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Experimental study of Fourier transform spectrometer based on MEMS micro-mirror 被引量:1
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作者 陈建君 朱永 +3 位作者 刘波 韦玮 王宁 张洁 《Chinese Optics Letters》 SCIE EI CAS CSCD 2013年第5期72-74,共3页
We propose a new Fourier transform spectrometer based on programmable microelectromechanical systems (MEMS) micro-mirror and an improved Michelson interferometer. The principle of the spectrometer is theoretically a... We propose a new Fourier transform spectrometer based on programmable microelectromechanical systems (MEMS) micro-mirror and an improved Michelson interferometer. The principle of the spectrometer is theoretically analyzed. A signal acquisition unit and an experimental set-up are designed. The spectrum of the polychromatie light source is obtained at a slantwise reflector angle of O.238°. The spectrum is analyzed by this system within the near infrared. The experimental results show that the spectral accuracy is less than 3 nm, and the signal-to-noise ratio (SNR) is 18 dB. The spectral resolution is less than 16 nm. 展开更多
关键词 BOLOMETERS Electromechanical devices Light sources MEMS Michelson interferometers Mirrors spacecraft instruments
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