用 VCAD 法在不锈钢和工模具钢基体上沉积均匀、致密的 TiN 膜时,TiN 膜的色泽、结晶取向和点阵常数均可能随着工艺参数的改变而改变,论文作者用 XRD 法研究了不同条件下该 TiN 膜的结构和点阵常数的变化,以及择优取向度,并对膜的行为...用 VCAD 法在不锈钢和工模具钢基体上沉积均匀、致密的 TiN 膜时,TiN 膜的色泽、结晶取向和点阵常数均可能随着工艺参数的改变而改变,论文作者用 XRD 法研究了不同条件下该 TiN 膜的结构和点阵常数的变化,以及择优取向度,并对膜的行为差异作了分析,结果表明:随着涂层中氮含量的增加,点阵常数值增大;TiN_x 的色泽与氮含量有关;择优取向主要取决于偏压。展开更多
TiN films deposited by the VCAD method at the substrate of stainless steel and superhigh speed tool steels are uniform and dense.Their colour,orientation and lattice parameter depend on deposited condition The lattice...TiN films deposited by the VCAD method at the substrate of stainless steel and superhigh speed tool steels are uniform and dense.Their colour,orientation and lattice parameter depend on deposited condition The lattice structure of deposited film,the change of the lattice parameter and its preferred orientation were studied by the XRD method,different behaviours of TiNx film were analysed.The lattice parameter of TiNx films is increased with the nitrogen content and The colour of TiNx film is strongly related to the content of Nitrogen also.The change of preferred orientation depends mainly on the Bias.展开更多
文摘TiN films deposited by the VCAD method at the substrate of stainless steel and superhigh speed tool steels are uniform and dense.Their colour,orientation and lattice parameter depend on deposited condition The lattice structure of deposited film,the change of the lattice parameter and its preferred orientation were studied by the XRD method,different behaviours of TiNx film were analysed.The lattice parameter of TiNx films is increased with the nitrogen content and The colour of TiNx film is strongly related to the content of Nitrogen also.The change of preferred orientation depends mainly on the Bias.
