The nonlinear static characteristic of a piezoelectric unimorph cantilever micro actuator driven by a strong applied electric field is studied based on the couple stress theory.The cantilever actuator consists of a pi...The nonlinear static characteristic of a piezoelectric unimorph cantilever micro actuator driven by a strong applied electric field is studied based on the couple stress theory.The cantilever actuator consists of a piezoelectric layer,a passive（elastic）layer and two electrode layers.First,the nonlinear static characteristic of the actuator caused by the electrostriction of the piezoelectric layer under a strong applied electric field is analyzed using the Rayleigh-Ritz method.Secondly,since the thickness of the cantilever beam is in micro scale and there exists a size effect,the size dependence of the deformation behavior is evaluated using the couple stress theory.The results show that the nonlinearities of the beam deflection increase along with the increase of the applied electric field which means that softening of the micro beam rigidity exists when a strong external electric field is applied.Meanwhile,the optimal value of the thickness ratio for the passive layer and the piezoelectric layer is not around 1.0 which is usually adopted by some previous researchers.Since there exists a size effect of the micro beam deflection,the optimal value of this thickness ratio should be greater than 1.0 in micro scale.展开更多
基金The National Natural Science Foundation of China(No.10772086,10772085)
文摘The nonlinear static characteristic of a piezoelectric unimorph cantilever micro actuator driven by a strong applied electric field is studied based on the couple stress theory.The cantilever actuator consists of a piezoelectric layer,a passive（elastic）layer and two electrode layers.First,the nonlinear static characteristic of the actuator caused by the electrostriction of the piezoelectric layer under a strong applied electric field is analyzed using the Rayleigh-Ritz method.Secondly,since the thickness of the cantilever beam is in micro scale and there exists a size effect,the size dependence of the deformation behavior is evaluated using the couple stress theory.The results show that the nonlinearities of the beam deflection increase along with the increase of the applied electric field which means that softening of the micro beam rigidity exists when a strong external electric field is applied.Meanwhile,the optimal value of the thickness ratio for the passive layer and the piezoelectric layer is not around 1.0 which is usually adopted by some previous researchers.Since there exists a size effect of the micro beam deflection,the optimal value of this thickness ratio should be greater than 1.0 in micro scale.
