A new micromachining method of Micro-EDM with electrodes by LIGA technique is introduced in this paper.The polymer structures of PMMA resist with thickness 2 mm and aspect ratio 100 have been obtained by deep exposure...A new micromachining method of Micro-EDM with electrodes by LIGA technique is introduced in this paper.The polymer structures of PMMA resist with thickness 2 mm and aspect ratio 100 have been obtained by deep exposure tosynchrotron radiation and development.Copper electrodes for Micro-EDM with thickness I mm have been made by electro-depositing copper into polymer structures.The patterned structures of stainless steel have been successfully fabricated basedon micro electro discharge machining with electrodes by LIGA technique.展开更多
文摘A new micromachining method of Micro-EDM with electrodes by LIGA technique is introduced in this paper.The polymer structures of PMMA resist with thickness 2 mm and aspect ratio 100 have been obtained by deep exposure tosynchrotron radiation and development.Copper electrodes for Micro-EDM with thickness I mm have been made by electro-depositing copper into polymer structures.The patterned structures of stainless steel have been successfully fabricated basedon micro electro discharge machining with electrodes by LIGA technique.
