The fabrication and simulation of an electromagnetic microrelay are presented based on micro electromechanical systems (MEMS) technique.The microrelay dimensions of about 4mm×4mm×0 5mm are fabricated with t...The fabrication and simulation of an electromagnetic microrelay are presented based on micro electromechanical systems (MEMS) technique.The microrelay dimensions of about 4mm×4mm×0 5mm are fabricated with the common technique of micromachining.Compared with the traditional relays,a planar coil is substituted for a solenoid coil to favor the MEMS fabrication.Moreover,a bi supporter cantilever beam with high sensitivity is fabricated to act as the movable electrode of the microrelay.Theoretical calculations and simulations are also carried out with respect to the electromagnetic force yielded by the exciting electromagnetic coil.The structure and parameters concerning the electromagnetic microrelay can be optimized using the results.展开更多
文摘The fabrication and simulation of an electromagnetic microrelay are presented based on micro electromechanical systems (MEMS) technique.The microrelay dimensions of about 4mm×4mm×0 5mm are fabricated with the common technique of micromachining.Compared with the traditional relays,a planar coil is substituted for a solenoid coil to favor the MEMS fabrication.Moreover,a bi supporter cantilever beam with high sensitivity is fabricated to act as the movable electrode of the microrelay.Theoretical calculations and simulations are also carried out with respect to the electromagnetic force yielded by the exciting electromagnetic coil.The structure and parameters concerning the electromagnetic microrelay can be optimized using the results.
