The geometry of an inductively coupled plasma （ICP） etcher is usually considered to be an important factor for determining both plasma and process uniformity over a large wafer. During the past few decades, these pa...The geometry of an inductively coupled plasma （ICP） etcher is usually considered to be an important factor for determining both plasma and process uniformity over a large wafer. During the past few decades, these parameters were determined by the ＂trial and error＂ method, resulting in wastes of time and funds. In this paper, a new approach of regression orthogonal design with plasma simulation experiments is proposed to investigate the sensitivity of the structural parameters on the uniformity of plasma characteristics. The tool for simulating plasma is CFD-ACE＋, which is commercial multi-physical modeling software that has been proven to be accurate for plasma simulation. The simulated experimental results are analyzed to get a regression equation on three structural parameters. Through this equation, engineers can compute the uniformity of the electron number density rapidly without modeling by CFD-ACE＋. An optimization performed at the end produces good results.展开更多
Slope climbing of urban expansion(SCE),as a form of urbanization,has increasingly significant impacts on urban development.Unsustainable slope climbing of urban expansion can harm the natural environment,thereby affec...Slope climbing of urban expansion(SCE),as a form of urbanization,has increasingly significant impacts on urban development.Unsustainable slope climbing of urban expansion can harm the natural environment,thereby affecting human production and living conditions.Using a coupled coordination model and the geographically weighted regression(GTWR)model,leveraging night light remote sensing data and ecological environment quality index model,this study investigated the coupling relationship between urban expansion and ecological environment quality and its influencing factors in the Yangtze River Economic Belt of China from 2000 to 2020.The results indicate that from 2000 to 2020,the intensity of urban slope climbing in the Yangtze River Economic Belt showed a fluctuating upward trend,with the slope climbing intensity being most significant in Chongqing Municipality and Kunming of Yunnan Province.Overall,the ecological environment quality exhibited an upward trend,with over 80%of the study area maintaining stable or improved ecological quality.There is a certain spatial correspondence between ecological environment quality and urban slope climbing.Although these two aspects of development demonstrate a high degree of coordination,fluctuations still occur during the development process.Further research on the coupling coordination relationship between the two revealed that population density has a negative impact on coupling coordination in the eastern region,and technology expenditure in eastern coastal cities has shown a negative trend over time.To ensure the continued increase in the proportion of highly coordinated areas in the future,eastern coastal cities in the study region could prioritize ecological civilization construction,strengthen urban construction and development planning,adjust influencing factors,and ensure the coordinated development of urban growth with ecological environment quality.展开更多
Forward Variable Area Bypass Injector(FVABI)is one of key components which contributes to modulate the cycle parameters of Variable Cycle Engine(VCE)under various operation conditions.The modeling method of zero-dimen...Forward Variable Area Bypass Injector(FVABI)is one of key components which contributes to modulate the cycle parameters of Variable Cycle Engine(VCE)under various operation conditions.The modeling method of zero-dimensional FVABI was reviewed and its deficiency was analyzed based on FVABI flow characteristic.In order to improve the accuracy of VCE performance simulation,the high-fidelity modeling method of FVABI was developed based on its working characteristics.Then it was coupled with the zero-dimensional VCE model and the multi-level VCE model was built.The results indicate that the geometric and aerodynamic parameters can affect the interaction between the two airflows and the zero-dimensional FVABI model is too simple to predict the component performance accurately,especially when the FVABI inner bypass is chocked.Based on the performance curves for single bypass mode and the regression model of multi-scale support vector regression for double bypass mode,the high-fidelity model can predict FVABI performance accurately and rapidly.The integration of high-fidelity FVABI model into zerodimensional VCE model can be done by adjusting iterative variables and balance equations.The multi-level model has good convergence and it can predict VCE performance when the FVABI inner bypass is chocked.展开更多
Aiming at deep roadway anchorage solids, laboratory similar model tests were used to reveal the mechanical properties of anchorage solids with different anchorage lengths under the coupling effect of temperature and p...Aiming at deep roadway anchorage solids, laboratory similar model tests were used to reveal the mechanical properties of anchorage solids with different anchorage lengths under the coupling effect of temperature and pressure, and SPSS statistical analysis software was used to conduct linear regression analysis of the ultimate anchorage force obtained from the tests. The results show that: through multiple linear regression analysis, the influence degree of temperature and pressure coupling on the ultimate anchorage force is arranged in order of anchoring length > surrounding rock strength > temperature > side pressure coefficient, and the linear regression equation of the model is obtained. Compared with the linear regression equation of simulation results, the model has a high explanatory ability.展开更多
基金supported by Important National Science & Technology Specific Projects of China (No.2) (Nos.2009ZX02001,2011ZX02403)
文摘The geometry of an inductively coupled plasma （ICP） etcher is usually considered to be an important factor for determining both plasma and process uniformity over a large wafer. During the past few decades, these parameters were determined by the ＂trial and error＂ method, resulting in wastes of time and funds. In this paper, a new approach of regression orthogonal design with plasma simulation experiments is proposed to investigate the sensitivity of the structural parameters on the uniformity of plasma characteristics. The tool for simulating plasma is CFD-ACE＋, which is commercial multi-physical modeling software that has been proven to be accurate for plasma simulation. The simulated experimental results are analyzed to get a regression equation on three structural parameters. Through this equation, engineers can compute the uniformity of the electron number density rapidly without modeling by CFD-ACE＋. An optimization performed at the end produces good results.
基金Under the auspices of National Natural Science Foundation of China(No.42371191)Science and Technology Planning of NIGLAS(No.NIGLAS2022GS06,2022NIGLAS-CJH04)。
文摘Slope climbing of urban expansion(SCE),as a form of urbanization,has increasingly significant impacts on urban development.Unsustainable slope climbing of urban expansion can harm the natural environment,thereby affecting human production and living conditions.Using a coupled coordination model and the geographically weighted regression(GTWR)model,leveraging night light remote sensing data and ecological environment quality index model,this study investigated the coupling relationship between urban expansion and ecological environment quality and its influencing factors in the Yangtze River Economic Belt of China from 2000 to 2020.The results indicate that from 2000 to 2020,the intensity of urban slope climbing in the Yangtze River Economic Belt showed a fluctuating upward trend,with the slope climbing intensity being most significant in Chongqing Municipality and Kunming of Yunnan Province.Overall,the ecological environment quality exhibited an upward trend,with over 80%of the study area maintaining stable or improved ecological quality.There is a certain spatial correspondence between ecological environment quality and urban slope climbing.Although these two aspects of development demonstrate a high degree of coordination,fluctuations still occur during the development process.Further research on the coupling coordination relationship between the two revealed that population density has a negative impact on coupling coordination in the eastern region,and technology expenditure in eastern coastal cities has shown a negative trend over time.To ensure the continued increase in the proportion of highly coordinated areas in the future,eastern coastal cities in the study region could prioritize ecological civilization construction,strengthen urban construction and development planning,adjust influencing factors,and ensure the coordinated development of urban growth with ecological environment quality.
基金the financial support of the National Natural Science Foundation of China(Nos.51876176 and 51906204)。
文摘Forward Variable Area Bypass Injector(FVABI)is one of key components which contributes to modulate the cycle parameters of Variable Cycle Engine(VCE)under various operation conditions.The modeling method of zero-dimensional FVABI was reviewed and its deficiency was analyzed based on FVABI flow characteristic.In order to improve the accuracy of VCE performance simulation,the high-fidelity modeling method of FVABI was developed based on its working characteristics.Then it was coupled with the zero-dimensional VCE model and the multi-level VCE model was built.The results indicate that the geometric and aerodynamic parameters can affect the interaction between the two airflows and the zero-dimensional FVABI model is too simple to predict the component performance accurately,especially when the FVABI inner bypass is chocked.Based on the performance curves for single bypass mode and the regression model of multi-scale support vector regression for double bypass mode,the high-fidelity model can predict FVABI performance accurately and rapidly.The integration of high-fidelity FVABI model into zerodimensional VCE model can be done by adjusting iterative variables and balance equations.The multi-level model has good convergence and it can predict VCE performance when the FVABI inner bypass is chocked.
文摘Aiming at deep roadway anchorage solids, laboratory similar model tests were used to reveal the mechanical properties of anchorage solids with different anchorage lengths under the coupling effect of temperature and pressure, and SPSS statistical analysis software was used to conduct linear regression analysis of the ultimate anchorage force obtained from the tests. The results show that: through multiple linear regression analysis, the influence degree of temperature and pressure coupling on the ultimate anchorage force is arranged in order of anchoring length > surrounding rock strength > temperature > side pressure coefficient, and the linear regression equation of the model is obtained. Compared with the linear regression equation of simulation results, the model has a high explanatory ability.
