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高像素密度GaN基Micro-LED阵列芯片的制备
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作者 周秀衡 李玲 +4 位作者 马非凡 徐良玉 萧俊龙 唐甜 赵永周 《微纳电子技术》 2026年第4期60-67,共8页
为满足增强现实(AR)/虚拟现实(VR)等高分辨率微显示器的应用需求,设计并制备了一款0.31英寸(1英寸=2.54 cm)、1344×784分辨率的绿光微型发光二极管(Micro-LED)微显示器,采用无源矩阵驱动方式。其像素间距为5μm,像素密度为5000 PP... 为满足增强现实(AR)/虚拟现实(VR)等高分辨率微显示器的应用需求,设计并制备了一款0.31英寸(1英寸=2.54 cm)、1344×784分辨率的绿光微型发光二极管(Micro-LED)微显示器,采用无源矩阵驱动方式。其像素间距为5μm,像素密度为5000 PPI。在器件制备过程中,重点优化了氧化铟锡(ITO)透明导电膜的成膜工艺,研究对比了电子束蒸镀与磁控溅射工艺制备ITO膜层的性能差异,发现磁控溅射技术结合干法刻蚀工艺更能保障高像素密度显示阵列的薄膜质量与图形精度,并通过优化光刻胶材料(选用高分辨率、高对比度且具有强附着力的负性光刻胶),有效解决了微米级像素制备中的电极光刻偏移问题。此外,在硅背板上制备凸点下金属化层,实现了高像素密度Micro-LED显示阵列的精准集成。制备的Micro-LED微显示器展现出优异的光学与电学特性,在2.3 V驱动电压下即可实现均匀发光,亮度超过50000 cd/m^(2);驱动电压提升至4.5 V时,亮度可达5335651 cd/m^(2),充分展现了其在超高亮度显示领域的应用潜力。 展开更多
关键词 微型发光二极管(micro-LED) micro-LED芯片 GAN基材料 高像素密度LED阵列 发光强度
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人体手舟骨显微形态学特征的Micro CT成像技术分析
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作者 张德洲 吕远 +12 位作者 李琨 陈杰 杨向荣 赵海龙 张少杰 马渊 郝韵腾 杨洋 高明杰 王志强 李志军 史君 王星 《中国组织工程研究》 北大核心 2026年第21期5573-5581,共9页
背景:临床上,由于手舟骨的特殊解剖特点和内部骨小梁分布特征等往往使得骨折的治疗效果普遍不佳,常导致骨折不愈合和缺血性坏死,进而引发腕关节炎和功能丧失。目的:利用Micro CT技术对手舟骨标本进行扫描,分析其内部显微结构特征,测量... 背景:临床上,由于手舟骨的特殊解剖特点和内部骨小梁分布特征等往往使得骨折的治疗效果普遍不佳,常导致骨折不愈合和缺血性坏死,进而引发腕关节炎和功能丧失。目的:利用Micro CT技术对手舟骨标本进行扫描,分析其内部显微结构特征,测量各区域骨小梁显微结构参数值,以发现手舟骨骨小梁的区域差异,旨在为手舟骨骨折的预防、治疗及骨折机制研究提供科学依据。方法:选取5具成人尸体标本的双侧手舟骨(10例)进行Micro CT扫描,通过对手舟骨3个感兴趣区域(结节部、腰部、体部)内骨小梁的勾选与重建,详细观察手舟骨内部的显微形态特征,测量和比较各区域骨小梁显微结构参数值的差异。结果与结论:①Micro CT图像显示手舟骨表面皮质骨相对较薄,内部充满复杂的骨小梁微观结构;靠近皮质骨的板层状骨小梁相对密集,向内部延伸成杆状骨小梁;从矢状面、冠状面和横断面上观察,腰部内骨小梁分布较为稀疏,而体部和结节部内骨小梁分布则更为致密;②手舟骨结节部的骨体积分数、骨表面积、骨表面积组织体积比、骨小梁分离度、骨小梁数目、骨小梁连通性、骨小梁连接密度、分形维数、骨矿物质密度和骨矿物质含量在左右侧别间比较差异均有显著性意义(P<0.05);腰部和体部的各骨小梁显微结构参数值在左右侧别间比较差异均无显著性意义(P>0.05);③手舟骨的骨体积、骨体积分数、骨表面积、骨表面积组织体积比、骨表面积骨体积比、骨矿物质密度和骨矿物质含量在体部与结节部、腰部之间比较差异有显著性意义(P<0.05);手舟骨的骨小梁厚度在体部与结节部之间比较差异有显著性意义(P<0.05);手舟骨的骨小梁分离度、分形维数在体部与结节部、腰部,结节部与腰部之间差异有显著性意义(P<0.05);手舟骨的骨小梁数目、骨小梁连通性、骨小梁连接密度在腰部与结节部、体部之间比较差异有显著性意义(P<0.05);手舟骨的组织体积、各向异性程度在体部、结节部、腰部之间比较差异均无显著性意义(P>0.05);④结果显示,手舟骨的骨小梁显微结构参数值存在区域性差异,其中腰部的骨密度和强度较低,是最容易发生骨折的部位,该发现从骨小梁微观结构角度为理解手舟骨骨折机制提供了理论依据;同时,此次研究揭示的手舟骨不同部位的骨小梁结构特征也为设计针对性的内固定器械提供了理论依据。 展开更多
关键词 手舟骨 micro CT 显微形态 骨小梁 区域差异 骨小梁显微结构
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距骨不同区域骨小梁形态特征的Micro-CT评估
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作者 李磊 张凤珍 +10 位作者 尹兆正 伊钰营 申晓科 段博 王志强 任小燕 李琨 李志军 王奇娇 王星 张少杰 《中国组织工程研究》 北大核心 2026年第15期3946-3952,共7页
背景:距骨骨折治疗难度大,易出现多种并发症,导致预后不良,故需进一步了解距骨内骨小梁分布特征及其与骨折发生的关系。目的:利用Micro-CT技术对距骨标本进行扫描,观测骨小梁结构特征及形态计量学参数,探讨距骨不同区域的骨小梁差异,为... 背景:距骨骨折治疗难度大,易出现多种并发症,导致预后不良,故需进一步了解距骨内骨小梁分布特征及其与骨折发生的关系。目的:利用Micro-CT技术对距骨标本进行扫描,观测骨小梁结构特征及形态计量学参数,探讨距骨不同区域的骨小梁差异,为距骨骨折的预防、治疗及骨折机制研究提供依据。方法:选取53例成人距骨标本进行Micro-CT扫描,将影像资料导入Avata软件进行三维重建,通过对距骨头部、颈部、体部3个感兴趣区域内骨小梁的勾选与重建,观察其形态特征,并测量分析不同区域骨小梁形态计量学参数的差异。结果与结论:①距骨的Micro-CT扫描影像显示其头部和体部的皮质骨较薄,而颈部的皮质骨则相对较厚;颈部的骨小梁分布较为稀疏,而头部和体部的骨小梁则相对致密;②距骨骨小梁的骨体积、骨体积分数、骨小梁模式因子在头部与颈部、体部间比较差异均有显著性意义(P<0.05);距骨骨小梁的骨表面积、骨表面积组织体积比、骨小梁分离度、分形维数在颈部与头部、体部间比较差异均有显著性意义(P<0.05);距骨骨小梁的骨小梁厚度在体部与头部、颈部之间比较差异有显著性意义(P<0.05);距骨骨小梁的骨表面积骨体积比、骨小梁厚度、骨小梁连通性、骨小梁连接密度、各向异性程度、结构模型指数在颈部与头部、体部,头部与体部间比较差异均有显著性意义(P<0.05);③提示Micro-CT技术能够定量分析距骨不同区域骨小梁形态的计量学参数,距骨的骨小梁形态计量学参数存在区域性差异,颈部的骨小梁数量和强度较低,是最容易发生骨折的部位,从骨小梁分布特征说明了距骨骨折好发于颈部。 展开更多
关键词 距骨 micro-CT 骨小梁 区域差异 形态计量学参数
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下颌第二磨牙根管解剖结构的Micro CT分析
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作者 苗晖 陈宇帆 +5 位作者 胡晓丽 安佳琪 李佳晔 荆瑶 尹斌 吴丽更 《现代口腔医学杂志》 2026年第1期9-14,共6页
目的 本研究旨在分析下颌第二磨牙根尖1/3的根管解剖形态,以深入认识下颌第二磨牙根管解剖结构的复杂性,提高根管治疗和根管再治疗的成功率。方法 收集因牙周病拔除的完整下颌第二磨牙39颗,经Micro-CT扫描重建根尖1/3三维结构,采用Schne... 目的 本研究旨在分析下颌第二磨牙根尖1/3的根管解剖形态,以深入认识下颌第二磨牙根管解剖结构的复杂性,提高根管治疗和根管再治疗的成功率。方法 收集因牙周病拔除的完整下颌第二磨牙39颗,经Micro-CT扫描重建根尖1/3三维结构,采用Schneider法测量根管弯曲度,改良Vertucci分型判定根管形态,并记录侧支根管分布及根尖孔开口位置。结果 符合纳排标准的65个根管中,31个有侧支根管;根尖1/3以中度弯曲为主(49.2%),重度弯曲次之(29.2%);根尖孔开口于根侧者占69.2%;复杂根管占41.5%;根管分型以2-1型最常见,多见于双根牙近中根及融合根单根管。结论 下颌第二磨牙根尖1/3解剖结构复杂,提示根管治疗前需拍摄CBCT评估根管治疗的难度,了解根管解剖的形态,以利于提高根管治疗的疗效。 展开更多
关键词 micro CT 下颌第二磨牙 根管分型 根管解剖
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基于Micro-LED芯片的用于管状结构3D打印的低成本光源
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作者 魏伟 宋金德 +6 位作者 林燕丹 邹军 蔡昊源 林金填 陈磊 王琦 张国义 《光学学报(网络版)》 2026年第5期1-7,共7页
针对目前管状结构的3D光源成本较高、打印时间较长的问题,通过模拟计算优化基于微米级发光二极管(MicroLED)芯片的器件结构,设计了一种兼具高速打印能力与低成本优势的3D光源器件。利用该光源结合光固化材料,可实现圆环状、管状结构的3... 针对目前管状结构的3D光源成本较高、打印时间较长的问题,通过模拟计算优化基于微米级发光二极管(MicroLED)芯片的器件结构,设计了一种兼具高速打印能力与低成本优势的3D光源器件。利用该光源结合光固化材料,可实现圆环状、管状结构的3D打印;通过调节方形遮挡结构的参数可控制管状结构的口径,而改变打印高度则可调控开口管状产品的口径;通过设计合适的阵列光源可实现阵列管打印。该方案可实现快速、低成本和大面积的3D打印。 展开更多
关键词 3D打印 micro-LED 管状结构 光线追迹法
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Microassembly:A Review on Fundamentals,Applications and Recent Developments 被引量:1
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作者 Yujian An Bingze He +2 位作者 Zhuochen Ma Yao Guo Guang-Zhong Yang 《Engineering》 2025年第5期323-346,共24页
Microassembly platforms have attracted significant attention recently because of their potential for developing microsystems and devices for a wide range of applications.Despite their considerable poten-tial,existing ... Microassembly platforms have attracted significant attention recently because of their potential for developing microsystems and devices for a wide range of applications.Despite their considerable poten-tial,existing techniques are mainly used in laboratory research settings.This review provides an over-view of the fundamentals,techniques,and applications of microassemblies.Manipulation techniques based on magnetic,optical,acoustic fields,and mechanical systems are discussed,and control systems that rely on machine vision and force feedback are introduced.Additionally,recent applications of microassemblies in microstructure fabrication,microelectromechanical operation,and biomedical engi-neering are examined.This review also highlights unmet technical demands and emerging trends,as well as new research opportunities in this expanding field of research driven by allied technologies such as microrobotics. 展开更多
关键词 microASSEMBLY microROBOTICS micro/nano-systems microelectromechanical systems Manipulation and control
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基于原位动态Micro CT的针刺预制体结构表征及工艺改进
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作者 张文奇 任志鹏 +4 位作者 邹艳玲 耿巍麟 陈伟 王孝锋 蒋云 《棉纺织技术》 2026年第3期42-47,共6页
采用原位动态Micro CT技术对某梯度密度针刺预制体进行无损检测与分析,通过高分辨率扫描和三维重构技术,实现了材料内部三维组织结构的精确表征,并定量统计了针刺纤维束的长度、直径等参数。结果表明:原工艺加工的产品均匀性存在缺陷;... 采用原位动态Micro CT技术对某梯度密度针刺预制体进行无损检测与分析,通过高分辨率扫描和三维重构技术,实现了材料内部三维组织结构的精确表征,并定量统计了针刺纤维束的长度、直径等参数。结果表明:原工艺加工的产品均匀性存在缺陷;结合统计数据,对织物层间及面内针刺工艺参数优化后,针刺纤维束平均直径提升约36%,表明纤维间的结合更加紧密;针刺纤维束长度下降约6%,说明纤维分布更加均匀。认为:通过原位动态Micro CT技术优化针刺工艺,可实现从结构表征到工艺改进的闭环优化,具有重要的工程应用价值。 展开更多
关键词 原位动态micro CT 预制体 无损检测 三维结构 针刺均匀性 针刺纤维束
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无衬底Micro LED芯片直显研究进展
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作者 梁劲豪 余亮 +1 位作者 陈勇林 屠孟龙 《电子与封装》 2026年第3期120-127,共8页
Micro LED技术具有众多优势,如高亮度、高对比度、高分辨率、低功耗以及长寿命等。随着芯片尺寸逐渐减小,无衬底Micro LED芯片应用研究需求越来越迫切。得益于无衬底Micro LED芯片的微小尺寸,屏体发光单元占屏体整体面积不足1%,底黑区... Micro LED技术具有众多优势,如高亮度、高对比度、高分辨率、低功耗以及长寿命等。随着芯片尺寸逐渐减小,无衬底Micro LED芯片应用研究需求越来越迫切。得益于无衬底Micro LED芯片的微小尺寸,屏体发光单元占屏体整体面积不足1%,底黑区域占比的提升能显著提高屏体的对比度。简要对比了Micro LED在PM以及AM玻璃基板上的应用。其中PM驱动玻璃基板线宽、线距最小可达12μm(传统PCB基板极限为50μm),因此PM玻璃基板更适配微小尺寸芯片。PM玻璃基板与巨量通孔技术和厚铜技术结合能实现成本与显示效果之间的平衡。同时针对玻璃基板存在的强度以及可靠性问题进行了相对应的方案设计并实现了预期目标。与之相对的AM驱动LED显示屏采用全倒装高压μA级晶片,使用电压为12 V的开关电源,通过高电压、低电流驱动模式,能显著降低电流密度,同时AM驱动的像素级精准调控支持任意区域独立升压,可实现局部峰值亮度显示。PM和AM驱动玻璃基板分别通过不同的方案实现无衬底Micro LED芯片在直显方面的应用,推动显示技术向超高清、低功耗方向迭代。 展开更多
关键词 无衬底micro LED芯片 直显 PM玻璃基板 AM玻璃基板
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Micro/nanoplastics and eye health:a review
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作者 Lun He Jiang Zheng +6 位作者 Xiao-Kun Han Tian-Yu Tao Jing Zeng Wei Luo Xin Chen Jun-Ming Wang Xiang-Yin Sha 《International Journal of Ophthalmology(English edition)》 2026年第2期405-413,共9页
Micro/nanoplastics(M/NPs)have become pervasive environmental pollutants,posing significant risks to human health through various exposure routes,including ingestion,inhalation,and direct contact.This review systematic... Micro/nanoplastics(M/NPs)have become pervasive environmental pollutants,posing significant risks to human health through various exposure routes,including ingestion,inhalation,and direct contact.This review systematically examined the potential impacts of M/NPs on ocular health,focusing on exposure pathways,toxicological mechanisms,and resultant damage to the eye.Ocular exposure to M/NPs can occur via direct contact and oral ingestion,with the latter potentially leading to the penetration of particles through ocular biological barriers into ocular tissues.The review highlighted that M/NPs can induce adverse effects on the ocular surface,elevate intraocular pressure,and cause abnormalities in the vitreous and retina.Mechanistically,oxidative stress and inflammation are central to M/NP-induced ocular damage,with smaller particles often exhibiting greater toxicity.Overall,this review underscored the potential risks of M/NPs to ocular health and emphasized the need for further research to elucidate exposure mechanisms,toxicological pathways,and mitigation strategies. 展开更多
关键词 micro/nanoplastics EXPOSURE OCULAR TOXICITY
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Superelastic and Washable Micro/Nanofibrous Sponges Based on Biomimetic Helical Fibers for Efficient Thermal Insulation
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作者 Fengjin Yang Zhifei Wang +7 位作者 Wei Zhang Sai Wang Yi‑Tao Liu Fei Wang Roman ASurmenev Jianyong Yu Shichao Zhang Bin Ding 《Nano-Micro Letters》 2026年第2期170-182,共13页
Extreme cold weather seriously harms human thermoregulatory system,necessitating high-performance insulating garments to maintain body temperature.However,as the core insulating layer,advanced fibrous materials always... Extreme cold weather seriously harms human thermoregulatory system,necessitating high-performance insulating garments to maintain body temperature.However,as the core insulating layer,advanced fibrous materials always struggle to balance mechanical properties and thermal insulation,resulting in their inability to meet the demands for both washing resistance and personal protection.Herein,inspired by the natural spring-like structures of cucumber tendrils,a superelastic and washable micro/nanofibrous sponge(MNFS)based on biomimetic helical fibers is directly prepared utilizing multiple-jet electrospinning technology for high-performance thermal insulation.By regulating the conductivity of polyvinylidene fluoride solution,multiple-jet ejection and multiple-stage whipping of jets are achieved,and further control of phase separation rates enables the rapid solidification of jets to form spring-like helical fibers,which are directly entangled to assemble MNFS.The resulting MNFS exhibits superelasticity that can withstand large tensile strain(200%),1000 cyclic tensile or compression deformations,and retain good resilience even in liquid nitrogen(-196℃).Furthermore,the MNFS shows efficient thermal insulation with low thermal conductivity(24.85 mW m^(-1)K^(-1)),close to the value of dry air,and remains structural stability even after cyclic washing.This work offers new possibilities for advanced fibrous sponges in transportation,environmental,and energy applications. 展开更多
关键词 ELECTROSPINNING micro/nanofibrous sponge Hierarchical structure SUPERELASTICITY Thermal insulation
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Defect reconfiguration for dendrite-free Zn anodes:Monodisperse micro-curves homogenizing electric fields enable>650 h flexible cycles
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作者 Qiangqiang Zhang Xinyue Guo +4 位作者 Yikun Duan Qingliang Luo Kangkang Wang MD Imran Hossen Dongxiao Ji 《Journal of Energy Chemistry》 2026年第2期550-559,I0013,共11页
The deployment of flexible zinc-ion batteries is impeded by dendrite growth from random anode defects.Conventional defect-elimination strategies often compromise flexibility and fail to achieve uniform interfaces.We p... The deployment of flexible zinc-ion batteries is impeded by dendrite growth from random anode defects.Conventional defect-elimination strategies often compromise flexibility and fail to achieve uniform interfaces.We propose a paradigm shift:reconfiguring random defects into engineered,monodisperse artificial micro-curves to homogenize electric fields and guide aligned zinc(Zn)deposition.Using moisture-assisted flash heating,we transform zincophilic silver(Ag)coatings on carbon fibers into uniformly dispersed micro-curved particles(Ag Particles@CC),creating identical nucleation sites with optimal zinc ion(Zn^(2+))adsorption energetics.Theoretical simulations confirm these structures eliminate localized field concentrations,enabling homogeneous plating/stripping.This design demonstrates remarkable performance,with ultrastable 1500 cycles at 10 mA cm^(-2)(98.6%avg.Coulombic efficiency)and symmetric cell operation>650 h(57.7 mV hysteresis).Crucially,interparticle discontinuities preserve intrinsic flexibility,enabling flexible pouch cells(Ag Particles@CC-Zn//NaV_(3)O_(8)·1,5H_(2)O)to successfully power wearable devices such as smartwatches and smartphones.This work establishes defect reconfiguration via artificial micro-curvature engineering as a universal strategy toward dendritesuppressed,flexible energy storage. 展开更多
关键词 Carbon fibers Zinc-ion batteries Joule-heating Flexible Zn anode Artificial micro curvature
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Joule heating activation-assisted full-depth doping enabling fast-kinetic and stable micro silicon anodes in solid-state batteries
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作者 Xin Qin Zuqiang Ge +7 位作者 Yafei Wang Guanzhong Ma Fei Yang Qian Xu Yanpeng Li Debin Kong Junwei Han Linjie Zhi 《Journal of Energy Chemistry》 2026年第1期208-218,I0006,共12页
Micro silicon(mSi)is a promising anode candidate for all-solid-state batteries due to its high specific capacity,low side reactions,and high tap density.However,silicon suffers from its poor electronic and ionic condu... Micro silicon(mSi)is a promising anode candidate for all-solid-state batteries due to its high specific capacity,low side reactions,and high tap density.However,silicon suffers from its poor electronic and ionic conductivity,which is particularly severe on a micro scale and in solid-state systems,leading to increased polarization and inferior electrochemical performance.Doping can broaden the transmission pathways and reduce the diffusion energy barrier for electrons and lithium ions.However,achieving effective,uniform doping in mSi is challenging due to its longer diffusion paths and higher energy barriers.Therefore,current doping research is primarily limited to nanosilicon.In this study,we successfully used a Joule-heating activated staged thermal treatment to achieve full-depth doping of germanium(Ge)in the mSi substrate.The Joule-heating process activated the mSi substrate,resulting in abundant vacancy defects that reduced the diffusion barrier of Ge into the silicon lattice and facilitated full-depth Ge doping.Surprisingly,the resulting Si-Ge anode exhibited significantly enhanced electrical conductivity(70 times).Meanwhile,the improved Li-ion conductivity in mSi and the reduced Young’s modulus enhance the electrode reaction kinetics and integrity after cycling.Ge-doped silicon anodes demonstrate excellent electrochemical performance when applied in sulfide solid-state half-cells and full-cells.This work provides substantial insights into the rational structural design of mSi alloyed anode materials,paving the way for the development of high-performance solid-state Li-ion batteries. 展开更多
关键词 micro silicon Solid-state batteries Full-depth doping Sulfide solid-state electrolytes
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Micro/Nano‑Reconfigurable Robots for Intelligent Carbon Management in Confined‑Space Life‑Support Systems
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作者 Wei Lu Rimei Chen +5 位作者 Lianlong Zhan Qin Xiang Renting Huang Lei Wang Shuangfei Wang Hui He 《Nano-Micro Letters》 2026年第3期210-226,共17页
Strategically coupling nanoparticle hybrids and internal thermosensitive molecular switches establishes an innovative paradigm for constructing micro/nanoscale-reconfigurable robots,facilitating energyefficient CO_(2)... Strategically coupling nanoparticle hybrids and internal thermosensitive molecular switches establishes an innovative paradigm for constructing micro/nanoscale-reconfigurable robots,facilitating energyefficient CO_(2) management in life-support systems of confined space.Here,a micro/nano-reconfigurable robot is constructed from the CO_(2) molecular hunters,temperature-sensitive molecular switch,solar photothermal conversion,and magnetically-driven function engines.The molecular hunters within the molecular extension state can capture 6.19 mmol g^(−1) of CO_(2) to form carbamic acid and ammonium bicarbonate.Interestingly,the molecular switch of the robot activates a molecular curling state that facilitates CO_(2) release through nano-reconfiguration,which is mediated by the temperature-sensitive curling of Pluronic F127 molecular chains during the photothermal desorption.Nano-reconfiguration of robot alters the amino microenvironment,including increasing surface electrostatic potential of the amino group and decreasing overall lowest unoccupied molecular orbital energy level.This weakened the nucleophilic attack ability of the amino group toward the adsorption product derivatives,thereby inhibiting the side reactions that generate hard-to-decompose urea structures,achieving the lowest regeneration temperature of 55℃ reported to date.The engine of the robot possesses non-contact magnetically-driven micro-reconfiguration capability to achieve efficient photothermal regeneration while avoiding local overheating.Notably,the robot successfully prolonged the survival time of mice in the sealed container by up to 54.61%,effectively addressing the issue of carbon suffocation in confined spaces.This work significantly enhances life-support systems for deep-space exploration,while stimulating innovations in sustainable carbon management technologies for terrestrial extreme environments. 展开更多
关键词 micro/nano RECONFIGURABLE Robot Confined space CO_(2)management Efficient regeneration
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Impact of sidewall passivation on reliability in InGaN-based micro-LEDs
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作者 Tae Kyoung Kim Abu Bashar Mohammad Hamidul Islam +8 位作者 Jongil Kim Hyeondong Lee Minji Kim Joohan Bae June-O Song Dong-Soo Shin Jong-In Shim Sang Ho Oh Joon Seop Kwak 《Advanced Photonics Nexus》 2026年第1期186-201,共16页
The performance degradation of micro light-emitting diodes(micro-LEDs)is closely associated with the deterioration of sidewall passivation layers under prolonged electrical bias.We investigate reliability improvements... The performance degradation of micro light-emitting diodes(micro-LEDs)is closely associated with the deterioration of sidewall passivation layers under prolonged electrical bias.We investigate reliability improvements in 20μm×20μm InGaN/GaN blue micro-LEDs by suppressing the formation of an unstable interfacial layer during sidewall passivation.SiO_(2)is deposited on the etched mesa sidewalls using either Sputtering or plasma-enhanced chemical vapor deposition(PECVD).Comparative analysis reveals that PECVD-passivated devices experience more severe performance degradation,primarily due to the increased leakage current.After 100 h of accelerated aging,external quantum efficiency decreases by 44%in PECVD-passivated samples,whereas Sputter-passivated devices exhibit only an11%reduction.This discrepancy is attributed to the formation of a thicker and chemically unstable gallium oxynitride(Ga-O_(X)-N_(1-X))interfacial layer at the SiO_(2)∕GaN-based interface,which facilitates the generation of sidewall defects.Suppressing the formation of this interlayer enhances the crystallinity and structural stability of the passivation layer,thereby mitigating the activation of point defects.Notably,Sputter deposition is more effective in minimizing the formation of Ga-O-N interlayer.These findings emphasize the critical role of achieving low-defect-density sidewall passivation to improve the reliability of micro-LEDs for next-generation high-resolution display applications. 展开更多
关键词 micro light-emitting diode SPUTTER plasma-enhanced chemical vapor deposition PASSIVATION external quantum efficiency point defect RELIABILITY interfacial layer
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AlScN:characteristics,micro/nano fabrication and multiple applications
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作者 Shihang Liu Jinfeng Gao +6 位作者 Jiajie Pan Lin Li Hanxiang Jia Shuangzan Lu Maowei Zhang Bo Zhao Jun Liu 《Journal of Semiconductors》 2026年第3期10-27,共18页
Aluminum scandium nitride(AlScN),an emergingⅢ-nitride semiconductor material,has attracted significant atten-tion in recent years due to its exceptional piezoelectric properties,high thermal stability,tunable bandgap... Aluminum scandium nitride(AlScN),an emergingⅢ-nitride semiconductor material,has attracted significant atten-tion in recent years due to its exceptional piezoelectric properties,high thermal stability,tunable bandgap,and excellent com-patibility with micro/nano fabrication.This paper systematically reviews the crystal structure,fundamental properties,and prop-erty modulation mechanisms of AlScN.It also summarizes recent progress in micro/nano fabrication technologies,including deposition,etching,and device integration.Furthermore,the applications of AlScN in diverse fields such as micro-electrome-chanical systems(MEMS),RF communications,energy conversion,optoelectronics and sensors are discussed.Finally,current challenges and promising future research directions for AlScN are outlined. 展开更多
关键词 aluminum scandium nitride material properties micro/nano fabrication device integration
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External-field-assisted additive manufacturing for micro/nano device fabrication
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作者 Bin Wang Jiansheng Du +6 位作者 Haoyu Zhang Ying Cao Chengyu Wen Veronica Iacovacci Zhiyang Lyu Tianlong Li Qianqian Wang 《International Journal of Extreme Manufacturing》 2026年第1期147-185,共39页
Micro/nano devices(MNDs)are characterized by miniaturization,high precision,and multifunctional integration,making them highly suitable for use in areas such as microrobotics,biomedical devices and electronic sensors.... Micro/nano devices(MNDs)are characterized by miniaturization,high precision,and multifunctional integration,making them highly suitable for use in areas such as microrobotics,biomedical devices and electronic sensors.Their fabrication requires exceptional precision in structural integrity,material control,and functional integration.Traditional micro/nano fabrication techniques face inherent limitations in constructing complex three-dimensional(3D)architectures and integrating multiple materials.While additive manufacturing(AM)provides flexibility,challenges remain in material alignment control,microstructural organization,and multifunctional integration.To overcome these limitations,field-assisted additive manufacturing(FAM)has emerged as a promising approach that combines magnetic,acoustic,or electric fields to regulate material alignment,microstructural organization,and spatial alignment.This capability improves fabrication precision,enhances material anisotropy and facilitates functional integration.This review systematically explores the mechanisms,fabrication process,and functional integration of FAM in the framework of nozzle-based and vat photopolymerization-based,while further exploring their applications in microrobotics,biomedical devices,and electronic sensors.Moreover,this review provides a comparative overview of different FAM approaches,highlighting their respective characteristics,typical applications,and unique advantages.In addition,the major challenges facing FAM research are comprehensively assessed and future directions are explored,including advances in spatial precision control capability,intelligent control for process integration,and multi-field coupling optimization.This review establishes a foundational theoretical framework that can serve as a systematic reference for micro/nano manufacturing researchers to promote the development of FAM for high-performance micro/nano device fabrication. 展开更多
关键词 additive manufacturing 3D printing field-assisted additive manufacturing micro/nano devices
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CO_(2)nanobubble-enhanced cement-fly ash backfill:Optimizing aggregate gradation and microstructure
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作者 Xiaoxiao Cao Haoyan Lyu +4 位作者 Yanlong Chen Jiangyu Wu Hideki Shimada Takashi Sasaoka Akihiro Hamanaka 《International Journal of Minerals,Metallurgy and Materials》 2026年第1期129-140,共12页
Mine filling materials urgently need to improve mechanical properties and achieve low-carbon transformation.This study explores the mechanism of the synergistic effect of optimizing aggregate fractal grading and intro... Mine filling materials urgently need to improve mechanical properties and achieve low-carbon transformation.This study explores the mechanism of the synergistic effect of optimizing aggregate fractal grading and introducing CO_(2)nanobubble technology to improve the performance of cement-fly ash-based backfill materials(CFB).The properties including fluidity,setting time,uniaxial compressive strength,elastic modulus,porosity,microstructure and CO_(2)storage performance were systematically studied through methods such as fluidity evaluation,time test,uniaxial compression test,mercury intrusion porosimetry(MIP),scanning electron microscopy-energy dispersive spectroscopy analysis(SEM-EDS),and thermogravimetric-differential thermogravimetric analysis(TG-DTG).The experimental results show that the density and strength of the material are significantly improved under the synergistic effect of fractal dimension and CO_(2)nanobubbles.When the fractal dimension reaches 2.65,the mass ratio of coarse and fine aggregates reaches the optimal balance,and the structural density is greatly improved at the same time.At this time,the uniaxial compressive strength and elastic modulus reach their peak values,with increases of up to 13.46%and 27.47%,respectively.CO_(2)nanobubbles enhance the material properties by promoting hydration reaction and carbonization.At the microscopic level,CO_(2)nanobubble water promotes the formation of C-S-H(hydrated calcium silicate),C-A-S-H(hydrated calcium aluminium silicate)gel and CaCO_(3),which is the main way to enhance the performance.Thermogravimetric studies have shown that when the fractal dimension is 2.65,the dehydration of hydration products and the decarbonization process of CaCO_(3)are most obvious,and CO_(2)nanobubble water promotes the carbonization reaction,making it surpass the natural state.The CO_(2)sequestration quality of cement-fly ash-based materials treated with CO_(2)nanobubble water at different fractal dimensions increased by 12.4wt%to 99.8wt%.The results not only provide scientific insights for the design and implementation of low-carbon filling materials,but also provide a solid theoretical basis for strengthening green mining practices and promoting sustainable resource utilization. 展开更多
关键词 cement-fly ash-based backfill CO_(2)nanobubble fractal dimension macro and micro performance carbon sequestration
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Adaptive Grid-Interface Control for Power Coordination in Multi-Microgrid Energy Networks
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作者 Sk.A.Shezan 《Energy Engineering》 2026年第1期91-114,共24页
Modern power systems increasingly depend on interconnected microgrids to enhance reliability and renewable energy utilization.However,the high penetration of intermittent renewable sources often causes frequency devia... Modern power systems increasingly depend on interconnected microgrids to enhance reliability and renewable energy utilization.However,the high penetration of intermittent renewable sources often causes frequency deviations,voltage fluctuations,and poor reactive power coordination,posing serious challenges to grid stability.Conventional Interconnection FlowControllers(IFCs)primarily regulate active power flowand fail to effectively handle dynamic frequency variations or reactive power sharing in multi-microgrid networks.To overcome these limitations,this study proposes an enhanced Interconnection Flow Controller(e-IFC)that integrates frequency response balancing and an Interconnection Reactive Power Flow Controller(IRFC)within a unified adaptive control structure.The proposed e-IFC is implemented and analyzed in DIgSILENT PowerFactory to evaluate its performance under various grid disturbances,including frequency drops,load changes,and reactive power fluctuations.Simulation results reveal that the e-IFC achieves 27.4% higher active power sharing accuracy,19.6% lower reactive power deviation,and 18.2% improved frequency stability compared to the conventional IFC.The adaptive controller ensures seamless transitions between grid-connected and islanded modes and maintains stable operation even under communication delays and data noise.Overall,the proposed e-IFCsignificantly enhances active-reactive power coordination and dynamic stability in renewable-integrated multi-microgrid systems.Future research will focus on coupling the e-IFC with tertiary-level optimization frameworks and conducting hardware-in-the-loop validation to enable its application in large-scale smart microgrid environments. 展开更多
关键词 Active power flow control interconnection flow controller(IFC) frequency response micro grid stability reactive power management
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数字PWM驱动的像素化GaN基Micro-LED显示屏研究
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作者 陈辉煌 叶金宇 +4 位作者 林怡彬 吴朝兴 郭太良 周雄图 张永爱 《光电子技术》 2026年第1期48-53,共6页
针对传统刻蚀工艺导致Micro-LED器件侧壁损伤的技术难题,利用离子注入技术成功实现了Micro-LED的像素化,并制备了高性能的GaN基PM Micro-LED显示阵列。采用FPGA作为控制器件,设计了相应的行列驱动电路,成功驱动了Micro-LED显示阵列;引... 针对传统刻蚀工艺导致Micro-LED器件侧壁损伤的技术难题,利用离子注入技术成功实现了Micro-LED的像素化,并制备了高性能的GaN基PM Micro-LED显示阵列。采用FPGA作为控制器件,设计了相应的行列驱动电路,成功驱动了Micro-LED显示阵列;引入了电压转换和电阻调节模块,通过调节输出电压或者电流,有效调节显示亮度,并通过全点亮测试了Micro-LED显示阵列不同电压下的器件性能。此外,通过数字PWM调制方式实现了不同灰度等级的显示,并引入亮度校正模块以优化显示效果。最后,在高灰度图像数据传输中,通过并行处理数据传输与显示,最终实现了1024个灰度等级。 展开更多
关键词 像素化微型发光二极管 离子注入 数字脉冲宽度调制 1024灰度等级
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微显示技术LCoS、Micro-OLED与Micro-LED分析与前景展望
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作者 王绍华 黄博 夏军 《光电子技术》 2026年第1期1-23,共23页
综述了LCoS(硅基液晶)、Micro-OLED(硅基有机发光二极管)和Micro-LED(微型发光二极管)为代表的微显示技术发展现状,并从器件的原理、性能参数、市场趋势与应用场景切入,分别讨论了亮度、色域、寿命等关键参数提升的技术路径。研究结果表... 综述了LCoS(硅基液晶)、Micro-OLED(硅基有机发光二极管)和Micro-LED(微型发光二极管)为代表的微显示技术发展现状,并从器件的原理、性能参数、市场趋势与应用场景切入,分别讨论了亮度、色域、寿命等关键参数提升的技术路径。研究结果表明LCoS因成本优势在消费级AR设备中被广泛应用,同时,LCoS作为一种先进的光调制器,在量子光学等领域也展现出重要的应用潜力。此外,Micro-OLED显示器在当下的高端VR市场占据主导地位,而Micro-LED则被视为未来的AR显示终极方案。文章为微显示器技术的发展方向与产业趋势提供了参考。 展开更多
关键词 硅基液晶 硅基发光二极管 微型发光二极管 寿命 色域 叠层OLED
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