In this paper,we report a continuous deposition method for double-sided CeO2/YSZ/Y2O3 buffer layers by reel-to-reel in a D.C.magnetron reactive sputtering system.X-ray diffraction exhibited all the samples were highly...In this paper,we report a continuous deposition method for double-sided CeO2/YSZ/Y2O3 buffer layers by reel-to-reel in a D.C.magnetron reactive sputtering system.X-ray diffraction exhibited all the samples were highly c-axis oriented and atomic force microscope observations revealed a smooth,dense and crack-free surface morphology.Out-of-plane,in-plane texture,and surface roughness of multi-buffer layers were improved under optimized deposition conditions.Full width at half maximum(FWHM)values of out-of-plane and in-plane were about 4°and 5.5°in 50 cm double-sided buffed template.YBa2Cu3O7-δfilms with thickness of 1.2μm were deposited on both sides of the buffed tape.Both sides showed similar critical current density,Jc(77 K,self field)as 0.8 MA/cm2 and 0.7 MA/cm2,respectively.展开更多
文摘In this paper,we report a continuous deposition method for double-sided CeO2/YSZ/Y2O3 buffer layers by reel-to-reel in a D.C.magnetron reactive sputtering system.X-ray diffraction exhibited all the samples were highly c-axis oriented and atomic force microscope observations revealed a smooth,dense and crack-free surface morphology.Out-of-plane,in-plane texture,and surface roughness of multi-buffer layers were improved under optimized deposition conditions.Full width at half maximum(FWHM)values of out-of-plane and in-plane were about 4°and 5.5°in 50 cm double-sided buffed template.YBa2Cu3O7-δfilms with thickness of 1.2μm were deposited on both sides of the buffed tape.Both sides showed similar critical current density,Jc(77 K,self field)as 0.8 MA/cm2 and 0.7 MA/cm2,respectively.
