Radio frequency capacitively coupled plasmas(RF CCPs)operated in Ar/O_(2)gas mixtures which are widely adopted in microelectronics,display,and photovoltaic industry,are investigated based on an equivalent circuit mode...Radio frequency capacitively coupled plasmas(RF CCPs)operated in Ar/O_(2)gas mixtures which are widely adopted in microelectronics,display,and photovoltaic industry,are investigated based on an equivalent circuit model coupled with a global model.This study focuses on the effects of singlet metastable molecule O_(2)(b^(1)∑_(8)^(+)),highly excited Herzberg states O_(2)(A^(3)∑_(u)^(+),A^(3)△_(u),c^(1)∑_(u)^(-)),and the negative ion O_(2)^(-),which are usually neglected in simulation studies.Specifically,their impact on particle densities,electronegativity,electron temperature,voltage drop across the sheath,and absorbed power in the discharge is analyzed.The results indicate that O_(2)(b^(1)∑_(8)^(+))and O_(2)^(-)exhibit relatively high densities in argon-oxygen discharges.While O_(2)(A^(3)∑_(u)^(+),A^(3)△_(u),c^(1)∑_(u)^(-))play a critical role in O_(2)b1S+g production,especially at higher pressure.The inclusion of these particles reduces the electronegativity,electron temperature,and key species densities,especially the O^(-)and O^(*)densities.Moreover,the sheath voltage drop,as well as the inductance and resistance of the plasma bulk are enhanced,while the sheath dissipation power and total absorbed power decrease slightly.With the increasing pressure,the influence of these particles on the discharge properties becomes more significant.The study also explores the generation and loss of main neutral species and charged particles within the pressure range of 20 mTorr-100 mTorr(1 Torr=1.33322×10^(2)Pa),offering insights into essential and non-essential reactions for future low-pressure O_(2)and Ar/O_(2)CCP discharge modeling.展开更多
The setting chemistry of glass ionomer cement was imestigated by using mechanical determination of compressive strength at predetermined intervals,and measurement of structure changes of correspondling fracture sample...The setting chemistry of glass ionomer cement was imestigated by using mechanical determination of compressive strength at predetermined intervals,and measurement of structure changes of correspondling fracture sample by means of IR spectra and differential scanning calorimetry（DSC）.Zinc polycarboxylate cement was used as a comparison sample.The compressive strength of glass ionomer cement（GIC） increases with aging.IR spectra and DSC of corresponding fracture sample show the structure changes of the matrix and interface layer comprising of silica gel during the predetermined intervals studied.however,no significant changes occur in the zinc polycarxyolate cement.Hence the structure changes of the matrix and/or interface layer are responsible for compressive strength increasing with aging.The structure changes include the crosslink density,the ratio of complex form to ionic form,the content ratio of Al-PAA to Ca-PAA,the forming and maturing process of the interface layer comprising of silica gel.展开更多
基金supported by the National Natural Science Foundation of China(Grant Nos.12020101005,12475202,12347131,and 12405289).
文摘Radio frequency capacitively coupled plasmas(RF CCPs)operated in Ar/O_(2)gas mixtures which are widely adopted in microelectronics,display,and photovoltaic industry,are investigated based on an equivalent circuit model coupled with a global model.This study focuses on the effects of singlet metastable molecule O_(2)(b^(1)∑_(8)^(+)),highly excited Herzberg states O_(2)(A^(3)∑_(u)^(+),A^(3)△_(u),c^(1)∑_(u)^(-)),and the negative ion O_(2)^(-),which are usually neglected in simulation studies.Specifically,their impact on particle densities,electronegativity,electron temperature,voltage drop across the sheath,and absorbed power in the discharge is analyzed.The results indicate that O_(2)(b^(1)∑_(8)^(+))and O_(2)^(-)exhibit relatively high densities in argon-oxygen discharges.While O_(2)(A^(3)∑_(u)^(+),A^(3)△_(u),c^(1)∑_(u)^(-))play a critical role in O_(2)b1S+g production,especially at higher pressure.The inclusion of these particles reduces the electronegativity,electron temperature,and key species densities,especially the O^(-)and O^(*)densities.Moreover,the sheath voltage drop,as well as the inductance and resistance of the plasma bulk are enhanced,while the sheath dissipation power and total absorbed power decrease slightly.With the increasing pressure,the influence of these particles on the discharge properties becomes more significant.The study also explores the generation and loss of main neutral species and charged particles within the pressure range of 20 mTorr-100 mTorr(1 Torr=1.33322×10^(2)Pa),offering insights into essential and non-essential reactions for future low-pressure O_(2)and Ar/O_(2)CCP discharge modeling.
文摘The setting chemistry of glass ionomer cement was imestigated by using mechanical determination of compressive strength at predetermined intervals,and measurement of structure changes of correspondling fracture sample by means of IR spectra and differential scanning calorimetry（DSC）.Zinc polycarboxylate cement was used as a comparison sample.The compressive strength of glass ionomer cement（GIC） increases with aging.IR spectra and DSC of corresponding fracture sample show the structure changes of the matrix and interface layer comprising of silica gel during the predetermined intervals studied.however,no significant changes occur in the zinc polycarxyolate cement.Hence the structure changes of the matrix and/or interface layer are responsible for compressive strength increasing with aging.The structure changes include the crosslink density,the ratio of complex form to ionic form,the content ratio of Al-PAA to Ca-PAA,the forming and maturing process of the interface layer comprising of silica gel.
