Zhengxi ZHU Chang LU Zhiwen WU Ningfei WANG 《Chinese Journal of Aeronautics》 2025年第1期254-270,共17页
In the past few decades,ion engines have been widely used in deep-space propulsion and satellite station-keeping.The aim of extending the thruster lifetime is still one of the most important parts during the design st... In the past few decades,ion engines have been widely used in deep-space propulsion and satellite station-keeping.The aim of extending the thruster lifetime is still one of the most important parts during the design stage of ion engine.As one of the core components of ion engine,the grid assembly of ion optic systems may experience long-term ion sputtering in extreme electro-thermal environments,which will eventually lead to its structural and electron-backstreaming failures.In this paper,the current studies of the grid assembly erosion process are systematically analyzed from the aspects of sputtering damage process of grid materials,numerical simulations,and measurements of erosion characteristics of grid assembly.The advantages and disadvantages of various erosion prediction models are highlighted,and the key factors and processes affecting the prediction accuracy of grid assembly erosion patterns are analyzed.Three different types of experimental methods of grid assembly erosion patterns are compared.The analysis in this paper is of great importance for selecting the sputter-resistant grid materials,as well as establishing the erosion models and measurement methods to accurately determine the erosion rate and failure modes of grid assembly.Consequently,the working conditions and structure parameters of ion optic systems could be optimized based on erosion models to promote the ion engine lifetime. 展开更多
关键词 Electric propulsion Ion optic systems sputtering yield Erosion characteristics Erosion pattern measurement Lifetime evaluation
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Influence of sputtering ambient with hydrogen gas on optoelectrical properties of Ta-doped tin oxide
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作者 Haozhen Li Xingqian Chen +2 位作者 Minqiu Du Wei Chen Xiaolong Du 《Chinese Physics B》 2025年第7期542-548,共7页
Ta-doped SnO_(2)(TTO)is a suitable candidate to replace transparent conductive oxide(TCO)composed of expensive indium used for optoelectronics and silicon heterojunction solar cells fabricated below 200℃.However,TTO ... Ta-doped SnO_(2)(TTO)is a suitable candidate to replace transparent conductive oxide(TCO)composed of expensive indium used for optoelectronics and silicon heterojunction solar cells fabricated below 200℃.However,TTO films fabricated by sputtering at low temperature still demonstrate too high resistance and optical absorptance for application in industry.In this study,we investigate the influence of sputtering ambient on the optoelectrical properties of TTO films.The addition of hydrogen and oxygen to argon during sputtering leads to a large improvement in the optoelectrical properties of TTO films.The best TTO film has a low average absorptance of 1.9%and a low resistance of 3.8×10^(-3)Ω·cm with a high carrier density of 9.3×10^(19)cm^(-3)and mobility of 17.8 cm^(2)·V^(-1)·s^(-1).The micros tructural and compositional properties of TTO films were characterized using x-ray diffraction,x-ray photoelectron spectroscopy and UV-Vis spectrophotometry.A proper ratio of hydrogen to oxygen in the sputtering gas improves the crystallinity and the doping efficiency of Ta.Optical absorptance is also reduced with suppressed formation of Sn(Ⅱ)in the TTO films.Therefore,our findings exhibit remarkable potential for the industrial application of TTO as a low-cost TCO. 展开更多
关键词 transparent conductive oxide(TCO) magnetron sputtering AMBIENT Ta-doped SnO_(2) H_(2)
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Martian atmosphere sputtering escape generated by penetrating hydrogen energetic neutral atoms
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作者 JiJie Ma LingGao Kong +13 位作者 Hao Gu WenYa Li YuMing Wang YuTian Chi BinBin Tang XiaoPeng Liu YiFan Song BaiQu Pu FuHao Qiao LiMin Wang Jun Cui Yong Wei AiBing Zhang Chi Wang 《Earth and Planetary Physics》 2025年第6期1147-1156,共10页
Atmospheric escape plays a critical role in shaping the long-term climate evolution of Mars.Among the various escape mechanisms,energetic neutral atoms(ENAs)generated through charge exchange between solar wind ions an... Atmospheric escape plays a critical role in shaping the long-term climate evolution of Mars.Among the various escape mechanisms,energetic neutral atoms(ENAs)generated through charge exchange between solar wind ions and exospheric neutrals serve as an important diagnostic for ion-neutral interactions and upper atmospheric loss.This study presents direct observations of hydrogen ENAs(H-ENAs)on the dayside of Mars by using the Mars Ion and Neutral Particle Analyzer(MINPA)onboard China’s Tianwen-1 orbiter.By analyzing H-ENA data during a coronal mass ejection and a stream interaction region from December 29,2021,to January 1,2022,and comparing these data with MAVEN/SWIA(Mars Atmosphere and Volatile EvolutioN/Solar Wind Ion Analyzer)solar wind measurements,we examine the temporal evolution of H-ENA flux and the associated sputtered escape of atmospheric constituents.The observed H-ENA velocity is consistent with upstream solar wind ions,and the H-ENA-to-ion intensity ratio is used to infer variations in exospheric density,revealing a delayed response to enhanced solar wind activity.Penetrating H-ENA intensities reach up to 5.3×10^(6)s^(−1) cm^(−2),with energy fluxes on the order of(0.5-8.1)×10^(−3) mW/m^(2).The estimated oxygen sputtered escape rate driven by penetrating H-ENAs ranges from 5.5×10^(23)s^(−1) to 5.2×10^(24)s^(−1),comparable to or exceeding previous estimates based on penetrating ions.The findings highlight the need for low-altitude H-ENA observations to better quantify their atmospheric interactions and refine our understanding of nonthermal escape processes at Mars. 展开更多
关键词 penetrating energetic neutral atoms sputtered escape Mars atmosphere loss Tianwen-1 future energetic neutral atom observations
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