The present paper investigates the existence of chaos in a non-autonomous fractional-order micro-electromechanical resonator system（FOMEMRS）.Using the maximal Lyapunov exponent criterion,we show that the FOMEMRS exh...The present paper investigates the existence of chaos in a non-autonomous fractional-order micro-electromechanical resonator system（FOMEMRS）.Using the maximal Lyapunov exponent criterion,we show that the FOMEMRS exhibits chaos.Strange attractors of the system are plotted to validate its chaotic behavior.Afterward,a novel fractional finite-time controller is introduced to suppress the chaos of the FOMEMRS with model uncertainties and external disturbances in a given finite time.Using the latest version of the fractional Lyapunov theory,the finite time stability and robustness of the proposed scheme are proved.Finally,we present some computer simulations to illustrate the usefulness and applicability of the proposed method.展开更多
Photoacoustic imaging acquires the absorption contrast of biological tissue with ultrasound resolution. It has been broadly investigated in biomedicine for animal and clinical studies. Recently, a micro-electromechani...Photoacoustic imaging acquires the absorption contrast of biological tissue with ultrasound resolution. It has been broadly investigated in biomedicine for animal and clinical studies. Recently, a micro-electromechanical system(MEMS) scanner has been utilized in photoacoustic imaging systems to enhance their performance and extend the realm of applications. The review provides a recap of recent developments in photoacoustic imaging using MEMS scanner, from instrumentation to applications. The topics include the design of MEMS scanner, its use in photoacoustic microscopy, miniature imaging probes, development of dual-modality systems,as well as cutting-edge bio-imaging studies.展开更多
This paper presents a bulk acoustic wave piezoelectric disk resonator based on a special pair of degenerative modes, to detect z-axis angular velocity. A single piezoelectric disk is operated in its appropriate modes ...This paper presents a bulk acoustic wave piezoelectric disk resonator based on a special pair of degenerative modes, to detect z-axis angular velocity. A single piezoelectric disk is operated in its appropriate modes in the k Hz frequency range to achieve this function. This design combines the bulk acoustic wave drive/sense mode with lead zirconate titanate resonator which improves device's performance and simplifies its structural complexity. The operation principle of piezoelectric disk resonator is given and validated by finite element method,and the scale factor of piezoelectric disk resonator is 0.977 μV/[(°) · s-1] without any amplification section.The results of impedance analysis for the prototype in the air, which is fabricated on lead zirconate titanate wafer by Micro-Electro-Mechanical System process, show that the resonant frequency of the piezoelectric disk resonator is about 190 k Hz. Moreover, the measured frequency split between drive and sense mode is about290 Hz without any tuning methods. At last, a closed-loop driving and detecting circuit system is designed and its modulation/demodulation method is studied, preliminary experiments show that this device is not sensitive to acceleration, but is sensitive to angular velocity, its performance parameters need follow-up experiments.展开更多
This paper addresses a nonlinear feedback control problem for the chaotic arch micro- electro-mechanical system with unknown parameters,immeasurable states and partial state-constraint subjected to the distributed ele...This paper addresses a nonlinear feedback control problem for the chaotic arch micro- electro-mechanical system with unknown parameters,immeasurable states and partial state-constraint subjected to the distributed electrostatic actuation.To reflect inherent properties and design controller, the phase diagrams,bifurcation diagram and Poincare section are presented to investigate the nonlinear dynamics.The authors employ a symmetric barrier Lyapunov function to prevent violation of constraint when the arch micro-electro-mechanical system faces some limits.An RBF neural network system integrating with an update law is adopted to estimate unknown function with arbitrarily small error. To eliminate chaotic oscillation,a neuro-adaptive backstepping control scheme fused with an extended state tracking differentiator and an observer is constructed to lower requirements on measured states and precise system model.Besides,introducing an extended state tracking differentiator avoids repeated derivative for the virtual control signal associated with conventional backstepping.Finally,simulation results are presented to illustrate feasibility of the proposed scheme.展开更多
文摘The present paper investigates the existence of chaos in a non-autonomous fractional-order micro-electromechanical resonator system（FOMEMRS）.Using the maximal Lyapunov exponent criterion,we show that the FOMEMRS exhibits chaos.Strange attractors of the system are plotted to validate its chaotic behavior.Afterward,a novel fractional finite-time controller is introduced to suppress the chaos of the FOMEMRS with model uncertainties and external disturbances in a given finite time.Using the latest version of the fractional Lyapunov theory,the finite time stability and robustness of the proposed scheme are proved.Finally,we present some computer simulations to illustrate the usefulness and applicability of the proposed method.
基金the National Natural Science Foundation of China(No.61405112)the National High Technology Research and Development Program(863)of China(No.2015AA020944)
文摘Photoacoustic imaging acquires the absorption contrast of biological tissue with ultrasound resolution. It has been broadly investigated in biomedicine for animal and clinical studies. Recently, a micro-electromechanical system(MEMS) scanner has been utilized in photoacoustic imaging systems to enhance their performance and extend the realm of applications. The review provides a recap of recent developments in photoacoustic imaging using MEMS scanner, from instrumentation to applications. The topics include the design of MEMS scanner, its use in photoacoustic microscopy, miniature imaging probes, development of dual-modality systems,as well as cutting-edge bio-imaging studies.
基金the Special New Century Excellent Talents Support Program of Ministry of Education(No.NCET-10-0583)the National Key Laboratory of Science and Technology on Nano/Micro Fabrication(No.9140C790405110C7904)+2 种基金Preresearch Fund(No.9140A09010312JW03104)Fund(No.2013ZC57003)the Graduate Innovation Program of Shanghai Jiao Tong University(No.Z-340-014)
文摘This paper presents a bulk acoustic wave piezoelectric disk resonator based on a special pair of degenerative modes, to detect z-axis angular velocity. A single piezoelectric disk is operated in its appropriate modes in the k Hz frequency range to achieve this function. This design combines the bulk acoustic wave drive/sense mode with lead zirconate titanate resonator which improves device's performance and simplifies its structural complexity. The operation principle of piezoelectric disk resonator is given and validated by finite element method,and the scale factor of piezoelectric disk resonator is 0.977 μV/[(°) · s-1] without any amplification section.The results of impedance analysis for the prototype in the air, which is fabricated on lead zirconate titanate wafer by Micro-Electro-Mechanical System process, show that the resonant frequency of the piezoelectric disk resonator is about 190 k Hz. Moreover, the measured frequency split between drive and sense mode is about290 Hz without any tuning methods. At last, a closed-loop driving and detecting circuit system is designed and its modulation/demodulation method is studied, preliminary experiments show that this device is not sensitive to acceleration, but is sensitive to angular velocity, its performance parameters need follow-up experiments.
基金supported by the National Natural Science Foundation of China under Grant Nos.51505170,51475097 and 51505045Basic and Frontier Research Program of Chongqing Municipality under Grant Nos.cstc2016jcyjA0584 and cstc2016jcyjA0441)+1 种基金Project of Introduction of Talents of Guizhou University(No.[2017]27)Key Scientific Research Program of Guizhou Province under Grant No.[2017]3001)
文摘This paper addresses a nonlinear feedback control problem for the chaotic arch micro- electro-mechanical system with unknown parameters,immeasurable states and partial state-constraint subjected to the distributed electrostatic actuation.To reflect inherent properties and design controller, the phase diagrams,bifurcation diagram and Poincare section are presented to investigate the nonlinear dynamics.The authors employ a symmetric barrier Lyapunov function to prevent violation of constraint when the arch micro-electro-mechanical system faces some limits.An RBF neural network system integrating with an update law is adopted to estimate unknown function with arbitrarily small error. To eliminate chaotic oscillation,a neuro-adaptive backstepping control scheme fused with an extended state tracking differentiator and an observer is constructed to lower requirements on measured states and precise system model.Besides,introducing an extended state tracking differentiator avoids repeated derivative for the virtual control signal associated with conventional backstepping.Finally,simulation results are presented to illustrate feasibility of the proposed scheme.
文摘随着微机电系统(micro-electro-mechanical system,MEMS)工艺的快速发展,芯片级质谱仪的研制逐渐成为分析仪器领域的新焦点。微型质量分析器是芯片级质谱仪的核心器件,本工作基于非硅MEMS工艺下可实现的1 mm场半径极微型双曲面线性离子阱(miniature-hyperboloid linear ion trap,M-HLIT)质量分析器,采用理论模拟方法研究了2种不同结构M-HLIT的质量分析性能。在理想结构中,系统研究了共振激发交流(alternatingcurrent,AC)信号幅值和频率、射频(radio frequency,RF)信号频率等电参数对质量分辨率的影响。在“拉伸”结构中,优化了“拉伸”比(ry/rx)、开槽宽度d、电极截断距离h等结构参数。模拟结果表明,通过对M-HLIT的系统性优化,m/z 117离子的最高质量分辨率可达551,优于相同尺寸的简化电极线性离子阱;当扫描速率降至600 Th/s时,质量分辨率可提升至1376。该M-HLIT在处理低m/z离子时存在一定局限性,但在处理高m/z离子时具有优势。优化后的M-HLIT体积仅0.62 cm3,为传统微型线性离子阱体积的25.5%,这为芯片级.质谱仪中微型质量分析器的设计提供了有效解决方案,可有力推动原位快检质谱分析技术的发展。
