聚焦离子束扫描电子显微镜(Focused Ion Beam Scanning Electron Microscope,FIB-SEM)双束系统结合了扫描电子显微镜与聚焦离子束系统的优势。基于该系统的高分辨率、原位加工及观测的特点,研究了它在缺陷与像元解剖分析、透射电镜样品...聚焦离子束扫描电子显微镜(Focused Ion Beam Scanning Electron Microscope,FIB-SEM)双束系统结合了扫描电子显微镜与聚焦离子束系统的优势。基于该系统的高分辨率、原位加工及观测的特点,研究了它在缺陷与像元解剖分析、透射电镜样品制备以及电路修复等方面的应用。详细介绍了用FIB-SEM系统定位问题像元的方法和修复电路的具体过程,并阐明了它对红外焦平面探测器研制的重要作用。该系统是高性能红外探测器研制过程中不可或缺的重要表征手段。展开更多
The crystallization process of the eutectic composition of GdAlO_3-Al_2O_3 from the amorphous phase prepared by rapid-quenching of melt that leads to the formation of a cantaloupe skin-like microstructure was investig...The crystallization process of the eutectic composition of GdAlO_3-Al_2O_3 from the amorphous phase prepared by rapid-quenching of melt that leads to the formation of a cantaloupe skin-like microstructure was investigated using focused ion-beam scanning electron microscopy (FIB-SEM) and high-resolution transmission electron microscopy (HR-TEM).The amorphous films were heat-treated at temperatures between 1000 °C and 1500 °C for up to 30min to form the eutectic phases of GdAlO_3 and Al_2O_3.The GdAlO_3 and Al_2O_3 crystal phases that formed from the amorphous phase were identified by FIB-SEM and HR-TEM.Both components began to crystallize and grow from the amorphous phase separately at different temperatures.The formation process of these crystal phases was different from that of the ordinary eutectic microstructure solidified from the GdAlO_3-Al_2O_3 system.Therefore,the observed structure is termed "eutectic-like" for distinction.The microstructures formed from the amorphous phases at sufficiently high temperatures consisted of ultra-fine microstructures of individually crystallized components and were similar to ordinary eutectic microstructures.By heat-treating the amorphous films at 1500 °C for either 2 min,8min or 30min,the ultra-fine components of GdAlO_3 and Al_2O_3 were found to crystallize following a eutectic-like stage after 8min of heat treatment.展开更多
FIB-SEM(Focused Ion Beam-Scanning Electron Microscope)双束系统是集聚焦离子束和扫描电子显微镜与一体的系统,其最大的优势是可以实现离子束切割或微加工的同时用电子束实时观察的功能。主要介绍FIB-SEM双束系统在PCB及IC载板缺陷...FIB-SEM(Focused Ion Beam-Scanning Electron Microscope)双束系统是集聚焦离子束和扫描电子显微镜与一体的系统,其最大的优势是可以实现离子束切割或微加工的同时用电子束实时观察的功能。主要介绍FIB-SEM双束系统在PCB及IC载板缺陷检测中的常见应用,如盲孔孔底分析、杂物失效分析和晶体结构分析。展开更多
文摘聚焦离子束扫描电子显微镜(Focused Ion Beam Scanning Electron Microscope,FIB-SEM)双束系统结合了扫描电子显微镜与聚焦离子束系统的优势。基于该系统的高分辨率、原位加工及观测的特点,研究了它在缺陷与像元解剖分析、透射电镜样品制备以及电路修复等方面的应用。详细介绍了用FIB-SEM系统定位问题像元的方法和修复电路的具体过程,并阐明了它对红外焦平面探测器研制的重要作用。该系统是高性能红外探测器研制过程中不可或缺的重要表征手段。
基金part of the study under the "Human Resource Development Center for Economic Region Leading Industry" Projectsupported by the Ministry of Education,Science & Technology(MEST)by the National Research Foundation of Korea(NRF)
文摘The crystallization process of the eutectic composition of GdAlO_3-Al_2O_3 from the amorphous phase prepared by rapid-quenching of melt that leads to the formation of a cantaloupe skin-like microstructure was investigated using focused ion-beam scanning electron microscopy (FIB-SEM) and high-resolution transmission electron microscopy (HR-TEM).The amorphous films were heat-treated at temperatures between 1000 °C and 1500 °C for up to 30min to form the eutectic phases of GdAlO_3 and Al_2O_3.The GdAlO_3 and Al_2O_3 crystal phases that formed from the amorphous phase were identified by FIB-SEM and HR-TEM.Both components began to crystallize and grow from the amorphous phase separately at different temperatures.The formation process of these crystal phases was different from that of the ordinary eutectic microstructure solidified from the GdAlO_3-Al_2O_3 system.Therefore,the observed structure is termed "eutectic-like" for distinction.The microstructures formed from the amorphous phases at sufficiently high temperatures consisted of ultra-fine microstructures of individually crystallized components and were similar to ordinary eutectic microstructures.By heat-treating the amorphous films at 1500 °C for either 2 min,8min or 30min,the ultra-fine components of GdAlO_3 and Al_2O_3 were found to crystallize following a eutectic-like stage after 8min of heat treatment.
文摘FIB-SEM(Focused Ion Beam-Scanning Electron Microscope)双束系统是集聚焦离子束和扫描电子显微镜与一体的系统,其最大的优势是可以实现离子束切割或微加工的同时用电子束实时观察的功能。主要介绍FIB-SEM双束系统在PCB及IC载板缺陷检测中的常见应用,如盲孔孔底分析、杂物失效分析和晶体结构分析。
