摘要
针对聚焦离子束/扫描电子显微镜双束系统中样品工作台无法实现回转微小特征结构的定位、成像和多自由度加工等难题,研制真空环境下基于步进电动机驱动的高精度样品旋转器。采用NX10.0计算机辅助设计软件建立样品旋转器三维数字模型;开展运动部件的运动模拟仿真,避免了工作时出现运动干涉情况;采用ANSYS有限元软件对其关键部组件的静动态特性进行仿真分析和优化,保证了该部件的工作精度和工作强度的要求,样品旋转器的最大转速为30 r/min,角度分辨率达到了0.0014°。所研制的样品旋转器具有精度高、操作简单等特点,为聚焦离子束加工下一代高精度三维微纳光子集成器件提供了参考。
Aiming at the problem that the sample table in the focused ion beam/scanning electron microscope double beam system cannot realize the positioning,imaging and multi-degree-of-freedom machining of rotary micro-feature structures,a high-precision sample rotator driven by stepping motor in vacuum environment is developed.A three-dimensional digital model of the sample rotator is established by NX10.0 computer-aided design software,and the motion simulation of the moving parts is carried out to avoid motion interference during work.The static and dynamic characteristics of its key components are simulated and optimized by ANSYS finite element software,which ensures the working accuracy and intensity requirements of the parts.The maximum rotation speed of the sample rotator is 30 r/min,and the angular resolution reaches 0.0014°.The developed sample rotator has the characteristics of high precision and simple operation,which provides an important guarantee for the next generation of high-precision three-dimensional micro-nano photonic integrated devices processed by focused ion beam.
作者
郭海林
王大森
王伟
黄思玲
夏超翔
赵仕燕
GUO Hailin;WANG Dasen;WANG Wei;HUANG Siling;XIA Chaoxiang;ZHAO Shiyan(Ningbo Branch of China Academy of Ordnance Science,Ningbo 315103,Zhejiang,China;School of Mechanical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China;State Key Laboratory of Extreme Photonics and Instrumentation,College of Optical Science and Engineering,Zhejiang University,Hangzhou 310027,China)
出处
《实验室研究与探索》
CAS
北大核心
2024年第12期39-42,63,共5页
Research and Exploration In Laboratory
基金
国家基础加强计划技术领域基金项目(2022-JCJQ-JJ-0139)。
