In order to quantitatively study layerslip-dipslip, nappe-glide structure systems in the Hunan-Jiangxiareas, samples with divided layers of these classical cross sections in the studied area were selected, and various...In order to quantitatively study layerslip-dipslip, nappe-glide structure systems in the Hunan-Jiangxiareas, samples with divided layers of these classical cross sections in the studied area were selected, and various physicomechanical parameters were systematically determined. Furthermore, five regional layer-slip systems of the basement and the cover strata were scientifically divided in the Middle Yangzi area, and they have been synthetically compared with the determined parameters in the Lower Yangzi area. Overall, the parameter value of a sliplayer presenting relative plasticity, ductility and viscosity is higher than a non-slip layer presenting relative elasticity, brittleness and rigidity, except the value of the Poission's ratio of the rock and the determined temperature of the inclusion, other parameters (such as the uniaxial pressure strength of the rock, the elastic module, the density and the elastic wave velocity) are all lower. On the basis of the study, the authors still further explain a pneumatic cushion effect of the slip-layer and the research significance.展开更多
研究了直径200 mm BCD器件用Si外延片滑移线的影响因素,探究了超高温条件下滑移线的工艺控制方法。基于BCD器件对Si外延片特性的要求,分析了石墨基座位置、衬底电阻率分布、温度分布对于超高温条件下外延层滑移线的影响,优化了外延控制...研究了直径200 mm BCD器件用Si外延片滑移线的影响因素,探究了超高温条件下滑移线的工艺控制方法。基于BCD器件对Si外延片特性的要求,分析了石墨基座位置、衬底电阻率分布、温度分布对于超高温条件下外延层滑移线的影响,优化了外延控制方法。采用常压高温化学气相沉积技术制备了BCD器件用Si外延片,并通过Hg-CV等设备对外延片进行测试分析。实验结果证明,该工艺控制方法可有效抑制滑移线的产生,同时满足BCD器件工艺所需的外延层均匀性、图形漂移畸变等控制要求,并通过长期外延验证确认了工艺稳定性。展开更多
基金Project supported by the National Natural Science Foundation of China.
文摘In order to quantitatively study layerslip-dipslip, nappe-glide structure systems in the Hunan-Jiangxiareas, samples with divided layers of these classical cross sections in the studied area were selected, and various physicomechanical parameters were systematically determined. Furthermore, five regional layer-slip systems of the basement and the cover strata were scientifically divided in the Middle Yangzi area, and they have been synthetically compared with the determined parameters in the Lower Yangzi area. Overall, the parameter value of a sliplayer presenting relative plasticity, ductility and viscosity is higher than a non-slip layer presenting relative elasticity, brittleness and rigidity, except the value of the Poission's ratio of the rock and the determined temperature of the inclusion, other parameters (such as the uniaxial pressure strength of the rock, the elastic module, the density and the elastic wave velocity) are all lower. On the basis of the study, the authors still further explain a pneumatic cushion effect of the slip-layer and the research significance.
文摘研究了直径200 mm BCD器件用Si外延片滑移线的影响因素,探究了超高温条件下滑移线的工艺控制方法。基于BCD器件对Si外延片特性的要求,分析了石墨基座位置、衬底电阻率分布、温度分布对于超高温条件下外延层滑移线的影响,优化了外延控制方法。采用常压高温化学气相沉积技术制备了BCD器件用Si外延片,并通过Hg-CV等设备对外延片进行测试分析。实验结果证明,该工艺控制方法可有效抑制滑移线的产生,同时满足BCD器件工艺所需的外延层均匀性、图形漂移畸变等控制要求,并通过长期外延验证确认了工艺稳定性。
