TaN/NbN multilayered coatings with nanoscale bilayer periods were synthesized at different Ar/N2 flow rates by RF （radio frequency） magnetron sputtering. XRD （X-ray diffraction） and Nano Indenter System were emplo...TaN/NbN multilayered coatings with nanoscale bilayer periods were synthesized at different Ar/N2 flow rates by RF （radio frequency） magnetron sputtering. XRD （X-ray diffraction） and Nano Indenter System were employed to investigate the influence of Ar/N2 flow rate （FAr：FN2） on microstructure and mechanical properties of the coatings. The low-angle XRD pattern indicated a well-defined composition modulation and layer structure of the multilayered coating. All multilayered coatings almost revealed higher hardness than the rule-of-mixtures value of monolithic TaN and NbN coatings. At FAr：FN2=10, the multilayered coating possessed desirable hardness, elastic modulus, internal stress, and fracture resistance, compared with ones synthesized at other Ar/N2 flow rates. The layered structure with strong mixture of TaN （110）, （111）, （200） and Nb2N （101）textures should be related to the enhanced mechanical properties.展开更多
薄膜镀层由于厚度小 ,难以用通常的磨损方法评估其耐磨性。本文研究了采用精密凹坑研磨仪评价薄膜镀层耐磨性的方法 ,并对 Ta N/ Nb N纳米多层膜和 Ta N、Nb N单层膜进行了磨损实验。结果表明 ,精密凹坑研磨仪是一种适用于评价薄膜镀层...薄膜镀层由于厚度小 ,难以用通常的磨损方法评估其耐磨性。本文研究了采用精密凹坑研磨仪评价薄膜镀层耐磨性的方法 ,并对 Ta N/ Nb N纳米多层膜和 Ta N、Nb N单层膜进行了磨损实验。结果表明 ,精密凹坑研磨仪是一种适用于评价薄膜镀层耐磨性的方法。Ta N/ Nb N纳米多层膜有比 Ta N、Tb展开更多
文摘TaN/NbN multilayered coatings with nanoscale bilayer periods were synthesized at different Ar/N2 flow rates by RF （radio frequency） magnetron sputtering. XRD （X-ray diffraction） and Nano Indenter System were employed to investigate the influence of Ar/N2 flow rate （FAr：FN2） on microstructure and mechanical properties of the coatings. The low-angle XRD pattern indicated a well-defined composition modulation and layer structure of the multilayered coating. All multilayered coatings almost revealed higher hardness than the rule-of-mixtures value of monolithic TaN and NbN coatings. At FAr：FN2=10, the multilayered coating possessed desirable hardness, elastic modulus, internal stress, and fracture resistance, compared with ones synthesized at other Ar/N2 flow rates. The layered structure with strong mixture of TaN （110）, （111）, （200） and Nb2N （101）textures should be related to the enhanced mechanical properties.
文摘薄膜镀层由于厚度小 ,难以用通常的磨损方法评估其耐磨性。本文研究了采用精密凹坑研磨仪评价薄膜镀层耐磨性的方法 ,并对 Ta N/ Nb N纳米多层膜和 Ta N、Nb N单层膜进行了磨损实验。结果表明 ,精密凹坑研磨仪是一种适用于评价薄膜镀层耐磨性的方法。Ta N/ Nb N纳米多层膜有比 Ta N、Tb
