The frequency characteristics of free oscillation magnetron（FOM） and injection-locked magnetron（ILM） are theoretically investigated.By using the equal power voltage obtained from the experiment data,expressions of...The frequency characteristics of free oscillation magnetron（FOM） and injection-locked magnetron（ILM） are theoretically investigated.By using the equal power voltage obtained from the experiment data,expressions of the frequency and radio frequency（RF） voltage of FOM and ILM,as well as the locking bandwidth,on the anode voltage and magnetic field are derived.With the increase of the anode voltage and the decrease of the magnetic field,the power and its growth rate increase,while the frequency increases and its growth rate decreases.The theoretical frequency and power of FOM agree with the particle-in-cell（PIC） simulation results.Besides,the theoretical trends of the power and frequency with the anode voltage and magnetic field are consistent with the experimental results,which verifies the accuracy of the theory.The theory provides a novel calculation method of frequency characteristics.It can approximately analyze the power and frequency of both FOM and ILM,which promotes the industrial applications of magnetron and microwave energy.展开更多
In this paper,three magnetrons with each of them having specifically designed multiple coupling ports,which deliver specific power distribution for developing a magnetron array based on efficient phase locking between...In this paper,three magnetrons with each of them having specifically designed multiple coupling ports,which deliver specific power distribution for developing a magnetron array based on efficient phase locking between them,are proposed to produce high powerμs-level pulses.To demonstrate the effectiveness of the magnetron with one and two coupling ports as a unit for efficient phase locking,we designed experimentally the coupling ports delivering~10%(the power distribution ratio)of the output power of the magnetron for coupling with other magnetron units.The effect of one and two coupling ports on the operating capability,including the power distribution ratio,anode current and frequency,is demonstrated by establishing an equivalent experimental model which can characterize an ideal operation of the array.The experimental results show that the power distribution ratio is~9%for the magnetron with one coupling port,and~12.5%(coupling port 1,2)for the magnetron with two coupling ports.This shows good uniformity of the coupling capability of the two coupling ports and provides guidance for optimizing the power distribution ratio of multiport magnetron units,which are critical for efficient phase locking in the proposed array in future and higher power arrays.展开更多
High-entropy materials possess high hardness and strong wear resistance,yet the key bottleneck for their practical applications is the poor corrosion resistance in harsh environments.In this work,the high-entropy nitr...High-entropy materials possess high hardness and strong wear resistance,yet the key bottleneck for their practical applications is the poor corrosion resistance in harsh environments.In this work,the high-entropy nitride(HEN)coatings of(MoNbTaTiZr)1-x Nx(x=0-0.47)were fabricated using a hybrid di-rect current magnetron sputtering technique.The research focus was dedicated to the effect of nitrogen content on the microstructure,mechanical and electrochemical properties.The results showed that the as-deposited coatings exhibited a typical body-centered cubic(BCC)structure without nitrogen,while the amorphous matrix with face-centered cubic(FCC)nanocrystalline grain was observed at x=0.17.Further increasing x in the range of 0.35-0.47 caused the appearance of polycrystalline FCC phase in structure.Compared with the MoNbTaTiZr metallic coating,the coating containing nitrogen favored the high hard-ness around 13.7-32.4 GPa,accompanied by excellent tolerance both against elastic and plastic deforma-tion.Furthermore,such N-containing coatings yielded a low corrosion current density of about 10−8-10−7 A/cm^(2) and high electrochemical impedance of 10^(6)Ωcm^(2) in 3.5 wt.%NaCl solution,indicating the supe-rior corrosion resistance.The reason for the enhanced electrochemical behavior could be ascribed to the spontaneous formation of protective passive layers over the coating surface,which consisted of the domi-nated multi-elemental oxides in chemical stability.Particularly,noted that the(MoNbTaTiZr)_(0.83) N0.17 coat-ing displayed the highest hardness of 32.4±2.6 GPa and H/E ratio at 0.09,together with remarkable cor-rosion resistance,proposing the strongest capability for harsh-environmental applications required both good anti-wear and anti-corrosion performance.展开更多
Perovskite solar cells(PSCs) have become a hot topic in the field of renewable energy due to their excellent power conversion efficiency and potential for low-cost manufacturing. The hole transport layer(HTL), as a ke...Perovskite solar cells(PSCs) have become a hot topic in the field of renewable energy due to their excellent power conversion efficiency and potential for low-cost manufacturing. The hole transport layer(HTL), as a key component of PSCs,plays a crucial role in the cell's overall performance. Magnetron sputtering NiO_(x) has attracted widespread attention due to its high carrier mobility, excellent stability, and suitability for large-scale production. Herein, an insightful summary of the recent progress of magnetron sputtering NiO_(x) as the HTL of PSCs is presented to promote its further development. This review summarized the basic properties of magnetron sputtering NiO_(x) thin film, the key parameters affecting the optoelectronic properties of NiO_(x) thin films during the magnetron-sputtering process, and the performance of the corresponding PSCs. Special attention was paid to the interfacial issues between NiO_(x) and perovskites, and the modification strategies were systematically summarized. Finally, the challenges of sputtering NiO_(x) technology and the possible development opportunities were concluded and discussed.展开更多
ZrCoRE(RE denotes rare earth elements)non-evaporable getter films have significant applications in vacuum packaging of micro-electro mechanical system devices because of their excellent gas adsorption performance,low ...ZrCoRE(RE denotes rare earth elements)non-evaporable getter films have significant applications in vacuum packaging of micro-electro mechanical system devices because of their excellent gas adsorption performance,low activation temperature and environmental friendliness.The films were deposited using DC magnetron sputtering with argon and krypton gases under various deposition pressures.The effects of sputtering gas type and pressure on the morphology and hydrogen adsorption performance of ZrCoRE films were investigated.Results show that the films prepared in Ar exhibit a relatively dense structure with fewer grain boundaries.The increase in Ar pressure results in more grain boundaries and gap structures in the films.In contrast,films deposited in Kr display a higher density of grain boundaries and cluster structures,and the films have an obvious columnar crystal structure,with numerous interfaces and gaps distributed between the columnar structures,providing more paths for gas diffusion.As Kr pressure increases,the film demonstrates more pronounced continuous columnar structure growth,accompanied by deeper and wider grain boundaries.This structural configuration provides a larger specific surface area,which significantly improves the hydrogen adsorption speed and capacity.Consequently,high Ar and Kr pressures are beneficial to improve the adsorption performance.展开更多
ZnO thin films with varying Ta concentrations were fabricated through magnetron sputtering.The crystallinity and surface morphology of the ZnO films are significantly influenced by the incorporation of Ta,as evidenced...ZnO thin films with varying Ta concentrations were fabricated through magnetron sputtering.The crystallinity and surface morphology of the ZnO films are significantly influenced by the incorporation of Ta,as evidenced by the X-ray diffraction and scanning electron microscopy results.The lattice constants,as determined by X-ray diffraction,contradict the disparity in Ta and Zn ion radii,which is attributed to the impact of interstitial defects.This inconsistency introduces variations in carrier concentration in this experiment compared with prior studies.Subsequent exploration of the luminescent characteristics and emission mechanism of defect levels in Ta-doped ZnO films was conducted through photoluminescence.Furthermore,the factors influencing the bandgap are discussed.展开更多
With the rapid advancement of 5G communication technology,increasingly stringent demands are placed on the performance and functionality of phase change switches.Given that RF and microwave signals exhibit characteris...With the rapid advancement of 5G communication technology,increasingly stringent demands are placed on the performance and functionality of phase change switches.Given that RF and microwave signals exhibit characteristics of high frequency,high speed,and high precision,it is imperative for phase change switches to possess fast,accurate,and reliable switching capabilities.Moreover,wafer-level compositional homogeneity and resistivity uniformity during semiconductor manufacturing are crucial for ensuring the yield and reliability of RF switches.By controlling magnetron sputter of GeTe through from four key parameters(pressure,power,Ar flow,and post-annealing)and incorporating elemental proportional compensation in the target,we achieved effective modulation over GeTe uniformity.Finally,we successfully demonstrated the process integration of GeTe phase-change RF switches on 6-inch scaled wafers.展开更多
Widely used spin-coated nickle oxide (NiOx) based perovskite solar cells often suffer from severe interfacial reactions between the NiOxand adjacent perovskite layers due to surface defect states,which inherently impa...Widely used spin-coated nickle oxide (NiOx) based perovskite solar cells often suffer from severe interfacial reactions between the NiOxand adjacent perovskite layers due to surface defect states,which inherently impair device performance in a long-term view,even with surface molecule passivation.In this study,we developed high-quality magnetron-sputtered NiOxthin films through detailed process optimization,and compared systematically sputtered and spin-coated NiOxthin film surfaces from materials to devices.These sputtered NiOxfilms exhibit improved crystallinity,smoother surfaces,and significantly reduced Ni3+or Ni vacancies compared to their spin-coated counterparts.Consequently,the interface between the perovskite and sputtered NiOxfilm shows a substantially reduced density of defect states.Perovskite solar cells (PSCs) fabricated with our optimally sputtered NiOxfilms achieved a high power conversion efficiency (PCE) of up to 19.93%and demonstrated enhanced stability,maintaining 86.2% efficiency during 500 h of maximum power point tracking under one standard sun illumination.Moreover,with the surface modification using (4-(2,7-dibromo-9,9-dimethylacridin-10(9H)-yl)butyl)p hosphonic acid (DMAcPA),the device PCE was further promoted to 23.07%,which is the highest value reported for sputtered NiOxbased PSCs so far.展开更多
In this work,we present an innovative method for fabricating high-performance proton-conductive fuel cells(PCFCs)by combining magnetron sputtering and flashlight sintering(FLS)techniques.BaZr_(0.8)Y_(0.2)O_(3–δ)(BZY...In this work,we present an innovative method for fabricating high-performance proton-conductive fuel cells(PCFCs)by combining magnetron sputtering and flashlight sintering(FLS)techniques.BaZr_(0.8)Y_(0.2)O_(3–δ)(BZY20)electrolyte thin-films are successfully prepared by improving the crystallinity while maintaining the stoichiometry.All components of PCFC,Ni-YSZ anode,BZY20 electrolyte and Pt-GDC cathode are fabricated by sequentially sputtering them onto an AAO substrate.Electrolytic sintering is performed at 550 and 650 V conditions using FLS,effectively solving the Ba evaporation problem encountered in conventional thermal sintering methods.XRD analysis confirms that the perovskite structure is retained,and crystallinity is improved in the FLS samples.Furthermore,FE-SEM and EDS analyses confirm the uniform elemental distribution and consistent thickness of the FLS-treated electrolyte.An optimized PCFC unit cell with FLS-treated electrolyte exhibits a peak power density of 200.0 mW cm^(-2) at 500℃ and an ohmic resistance of 376.0 mΩ cm^(-2).These results suggest that the combination of magnetron sputtering and FLS techniques is a promising approach for fabricating highperformance thin-film PCFCs.展开更多
Silver is an elegant white precious metal,but it is easily oxidized by O3,SO2,and H2S in the air,turning yellow or dark,which affects its decorative effect.The existing silver coating,primarily prepared through the el...Silver is an elegant white precious metal,but it is easily oxidized by O3,SO2,and H2S in the air,turning yellow or dark,which affects its decorative effect.The existing silver coating,primarily prepared through the electroplating process,poses serious environmental pollution problems.It is necessary to seek new,green,and environmentally friendly coating processes while also enhancing the color palette of silver jewelry coatings.Titanium film layers were deposited on Ag925 and Ag999 surfaces using magnetron sputtering coating technology.The effects of sputtering time,substrate surface state,reaction gas type and time,and film thickness on the color of the film layers were studied,and the anti discoloration performance of the obtained film layers under the optimal process was tested.The experimental results show that when the sputtering time varies from 5 to 10 minutes,injecting argon,oxygen,and nitrogen into the coating chamber yields rich colors such as purple with a red tint,blue,yellow green,yellowish purple,and blue purple.The precise control of gas injection time has a significant impact on the color of the film layer.In terms of anti tarnish performance,the film showed good stability in the artificial sweat immersion test.From an environmental perspective,the magnetron sputtering titanium film process has no harmful gas or liquid emissions,which aligns with the sustainable development trend of the jewelry industry and holds great promise for application.This study has improved the visual effect and practical performance of the product,providing important theoretical basis and experimental data support for the application of environmentally friendly silver surface vacuum magnetron sputtering titanium thin film coating technology.展开更多
Sm–Co-based films play an irreplaceable role in special applications due to their high curie temperature and magnetocrystalline anisotropic energy,especially in heat-assisted magnetic recording(HAMR),but the complex ...Sm–Co-based films play an irreplaceable role in special applications due to their high curie temperature and magnetocrystalline anisotropic energy,especially in heat-assisted magnetic recording(HAMR),but the complex composition of Sm–Co phase and unclear synergistic coupling mechanisms of multi-elemental doping become the challenges to enhance the properties.In this work,a novel strategy combining magnetron sputtering and a high-throughput experiment method is applied to solve the above-mentioned problems.Fe/Cu co-doping highly increases the remanence while maintaining a coercivity larger than 26 kOe,leading to an enhancement of the magnetic energy product to 18.1 MGOe.X-ray diffraction(XRD)and high-resolution transmission electron microscope(HRTEM)reveals that SmCo_(5) phase occupies the major fraction,with Co atoms partially substituted by Fe and Cu atoms.In situ Lorentz transmission electron microscopy(LTEM)observations show that the Sm(Co,Cu)5 phase effectively prohibits domain wall motions,leading to an increase of coercivity(H_(c)).Fe doping increases the low saturation magnetization(M_(s))and low remanence(Mr)due to the Fe atom having a higher saturation magnetic moment.The magnetization reversal behaviors are further verified by micromagnetic simulations.Our results suggest that Sm–Co-based films prepared via Fe/Cu co-doping could be a promising candidate for high-performed HAMR in the future.展开更多
Ammonium dinitramide(ADN),as a high-energy oxidizer widely applied in the field of rocket and missile propellants,has a prominent issue of high hygroscopicity due to its strong polarity.The previous coating encapsulat...Ammonium dinitramide(ADN),as a high-energy oxidizer widely applied in the field of rocket and missile propellants,has a prominent issue of high hygroscopicity due to its strong polarity.The previous coating encapsulation methods have struggled to address the problems of uneven coating and polarity mismatch.This research innovatively introduces perfluorooctanoic acid(PFOA)as a polar transition intermediate layer.Utilizing the polarity of one end of it to adsorb on the surface of ADN through hydrogen bonds,the problem of polarity mismatch is effectively overcome.Meanwhile,the vibrational magnetron sputtering process has been first applied in the energetic field,with a special vibrating abutment enhancing ADN particle fluidity to solve coating non-uniformity,thus preparing prilled ADN@PFOA@PTFE core-dual-shell composites.Performance tests reveal that this composite material possesses excellent hydrophobic and anti-hygroscopic properties.When left at 25℃and 75%RH for 3 days,moisture absorption was reduced by more than 90%compared to pure ADN.Simultaneously,its thermal stability,heat release performance,and combustion performance have been improved.The research achievements optimize the storage conditions of ADN in the application of rocket and missile propellants,providing solid support and broad development prospects for technological innovation in military fields.展开更多
Vanadium redox flow batteries(VRFBs)hold significant promise for large-scale energy storage applications.However,the sluggish reaction kinetics on the electrode surface considerably limit their performance.Implementat...Vanadium redox flow batteries(VRFBs)hold significant promise for large-scale energy storage applications.However,the sluggish reaction kinetics on the electrode surface considerably limit their performance.Implementation of efficient surface modification on carbon electrodes through an economically viable production method is crucial for the practical application of VRFBs.Herein,a nano-carbon layer with morphology of fine nanoparticles(<90 nm)and rich oxygen functional groups was constructed on carbon felts by unbalanced magnetron sputtering coupled with thermal treatment.This modified carbon felt served as both anode and cathode in cell,enabling an improved wettability of electrolyte and high reversibility of the active mass,and promoted kinetics of redox reactions.The optimized carbon felt,achieved through one hour of deposition(1C-CF),demonstrated outstanding electrochemical performance in a single cell.The cell exhibited a high energy efficiency of 82.4%at a current density of 100 m A cm^(-2)and maintained 71.8%at a high current density of 250 mA cm^(-2).Furthermore,the energy efficiency remained at 77.2%during long-term cycling(450 cycles)at a current density of 150 mA cm^(-2),indicating good electrode stability.Our results shed light on the surface design of carbon felt electrodes for the broad application interest of VRFB energy storage systems.展开更多
Gadolinium(Gd)and yttrium(Y)elements were added to the composition design and sputtering process to create a composite artificial ligament with enhanced mechanical and frictional wear performance.Due to the oxidative ...Gadolinium(Gd)and yttrium(Y)elements were added to the composition design and sputtering process to create a composite artificial ligament with enhanced mechanical and frictional wear performance.Due to the oxidative and adhesive wear mechanisms,MgZnCaY metallic glass(MG)films exhibit a reduced scratch depth,a lower friction coefficient,and better wear resistance than MgZnCaGd.The wear coefficients of MgZnCaGd and MgZnCaY are 1.45±0.04 and 0.99±0.068,respectively.MgZnCaY MG coating has a higher hardness(8.64±0.01 GPa)and Young’s modulus(144.67±1.57 GPa)than MgZnCaGd MG coating(4.90±1.86 GPa,110.4±23.2 GPa).The MgZnCaY composite-coated artificial ligament has 49.02 MPa and 18.54% elongation at break,compared to 49.86 MPa and 15.19% for the MgZnCaGd coating.The results of the mechanical test shows that the coated composite artificial ligament allows for greater fracture elongation and appropriate stiffness during the stretching process.Because of the formation of Y_(2)O_(3),which can strengthen the interfacial bonding strength between the adhesive layer and the ligament matrix,increase the adherence of oxides,and reduce the likelihood of oxide delamination,artificial ligaments coated with MgZnGaY also perform exceptionally well mechanically.The current research findings provide new insights for the design of composite artificial ligaments and present promising materials for applications in the field of artificial ligaments.展开更多
Low-cost and large-area uniform amorphous Ga_(2)O_(3)(α-Ga_(2)O_(3))solar-blind ultraviolet(UV)detectors have garnered significant attention in recent years.Oxygen vacancy(VO)defects are generally considered as the p...Low-cost and large-area uniform amorphous Ga_(2)O_(3)(α-Ga_(2)O_(3))solar-blind ultraviolet(UV)detectors have garnered significant attention in recent years.Oxygen vacancy(VO)defects are generally considered as the predominant defects affecting the detector performance.Reducing VOconcentration generally results in both low dark current and low photo current,significantly limiting further improvement of the photo-to-dark current ratio(PDCR)parameter.Herein,a delicately optimized atomic layer deposition(ALD)method is revealed having the capability to break through the trade-off in a-Ga_(2)O_(3),achieving both low dark current and high photocurrent simultaneously.For a clear demonstration,a-Ga_(2)O_(3)contrast sample is prepared by magnetron sputtering and compared as well.Combined tests are performed including xray photoelectron spectroscopy,photoluminescence,electron paramagnetic resonance and Fourier-transform infrared spectroscopy.It is found that ALDα-Ga_(2)O_(3)has a lower VOconcentration,but also a lower dangling bonds concentration which are strong non-irradiation recombination centers.Therefore,decrease of dangling bonds is suggested to compensate for the low optical gain induced by low VOconcentration and promote the PDCR to~2.06×10^(6).Our findings firstly prove that the dangling bonds also play an important role in determining the a-Ga_(2)O_(3)detection performance,offering new insights for further promotion ofα-Ga_(2)O_(3)UV detector performance via dual optimization of dangling bonds and VO.展开更多
Planar-structured amorphous InGaZnO(a-IGZO)film-based UV photodetectors with different ITO interdigitated electrode spacings were developed on flexible PI substrates via radio frequency magnetron sputtering and non-li...Planar-structured amorphous InGaZnO(a-IGZO)film-based UV photodetectors with different ITO interdigitated electrode spacings were developed on flexible PI substrates via radio frequency magnetron sputtering and non-lithographic fabrication processes.The effects of oxygen flow rate on the surface morphology,electrical transport,and chemical bonding properties of the a-IGZO films were systematically investigated to optimize the performance of the flexible detector.The average transmittance of the flexible a-IGZO photodetector is over 90%in the visible spectral range with a large photo-to-dark current ratio of 3.9×10^(3)under 360 nm UV illumination.The photocurrent of the detectors increases with decreasing the electrode spacing,which is attribute to formation of higher electrical field and drifting more electron-hole pairs to the electrode with shortening the electrode spacing.Under a UV illumination intensity of 9.1 mW/cm~2,the highest responsivity and detectivity of the photodetector with the electrode spacing of 0.4 mm reach 62.1 mA/W and2.83×10^(11)cm·Hz^(1/2)·W^(-1)at 11 V bias voltage,respectively.The flexible detector exhibits enhanced photoresponse performance with the rise and decay time of 2.02 and 0.94 s,respectively.These results can be used in a practical scheme to design and realize the a-IGZO based UV photodetectors with excellent transparency and flexibility for wearable UV monitoring applications.展开更多
The discharge and plasma characteristics of Ag magnetron sputtering discharge operated near the electron series resonance(ESR)oscillation,which was excited using the driving frequency of 27.12 MHz,was investigated.The...The discharge and plasma characteristics of Ag magnetron sputtering discharge operated near the electron series resonance(ESR)oscillation,which was excited using the driving frequency of 27.12 MHz,was investigated.The imaginary part of impedance was found to undergo a transition from capacitive to inductive on varying radio-frequency(RF)power,and the conditions for the ESR excitation were satisfied.The current–voltage(I–V)characteristic of discharge showed that the lower discharge voltage with higher current was an important feature of RF magnetron sputtering operated near the ESR oscillation,which was caused by the small impedance Z originated from the mutual compensation between the sheath capacitive reactance and the plasma inductive reactance.The higher electron temperature,ion flux density and ion energy as well as the moderate electron density were obtained.The interaction of higher energy ions on substrate surface improved the crystallographic quality of Ag films.Therefore,the 27.12 MHz magnetron sputtering operated near the ESR oscillation has better deposition characteristics than that of commercial 13.56 MHz RF magnetron sputtering.展开更多
Ensuring high electrocatalytic performance simultaneously with low or even no precious-metal usage is still a big challenge for the development of electrocatalysts toward oxygen evolution reaction(OER)in anion exchang...Ensuring high electrocatalytic performance simultaneously with low or even no precious-metal usage is still a big challenge for the development of electrocatalysts toward oxygen evolution reaction(OER)in anion exchange membrane water electrolysis.Here,homogeneous high entropy oxide(HEO)film is in-situ fabricated on nickel foam(NF)substrate via magnetron sputtering technology without annealing process in air,which is composed of many spinel-structured(FeCoNiCrMo)_(3)O_(4) grains with an average particle size of 2.5 nm.The resulting HEO film(abbreviated as(FeCoNiCr-Mo)_(3)O_(4))exhibits a superior OER performance with a low OER overpotential of 216 mV at 10 mA cm^(–2) and steadily operates at 100 mA cm^(–2) for 200 h with a decay of only 272μV h^(–1),which is far better than that of commercial IrO_(2) catalyst(290 mV,1090μV h^(–1)).Tetramethylammonium cation(TMA^(+))probe experiment,activation energy analysis and theoretical calculations unveil that the OER on(FeCoNiCrMo)_(3)O_(4) follows an adsorbate evolution mechanism pathway,where the energy barrier of rate-determining step for OER on(FeCoNiCrMo)_(3)O_(4) is substantially lowered.Also,methanol molecular probe experiment suggests that a weakened ^(*)OH bonding on the(FeCoNiCrMo)_(3)O_(4) surface and a rapid deprotonation of ^(*)OH,further enhancing its OER performance.This work provides a feasible solution for designing efficient high entropy oxides electrocatalysts for OER,accelerating the practical process of water electrolysis for H2 production.展开更多
Ta-doped SnO_(2)(TTO)is a suitable candidate to replace transparent conductive oxide(TCO)composed of expensive indium used for optoelectronics and silicon heterojunction solar cells fabricated below 200℃.However,TTO ...Ta-doped SnO_(2)(TTO)is a suitable candidate to replace transparent conductive oxide(TCO)composed of expensive indium used for optoelectronics and silicon heterojunction solar cells fabricated below 200℃.However,TTO films fabricated by sputtering at low temperature still demonstrate too high resistance and optical absorptance for application in industry.In this study,we investigate the influence of sputtering ambient on the optoelectrical properties of TTO films.The addition of hydrogen and oxygen to argon during sputtering leads to a large improvement in the optoelectrical properties of TTO films.The best TTO film has a low average absorptance of 1.9%and a low resistance of 3.8×10^(-3)Ω·cm with a high carrier density of 9.3×10^(19)cm^(-3)and mobility of 17.8 cm^(2)·V^(-1)·s^(-1).The micros tructural and compositional properties of TTO films were characterized using x-ray diffraction,x-ray photoelectron spectroscopy and UV-Vis spectrophotometry.A proper ratio of hydrogen to oxygen in the sputtering gas improves the crystallinity and the doping efficiency of Ta.Optical absorptance is also reduced with suppressed formation of Sn(Ⅱ)in the TTO films.Therefore,our findings exhibit remarkable potential for the industrial application of TTO as a low-cost TCO.展开更多
Copper is a versatile material,commonly utilized in power transmission and electronic devices,but its relative high reactivity necessitates a long-lasting protective technique.Here,we report a method that combines pla...Copper is a versatile material,commonly utilized in power transmission and electronic devices,but its relative high reactivity necessitates a long-lasting protective technique.Here,we report a method that combines plasma-enhanced non-equilibrium magnetron sputtering physical vapor deposition(PEUMS-PVD)and anodization to construct a self-healing three-dimensional Ti/Al-doped TiO_(2)nanotubes/Ti_(3)AlC_(2)coating on the surface of Cu substrates.This novel strategy enhances the corrosion resistance of copper substrates in marine environments,with corrosion current densities of up to 4.5643×10^(−8)A/cm^(2).Among them,the doping of nano-aluminum particles makes the coating self-healing.The mechanistic analysis of the corrosion behaviors during early immersion experiments was conducted using electrochemical noise,and revealed that during the initial stages of coating immersion,uniform corrosion predominates,with a minor occurrence of localized corrosion.展开更多
基金Project supported by the National Basic Research Program of China(Grant No.2013CB328901)the National Natural Science Foundation of China(Grant No.11305177)
文摘The frequency characteristics of free oscillation magnetron（FOM） and injection-locked magnetron（ILM） are theoretically investigated.By using the equal power voltage obtained from the experiment data,expressions of the frequency and radio frequency（RF） voltage of FOM and ILM,as well as the locking bandwidth,on the anode voltage and magnetic field are derived.With the increase of the anode voltage and the decrease of the magnetic field,the power and its growth rate increase,while the frequency increases and its growth rate decreases.The theoretical frequency and power of FOM agree with the particle-in-cell（PIC） simulation results.Besides,the theoretical trends of the power and frequency with the anode voltage and magnetic field are consistent with the experimental results,which verifies the accuracy of the theory.The theory provides a novel calculation method of frequency characteristics.It can approximately analyze the power and frequency of both FOM and ILM,which promotes the industrial applications of magnetron and microwave energy.
基金This work is supported in part by National Natural Science Foundation of China(No.62401125)Natural Science Foundation of Sichuan Province(No.2023NSFSC1376)Fundamental Research Funds for the Central Universities(No.ZYGX2024J008)。
文摘In this paper,three magnetrons with each of them having specifically designed multiple coupling ports,which deliver specific power distribution for developing a magnetron array based on efficient phase locking between them,are proposed to produce high powerμs-level pulses.To demonstrate the effectiveness of the magnetron with one and two coupling ports as a unit for efficient phase locking,we designed experimentally the coupling ports delivering~10%(the power distribution ratio)of the output power of the magnetron for coupling with other magnetron units.The effect of one and two coupling ports on the operating capability,including the power distribution ratio,anode current and frequency,is demonstrated by establishing an equivalent experimental model which can characterize an ideal operation of the array.The experimental results show that the power distribution ratio is~9%for the magnetron with one coupling port,and~12.5%(coupling port 1,2)for the magnetron with two coupling ports.This shows good uniformity of the coupling capability of the two coupling ports and provides guidance for optimizing the power distribution ratio of multiport magnetron units,which are critical for efficient phase locking in the proposed array in future and higher power arrays.
基金supported by the National Science Fund for Distinguished Young Scholars of China(No.52025014)Zhejiang Provincial Natural Science Foundation of China(Nos.LZJWY23E090001 and LD24E010003)the Natural Science Foundation of Ningbo(No.2022J305).
文摘High-entropy materials possess high hardness and strong wear resistance,yet the key bottleneck for their practical applications is the poor corrosion resistance in harsh environments.In this work,the high-entropy nitride(HEN)coatings of(MoNbTaTiZr)1-x Nx(x=0-0.47)were fabricated using a hybrid di-rect current magnetron sputtering technique.The research focus was dedicated to the effect of nitrogen content on the microstructure,mechanical and electrochemical properties.The results showed that the as-deposited coatings exhibited a typical body-centered cubic(BCC)structure without nitrogen,while the amorphous matrix with face-centered cubic(FCC)nanocrystalline grain was observed at x=0.17.Further increasing x in the range of 0.35-0.47 caused the appearance of polycrystalline FCC phase in structure.Compared with the MoNbTaTiZr metallic coating,the coating containing nitrogen favored the high hard-ness around 13.7-32.4 GPa,accompanied by excellent tolerance both against elastic and plastic deforma-tion.Furthermore,such N-containing coatings yielded a low corrosion current density of about 10−8-10−7 A/cm^(2) and high electrochemical impedance of 10^(6)Ωcm^(2) in 3.5 wt.%NaCl solution,indicating the supe-rior corrosion resistance.The reason for the enhanced electrochemical behavior could be ascribed to the spontaneous formation of protective passive layers over the coating surface,which consisted of the domi-nated multi-elemental oxides in chemical stability.Particularly,noted that the(MoNbTaTiZr)_(0.83) N0.17 coat-ing displayed the highest hardness of 32.4±2.6 GPa and H/E ratio at 0.09,together with remarkable cor-rosion resistance,proposing the strongest capability for harsh-environmental applications required both good anti-wear and anti-corrosion performance.
基金financially supported by the Natural Science Foundation of China (62288102, 22379067, T2441002, 6220514, and 5230226)the National Key Research and Development Program of China (2023YFB4204500)+1 种基金the Jiangsu Provincial Departments of Science and Technology (BE2022023, BK20220010, and BZ2023060)the Open Project Program of Wuhan National Laboratory for Optoelectronics (2021WNLOKF003)。
文摘Perovskite solar cells(PSCs) have become a hot topic in the field of renewable energy due to their excellent power conversion efficiency and potential for low-cost manufacturing. The hole transport layer(HTL), as a key component of PSCs,plays a crucial role in the cell's overall performance. Magnetron sputtering NiO_(x) has attracted widespread attention due to its high carrier mobility, excellent stability, and suitability for large-scale production. Herein, an insightful summary of the recent progress of magnetron sputtering NiO_(x) as the HTL of PSCs is presented to promote its further development. This review summarized the basic properties of magnetron sputtering NiO_(x) thin film, the key parameters affecting the optoelectronic properties of NiO_(x) thin films during the magnetron-sputtering process, and the performance of the corresponding PSCs. Special attention was paid to the interfacial issues between NiO_(x) and perovskites, and the modification strategies were systematically summarized. Finally, the challenges of sputtering NiO_(x) technology and the possible development opportunities were concluded and discussed.
基金National Natural Science Foundation of China(62171208)Natural Science Foundation of Gansu Province(23JRRA1355)。
文摘ZrCoRE(RE denotes rare earth elements)non-evaporable getter films have significant applications in vacuum packaging of micro-electro mechanical system devices because of their excellent gas adsorption performance,low activation temperature and environmental friendliness.The films were deposited using DC magnetron sputtering with argon and krypton gases under various deposition pressures.The effects of sputtering gas type and pressure on the morphology and hydrogen adsorption performance of ZrCoRE films were investigated.Results show that the films prepared in Ar exhibit a relatively dense structure with fewer grain boundaries.The increase in Ar pressure results in more grain boundaries and gap structures in the films.In contrast,films deposited in Kr display a higher density of grain boundaries and cluster structures,and the films have an obvious columnar crystal structure,with numerous interfaces and gaps distributed between the columnar structures,providing more paths for gas diffusion.As Kr pressure increases,the film demonstrates more pronounced continuous columnar structure growth,accompanied by deeper and wider grain boundaries.This structural configuration provides a larger specific surface area,which significantly improves the hydrogen adsorption speed and capacity.Consequently,high Ar and Kr pressures are beneficial to improve the adsorption performance.
基金supported by the National Natural Science Foundation of China(61774140).
文摘ZnO thin films with varying Ta concentrations were fabricated through magnetron sputtering.The crystallinity and surface morphology of the ZnO films are significantly influenced by the incorporation of Ta,as evidenced by the X-ray diffraction and scanning electron microscopy results.The lattice constants,as determined by X-ray diffraction,contradict the disparity in Ta and Zn ion radii,which is attributed to the impact of interstitial defects.This inconsistency introduces variations in carrier concentration in this experiment compared with prior studies.Subsequent exploration of the luminescent characteristics and emission mechanism of defect levels in Ta-doped ZnO films was conducted through photoluminescence.Furthermore,the factors influencing the bandgap are discussed.
基金supported by the National Natural Science Foundation of China(General Program,No.52473331).
文摘With the rapid advancement of 5G communication technology,increasingly stringent demands are placed on the performance and functionality of phase change switches.Given that RF and microwave signals exhibit characteristics of high frequency,high speed,and high precision,it is imperative for phase change switches to possess fast,accurate,and reliable switching capabilities.Moreover,wafer-level compositional homogeneity and resistivity uniformity during semiconductor manufacturing are crucial for ensuring the yield and reliability of RF switches.By controlling magnetron sputter of GeTe through from four key parameters(pressure,power,Ar flow,and post-annealing)and incorporating elemental proportional compensation in the target,we achieved effective modulation over GeTe uniformity.Finally,we successfully demonstrated the process integration of GeTe phase-change RF switches on 6-inch scaled wafers.
基金National Natural Science Foundation of China (NSFC)(52273266, U2001216)Shenzhen Science and Technology Innovation Committee (20231121102401001)+2 种基金Shenzhen Key Laboratory Project (ZDSYS201602261933302)GuangdongHong Kong-Macao Joint Laboratory on Micro-Nano Manufacturing Technology (2021LSYS004)SUSTech high level special funds (G03050K002)。
文摘Widely used spin-coated nickle oxide (NiOx) based perovskite solar cells often suffer from severe interfacial reactions between the NiOxand adjacent perovskite layers due to surface defect states,which inherently impair device performance in a long-term view,even with surface molecule passivation.In this study,we developed high-quality magnetron-sputtered NiOxthin films through detailed process optimization,and compared systematically sputtered and spin-coated NiOxthin film surfaces from materials to devices.These sputtered NiOxfilms exhibit improved crystallinity,smoother surfaces,and significantly reduced Ni3+or Ni vacancies compared to their spin-coated counterparts.Consequently,the interface between the perovskite and sputtered NiOxfilm shows a substantially reduced density of defect states.Perovskite solar cells (PSCs) fabricated with our optimally sputtered NiOxfilms achieved a high power conversion efficiency (PCE) of up to 19.93%and demonstrated enhanced stability,maintaining 86.2% efficiency during 500 h of maximum power point tracking under one standard sun illumination.Moreover,with the surface modification using (4-(2,7-dibromo-9,9-dimethylacridin-10(9H)-yl)butyl)p hosphonic acid (DMAcPA),the device PCE was further promoted to 23.07%,which is the highest value reported for sputtered NiOxbased PSCs so far.
基金supported by the Korea Institute of Energy Technology Evaluation and Planning and the Ministry of Trade,Industry and Energy of the Republic of Korea(No.20213030030150)by the National Research Foundation of Korea funded by the Korea government(MSIT)(No.RS-2021-NR057434).
文摘In this work,we present an innovative method for fabricating high-performance proton-conductive fuel cells(PCFCs)by combining magnetron sputtering and flashlight sintering(FLS)techniques.BaZr_(0.8)Y_(0.2)O_(3–δ)(BZY20)electrolyte thin-films are successfully prepared by improving the crystallinity while maintaining the stoichiometry.All components of PCFC,Ni-YSZ anode,BZY20 electrolyte and Pt-GDC cathode are fabricated by sequentially sputtering them onto an AAO substrate.Electrolytic sintering is performed at 550 and 650 V conditions using FLS,effectively solving the Ba evaporation problem encountered in conventional thermal sintering methods.XRD analysis confirms that the perovskite structure is retained,and crystallinity is improved in the FLS samples.Furthermore,FE-SEM and EDS analyses confirm the uniform elemental distribution and consistent thickness of the FLS-treated electrolyte.An optimized PCFC unit cell with FLS-treated electrolyte exhibits a peak power density of 200.0 mW cm^(-2) at 500℃ and an ohmic resistance of 376.0 mΩ cm^(-2).These results suggest that the combination of magnetron sputtering and FLS techniques is a promising approach for fabricating highperformance thin-film PCFCs.
文摘Silver is an elegant white precious metal,but it is easily oxidized by O3,SO2,and H2S in the air,turning yellow or dark,which affects its decorative effect.The existing silver coating,primarily prepared through the electroplating process,poses serious environmental pollution problems.It is necessary to seek new,green,and environmentally friendly coating processes while also enhancing the color palette of silver jewelry coatings.Titanium film layers were deposited on Ag925 and Ag999 surfaces using magnetron sputtering coating technology.The effects of sputtering time,substrate surface state,reaction gas type and time,and film thickness on the color of the film layers were studied,and the anti discoloration performance of the obtained film layers under the optimal process was tested.The experimental results show that when the sputtering time varies from 5 to 10 minutes,injecting argon,oxygen,and nitrogen into the coating chamber yields rich colors such as purple with a red tint,blue,yellow green,yellowish purple,and blue purple.The precise control of gas injection time has a significant impact on the color of the film layer.In terms of anti tarnish performance,the film showed good stability in the artificial sweat immersion test.From an environmental perspective,the magnetron sputtering titanium film process has no harmful gas or liquid emissions,which aligns with the sustainable development trend of the jewelry industry and holds great promise for application.This study has improved the visual effect and practical performance of the product,providing important theoretical basis and experimental data support for the application of environmentally friendly silver surface vacuum magnetron sputtering titanium thin film coating technology.
基金supported by the National Key R&D Program of China(No.2022YFB3505700)the National Natural Science Foundation of China(No.51901079)+4 种基金Guangdong Science and Technology Program(No.2023A0505050145)the Natural Science Foundation of Guangdong Province(Nos.2024A1515030178,2020A1515010736 and 2021A1515010451)Guangzhou Municipal Science and Technology Program(No.202007020008)the Fundamental Research Funds for the Central Universities,the Opening Project of National Engineering Research Center for Powder Metallurgy of Titanium&Rare Metals,the Fundamental Research Funds for the Central Universities and Zhongshan Municipal Science and Technology Program(No.191007102629094)Zhongshan Collaborative Innovation Fund(No.2018C1001).
文摘Sm–Co-based films play an irreplaceable role in special applications due to their high curie temperature and magnetocrystalline anisotropic energy,especially in heat-assisted magnetic recording(HAMR),but the complex composition of Sm–Co phase and unclear synergistic coupling mechanisms of multi-elemental doping become the challenges to enhance the properties.In this work,a novel strategy combining magnetron sputtering and a high-throughput experiment method is applied to solve the above-mentioned problems.Fe/Cu co-doping highly increases the remanence while maintaining a coercivity larger than 26 kOe,leading to an enhancement of the magnetic energy product to 18.1 MGOe.X-ray diffraction(XRD)and high-resolution transmission electron microscope(HRTEM)reveals that SmCo_(5) phase occupies the major fraction,with Co atoms partially substituted by Fe and Cu atoms.In situ Lorentz transmission electron microscopy(LTEM)observations show that the Sm(Co,Cu)5 phase effectively prohibits domain wall motions,leading to an increase of coercivity(H_(c)).Fe doping increases the low saturation magnetization(M_(s))and low remanence(Mr)due to the Fe atom having a higher saturation magnetic moment.The magnetization reversal behaviors are further verified by micromagnetic simulations.Our results suggest that Sm–Co-based films prepared via Fe/Cu co-doping could be a promising candidate for high-performed HAMR in the future.
基金funded by Open Research Fund Program of National Key Laboratory of Aerospace Chemical Power(NKLACP120241B04)National Natural Science Foundation of China Youth Science Foundation(12402450)。
文摘Ammonium dinitramide(ADN),as a high-energy oxidizer widely applied in the field of rocket and missile propellants,has a prominent issue of high hygroscopicity due to its strong polarity.The previous coating encapsulation methods have struggled to address the problems of uneven coating and polarity mismatch.This research innovatively introduces perfluorooctanoic acid(PFOA)as a polar transition intermediate layer.Utilizing the polarity of one end of it to adsorb on the surface of ADN through hydrogen bonds,the problem of polarity mismatch is effectively overcome.Meanwhile,the vibrational magnetron sputtering process has been first applied in the energetic field,with a special vibrating abutment enhancing ADN particle fluidity to solve coating non-uniformity,thus preparing prilled ADN@PFOA@PTFE core-dual-shell composites.Performance tests reveal that this composite material possesses excellent hydrophobic and anti-hygroscopic properties.When left at 25℃and 75%RH for 3 days,moisture absorption was reduced by more than 90%compared to pure ADN.Simultaneously,its thermal stability,heat release performance,and combustion performance have been improved.The research achievements optimize the storage conditions of ADN in the application of rocket and missile propellants,providing solid support and broad development prospects for technological innovation in military fields.
基金supported by National Natural Science Foundation of China(U21B2057)。
文摘Vanadium redox flow batteries(VRFBs)hold significant promise for large-scale energy storage applications.However,the sluggish reaction kinetics on the electrode surface considerably limit their performance.Implementation of efficient surface modification on carbon electrodes through an economically viable production method is crucial for the practical application of VRFBs.Herein,a nano-carbon layer with morphology of fine nanoparticles(<90 nm)and rich oxygen functional groups was constructed on carbon felts by unbalanced magnetron sputtering coupled with thermal treatment.This modified carbon felt served as both anode and cathode in cell,enabling an improved wettability of electrolyte and high reversibility of the active mass,and promoted kinetics of redox reactions.The optimized carbon felt,achieved through one hour of deposition(1C-CF),demonstrated outstanding electrochemical performance in a single cell.The cell exhibited a high energy efficiency of 82.4%at a current density of 100 m A cm^(-2)and maintained 71.8%at a high current density of 250 mA cm^(-2).Furthermore,the energy efficiency remained at 77.2%during long-term cycling(450 cycles)at a current density of 150 mA cm^(-2),indicating good electrode stability.Our results shed light on the surface design of carbon felt electrodes for the broad application interest of VRFB energy storage systems.
基金the financial support from National Natural Science Foundation of China(Nos.52201183,51925103,U23A2065)the Open Research Fund of Songshan Lake Materials Laboratory(2023SLABFN07)+1 种基金the Innovation Program of Shanghai Municipal Education Commission(No.2021-01-07-00-09-E00114)the Innovation Program of Shanghai Science and Technology(No.23520760700).
文摘Gadolinium(Gd)and yttrium(Y)elements were added to the composition design and sputtering process to create a composite artificial ligament with enhanced mechanical and frictional wear performance.Due to the oxidative and adhesive wear mechanisms,MgZnCaY metallic glass(MG)films exhibit a reduced scratch depth,a lower friction coefficient,and better wear resistance than MgZnCaGd.The wear coefficients of MgZnCaGd and MgZnCaY are 1.45±0.04 and 0.99±0.068,respectively.MgZnCaY MG coating has a higher hardness(8.64±0.01 GPa)and Young’s modulus(144.67±1.57 GPa)than MgZnCaGd MG coating(4.90±1.86 GPa,110.4±23.2 GPa).The MgZnCaY composite-coated artificial ligament has 49.02 MPa and 18.54% elongation at break,compared to 49.86 MPa and 15.19% for the MgZnCaGd coating.The results of the mechanical test shows that the coated composite artificial ligament allows for greater fracture elongation and appropriate stiffness during the stretching process.Because of the formation of Y_(2)O_(3),which can strengthen the interfacial bonding strength between the adhesive layer and the ligament matrix,increase the adherence of oxides,and reduce the likelihood of oxide delamination,artificial ligaments coated with MgZnGaY also perform exceptionally well mechanically.The current research findings provide new insights for the design of composite artificial ligaments and present promising materials for applications in the field of artificial ligaments.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.62404146,12174275,62174113)the Basic and Applied Basic Research Foundation of Guangdong Province,China(Grant Nos.2023A1515110730 and 2023A1515140094)the INTPART Program at the Research Council of Norway(Project number 322382)。
文摘Low-cost and large-area uniform amorphous Ga_(2)O_(3)(α-Ga_(2)O_(3))solar-blind ultraviolet(UV)detectors have garnered significant attention in recent years.Oxygen vacancy(VO)defects are generally considered as the predominant defects affecting the detector performance.Reducing VOconcentration generally results in both low dark current and low photo current,significantly limiting further improvement of the photo-to-dark current ratio(PDCR)parameter.Herein,a delicately optimized atomic layer deposition(ALD)method is revealed having the capability to break through the trade-off in a-Ga_(2)O_(3),achieving both low dark current and high photocurrent simultaneously.For a clear demonstration,a-Ga_(2)O_(3)contrast sample is prepared by magnetron sputtering and compared as well.Combined tests are performed including xray photoelectron spectroscopy,photoluminescence,electron paramagnetic resonance and Fourier-transform infrared spectroscopy.It is found that ALDα-Ga_(2)O_(3)has a lower VOconcentration,but also a lower dangling bonds concentration which are strong non-irradiation recombination centers.Therefore,decrease of dangling bonds is suggested to compensate for the low optical gain induced by low VOconcentration and promote the PDCR to~2.06×10^(6).Our findings firstly prove that the dangling bonds also play an important role in determining the a-Ga_(2)O_(3)detection performance,offering new insights for further promotion ofα-Ga_(2)O_(3)UV detector performance via dual optimization of dangling bonds and VO.
基金Funded by the Research Project of Shenzhen Science and Technology Innovation Committee(No.JCYJ20180306170801080)。
文摘Planar-structured amorphous InGaZnO(a-IGZO)film-based UV photodetectors with different ITO interdigitated electrode spacings were developed on flexible PI substrates via radio frequency magnetron sputtering and non-lithographic fabrication processes.The effects of oxygen flow rate on the surface morphology,electrical transport,and chemical bonding properties of the a-IGZO films were systematically investigated to optimize the performance of the flexible detector.The average transmittance of the flexible a-IGZO photodetector is over 90%in the visible spectral range with a large photo-to-dark current ratio of 3.9×10^(3)under 360 nm UV illumination.The photocurrent of the detectors increases with decreasing the electrode spacing,which is attribute to formation of higher electrical field and drifting more electron-hole pairs to the electrode with shortening the electrode spacing.Under a UV illumination intensity of 9.1 mW/cm~2,the highest responsivity and detectivity of the photodetector with the electrode spacing of 0.4 mm reach 62.1 mA/W and2.83×10^(11)cm·Hz^(1/2)·W^(-1)at 11 V bias voltage,respectively.The flexible detector exhibits enhanced photoresponse performance with the rise and decay time of 2.02 and 0.94 s,respectively.These results can be used in a practical scheme to design and realize the a-IGZO based UV photodetectors with excellent transparency and flexibility for wearable UV monitoring applications.
基金supported by National Natural Science Foundation of China (No.11275136)。
文摘The discharge and plasma characteristics of Ag magnetron sputtering discharge operated near the electron series resonance(ESR)oscillation,which was excited using the driving frequency of 27.12 MHz,was investigated.The imaginary part of impedance was found to undergo a transition from capacitive to inductive on varying radio-frequency(RF)power,and the conditions for the ESR excitation were satisfied.The current–voltage(I–V)characteristic of discharge showed that the lower discharge voltage with higher current was an important feature of RF magnetron sputtering operated near the ESR oscillation,which was caused by the small impedance Z originated from the mutual compensation between the sheath capacitive reactance and the plasma inductive reactance.The higher electron temperature,ion flux density and ion energy as well as the moderate electron density were obtained.The interaction of higher energy ions on substrate surface improved the crystallographic quality of Ag films.Therefore,the 27.12 MHz magnetron sputtering operated near the ESR oscillation has better deposition characteristics than that of commercial 13.56 MHz RF magnetron sputtering.
文摘Ensuring high electrocatalytic performance simultaneously with low or even no precious-metal usage is still a big challenge for the development of electrocatalysts toward oxygen evolution reaction(OER)in anion exchange membrane water electrolysis.Here,homogeneous high entropy oxide(HEO)film is in-situ fabricated on nickel foam(NF)substrate via magnetron sputtering technology without annealing process in air,which is composed of many spinel-structured(FeCoNiCrMo)_(3)O_(4) grains with an average particle size of 2.5 nm.The resulting HEO film(abbreviated as(FeCoNiCr-Mo)_(3)O_(4))exhibits a superior OER performance with a low OER overpotential of 216 mV at 10 mA cm^(–2) and steadily operates at 100 mA cm^(–2) for 200 h with a decay of only 272μV h^(–1),which is far better than that of commercial IrO_(2) catalyst(290 mV,1090μV h^(–1)).Tetramethylammonium cation(TMA^(+))probe experiment,activation energy analysis and theoretical calculations unveil that the OER on(FeCoNiCrMo)_(3)O_(4) follows an adsorbate evolution mechanism pathway,where the energy barrier of rate-determining step for OER on(FeCoNiCrMo)_(3)O_(4) is substantially lowered.Also,methanol molecular probe experiment suggests that a weakened ^(*)OH bonding on the(FeCoNiCrMo)_(3)O_(4) surface and a rapid deprotonation of ^(*)OH,further enhancing its OER performance.This work provides a feasible solution for designing efficient high entropy oxides electrocatalysts for OER,accelerating the practical process of water electrolysis for H2 production.
基金Project supported by the Key-Area Research and Development Program of Guangdong Province,China(Grant No.2021B0101260001)the Guangdong Basic and Applied Basic Research Foundation(Grant No.2019A1515110411)。
文摘Ta-doped SnO_(2)(TTO)is a suitable candidate to replace transparent conductive oxide(TCO)composed of expensive indium used for optoelectronics and silicon heterojunction solar cells fabricated below 200℃.However,TTO films fabricated by sputtering at low temperature still demonstrate too high resistance and optical absorptance for application in industry.In this study,we investigate the influence of sputtering ambient on the optoelectrical properties of TTO films.The addition of hydrogen and oxygen to argon during sputtering leads to a large improvement in the optoelectrical properties of TTO films.The best TTO film has a low average absorptance of 1.9%and a low resistance of 3.8×10^(-3)Ω·cm with a high carrier density of 9.3×10^(19)cm^(-3)and mobility of 17.8 cm^(2)·V^(-1)·s^(-1).The micros tructural and compositional properties of TTO films were characterized using x-ray diffraction,x-ray photoelectron spectroscopy and UV-Vis spectrophotometry.A proper ratio of hydrogen to oxygen in the sputtering gas improves the crystallinity and the doping efficiency of Ta.Optical absorptance is also reduced with suppressed formation of Sn(Ⅱ)in the TTO films.Therefore,our findings exhibit remarkable potential for the industrial application of TTO as a low-cost TCO.
基金Projects(42106051,42006046,U2106206) supported by the National Natural Science Foundation of ChinaProject(22373501D) supported by Hebei Provincial Key R&D Program,China。
文摘Copper is a versatile material,commonly utilized in power transmission and electronic devices,but its relative high reactivity necessitates a long-lasting protective technique.Here,we report a method that combines plasma-enhanced non-equilibrium magnetron sputtering physical vapor deposition(PEUMS-PVD)and anodization to construct a self-healing three-dimensional Ti/Al-doped TiO_(2)nanotubes/Ti_(3)AlC_(2)coating on the surface of Cu substrates.This novel strategy enhances the corrosion resistance of copper substrates in marine environments,with corrosion current densities of up to 4.5643×10^(−8)A/cm^(2).Among them,the doping of nano-aluminum particles makes the coating self-healing.The mechanistic analysis of the corrosion behaviors during early immersion experiments was conducted using electrochemical noise,and revealed that during the initial stages of coating immersion,uniform corrosion predominates,with a minor occurrence of localized corrosion.
