摘要
第十五届阿尔贝特 凯尔 电接触研讨会 讨论了信息技术进步中微型开关的研究发展情况。其中微型继电器由于采用硅材料作驱动元件而使继电器进一步微型化。本文简要介绍新的微驱动器构造原理和制造工艺 ,以及硅微型开关与其它微型开关的比较。
During the '15 Albert Keil Kontaktseminar',discussions were carried out on the development of microswitch in the progress of information technology.Among the microswitches,the microrelay has already been further microminiaturized by using silicon as activator element.This article briefly introduces the new concept and the manufacture technology of microactivator,and the comparison of Si microswitch and other microswitches as well.
出处
《上海有色金属》
CAS
2001年第3期138-142,共5页
Shanghai Nonferrous Metals
