Surface acoustic wave(SAW)resonator with outstanding quality factors of 4829/6775 at the resonant/anti-resonant frequencies has been demonstrated on C-doped semi-insulating bulk GaN.The impact of device parameters inc...Surface acoustic wave(SAW)resonator with outstanding quality factors of 4829/6775 at the resonant/anti-resonant frequencies has been demonstrated on C-doped semi-insulating bulk GaN.The impact of device parameters including aspect ratio of length to width of resonators,number of interdigital transducers,and acoustic propagation direction on resonator performance have been studied.For the first time,we demonstrate wireless temperature sensing from 21.6 to 120℃ with a stable temperature coefficient of frequency of–24.3 ppm/℃ on bulk GaN-based SAW resonators.展开更多
In the present paper, we study the transmission of the two-dimensional photonic crystal （PC） superellipse ring resonator. The fast growing applications of optomechanical systems lead to strong demands in new sensing...In the present paper, we study the transmission of the two-dimensional photonic crystal （PC） superellipse ring resonator. The fast growing applications of optomechanical systems lead to strong demands in new sensing mechanism in order to design the sensing elements to nanometer scale. The photonic crystal based resonator has been investigated as promising solutions because the band gap structure and resonator characteristics are extremely sensitive to the deformation and position shift of rod/cavity in PC resonators. This structure opens a single channel filter. The study is extended for tuning of channel filter＇s wavelength with a temperature of this structure. The transmission of the channel filter shows a red shift with temperature linearly. This wavelength shift of the channel filter is used for the sensor application. The sensitivity for the proposed structure is found to be 65.3pm/℃. The outstanding sensing capability renders PC resonators as a promising optomechanical sensing element to be integrated into various transducers for temperature sensing applications.展开更多
In order to control the working wavelength range of the fiber surface plasmon resonance(SPR)temperature sensor and realize the wavelength division multiplexing type multi-channel fiber SPR temperature sensor,by compre...In order to control the working wavelength range of the fiber surface plasmon resonance(SPR)temperature sensor and realize the wavelength division multiplexing type multi-channel fiber SPR temperature sensor,by comprehensively investigating the influence of liquids with different thermal-optical coefficients and solid packaging materials on the performance of fiber SPR temperature sensor,a dual-channel fiber SPR temperature sensor based on liquid-solid cascade encapsulation was designed and fabricated.The liquid temperature sensing stage encapsulated in capillary worked in 616.03 nm-639.05 nm band,the solid sensing stage coated with pouring sealant worked in 719.37 nm-825.27 nm band,and the two stages were cascaded to form a fiber dual-channel temperature sensor.The testing results indicated that when the temperature range was 35℃-95℃,the sensitivity of two-stage temperature detection was−0.384 nm/℃and−1.765 nm/℃respectively.The proposed fiber sensor has simple fabrication and excellent performance which can be widely used in various fields of dual-channel temperature measurement and temperature compensation.展开更多
A seawater temperature sensing method based on polydimethylsiloxane-coated (PDMS-coated) microfiber knot resonator (MKR) is proposed, which has the advantages of high sensitivity and weak salinity dependence. The depe...A seawater temperature sensing method based on polydimethylsiloxane-coated (PDMS-coated) microfiber knot resonator (MKR) is proposed, which has the advantages of high sensitivity and weak salinity dependence. The dependences of the temperature sensitivity on fiber diameter, coating thickness and probing wavelength are theoretically investigated and the range of coating thickness for weak salinity dependence is obtained. By optimizing the parameters of the seawater temperature sensing system, when the probing wavelength is 1550 nm, the fiber diameter is 1 μm, and the coating thickness is 5 μm, the sensitivity can reach to 0.197 nm/°C. Results shown here are beneficial to find the optimal parameters for the temperature sensors with high sensitivity and weak salinity dependence.展开更多
Resonant temperature sensors have drawn considerable attention for their advantages such as high sensitivity,digitized signal output and high precision.This paper presents a new type of resonant temperature sensor,whi...Resonant temperature sensors have drawn considerable attention for their advantages such as high sensitivity,digitized signal output and high precision.This paper presents a new type of resonant temperature sensor,which uses capacitive micromachined ultrasonic transducer(CMUT)as the sensing element.A lumped electro-mechanical-thermal model was established to show its working principle for temperature measurement.The theoretical model explicitly explains the thermally induced changes in the resonant frequency of the CMUT.Then,the finite element method was used to further investigate the sensing performance.The numerical results agree well with the established analytical model qualitatively.The numerical results show that the resonant frequency varies linearly with the temperature over the range of 20℃to 140℃ at the first four vibrating modes.However,the first order vibrating mode shows a higher sensitivity than the other three higher modes.When working at the first order vibrating mode,the temperature coefficient of the resonance frequency(TCf)can reach as high as-1114.3 ppm/℃ at a bias voltage equal to 90%of the collapse voltage of the MCUT.The corresponding nonlinear error was as low as 1.18%.It is discovered that the sensing sensitivity is dependent on the applied bias voltages.A higher sensitivity can be achieved by increasing the bias voltages.展开更多
Flexible fiber sensors,However,traditional methods face challenges in fabricating low-cost,large-scale fiber sensors.In recent years,the thermal drawing process has rapidly advanced,offering a novel approach to flexib...Flexible fiber sensors,However,traditional methods face challenges in fabricating low-cost,large-scale fiber sensors.In recent years,the thermal drawing process has rapidly advanced,offering a novel approach to flexible fiber sensors.Through the preform-tofiber manufacturing technique,a variety of fiber sensors with complex functionalities spanning from the nanoscale to kilometer scale can be automated in a short time.Examples include temperature,acoustic,mechanical,chemical,biological,optoelectronic,and multifunctional sensors,which operate on diverse sensing principles such as resistance,capacitance,piezoelectricity,triboelectricity,photoelectricity,and thermoelectricity.This review outlines the principles of the thermal drawing process and provides a detailed overview of the latest advancements in various thermally drawn fiber sensors.Finally,the future developments of thermally drawn fiber sensors are discussed.展开更多
A multimode-quartz-crystal oscillator was developed to excite stable dual-mode resonance at different frequencies: The oscillation of the 3rd harmonic resonance of the principle C-mode and an additional resonance B-mo...A multimode-quartz-crystal oscillator was developed to excite stable dual-mode resonance at different frequencies: The oscillation of the 3rd harmonic resonance of the principle C-mode and an additional resonance B-mode of SC-cut crystal. Harmonic combinations of the 3rd and fundamental mode of B-mode with the 3rd harmonics of C-mode are demonstrated. The measurement of the temperature dependence of the oscillation frequency is demonstrated along with the stability determined by root Allan variance. Dependence on the open conductance of the active circuit and the dependence on the coupling capacitors are discussed.展开更多
A high sensitivity D-shaped hole double-cladding fiber temperature sensor based on surface plasmon resonance(SPR)is designed and investigated by a full-vector finite element method.Within the D-shaped hole doublecladd...A high sensitivity D-shaped hole double-cladding fiber temperature sensor based on surface plasmon resonance(SPR)is designed and investigated by a full-vector finite element method.Within the D-shaped hole doublecladding fiber,the hollow D-section is coated with gold film and then injected in a high thermo-optic coefficient liquid to realize the high temperature sensitivity for the fiber SPR temperature sensor.The numerical simulation results show that the peaking loss of the D-shaped hole double-cladding fiber SPR is hugely influenced by the distance between the D-shaped hole and fiber core and by the thickness of the gold film,but the temperature sensitivity is almost insensitive to the above parameters.When the thermo-optic coefficient is -2.8×10^(-4)∕℃,the thickness of the gold film is 47 nm,and the distance between the D-shaped hole and fiber core is 5μm,the temperature sensitivity of the D-shaped hole fiber SPR sensor can reach to -3.635 nm∕℃.展开更多
A compact surface plasmon resonance(SPR) fiber optic sensor, being utilized to simultaneously measure refractive index(RI) and temperature, is proposed and experimentally demonstrated in this paper. One part of a no-c...A compact surface plasmon resonance(SPR) fiber optic sensor, being utilized to simultaneously measure refractive index(RI) and temperature, is proposed and experimentally demonstrated in this paper. One part of a no-core fiber(NCF)was coated with a silver(Ag) film, and the other part was coated with a silver/polydimethylsiloxane(Ag/PDMS) composite film to stimulate the SPR effect. Due to the two heterogeneous films, two dips appeared in the transmission spectrum and were used to achieve the dual-parameter measurements. The experimental results showed that the RI sensitivity reached 2121.43 nm/RIU and 0 nm/RIU, while the temperature sensitivity reached-0.32 nm/℃ and-2.21 nm/℃ for the two dips,respectively. Based on the obtained transfer matrix, the measurements of RI and temperature could be demodulated. This designed sensor showed the merits of simple structure, easy to implement, and high sensitivity, demonstrating application prospects in dual-parameter monitoring.展开更多
基金The research is supported by the National Natural Sciences Foundation of China(Grant No.61974137)the One Hundred Person project of the Chinese Academy of Science.
文摘Surface acoustic wave(SAW)resonator with outstanding quality factors of 4829/6775 at the resonant/anti-resonant frequencies has been demonstrated on C-doped semi-insulating bulk GaN.The impact of device parameters including aspect ratio of length to width of resonators,number of interdigital transducers,and acoustic propagation direction on resonator performance have been studied.For the first time,we demonstrate wireless temperature sensing from 21.6 to 120℃ with a stable temperature coefficient of frequency of–24.3 ppm/℃ on bulk GaN-based SAW resonators.
文摘In the present paper, we study the transmission of the two-dimensional photonic crystal （PC） superellipse ring resonator. The fast growing applications of optomechanical systems lead to strong demands in new sensing mechanism in order to design the sensing elements to nanometer scale. The photonic crystal based resonator has been investigated as promising solutions because the band gap structure and resonator characteristics are extremely sensitive to the deformation and position shift of rod/cavity in PC resonators. This structure opens a single channel filter. The study is extended for tuning of channel filter＇s wavelength with a temperature of this structure. The transmission of the channel filter shows a red shift with temperature linearly. This wavelength shift of the channel filter is used for the sensor application. The sensitivity for the proposed structure is found to be 65.3pm/℃. The outstanding sensing capability renders PC resonators as a promising optomechanical sensing element to be integrated into various transducers for temperature sensing applications.
基金supported by the National Natural Science Foundation of China(Grant No.61705025)the Natural Science Foundation of Heilongjiang Province,China(Grant No.F2018027)+3 种基金partially supported by Chongqing Natural Science Foundation(Grant Nos.cstc2019jcyj-msxmX0431 and cstc2018jcyjAX0817)the Science and Technology Project Affiliated to the Education Department of Chongqing Municipality(Grant Nos.KJQN201801217,KJQN201901226,and KJ1710247)Chongqing Key Laboratory of Geological Environment Monitoring and Disaster Early-Warning in Three Gorges Reservoir Area(Grant Nos.ZD2020A0103 and ZD2020A0102)the Fundamental Research Funds for Chongqing Three Gorges University of China(Grant No.19ZDPY08).
文摘In order to control the working wavelength range of the fiber surface plasmon resonance(SPR)temperature sensor and realize the wavelength division multiplexing type multi-channel fiber SPR temperature sensor,by comprehensively investigating the influence of liquids with different thermal-optical coefficients and solid packaging materials on the performance of fiber SPR temperature sensor,a dual-channel fiber SPR temperature sensor based on liquid-solid cascade encapsulation was designed and fabricated.The liquid temperature sensing stage encapsulated in capillary worked in 616.03 nm-639.05 nm band,the solid sensing stage coated with pouring sealant worked in 719.37 nm-825.27 nm band,and the two stages were cascaded to form a fiber dual-channel temperature sensor.The testing results indicated that when the temperature range was 35℃-95℃,the sensitivity of two-stage temperature detection was−0.384 nm/℃and−1.765 nm/℃respectively.The proposed fiber sensor has simple fabrication and excellent performance which can be widely used in various fields of dual-channel temperature measurement and temperature compensation.
文摘A seawater temperature sensing method based on polydimethylsiloxane-coated (PDMS-coated) microfiber knot resonator (MKR) is proposed, which has the advantages of high sensitivity and weak salinity dependence. The dependences of the temperature sensitivity on fiber diameter, coating thickness and probing wavelength are theoretically investigated and the range of coating thickness for weak salinity dependence is obtained. By optimizing the parameters of the seawater temperature sensing system, when the probing wavelength is 1550 nm, the fiber diameter is 1 μm, and the coating thickness is 5 μm, the sensitivity can reach to 0.197 nm/°C. Results shown here are beneficial to find the optimal parameters for the temperature sensors with high sensitivity and weak salinity dependence.
基金supported in part by the National Natural Science Foundation of China ( 51375378, 91323303 )the 13th Fok Ying Tung Education Foundation ( 132010 )+5 种基金the Science and Technology Research Project of Shaanxi (2012KJXX-01)the Fundamental Research Funds for the Central Universities ( 2012jdgz08 )the Major National Science and Technology Project ( 2011ZX04004-061 )the 111 Program ( B12016 )National Key Scientific Instrument and Equipment Development Projects of China ( 2012YQ03026101 )The China Scholarship Council
文摘Resonant temperature sensors have drawn considerable attention for their advantages such as high sensitivity,digitized signal output and high precision.This paper presents a new type of resonant temperature sensor,which uses capacitive micromachined ultrasonic transducer(CMUT)as the sensing element.A lumped electro-mechanical-thermal model was established to show its working principle for temperature measurement.The theoretical model explicitly explains the thermally induced changes in the resonant frequency of the CMUT.Then,the finite element method was used to further investigate the sensing performance.The numerical results agree well with the established analytical model qualitatively.The numerical results show that the resonant frequency varies linearly with the temperature over the range of 20℃to 140℃ at the first four vibrating modes.However,the first order vibrating mode shows a higher sensitivity than the other three higher modes.When working at the first order vibrating mode,the temperature coefficient of the resonance frequency(TCf)can reach as high as-1114.3 ppm/℃ at a bias voltage equal to 90%of the collapse voltage of the MCUT.The corresponding nonlinear error was as low as 1.18%.It is discovered that the sensing sensitivity is dependent on the applied bias voltages.A higher sensitivity can be achieved by increasing the bias voltages.
基金supported by the National Key Research and Development Program of China(2023YFB3809800)the National Natural Science Foundation of China(52172249,52525601)+2 种基金the Chinese Academy of Sciences Talents Program(E2290701)the Jiangsu Province Talents Program(JSSCRC2023545)the Special Fund Project of Carbon Peaking Carbon Neutrality Science and Technology Innovation of Jiangsu Province(BE2022011).
文摘Flexible fiber sensors,However,traditional methods face challenges in fabricating low-cost,large-scale fiber sensors.In recent years,the thermal drawing process has rapidly advanced,offering a novel approach to flexible fiber sensors.Through the preform-tofiber manufacturing technique,a variety of fiber sensors with complex functionalities spanning from the nanoscale to kilometer scale can be automated in a short time.Examples include temperature,acoustic,mechanical,chemical,biological,optoelectronic,and multifunctional sensors,which operate on diverse sensing principles such as resistance,capacitance,piezoelectricity,triboelectricity,photoelectricity,and thermoelectricity.This review outlines the principles of the thermal drawing process and provides a detailed overview of the latest advancements in various thermally drawn fiber sensors.Finally,the future developments of thermally drawn fiber sensors are discussed.
文摘A multimode-quartz-crystal oscillator was developed to excite stable dual-mode resonance at different frequencies: The oscillation of the 3rd harmonic resonance of the principle C-mode and an additional resonance B-mode of SC-cut crystal. Harmonic combinations of the 3rd and fundamental mode of B-mode with the 3rd harmonics of C-mode are demonstrated. The measurement of the temperature dependence of the oscillation frequency is demonstrated along with the stability determined by root Allan variance. Dependence on the open conductance of the active circuit and the dependence on the coupling capacitors are discussed.
基金National Natural Science Foundation of China(NSFC)(61525501)
文摘A high sensitivity D-shaped hole double-cladding fiber temperature sensor based on surface plasmon resonance(SPR)is designed and investigated by a full-vector finite element method.Within the D-shaped hole doublecladding fiber,the hollow D-section is coated with gold film and then injected in a high thermo-optic coefficient liquid to realize the high temperature sensitivity for the fiber SPR temperature sensor.The numerical simulation results show that the peaking loss of the D-shaped hole double-cladding fiber SPR is hugely influenced by the distance between the D-shaped hole and fiber core and by the thickness of the gold film,but the temperature sensitivity is almost insensitive to the above parameters.When the thermo-optic coefficient is -2.8×10^(-4)∕℃,the thickness of the gold film is 47 nm,and the distance between the D-shaped hole and fiber core is 5μm,the temperature sensitivity of the D-shaped hole fiber SPR sensor can reach to -3.635 nm∕℃.
基金the Natural Science Foundation of Hebei Province, China (Grant No. F2021203112)the National Natural Science Foundation of China (Grant No. 12074331)+1 种基金the National Key Research and Development Program of China (Grant No. 2019YFB2204001)Basic Scientific Research Funds for universities in Hebei Province, China (Grant No. JQN2021019)。
文摘A compact surface plasmon resonance(SPR) fiber optic sensor, being utilized to simultaneously measure refractive index(RI) and temperature, is proposed and experimentally demonstrated in this paper. One part of a no-core fiber(NCF)was coated with a silver(Ag) film, and the other part was coated with a silver/polydimethylsiloxane(Ag/PDMS) composite film to stimulate the SPR effect. Due to the two heterogeneous films, two dips appeared in the transmission spectrum and were used to achieve the dual-parameter measurements. The experimental results showed that the RI sensitivity reached 2121.43 nm/RIU and 0 nm/RIU, while the temperature sensitivity reached-0.32 nm/℃ and-2.21 nm/℃ for the two dips,respectively. Based on the obtained transfer matrix, the measurements of RI and temperature could be demodulated. This designed sensor showed the merits of simple structure, easy to implement, and high sensitivity, demonstrating application prospects in dual-parameter monitoring.
基金Supported by the Special Research Fund for the Doctoral Programof Higher Education (Grant No.200802140005)Harbin Science Technology Innovation foundation (Grant No.2007RFQXG054)
文摘为了实现高精密温度测量,设计了高性能数字温度传感器,该传感器由石英音叉谐振器,数字接口电路和基于现场可编程门阵列的传感器重置控制算法构成。依据石英晶体压电效应原理,对石英音叉谐振器的热敏切型和电极设置进行了研究;基于力学振动原理,导出石英音叉谐振器弯曲振动模式的微分方程;讨论了谐振式温度传感器的工作原理,提取出石英音叉温度传感器的特征参数并进行了非线性误差分析;采用光刻和侵蚀技术加工制作了石英音叉谐振器。该传感器的频率输出信号通过数字接口进入现场可编程门阵列,通过重置控制算法实现传感器的重置和现场自动校验。实验结果表明,在-20 ～140 ℃,该传感器的灵敏度可达65×10-6/℃,测温分辨率为0 .001 ℃,响应时间为1 s ,测温精度为0 .01 ℃。
