Tilted metasurface nanostructures,with excellent physical properties and enormous application potential,pose an urgent need for manufacturing methods.Here,electric-field-driven generative-nanoimprinting technique is p...Tilted metasurface nanostructures,with excellent physical properties and enormous application potential,pose an urgent need for manufacturing methods.Here,electric-field-driven generative-nanoimprinting technique is proposed.The electric field applied between the template and the substrate drives the contact,tilting,filling,and holding processes.By accurately controlling the introduced included angle between the flexible template and the substrate,tilted nanostructures with a controllable angle are imprinted onto the substrate,although they are vertical on the template.By flexibly adjusting the electric field intensity and the included angle,large-area uniform-tilted,gradient-tilted,and high-angle-tilted nanostructures are fabricated.In contrast to traditional replication,the morphology of the nanoimprinting structure is extended to customized control.This work provides a cost-effective,efficient,and versatile technology for the fabrication of various large-area tilted metasurface structures.As an illustration,a tilted nanograting with a high coupling efficiency is fabricated and integrated into augmented reality displays,demonstrating superior imaging quality.展开更多
Semiconductor optoelectronics devices,capable of converting electrical power into light or conversely light into electrical power in a compact and highly efficient manner represent one of the most advanced technologie...Semiconductor optoelectronics devices,capable of converting electrical power into light or conversely light into electrical power in a compact and highly efficient manner represent one of the most advanced technologies ever developed,which has profoundly reshaped the modern life with a wide range of applications.In recent decades,semiconductor technology has rapidly evolved from first-generation narrow bandgap materials(Si,Ge)to the latest fourth-generation ultra-wide bandgap semiconductor(GaO,diamond,AlN)with enhanced performance to meet growing demands.Additionally,merging semiconductor devices with other techniques,such as computer assisted design,state-of-the-art micro/nano fabrications,novel epitaxial growth,have significantly accelerated the development of semiconductor optoelectronics devices.Among them,integrating metasurfaces with semiconductor optoelectronic devices have opened new frontiers for on-chip control of their electromagnetic response,providing access to previously inaccessible degrees of freedom.We review the recent advances in on-chip control of a variety of semiconductor optoelectronic devices using integrated metasurfaces,including semiconductor lasers,semiconductor light emitting devices,semiconductor photodetectors,and low dimensional semiconductors.The integration of metasurfaces with semiconductors offers wafer-level ultracompact solutions for manipulating the functionalities of semiconductor devices,while also providing a practical platform for implementing cuttingedge metasurface technology in real-world applications.展开更多
Diatomic metasurfaces designed for interferometric mechanisms possess significant potential for the multidimensional manipulation of electromagnetic waves,including control over amplitude,phase,frequency,and polarizat...Diatomic metasurfaces designed for interferometric mechanisms possess significant potential for the multidimensional manipulation of electromagnetic waves,including control over amplitude,phase,frequency,and polarization.Geometric phase profiles with spin-selective properties are commonly associated with wavefront modulation,allowing the implementation of conjugate strategies within orthogonal circularly polarized channels.Simultaneous control of these characteristics in a single-layered diatomic metasurface will be an apparent technological extension.Here,spin-selective modulation of terahertz(THz)beams is realized by assembling a pair of meta-atoms with birefringent effects.The distinct modulation functions arise from geometric phase profiles characterized by multiple rotational properties,which introduce independent parametric factors that elucidate their physical significance.By arranging the key parameters,the proposed design strategy can be employed to realize independent amplitude and phase manipulation.A series of THz metasurface samples with specific modulation functions are characterized,experimentally demonstrating the accuracy of on-demand manipulation.This research paves the way for all-silicon meta-optics that may have great potential in imaging,sensing and detection.展开更多
Advancements in mode-division multiplexing(MDM)techniques,aimed at surpassing the Shannon limit and augmenting transmission capacity,have garnered significant attention in optical fiber communica-tion,propelling the d...Advancements in mode-division multiplexing(MDM)techniques,aimed at surpassing the Shannon limit and augmenting transmission capacity,have garnered significant attention in optical fiber communica-tion,propelling the demand for high-quality multiplexers and demultiplexers.However,the criteria for ideal-mode multiplexers/demultiplexers,such as performance,scalability,compatibility,and ultra-compactness,have only partially been achieved using conventional bulky devices(e.g.,waveguides,grat-ings,and free space optics)—an issue that will substantially restrict the application of MDM techniques.Here,we present a neuro-meta-router(NMR)optimized through deep learning that achieves spatial multi-mode division and supports multi-channel communication,potentially offering scalability,com-patibility,and ultra-compactness.An MDM communication system based on an NMR is theoretically designed and experimentally demonstrated to enable simultaneous and independent multi-dataset transmission,showcasing a capacity of up to 100 gigabits per second(Gbps)and a symbol error rate down to the order of 104,all achieved without any compensation technologies or correlation devices.Our work presents a paradigm that merges metasurfaces,fiber communications,and deep learning,with potential applications in intelligent metasurface-aided optical interconnection,as well as all-optical pat-tern recognition and classification.展开更多
Mid-infrared(MIR)-polarized thermal emission has broad applications in areas such as molecular sensing,information encryption,target detection,and optical communication.However,it is difficult for objects in nature to...Mid-infrared(MIR)-polarized thermal emission has broad applications in areas such as molecular sensing,information encryption,target detection,and optical communication.However,it is difficult for objects in nature to produce polarized thermal emission.Moreover,simultaneously generating and modulating broadband MIR thermal emission with both circular and linear polarization is even more difficult.We present a chiral plasmonic metasurface emitter(CPME)composed of asymmetric L-shaped and I-shaped antennas.The CPME consists of In_(3)SbTe_(2)(IST)phase-change material(PCM)antennas,an Al_(2)O_(3) dielectric layer,and an Au substrate.It is demonstrated that the CPME can selectively emit polarized light with different polarization states.Numerical simulations show that the CPME can achieve full Stokes parameter control of MIR thermal emission.By changing the state of the PCM IST,the spectral emissivity of 0 deg,45 deg,90 deg,and 135 deg linearly polarized(LP)lights and left-handed/right-handed circularly polarized(LCP/RCP)lights can be adjusted.In the crystalline state,the CPME exhibits the total degree of polarization(DoP)greater than 0.5 in the wavelength range of 3.4 to 5.3μm,the degree of linear polarization(DoLP)greater than 0.4 in the range of 3.0 to 5.1μm,and the degree of circular polarization(DoCP)greater than 0.4 in the range of 4.5 to 5.6μm.The physical mechanism of polarized emission has been investigated fully based on the near-field intensity distribution and power loss distribution.Finally,the potential applications of the designed CPME in infrared polarization detection and antidetection are verified through numerical calculations.展开更多
Multiple functional metasurfaces with high information capacity have attracted considerable attention from researchers.This study proposes a 2-bit tunable spin-decoupled coded metasurface designed for the terahertz ba...Multiple functional metasurfaces with high information capacity have attracted considerable attention from researchers.This study proposes a 2-bit tunable spin-decoupled coded metasurface designed for the terahertz band,which utilizes the tunable properties of Dirac semimetals(DSM)to create a novel multilayer structure.By incorporating both geometric and propagating phases into the metasurface design,we can effectively control the electromagnetic wave.When the Fermi level(EF)of the DSM is set at 6 meV,the electromagnetic wave is manipulated by the gold patch embedded in the DSM film,operating at a frequency of 1.3 THz.When the EF of the DSM is set at 80 meV,the electromagnetic wave is manipulated by the DSM patch,operating at a frequency of 1.4 THz.Both modes enable independent control of beam splitting under left-rotating circularly polarized(LCP)and rightrotating circularly polarized(RCP)wave excitation,resulting in the generation of vortex beams with distinct orbital angular momentum(OAM)modes.The findings of this study hold significant potential for enhancing information capacity and polarization multiplexing techniques in wireless communications.展开更多
Compared to traditional single-frequency bound states in the continuum(BIC),dual-band BIC of-fers higher degrees of freedom and functionality.Moveover,implementing independent control of dual-band BICs can further enh...Compared to traditional single-frequency bound states in the continuum(BIC),dual-band BIC of-fers higher degrees of freedom and functionality.Moveover,implementing independent control of dual-band BICs can further enhance their advantages and maximize their performance.This study presents a design for a dielectric metasurface that achieves dual-band BICs in the terahertz(THz)range.By adjusting two asym-metry parameters of the structure,independent control of the two symmetry-protected BICs is achieved.Fur-thermore,by varying the shape of the silicon holes,the design's robustness to geometric variations is demon-strated.Finally,the test results show that the figures of merit(FOMs)for both BICs reach 109.This work provides a new approach for realizing and tuning dual-frequency BICs,offering expanded possibilities for applications in multimode lasers,nonlinear optics,multi-channel filtering,and optical sensing.展开更多
Optically transparent microwave absorbers and multi-band stealth have extensive potential applications in military defense and wireless communication fields, and thus have attracted considerable attention. So far,most...Optically transparent microwave absorbers and multi-band stealth have extensive potential applications in military defense and wireless communication fields, and thus have attracted considerable attention. So far,most related work is based on inorganic transparent conductive metasurfaces. In this paper, we proposed and experimentally demonstrated a flexible, broadband and optically transparent microwave absorber using an organic metasurface. The metasurface absorber is composed of a sandwich structure, in which electric resonances and magnetic resonances are induced resulting in broadband absorption. A spraying process was developed to prepare this metasurface absorber. Both simulations and experiment show that this metasurface has broadband microwave absorption and good optical transparency. We further found that by using a multi-layer structure, visible, radar,and infrared stealth(multi-band stealth) can be achieved simultaneously. With the advantages of excellent foldability and low cost, the proposed metasurfaces may have applications in military and wireless communication fields.展开更多
Perfect anomalous reflections have been demonstrated in optical phase gradient metasurfaces(PGMs),but they suffer from single-frequency(narrow-band)response due to the intrinsic limitation of natural geometric periodi...Perfect anomalous reflections have been demonstrated in optical phase gradient metasurfaces(PGMs),but they suffer from single-frequency(narrow-band)response due to the intrinsic limitation of natural geometric periodicity.Here,we provide both numerical and analytical evidence that a depth gradient metasurface can achieve discrete ultra-broadband perfect anomalous reflection in the microwave range in the absence of geometric periodicity.Remarkably,by adjusting the operating frequency of the incident wave,the same effect can be steadily obtained via a physically equivalent phase periodicity in the PGM.Based on this mechanism,a perfect retroreflector with a broadband response ranging from 1 GHz to 40 GHz is realized.Our work has promising applications in communication,source tracking,and military satellites.展开更多
Chirality is a widespread physical phenomenon in nature,but natural materials often exhibit weak chiroptical responses.Recent advances have used chiral metasurfaces to enhance these responses,with applications in holo...Chirality is a widespread physical phenomenon in nature,but natural materials often exhibit weak chiroptical responses.Recent advances have used chiral metasurfaces to enhance these responses,with applications in holographic imaging,chiral molecule detection,and circularly polarized lasers.However,most chiral metasurfaces exhibit strong chiroptical responses only at fixed wavelengths,which limits their suitability for wavelength-tunable optical devices.We address this by designing a silicon-GST(silicon-Ge2Sb2Te5)hybrid metasurface with asymmetric cross-shaped units that support multi-wavelength resonances,achieving broadband and dynamically tunable CD(circular dichroism).In the amorphous phase,GST enables CD>0.7 in the range of 2,137 nm to 2,657 nm,with a PER(polarization extinction ratio)up to 38 dB.Upon transition to the crystalline phase,CD enhances with a redshift,and the sign of CD reverses.This enables dynamic wavelength tuning of broadband CD via the phase transition of GST.展开更多
A laser-induced periodic surface structure(LIPSS),which can be easily produced by femtosecond laser ablation,is a unique nanostructure with a visible refractive color that can be controlled by altering its orientation...A laser-induced periodic surface structure(LIPSS),which can be easily produced by femtosecond laser ablation,is a unique nanostructure with a visible refractive color that can be controlled by altering its orientation and uniformity,making it suitable for use in colorful marking,camouflage,and anticounterfeiting measures.However,single-mode information camouflage can no longer meet increasingly higher-level security requirements.Therefore,metasurfaces offer revolutionary solutions.In this study,conceptual metasurfaces of pure tungsten are theoretically proposed and verified using hierarchical LIPSS/nanoparticle(NP)nanostructures as meta-atoms.The anisotropy of the LIPSS nanostructure enables polarization-sensitive optical modulation,whereas the spatial configuration,NPs size,and period of LIPSS in the LIPSS/NP meta-atoms provide flexibility for tailoring broadband optical responses.In xpolarization,the LIPSS/NP meta-atom system provides more visible colors and divergent infrared absorption(emission)than in y-polarized and unpolarized modes,paving the way for vividly colorful polarization-sensitive displays and information camouflage in infrared bands.A simplified rendition of the world-famous painting“The Starry Night”by Van Gogh is used as a proof-of-concept.Preliminary experimental results are presented,based on which the feasibility and challenges for laser nanomanufacturing of the proposed conceptual metasurfaces are discussed,aiming to provide inspiration for the development of novel metasurfaces through interdisciplinary studies.展开更多
Metasurfaces composed of two-dimensional nanopillar arrays can manipulate light fields in desirable ways and exhibit the unique advantage of beam steering.Here,we experimentally demonstrate a metasurface-based wide-an...Metasurfaces composed of two-dimensional nanopillar arrays can manipulate light fields in desirable ways and exhibit the unique advantage of beam steering.Here,we experimentally demonstrate a metasurface-based wide-angle broadband all-dielectric blazed grating with an extreme incident angle of up to 80°,which is achieved by optimizing the wide-angle phase shifts and transmissivities of the unit cells.It exhibits a maximum diffraction efficiency of 72%and a high average efficiency of 64%over a wide range of incident angles from−80° to 45° at 1.55μm.Moreover,the proposed grating has a broad bandwidth of 200 nm(1.45-1.65μm),and average efficiencies of more than 50%can be achieved experimentally over the same incidence angles.Our results may pave the way for the creation of novel and efficient flat optical devices for wavefront control.展开更多
Almost half of the solar energy that reaches a silicon solar cell is lost due to the reflection at the silicon–air interface.Antireflective coatings aim to suppress the reflection and thereby to increase the photogen...Almost half of the solar energy that reaches a silicon solar cell is lost due to the reflection at the silicon–air interface.Antireflective coatings aim to suppress the reflection and thereby to increase the photogenerated current.The conventional few-layer dielectric antireflective coatings may significantly boost the transmission of solar light,but only in a narrow wavelength range.Using forward and inverse design optimization algorithms,we develop the designs of antireflective coatings for silicon solar cells based on single-layer silicon metasurfaces(periodic subwavelength nanostructure arrays),leading to a broadband reflection suppression in the wavelength range from 500 to 1200 nm for the incidence angles up to 60 deg.The reflection averaged over the visible and near-infrared spectra is at the record-low level of approximately 2%and 4.4%for the normal and oblique incidence,respectively.The obtained results demonstrate the potential of machine learning–enhanced photonic nanostructures to outperform the classical antireflective coatings.展开更多
A broadband polarization-independent terahertz multifunctional coding metasurface based on topological optimization using liquid crystal(LC)is proposed.The metasurface can achieve reconfigurability for beam steering a...A broadband polarization-independent terahertz multifunctional coding metasurface based on topological optimization using liquid crystal(LC)is proposed.The metasurface can achieve reconfigurability for beam steering and vortex beam generation within a frequency range of 0.68 THz–0.72 THz.Firstly,the metasurface unit is topologically optimized using the non-dominant sequencing genetic algorithms(NSGA-II)multi-objective optimization algorithm.By applying the LC’s electrically tunable refractive index properties,the metasurface unit enables polarization-independent 2-bit coding within a frequency range of 0.68 THz–0.72 THz.Then,based on the designed metasurface unit,the array arrangement of the metasurface is reverse-designed to achieve beam steering and vortex beam generation.The results show that,for beam steering,not only can polarization-independent steering of both single-and multi-beam be achieved within the 35°elevation angle range,but also independent control of the target angle of each beam in the multi-beam steering.For vortex beam generation,the metasurfaces can achieve the generation of single-and multi-vortex beams with topological charges l=±1,±2 within the 35elevation angle range,and the generation angles of each vortex beam in the multi-vortex beam can be independently controlled.This provides flexibility and diversity in the generation of vortex beams.Therefore,the proposed terahertz LC metasurface can realize flexible control of reconfigurable functions and has certain application prospects in terahertz communication,phased array radar,and vortex radar.展开更多
High-entropy alloys(HEAs)are promising materials for photonic applications.In such applications,permittivity is essential for numerical studies.In this work,we experimentally determine the complex permittivity of an H...High-entropy alloys(HEAs)are promising materials for photonic applications.In such applications,permittivity is essential for numerical studies.In this work,we experimentally determine the complex permittivity of an HEA composed of five noble metals-Au,Ag,Cu,Pd,and Pt.The measurements are conducted across a broad wavelength spectrum,spanning the ultraviolet,visible,and mid-infrared regions.The experiments,numerical simulations of reflection spectra,and analysis of absorption and scattering cross-sections reveal the potential for fabricating perfect absorber and emitter metasurfaces using this noble HEA.In addition,crystallography studies clearly show the formation of a uniform material.The lattice constant and electron work function of the alloy are found to be 0.396 nm and(4.8±0.4)eV,respectively-results indicate that the formed HEA alloy is well mixed.展开更多
Aberration-corrected focus scanning is crucial for high-precision optics,but the conventional optical systems rely on bulky and complicated dynamic correctors.Recently,Shiyi Xiao's group proposed a method using tw...Aberration-corrected focus scanning is crucial for high-precision optics,but the conventional optical systems rely on bulky and complicated dynamic correctors.Recently,Shiyi Xiao's group proposed a method using two rotating cascaded transmissive metasurfaces for adaptive aberration correction in focus scanning.The optimized phase profiles enable precise control of the focal position for scanning custom-curved surfaces.This concept was experimentally validated by two allsilicon meta-devices in the terahertz regime,paving the way for high-precision and compact optical devices in various applications.展开更多
Nonlinear wavefront shaping is crucial for advancing optical technologies,enabling applications in optical computation,information processing,and imaging.However,a significant challenge is that once a metasurface is f...Nonlinear wavefront shaping is crucial for advancing optical technologies,enabling applications in optical computation,information processing,and imaging.However,a significant challenge is that once a metasurface is fabricated,the nonlinear wavefront it generates is fixed,offering little flexibility.This limitation often necessitates the fabrication of different metasurfaces for different wavefronts,which is both time-consuming and inefficient.To address this,we combine evolutionary algorithms with spatial light modulators(SLMs)to dynamically control wavefronts using a single metasurface,reducing the need for multiple fabrications and enabling the generation of arbitrary nonlinear wavefront patterns without requiring complicated optical alignment.We demonstrate this approach by introducing a genetic algorithm(GA)to manipulate visible wavefronts converted from near-infrared light via third-harmonic generation(THG)in a silicon metasurface.The Si metasurface supports multipolar Mie resonances that strongly enhance light-matter interactions,thereby significantly boosting THG emission at resonant positions.Additionally,the cubic relationship between THG emission and the infrared input reduces noise in the diffractive patterns produced by the SLM.This allows for precise experimental engineering of the nonlinear emission patterns with fewer alignment constraints.Our approach paves the way for self-optimized nonlinear wavefront shaping,advancing optical computation and information processing techniques.展开更多
Structural colors based on metasurfaces have very promising applications in areas such as optical image encryption and color printing.Herein,we propose a deep learning-enabled reverse design of polarization-selective ...Structural colors based on metasurfaces have very promising applications in areas such as optical image encryption and color printing.Herein,we propose a deep learning-enabled reverse design of polarization-selective structural color based on coding metasurface.In this study,the long short-term memory(LSTM)neural network is presented to enable the forward and inverse mapping between coding metasurface structure and corresponding color.The results show that the method can achieve 98%accuracy for the forward prediction of color and 93%accuracy for the inverse design of the structure.Moreover,a cascaded architecture is adopted to train the inverse neural network model,which can solve the nonuniqueness problem of the polarization-selective color reverse design.This study provides a new path for the application and development of structural colors.展开更多
With the progression of photolithography processes,the present technology nodes have attained 3 nm and even 2 nm,necessitating a transition in the precision standards for displacement measurement and alignment methodo...With the progression of photolithography processes,the present technology nodes have attained 3 nm and even 2 nm,necessitating a transition in the precision standards for displacement measurement and alignment methodologies from the nanometer scale to the sub-nanometer scale.Metasurfaces,owing to their superior light field manipulation capabilities,exhibit significant promise in the domains of displacement measurement and positioning,and are anticipated to be applied in the advanced alignment systems of lithography machines.This paper primarily provides an overview of the contemporary alignment and precise displacement measurement technologies employed in photolithography stages,alongside the operational principles of metasurfaces in the context of precise displacement measurement and alignment.Furthermore,it explores the evolution of metasurface systems capable of achieving nano/sub-nano precision,and identifies the critical issues associated with sub-nanometer measurements using metasurfaces,as well as the principal obstacles encountered in their implementation within photolithography stages.The objective is to provide initial guidance for the advancement of photolithography technology.展开更多
基金supported by National Natural Science Foundation of China(No.52025055 and 52275571)Basic Research Operation Fund of China(No.xzy012024024).
文摘Tilted metasurface nanostructures,with excellent physical properties and enormous application potential,pose an urgent need for manufacturing methods.Here,electric-field-driven generative-nanoimprinting technique is proposed.The electric field applied between the template and the substrate drives the contact,tilting,filling,and holding processes.By accurately controlling the introduced included angle between the flexible template and the substrate,tilted nanostructures with a controllable angle are imprinted onto the substrate,although they are vertical on the template.By flexibly adjusting the electric field intensity and the included angle,large-area uniform-tilted,gradient-tilted,and high-angle-tilted nanostructures are fabricated.In contrast to traditional replication,the morphology of the nanoimprinting structure is extended to customized control.This work provides a cost-effective,efficient,and versatile technology for the fabrication of various large-area tilted metasurface structures.As an illustration,a tilted nanograting with a high coupling efficiency is fabricated and integrated into augmented reality displays,demonstrating superior imaging quality.
基金supported by the National Natural Science Foundation of China(62374150)Natural Science Foundation of Henan(242300421216)+3 种基金C.Zheng acknowledges the support of China Postdoctoral Science Foundation(Grant No.2023TQ0296)the Postdoctoral Fellowship Program of CPSF(Grant No.GZC20232389)Y.Xie acknowledges the support of National Natural Science Foundation of China(62074011,62134008)Beijing Outstanding Young Scientist Program(JWZQ20240102009).
文摘Semiconductor optoelectronics devices,capable of converting electrical power into light or conversely light into electrical power in a compact and highly efficient manner represent one of the most advanced technologies ever developed,which has profoundly reshaped the modern life with a wide range of applications.In recent decades,semiconductor technology has rapidly evolved from first-generation narrow bandgap materials(Si,Ge)to the latest fourth-generation ultra-wide bandgap semiconductor(GaO,diamond,AlN)with enhanced performance to meet growing demands.Additionally,merging semiconductor devices with other techniques,such as computer assisted design,state-of-the-art micro/nano fabrications,novel epitaxial growth,have significantly accelerated the development of semiconductor optoelectronics devices.Among them,integrating metasurfaces with semiconductor optoelectronic devices have opened new frontiers for on-chip control of their electromagnetic response,providing access to previously inaccessible degrees of freedom.We review the recent advances in on-chip control of a variety of semiconductor optoelectronic devices using integrated metasurfaces,including semiconductor lasers,semiconductor light emitting devices,semiconductor photodetectors,and low dimensional semiconductors.The integration of metasurfaces with semiconductors offers wafer-level ultracompact solutions for manipulating the functionalities of semiconductor devices,while also providing a practical platform for implementing cuttingedge metasurface technology in real-world applications.
基金supports from National Key Research and Development Program of China(2021YFB2800703)Sichuan Province Science and Technology Support Program(25QNJJ2419)+1 种基金National Natural Science Foundation of China(U22A2008,12404484)Laoshan Laboratory Science and Technology Innovation Project(LSKJ202200801).
文摘Diatomic metasurfaces designed for interferometric mechanisms possess significant potential for the multidimensional manipulation of electromagnetic waves,including control over amplitude,phase,frequency,and polarization.Geometric phase profiles with spin-selective properties are commonly associated with wavefront modulation,allowing the implementation of conjugate strategies within orthogonal circularly polarized channels.Simultaneous control of these characteristics in a single-layered diatomic metasurface will be an apparent technological extension.Here,spin-selective modulation of terahertz(THz)beams is realized by assembling a pair of meta-atoms with birefringent effects.The distinct modulation functions arise from geometric phase profiles characterized by multiple rotational properties,which introduce independent parametric factors that elucidate their physical significance.By arranging the key parameters,the proposed design strategy can be employed to realize independent amplitude and phase manipulation.A series of THz metasurface samples with specific modulation functions are characterized,experimentally demonstrating the accuracy of on-demand manipulation.This research paves the way for all-silicon meta-optics that may have great potential in imaging,sensing and detection.
基金supported by the National Key Research and Development Program of China(2023YFB2804704)the National Natural Science Foundation of China(12174292,12374278,and 62105250).
文摘Advancements in mode-division multiplexing(MDM)techniques,aimed at surpassing the Shannon limit and augmenting transmission capacity,have garnered significant attention in optical fiber communica-tion,propelling the demand for high-quality multiplexers and demultiplexers.However,the criteria for ideal-mode multiplexers/demultiplexers,such as performance,scalability,compatibility,and ultra-compactness,have only partially been achieved using conventional bulky devices(e.g.,waveguides,grat-ings,and free space optics)—an issue that will substantially restrict the application of MDM techniques.Here,we present a neuro-meta-router(NMR)optimized through deep learning that achieves spatial multi-mode division and supports multi-channel communication,potentially offering scalability,com-patibility,and ultra-compactness.An MDM communication system based on an NMR is theoretically designed and experimentally demonstrated to enable simultaneous and independent multi-dataset transmission,showcasing a capacity of up to 100 gigabits per second(Gbps)and a symbol error rate down to the order of 104,all achieved without any compensation technologies or correlation devices.Our work presents a paradigm that merges metasurfaces,fiber communications,and deep learning,with potential applications in intelligent metasurface-aided optical interconnection,as well as all-optical pat-tern recognition and classification.
基金supported by the National Natural Science Foundation of China(Grant No.61775050).
文摘Mid-infrared(MIR)-polarized thermal emission has broad applications in areas such as molecular sensing,information encryption,target detection,and optical communication.However,it is difficult for objects in nature to produce polarized thermal emission.Moreover,simultaneously generating and modulating broadband MIR thermal emission with both circular and linear polarization is even more difficult.We present a chiral plasmonic metasurface emitter(CPME)composed of asymmetric L-shaped and I-shaped antennas.The CPME consists of In_(3)SbTe_(2)(IST)phase-change material(PCM)antennas,an Al_(2)O_(3) dielectric layer,and an Au substrate.It is demonstrated that the CPME can selectively emit polarized light with different polarization states.Numerical simulations show that the CPME can achieve full Stokes parameter control of MIR thermal emission.By changing the state of the PCM IST,the spectral emissivity of 0 deg,45 deg,90 deg,and 135 deg linearly polarized(LP)lights and left-handed/right-handed circularly polarized(LCP/RCP)lights can be adjusted.In the crystalline state,the CPME exhibits the total degree of polarization(DoP)greater than 0.5 in the wavelength range of 3.4 to 5.3μm,the degree of linear polarization(DoLP)greater than 0.4 in the range of 3.0 to 5.1μm,and the degree of circular polarization(DoCP)greater than 0.4 in the range of 4.5 to 5.6μm.The physical mechanism of polarized emission has been investigated fully based on the near-field intensity distribution and power loss distribution.Finally,the potential applications of the designed CPME in infrared polarization detection and antidetection are verified through numerical calculations.
文摘Multiple functional metasurfaces with high information capacity have attracted considerable attention from researchers.This study proposes a 2-bit tunable spin-decoupled coded metasurface designed for the terahertz band,which utilizes the tunable properties of Dirac semimetals(DSM)to create a novel multilayer structure.By incorporating both geometric and propagating phases into the metasurface design,we can effectively control the electromagnetic wave.When the Fermi level(EF)of the DSM is set at 6 meV,the electromagnetic wave is manipulated by the gold patch embedded in the DSM film,operating at a frequency of 1.3 THz.When the EF of the DSM is set at 80 meV,the electromagnetic wave is manipulated by the DSM patch,operating at a frequency of 1.4 THz.Both modes enable independent control of beam splitting under left-rotating circularly polarized(LCP)and rightrotating circularly polarized(RCP)wave excitation,resulting in the generation of vortex beams with distinct orbital angular momentum(OAM)modes.The findings of this study hold significant potential for enhancing information capacity and polarization multiplexing techniques in wireless communications.
文摘Compared to traditional single-frequency bound states in the continuum(BIC),dual-band BIC of-fers higher degrees of freedom and functionality.Moveover,implementing independent control of dual-band BICs can further enhance their advantages and maximize their performance.This study presents a design for a dielectric metasurface that achieves dual-band BICs in the terahertz(THz)range.By adjusting two asym-metry parameters of the structure,independent control of the two symmetry-protected BICs is achieved.Fur-thermore,by varying the shape of the silicon holes,the design's robustness to geometric variations is demon-strated.Finally,the test results show that the figures of merit(FOMs)for both BICs reach 109.This work provides a new approach for realizing and tuning dual-frequency BICs,offering expanded possibilities for applications in multimode lasers,nonlinear optics,multi-channel filtering,and optical sensing.
基金supported by the National Key R&D Program of China (Grant Nos. 2023YFC3010703, 2020YFB1708800, and 2023YFC3010705)。
文摘Optically transparent microwave absorbers and multi-band stealth have extensive potential applications in military defense and wireless communication fields, and thus have attracted considerable attention. So far,most related work is based on inorganic transparent conductive metasurfaces. In this paper, we proposed and experimentally demonstrated a flexible, broadband and optically transparent microwave absorber using an organic metasurface. The metasurface absorber is composed of a sandwich structure, in which electric resonances and magnetic resonances are induced resulting in broadband absorption. A spraying process was developed to prepare this metasurface absorber. Both simulations and experiment show that this metasurface has broadband microwave absorption and good optical transparency. We further found that by using a multi-layer structure, visible, radar,and infrared stealth(multi-band stealth) can be achieved simultaneously. With the advantages of excellent foldability and low cost, the proposed metasurfaces may have applications in military and wireless communication fields.
基金supported by the National Natural Science Foundation of China(Grant Nos.12274313,62275184,and 62411540033)Collaborative Innovation Center of Suzhou Nano Science and Technology,Suzhou Basic Research Project(Grant No.SJC2023003)+1 种基金the Gusu Leading Talent Plan for Scientific and Technological Innovation and Entrepreneurship(Grant No.ZXL2024400)the Priority Academic Program Development of Jiangsu Higher Education Institutions.
文摘Perfect anomalous reflections have been demonstrated in optical phase gradient metasurfaces(PGMs),but they suffer from single-frequency(narrow-band)response due to the intrinsic limitation of natural geometric periodicity.Here,we provide both numerical and analytical evidence that a depth gradient metasurface can achieve discrete ultra-broadband perfect anomalous reflection in the microwave range in the absence of geometric periodicity.Remarkably,by adjusting the operating frequency of the incident wave,the same effect can be steadily obtained via a physically equivalent phase periodicity in the PGM.Based on this mechanism,a perfect retroreflector with a broadband response ranging from 1 GHz to 40 GHz is realized.Our work has promising applications in communication,source tracking,and military satellites.
文摘Chirality is a widespread physical phenomenon in nature,but natural materials often exhibit weak chiroptical responses.Recent advances have used chiral metasurfaces to enhance these responses,with applications in holographic imaging,chiral molecule detection,and circularly polarized lasers.However,most chiral metasurfaces exhibit strong chiroptical responses only at fixed wavelengths,which limits their suitability for wavelength-tunable optical devices.We address this by designing a silicon-GST(silicon-Ge2Sb2Te5)hybrid metasurface with asymmetric cross-shaped units that support multi-wavelength resonances,achieving broadband and dynamically tunable CD(circular dichroism).In the amorphous phase,GST enables CD>0.7 in the range of 2,137 nm to 2,657 nm,with a PER(polarization extinction ratio)up to 38 dB.Upon transition to the crystalline phase,CD enhances with a redshift,and the sign of CD reverses.This enables dynamic wavelength tuning of broadband CD via the phase transition of GST.
基金financial support received from the Shanghai Pujiang Program(23PJ1406500).
文摘A laser-induced periodic surface structure(LIPSS),which can be easily produced by femtosecond laser ablation,is a unique nanostructure with a visible refractive color that can be controlled by altering its orientation and uniformity,making it suitable for use in colorful marking,camouflage,and anticounterfeiting measures.However,single-mode information camouflage can no longer meet increasingly higher-level security requirements.Therefore,metasurfaces offer revolutionary solutions.In this study,conceptual metasurfaces of pure tungsten are theoretically proposed and verified using hierarchical LIPSS/nanoparticle(NP)nanostructures as meta-atoms.The anisotropy of the LIPSS nanostructure enables polarization-sensitive optical modulation,whereas the spatial configuration,NPs size,and period of LIPSS in the LIPSS/NP meta-atoms provide flexibility for tailoring broadband optical responses.In xpolarization,the LIPSS/NP meta-atom system provides more visible colors and divergent infrared absorption(emission)than in y-polarized and unpolarized modes,paving the way for vividly colorful polarization-sensitive displays and information camouflage in infrared bands.A simplified rendition of the world-famous painting“The Starry Night”by Van Gogh is used as a proof-of-concept.Preliminary experimental results are presented,based on which the feasibility and challenges for laser nanomanufacturing of the proposed conceptual metasurfaces are discussed,aiming to provide inspiration for the development of novel metasurfaces through interdisciplinary studies.
基金support by the Advanced Integrated Optoelectronics Facility at Tianjin University
文摘Metasurfaces composed of two-dimensional nanopillar arrays can manipulate light fields in desirable ways and exhibit the unique advantage of beam steering.Here,we experimentally demonstrate a metasurface-based wide-angle broadband all-dielectric blazed grating with an extreme incident angle of up to 80°,which is achieved by optimizing the wide-angle phase shifts and transmissivities of the unit cells.It exhibits a maximum diffraction efficiency of 72%and a high average efficiency of 64%over a wide range of incident angles from−80° to 45° at 1.55μm.Moreover,the proposed grating has a broad bandwidth of 200 nm(1.45-1.65μm),and average efficiencies of more than 50%can be achieved experimentally over the same incidence angles.Our results may pave the way for the creation of novel and efficient flat optical devices for wavefront control.
基金support of the U.S.Civilian Research and Development Foundation“CRDF Global”(Grant No.G-202401-71609)。
文摘Almost half of the solar energy that reaches a silicon solar cell is lost due to the reflection at the silicon–air interface.Antireflective coatings aim to suppress the reflection and thereby to increase the photogenerated current.The conventional few-layer dielectric antireflective coatings may significantly boost the transmission of solar light,but only in a narrow wavelength range.Using forward and inverse design optimization algorithms,we develop the designs of antireflective coatings for silicon solar cells based on single-layer silicon metasurfaces(periodic subwavelength nanostructure arrays),leading to a broadband reflection suppression in the wavelength range from 500 to 1200 nm for the incidence angles up to 60 deg.The reflection averaged over the visible and near-infrared spectra is at the record-low level of approximately 2%and 4.4%for the normal and oblique incidence,respectively.The obtained results demonstrate the potential of machine learning–enhanced photonic nanostructures to outperform the classical antireflective coatings.
基金Project supported by the Open Fund of Wuhan National Research Center for Optoelectronics(Grant No.2022WNLOKF012)the National College Students Innovation Innovation and Entrepreneurship Training Program(Grant No.2023102930147).
文摘A broadband polarization-independent terahertz multifunctional coding metasurface based on topological optimization using liquid crystal(LC)is proposed.The metasurface can achieve reconfigurability for beam steering and vortex beam generation within a frequency range of 0.68 THz–0.72 THz.Firstly,the metasurface unit is topologically optimized using the non-dominant sequencing genetic algorithms(NSGA-II)multi-objective optimization algorithm.By applying the LC’s electrically tunable refractive index properties,the metasurface unit enables polarization-independent 2-bit coding within a frequency range of 0.68 THz–0.72 THz.Then,based on the designed metasurface unit,the array arrangement of the metasurface is reverse-designed to achieve beam steering and vortex beam generation.The results show that,for beam steering,not only can polarization-independent steering of both single-and multi-beam be achieved within the 35°elevation angle range,but also independent control of the target angle of each beam in the multi-beam steering.For vortex beam generation,the metasurfaces can achieve the generation of single-and multi-vortex beams with topological charges l=±1,±2 within the 35elevation angle range,and the generation angles of each vortex beam in the multi-vortex beam can be independently controlled.This provides flexibility and diversity in the generation of vortex beams.Therefore,the proposed terahertz LC metasurface can realize flexible control of reconfigurable functions and has certain application prospects in terahertz communication,phased array radar,and vortex radar.
基金the Japan Society for the Promotion of Science(JSPS),the Grants-in-Aid for Scientific ResearchJSPS Bilateral Joint Research Projects between Japan and Lithuania+2 种基金partially supported by the PRE-STO and the Japan Science and Technology Agency(JST)(JPMJPR22B6)grateful for the startup funding of the Nanotechnology facility at Swinburne and support for exploratory projects on IR sensorssupported by the ARIM of MEXT in Japan(JPMXP1223HK0070).
文摘High-entropy alloys(HEAs)are promising materials for photonic applications.In such applications,permittivity is essential for numerical studies.In this work,we experimentally determine the complex permittivity of an HEA composed of five noble metals-Au,Ag,Cu,Pd,and Pt.The measurements are conducted across a broad wavelength spectrum,spanning the ultraviolet,visible,and mid-infrared regions.The experiments,numerical simulations of reflection spectra,and analysis of absorption and scattering cross-sections reveal the potential for fabricating perfect absorber and emitter metasurfaces using this noble HEA.In addition,crystallography studies clearly show the formation of a uniform material.The lattice constant and electron work function of the alloy are found to be 0.396 nm and(4.8±0.4)eV,respectively-results indicate that the formed HEA alloy is well mixed.
文摘Aberration-corrected focus scanning is crucial for high-precision optics,but the conventional optical systems rely on bulky and complicated dynamic correctors.Recently,Shiyi Xiao's group proposed a method using two rotating cascaded transmissive metasurfaces for adaptive aberration correction in focus scanning.The optimized phase profiles enable precise control of the focal position for scanning custom-curved surfaces.This concept was experimentally validated by two allsilicon meta-devices in the terahertz regime,paving the way for high-precision and compact optical devices in various applications.
基金support from the Biotechnology and Biological Council Doctoral Training Programme(BBSRC DTP)the support from the Royal Society and Wolfson Foundation(RSWF\FT\191022).
文摘Nonlinear wavefront shaping is crucial for advancing optical technologies,enabling applications in optical computation,information processing,and imaging.However,a significant challenge is that once a metasurface is fabricated,the nonlinear wavefront it generates is fixed,offering little flexibility.This limitation often necessitates the fabrication of different metasurfaces for different wavefronts,which is both time-consuming and inefficient.To address this,we combine evolutionary algorithms with spatial light modulators(SLMs)to dynamically control wavefronts using a single metasurface,reducing the need for multiple fabrications and enabling the generation of arbitrary nonlinear wavefront patterns without requiring complicated optical alignment.We demonstrate this approach by introducing a genetic algorithm(GA)to manipulate visible wavefronts converted from near-infrared light via third-harmonic generation(THG)in a silicon metasurface.The Si metasurface supports multipolar Mie resonances that strongly enhance light-matter interactions,thereby significantly boosting THG emission at resonant positions.Additionally,the cubic relationship between THG emission and the infrared input reduces noise in the diffractive patterns produced by the SLM.This allows for precise experimental engineering of the nonlinear emission patterns with fewer alignment constraints.Our approach paves the way for self-optimized nonlinear wavefront shaping,advancing optical computation and information processing techniques.
基金supported by the National Natural Science Foundation of China(Grant Nos.62375137 and 62175114).
文摘Structural colors based on metasurfaces have very promising applications in areas such as optical image encryption and color printing.Herein,we propose a deep learning-enabled reverse design of polarization-selective structural color based on coding metasurface.In this study,the long short-term memory(LSTM)neural network is presented to enable the forward and inverse mapping between coding metasurface structure and corresponding color.The results show that the method can achieve 98%accuracy for the forward prediction of color and 93%accuracy for the inverse design of the structure.Moreover,a cascaded architecture is adopted to train the inverse neural network model,which can solve the nonuniqueness problem of the polarization-selective color reverse design.This study provides a new path for the application and development of structural colors.
基金supported by the National Natural Science Foundation of China(No.62222511)National Key Research and Devel-opment Program of China(No.2023YFF0613000)+1 种基金Natural Science Foundation of Zhejiang Province China(No.LR22F050006)STI 2030-Major Projects(No.2021ZD0200401).
文摘With the progression of photolithography processes,the present technology nodes have attained 3 nm and even 2 nm,necessitating a transition in the precision standards for displacement measurement and alignment methodologies from the nanometer scale to the sub-nanometer scale.Metasurfaces,owing to their superior light field manipulation capabilities,exhibit significant promise in the domains of displacement measurement and positioning,and are anticipated to be applied in the advanced alignment systems of lithography machines.This paper primarily provides an overview of the contemporary alignment and precise displacement measurement technologies employed in photolithography stages,alongside the operational principles of metasurfaces in the context of precise displacement measurement and alignment.Furthermore,it explores the evolution of metasurface systems capable of achieving nano/sub-nano precision,and identifies the critical issues associated with sub-nanometer measurements using metasurfaces,as well as the principal obstacles encountered in their implementation within photolithography stages.The objective is to provide initial guidance for the advancement of photolithography technology.
