1.0μm gate-length GaAs-based MHEMTs have been fabricated by MBE epitaxial material and contact-mode lithography technology. Pt/Ti/Pt/Au and Ti/Pt/Au were evaporated to form gate metals. Excellent DC and RF performanc...1.0μm gate-length GaAs-based MHEMTs have been fabricated by MBE epitaxial material and contact-mode lithography technology. Pt/Ti/Pt/Au and Ti/Pt/Au were evaporated to form gate metals. Excellent DC and RF performances have been obtained, and the transconductance, maximum saturation drain current density, threshold voltage, current cut-off frequency,and maximum oscillation frequency of Pt/Ti/Pt/Au and Ti/Pt/Au MHEMTs were 502 （503） mS/mm, 382（530）mA/mm,0.1（ - 0.5）V,13.4（14.8）GHz,and 17.0（17.5）GHz,respectively. DC-10GHz single-pole double-throw （SPDT） switch MMICs have been designed and fabricated by Ti/Pt/Au MHEMTs. Insertion loss,isolation,input,and out- put return losses of SPDT chips were better than 2.93,23.34,and 20dB.展开更多
文摘1.0μm gate-length GaAs-based MHEMTs have been fabricated by MBE epitaxial material and contact-mode lithography technology. Pt/Ti/Pt/Au and Ti/Pt/Au were evaporated to form gate metals. Excellent DC and RF performances have been obtained, and the transconductance, maximum saturation drain current density, threshold voltage, current cut-off frequency,and maximum oscillation frequency of Pt/Ti/Pt/Au and Ti/Pt/Au MHEMTs were 502 （503） mS/mm, 382（530）mA/mm,0.1（ - 0.5）V,13.4（14.8）GHz,and 17.0（17.5）GHz,respectively. DC-10GHz single-pole double-throw （SPDT） switch MMICs have been designed and fabricated by Ti/Pt/Au MHEMTs. Insertion loss,isolation,input,and out- put return losses of SPDT chips were better than 2.93,23.34,and 20dB.
