An aluminum(Al)based nearly guided-wave surface plasmon resonance(NGWSPR)sensor is investigated in the far-ultraviolet(FUV)region.By simultaneously optimizing the thickness of Al and dielectric films,the sensitivity o...An aluminum(Al)based nearly guided-wave surface plasmon resonance(NGWSPR)sensor is investigated in the far-ultraviolet(FUV)region.By simultaneously optimizing the thickness of Al and dielectric films,the sensitivity of the optimized Al-based FUV-NGWSPR sensor increases from 183/RIU to 309/RIU,and its figure of merit rises from 26.47 RIU^(-1)to 32.59 RIU^(-1)when the refractive index of dielectric increases from 2 to 5.Compared with a traditional FUV-SPR sensor without dielectric,the optimized FUV-NGWSPR sensor can realize simultaneous improvement of sensitivity and figure of merit.In addition,the FUV-NGWSPR sensor with realistic materials(diamond,Ta_(2)O_(5),and GaN)is also investigated,and 137.84%,52.70%,and 41.89%sensitivity improvements are achieved respectively.This work proposes a method for performance improvement of FUV-SPR sensors by exciting nearly guided-wave,and could be helpful for the high-performance SPR sensor in the short-wavelength region.展开更多
基金Project supported by the National Natural Science Foundation of China(Grant Nos.61805007 and 11547241)
文摘An aluminum(Al)based nearly guided-wave surface plasmon resonance(NGWSPR)sensor is investigated in the far-ultraviolet(FUV)region.By simultaneously optimizing the thickness of Al and dielectric films,the sensitivity of the optimized Al-based FUV-NGWSPR sensor increases from 183/RIU to 309/RIU,and its figure of merit rises from 26.47 RIU^(-1)to 32.59 RIU^(-1)when the refractive index of dielectric increases from 2 to 5.Compared with a traditional FUV-SPR sensor without dielectric,the optimized FUV-NGWSPR sensor can realize simultaneous improvement of sensitivity and figure of merit.In addition,the FUV-NGWSPR sensor with realistic materials(diamond,Ta_(2)O_(5),and GaN)is also investigated,and 137.84%,52.70%,and 41.89%sensitivity improvements are achieved respectively.This work proposes a method for performance improvement of FUV-SPR sensors by exciting nearly guided-wave,and could be helpful for the high-performance SPR sensor in the short-wavelength region.