Micro-diamond films were prepared on YG6 substrate by hot filament chemical vapor deposition method.An innovative micro-diamond coated tool was used to the lap sapphire wafer.The effect of load,rotating speed,and lapp...Micro-diamond films were prepared on YG6 substrate by hot filament chemical vapor deposition method.An innovative micro-diamond coated tool was used to the lap sapphire wafer.The effect of load,rotating speed,and lapping time on material removal rate(MRR)and surface roughness was investigated.The results showed that the best process parameters were 3N,100r/min and 15 min.The surface quality of sapphire improved significantly after lapping.The coating after lapping adhered well and did not show any peeling.The innovative micro-diamond coated tool was feasible and suitable for the lapping of the single crystal sapphire wafer.展开更多
THE micro-diamond inclusions in garnet from eclogite in the Dabie Mountains have been reported by the present authors. However, Prof. Liou, J. G. and Dr. Zhang, R. Y. from the Stanford University of USA have expressed...THE micro-diamond inclusions in garnet from eclogite in the Dabie Mountains have been reported by the present authors. However, Prof. Liou, J. G. and Dr. Zhang, R. Y. from the Stanford University of USA have expressed their doubts about our discovery of micro-diamond, considering its weak intensity of Raman peak in our determination. Recently, we have determined the micro-diamond inclusion from the same sample 9010574 (fig. 1), tested展开更多
基金supported by the National Nature Science Foundation of China(No.51275230)NUAA Research Funding(No.kfjj20150507)+2 种基金Six Talent Peak of Jiangsu(No.ZBZZ-002)the Funding of Jiangsu Innovation Program for Graduate Education(No.KYLX_0227)the Fundamental Research Funds for the Central Universities
文摘Micro-diamond films were prepared on YG6 substrate by hot filament chemical vapor deposition method.An innovative micro-diamond coated tool was used to the lap sapphire wafer.The effect of load,rotating speed,and lapping time on material removal rate(MRR)and surface roughness was investigated.The results showed that the best process parameters were 3N,100r/min and 15 min.The surface quality of sapphire improved significantly after lapping.The coating after lapping adhered well and did not show any peeling.The innovative micro-diamond coated tool was feasible and suitable for the lapping of the single crystal sapphire wafer.
文摘THE micro-diamond inclusions in garnet from eclogite in the Dabie Mountains have been reported by the present authors. However, Prof. Liou, J. G. and Dr. Zhang, R. Y. from the Stanford University of USA have expressed their doubts about our discovery of micro-diamond, considering its weak intensity of Raman peak in our determination. Recently, we have determined the micro-diamond inclusion from the same sample 9010574 (fig. 1), tested
