摘要
A new micromachining method of Micro-EDM with electrodes by LIGA technique is introduced in this paper.The polymer structures of PMMA resist with thickness 2 mm and aspect ratio 100 have been obtained by deep exposure tosynchrotron radiation and development.Copper electrodes for Micro-EDM with thickness I mm have been made by electro-depositing copper into polymer structures.The patterned structures of stainless steel have been successfully fabricated basedon micro electro discharge machining with electrodes by LIGA technique.
提出LIGA-EDM复合技术技术,即采用LIGA技术制备工具电极的微细电火花加工技术,通过同步辐射尝试光刻得到的胶结构厚度达2mm深宽比约为100,使用电铸技术得到厚度达1mm的铜工县电极,利用该电极进行微细电火花加工实验,在不锈钢上加工出异形小孔阵列.
