摘要
We propose a new Fourier transform spectrometer based on programmable microelectromechanical systems （MEMS） micro-mirror and an improved Michelson interferometer. The principle of the spectrometer is theoretically analyzed. A signal acquisition unit and an experimental set-up are designed. The spectrum of the polychromatie light source is obtained at a slantwise reflector angle of O.238°. The spectrum is analyzed by this system within the near infrared. The experimental results show that the spectral accuracy is less than 3 nm, and the signal-to-noise ratio （SNR） is 18 dB. The spectral resolution is less than 16 nm.
We propose a new Fourier transform spectrometer based on programmable microelectromechanical systems （MEMS） micro-mirror and an improved Michelson interferometer. The principle of the spectrometer is theoretically analyzed. A signal acquisition unit and an experimental set-up are designed. The spectrum of the polychromatie light source is obtained at a slantwise reflector angle of O.238°. The spectrum is analyzed by this system within the near infrared. The experimental results show that the spectral accuracy is less than 3 nm, and the signal-to-noise ratio （SNR） is 18 dB. The spectral resolution is less than 16 nm.
基金
supported by the National Natural Science Foundation of China under Grant No.60976084
