In this paper,a fifth-order fully differential interface circuit( IC) is presented to improve the noise performance for micromechanical sigma-delta( Σ-Δ) accelerometer. A lead compensator is adopted to ensure the st...In this paper,a fifth-order fully differential interface circuit( IC) is presented to improve the noise performance for micromechanical sigma-delta( Σ-Δ) accelerometer. A lead compensator is adopted to ensure the stability of the closed-loop high-order system. A low noise capacitance detection circuit is described with a correlated-double-sampling( CDS) technique to decrease 1 /f noise and offset of the operational amplifier. This paper also proposes a self-test technique for the interface circuit to test the harmonic distortion. An electrostatic force feedback linearization circuit is presented to reduce the harmonic distortion resulting in larger dynamic range( DR). The layout of the IC is implemented in a standard 0. 6 μm CMOS technology and operates at a sampling frequency of 250 kHz. The interface consumes 20 mW from a 5 V supply. The post-simulation results indicate that the noise floor of the digital accelerometer is about- 140 dBV /Hz1 /2at low frequency. The sensitivity is 2. 5 V /g and the nonlinearity is 0. 11%. The self-test function is achieved with 98. 2 dB thirdorder harmonic distortion detection based on the electrostatic force feedback linearization.展开更多
This paper reports a low noise switched-capacitor CMOS interface circuit for the closed-loop operation of a capacitive accelerometer.The time division multiplexing of the same electrode is adopted to avoid the strong ...This paper reports a low noise switched-capacitor CMOS interface circuit for the closed-loop operation of a capacitive accelerometer.The time division multiplexing of the same electrode is adopted to avoid the strong feedthrough between capacitance sensing and electrostatic force feedback.A PID controller is designed to ensure the stability and dynamic response of a high Q closed-loop accelerometer with a vacuum package.The architecture only requires single ended operational amplifiers,transmission gates and capacitors.Test results show that a full scale acceleration of±3 g,non-linearity of 0.05%and signal bandwidth of 1000 Hz are achieved.The complete module operates from a±5 V supply and has a measured sensitivity of 1.2 V/g with a noise of floor of 0.8μg/（Hz）;in closed-loop.The chip is fabricated in the 2μm two-metal and two-poly n-well CMOS process with an area of 15.2 mm;.These results prove that this circuit is suitable for high performance micro-accelerometer applications like seismic detection and oil exploration.展开更多
The noise of closed loop micro-electromechanical systems(MEMS) capacitive accelerometer is treated as one of the significant performance specifications.Traditional optimization of noise performance often focuses on de...The noise of closed loop micro-electromechanical systems(MEMS) capacitive accelerometer is treated as one of the significant performance specifications.Traditional optimization of noise performance often focuses on designing large capacitive sensitivity accelerometer and applying closed loop structure to shape total noise,but different noise sources in closed loop and their behaviors at low frequencies are seldom carefully studied,especially their behaviors with different electronic parameters.In this work,a thorough noise analysis is established focusing on the four noise sources transfer functions near 0 Hz with simplified electronic parameters in closed loop,and it is found that the total electronic noise equivalent acceleration varies differently at different frequency points,such that the noise spectrum shape at low frequencies can be altered from 1/f noise-like shape to flat spectrum shape.The bias instability changes as a consequence.With appropriate parameters settings,the 670 Hz resonant frequency accelerometer can reach resolution of 2.6 μg/(Hz)1/2 at 2 Hz and 6 μg bias instability,and 1300 Hz accelerometer can achieve 5μg/(Hz)1/2 at 2 Hz and 31 μg bias instability.Both accelerometers have flat spectrum profile from 2 Hz to 15 Hz.展开更多
In order to suppress the influence of temperature changes on the performance of accelerometers,a digital quartz resonant accelerometer with low temperature drift is developed using a quartz resonator cluster as a tran...In order to suppress the influence of temperature changes on the performance of accelerometers,a digital quartz resonant accelerometer with low temperature drift is developed using a quartz resonator cluster as a transducer element.In addition,a digital intellectual property(IP) is designed in FPGA to achieve signal processing and fusion of integrated resonators.A testing system for digital quartz resonant accelerometers is established to characterize the performance under different conditions.The scale factor of the accelerometer prototype reaches 3561.63 Hz/g in the range of -1 g to +1 g,and 3542.5 Hz/g in the range of-10 g to+10 g.In different measurement ranges,the linear correlation coefficient R~2 of the accelerometer achieves greater than 0.998.The temperature drift of the accelerometer prototype is tested using a constant temperature test chamber,with a temperature change from -20℃ to 80℃.After temperature-drift compensation,the zero bias temperature coefficient falls to 0.08 mg/℃,and the scale factor temperature coefficient is 65.43 ppm/℃.The experimental results show that the digital quartz resonant accelerometer exhibits excellent sensitivity and low temperature drift.展开更多
Along with process control,perception represents the main function performed by the Edge Layer of an Internet of Things(IoT)network.Many of these networks implement various applications where the response time does no...Along with process control,perception represents the main function performed by the Edge Layer of an Internet of Things(IoT)network.Many of these networks implement various applications where the response time does not represent an important parameter.However,in critical applications,this parameter represents a crucial aspect.One important sensing device used in IoT designs is the accelerometer.In most applications,the response time of the embedded driver software handling this device is generally not analysed and not taken into account.In this paper,we present the design and implementation of a predictable real-time driver stack for a popular accelerometer and gyroscope device family.We provide clear justifications for why this response time is extremely important for critical applications in the acquisition process of such data.We present extensive measurements and experimental results that demonstrate the predictability of our solution,making it suitable for critical real-time systems.展开更多
Objectives:Valid estimation of energy expenditure remains a challenge,particularly when using ankle-and thighworn devices.The Move 4 is a research-grade accelerometer previously tested for predicting metabolic equival...Objectives:Valid estimation of energy expenditure remains a challenge,particularly when using ankle-and thighworn devices.The Move 4 is a research-grade accelerometer previously tested for predicting metabolic equivalents(METs)when worn at the waist or wrist.This study aimed to calibrate and evaluate regression models to estimate METs from Move 4 data when worn at the ankle and thigh.Methods:Participants completed walking and jogging tasks under laboratory conditions while wearing Move 4 sensors and with indirect calorimetry as a reference measure.Models were calibrated using study 1(n=160)and evaluated in an independent dataset(study 2;n=15).Performance was assessed using mean absolute error(MAE),root mean square error(RMSE),and Bland-Altman analyses.Results:The MET models demonstrated strong agreement across both locations and datasets.For the thigh position,the MAE ranged from 0.60 METs(walking)to 1.38 METs(jogging),with RMSE of 0.82 and 1.70 in the evaluation data.Calibration metrics were comparable(jogging:MAE=1.24,RMSE=1.63).The ankle models showed similar accuracy,with MAEs of 0.66(walking)and 1.39(jogging),and RMSEs of 0.85 and 1.67,respectively.Systematic bias remained low(mean differences between−0.34 and−0.01 METs).Conclusions:This study provides the first calibration and evaluation for estimating METs from ankle-and thigh-worn Move 4 accelerometers.The model indicated accurate,highresolution MET estimation for walking and jogging.Future work should expand independent performance evaluations,including diverse activities such as static activities,and diverse samples under free-living conditions.展开更多
This study focuses on the design and validation of a behavior classification system for cattle using behavioral data collected through accelerometer sensors.Data collection and behavioral analysis are achieved using m...This study focuses on the design and validation of a behavior classification system for cattle using behavioral data collected through accelerometer sensors.Data collection and behavioral analysis are achieved using machine learning(ML)algorithms through accelerometer sensors.However,behavioral analysis poses challenges due to the complexity of cow activities.The task becomes more challenging in a real-time behavioral analysis system with the requirement for shorter data windows and energy constraints.Shorter windows may lack sufficient information,reducing algorithm performance.Additionally,the sensor’s position on the cowsmay shift during practical use,altering the collected accelerometer data.This study addresses these challenges by employing a 3-s data window to analyze cow behaviors,specifically Feeding,Lying,Standing,and Walking.Data synchronization between accelerometer sensors placed on the neck and leg compensates for the lack of information in short data windows.Features such as the Vector of Dynamic Body Acceleration(VeDBA),Mean,Variance,and Kurtosis are utilized alongside the Decision Tree(DT)algorithm to address energy efficiency and ensure computational effectiveness.This study also evaluates the impact of sensor misalignment on behavior classification.Simulated datasets with varying levels of sensor misalignment were created,and the system’s classification accuracy exceeded 0.95 for the four behaviors across all datasets(including original and simulated misalignment datasets).Sensitivity(Sen)and PPV for all datasets were above 0.9.The study provides farmers and the dairy industry with a practical,energy-efficient system for continuously monitoring cattle behavior to enhance herd productivity while reducing labor costs.展开更多
In order to get rid of the dependence on high-precision centrifuges in accelerometer nonlinear coefficients calibration,this paper proposes a system-level calibration method for field condition.Firstly,a 42-dimension ...In order to get rid of the dependence on high-precision centrifuges in accelerometer nonlinear coefficients calibration,this paper proposes a system-level calibration method for field condition.Firstly,a 42-dimension Kalman filter is constructed to reduce impact brought by turntable.Then,a biaxial rotation path is designed based on the accelerometer output model,including orthogonal 22 positions and tilt 12 positions,which enhances gravity excitation on nonlinear coefficients of accelerometer.Finally,sampling is carried out for calibration and further experiments.The results of static inertial navigation experiments lasting 4000 s show that compared with the traditional method,the proposed method reduces the position error by about 390 m.展开更多
Vibration detection using sensors with both wide working frequency range,good sensitivity,and other good performances is a topic of great interest in fields such as inertial navigation,deep-sea fishing boat engines co...Vibration detection using sensors with both wide working frequency range,good sensitivity,and other good performances is a topic of great interest in fields such as inertial navigation,deep-sea fishing boat engines condition monitoring,seismic monitoring,attitude,and heading reference system,etc.This paper investigates two 6H-SIC MEMS diaphragms,one triangular and the other square,used in a fiber optic Fabry–Perot(FP)accelerometer in an experimental scenario.The triangular chip shows a wide working frequency range of 630 Hz–5300 Hz,a natural frequency of 44.3 k Hz,and a mechanical sensitivity of 0.154 nm/g.An optimal structure of the square chip used in a probe such as a fiber optic FP accelerometer also shows a wide working frequency range of 120 Hz–2300 Hz;a good sensitivity of 31.5 m V/g,a resonance frequency of7873 Hz,an accuracy of 0.96%F.S.,a frequency measurement error of 1.15%,and an excellent linearity of 0.9995.展开更多
To achieve a high precision capacitive closed-loop micro-accelerometer,a full differential CMOS based on switched-capacitor circuit was presented in this paper as the sensor interface circuit.This circuit consists of ...To achieve a high precision capacitive closed-loop micro-accelerometer,a full differential CMOS based on switched-capacitor circuit was presented in this paper as the sensor interface circuit.This circuit consists of a balance-bridge module,a charge sensitive amplifier,a correlated-double-sampling module,and a logic timing control module.A special two-path feedback circuit configuration was given to improve the system linearity.The quantitative analysis of error voltage and noise shows that there is tradeoff around circuit's noise,speed and accuracy.A detailed design method was given for this tradeoff.The noise performance optimized circuit has a noise root spectral density of 1.0 μV/Hz,equivalent to rms noise root spectral density of 1.63 μg/Hz.Therefore,the sensor's Brown noise becomes the main noise source in this design.This circuit is designed with 0.5 μm n-well CMOS process.Under a ±5 V supply,the Hspice simulation shows that the system sensitivity achieves 0.616 V/g,the system offset is as low as 1.456 mV,the non-linearity is below 0.03%,and the system linear range achieves ±5 g.展开更多
A high precision detection technique is analyzed based on the optical micro electro-mechanical system(MEMS)accelerometer with double gratings for noise suppression and scale factor enhancement.The brief sensing model ...A high precision detection technique is analyzed based on the optical micro electro-mechanical system(MEMS)accelerometer with double gratings for noise suppression and scale factor enhancement.The brief sensing model and modulation detection model are built using the phase sensitive detection,and the relationship between stimulated acceleration and system output is given.The schematics of gap modulation and light intensity modulation are analyzed respectively,and the choice of modulation frequency in the optical MEMS accelerometer system is discussed.According to the experimental results,the scale factor is improved from 15.45 V/g with the gap modulation to 18.78 V/g with the light intensity modulation,and the signal to noise ratio is improved from 42.95 dB to 81.73 dB.The overall noise level in the optical MEMS accelerometer is effectively suppressed.展开更多
Device-based measurements are recommended to improve population-based physical activity(PA)surveillance.1,2However,implementation remains challenging due to lack of consensus on analytical methods,and the most widely ...Device-based measurements are recommended to improve population-based physical activity(PA)surveillance.1,2However,implementation remains challenging due to lack of consensus on analytical methods,and the most widely used“generic”(absolute intensity)cut-point approach has limited generalisability to population-level free-living data.Further,current methods generally fail to account for differences in people's physical capacity.展开更多
Type 2 diabetes(T2D)is a global public health issue.In 2021,537 million adults were diagnosed with T2D,corresponding to 10.5%of adults aged 20 and older.^(1)T2D increases the risks for morbidity,disability,and prematu...Type 2 diabetes(T2D)is a global public health issue.In 2021,537 million adults were diagnosed with T2D,corresponding to 10.5%of adults aged 20 and older.^(1)T2D increases the risks for morbidity,disability,and premature mortality,which increased by 3%between 2000 and 2019.2 Evidence is strong that maintaining a healthy diet,engaging in regular physical activity(PA),and preventing obesity can prevent or delay the incidence of T2D.展开更多
Microneedle technology has undergone a paradigm shift from basic transdermal drug delivery to intelligent,closed-loop theranostic systems.Hydrogel materials have emerged as core carriers due to their excellent biocomp...Microneedle technology has undergone a paradigm shift from basic transdermal drug delivery to intelligent,closed-loop theranostic systems.Hydrogel materials have emerged as core carriers due to their excellent biocompatibility,efficient drug loading capacity,and improved patient compliance.Moreover,critical bottlenecks in hydrogel microneedles,including poor mechanical strength,burst release of drugs,and delayed response to treatment,can be addressed via cross-scale integration of nanomaterials.This review systematically outlines several multiscale engineering strategies to overcome these limitations.The construction of nanotopological networks coupled with dynamic crosslinking modulation synergistically enhances the mechanical properties,stability of drug loading,and conductivity of hydrogel microneedles.Furthermore,responsive nanocarriers equipped with biosensors help establish a closed-loop linkage between monitoring and therapeutic functions.We highlight their synergistic theranostic advantages in scenarios such as wound regulation and tumor-immune microenvironments,while revealing the role in integrating flexible electronics with wearable systems in intelligent medicine.We also summarize the research advances on the biosafety and scalable manufacturing processes of nanocomposite hydrogel m icroneedles(NHMNs),providing examples of clinical translation to elucidate the path from fundamental research to industrial implementation.As a convergence of nanotechnology,biomaterials,and flexible electronics,NHMNs provide new standards for transdermal theranostics as well as a roadmap for iterative advancement of intelligent theranostic devices in personalized medicine.Their cross-scale collaborative design,which spans from the properties of materials to the functional integration of macroscopic devices,can facilitate potential breakthroughs in next-generation closed-loop theranostic systems.展开更多
A calculation and test method for the natural frequency of a high-g micro accelerometer with complex structures is presented. A universal formula for natural frequency, which can significantly simplify the structural ...A calculation and test method for the natural frequency of a high-g micro accelerometer with complex structures is presented. A universal formula for natural frequency, which can significantly simplify the structural design process, is deduced and confirmed by experiment. A simplified analytical model is established to describe the accelerometer＇s mechanical behavior and deduce the formula for the natural frequency. Finite element modeling is also conducted to evaluate the natural frequency of the micro-accelerometer and verify the formula. The results obtained from the analytical model and the finite element simulation show good agreement. Finally, a shock comparison method designed for acquiring the high frequency characteristics of the accelerometer is introduced to verify the formula by testing its actual natural frequency.展开更多
In allusion to the limitations of the traditional attitude measurement system consisting of a three-axis magnetic sensor and two accelerometers on high-spinning projectile, a new scheme comprised of two magnetic senso...In allusion to the limitations of the traditional attitude measurement system consisting of a three-axis magnetic sensor and two accelerometers on high-spinning projectile, a new scheme comprised of two magnetic sensors and two accelerometers installed in a particular way is given. The configuration of the sensors is described. The calculation method and the mathematical model of the projectile attitude based on the sensor configuration are discussed. The basic calculation method including the Magsonde Window, the proof of the ratios of maximums and minimums and the calculation of the attitude angles are analyzed in theory. Finally, the system is simulated under the given conditions. The simulation result indicates that the estimated attitude angles are in agreement with the true attitude angles.展开更多
Resonant accelerometer is designed,which includes two double-ended tuning forks,a proof mass,four-leverage system amplifying inertial force,and drive/sense combs.Each tuning fork is electrostatically actuated and sens...Resonant accelerometer is designed,which includes two double-ended tuning forks,a proof mass,four-leverage system amplifying inertial force,and drive/sense combs.Each tuning fork is electrostatically actuated and sensed at resonance using comb electrodes.The device is fabricated using MEMS bulk-silicon technology,whose sensitive degree is 27 3Hz/g,and the resolution is 167 8μg.展开更多
A novel capacitive biaxial microaccelerometer with a highly symmetrical microstructure is developed. The sensor is composed of a single seismic mass, grid strip, supporting beam, joint beam, and damping adjusting comb...A novel capacitive biaxial microaccelerometer with a highly symmetrical microstructure is developed. The sensor is composed of a single seismic mass, grid strip, supporting beam, joint beam, and damping adjusting combs. The sensing method of changing capacitance area is used in the design,which depresses the requirement of the DRIE process, and de- creases electronic noise by increasing sensing voltage to improve the resolution. The parameters and characteristics of the biaxial microaccelerometer are discussed with the FEM tool ANSYS. The simulated results show that the transverse sensitivity of the sensor is equal to zero. The testing devices based on the slide-film damping effect are fabricated, and the testing quality factor is 514, which shows that the designed structure can improve the resolution and proves the feasibility of the designed process.展开更多
A tunneling accelerometer is fabricated and characterized based on the extension of the silicon-glass anodic-bonding and deep etching releasing process provided by Peking University.The tunneling current under open lo...A tunneling accelerometer is fabricated and characterized based on the extension of the silicon-glass anodic-bonding and deep etching releasing process provided by Peking University.The tunneling current under open loop operation is tested in the air by HP4145B semiconductor analyzer,which verifies the presence of tunneling current and the exponential relationship between tunneling gap and tunneling current.The tunneling barrier is extrapolated to be from 1.182 to 2.177eV.The threshold voltages are tested to be 14～16V for most of the devices.The threshold voltages under -1,0,and +1g are tested,respectively,which shows the sensitivity of the accelerometer is about 87mV/g.展开更多
This paper presents two approaches for system-level simulation of force-balance accelerometers. The derivation of the system-level model is elaborated and simulation results are obtained from the implementation of tho...This paper presents two approaches for system-level simulation of force-balance accelerometers. The derivation of the system-level model is elaborated and simulation results are obtained from the implementation of those strategies on the fabricated silicon force-balance MEMS accelerometer. The mathematical model presented is implemented in VHDL- AMS and SIMULINK TM,respectively. The simulation results from the two approaches are compared and show a slight difference. Using VHDL-AMS is flexible,reusable,and more accurate. But there is not a mature solver developed for the language and this approach takes more time, while the simulation model can be easily built and quickly evaluated using SIMULINK.展开更多
基金Sponsored by the National Natural Science Foundation of China(Grant No.61204121)the National Hi-Tech Research and Development Program of China(Grant No.2013AA041107)
文摘In this paper,a fifth-order fully differential interface circuit( IC) is presented to improve the noise performance for micromechanical sigma-delta( Σ-Δ) accelerometer. A lead compensator is adopted to ensure the stability of the closed-loop high-order system. A low noise capacitance detection circuit is described with a correlated-double-sampling( CDS) technique to decrease 1 /f noise and offset of the operational amplifier. This paper also proposes a self-test technique for the interface circuit to test the harmonic distortion. An electrostatic force feedback linearization circuit is presented to reduce the harmonic distortion resulting in larger dynamic range( DR). The layout of the IC is implemented in a standard 0. 6 μm CMOS technology and operates at a sampling frequency of 250 kHz. The interface consumes 20 mW from a 5 V supply. The post-simulation results indicate that the noise floor of the digital accelerometer is about- 140 dBV /Hz1 /2at low frequency. The sensitivity is 2. 5 V /g and the nonlinearity is 0. 11%. The self-test function is achieved with 98. 2 dB thirdorder harmonic distortion detection based on the electrostatic force feedback linearization.
基金Project supported by the National High Technology Research and Development Program of China(No2008AA042201)
文摘This paper reports a low noise switched-capacitor CMOS interface circuit for the closed-loop operation of a capacitive accelerometer.The time division multiplexing of the same electrode is adopted to avoid the strong feedthrough between capacitance sensing and electrostatic force feedback.A PID controller is designed to ensure the stability and dynamic response of a high Q closed-loop accelerometer with a vacuum package.The architecture only requires single ended operational amplifiers,transmission gates and capacitors.Test results show that a full scale acceleration of±3 g,non-linearity of 0.05%and signal bandwidth of 1000 Hz are achieved.The complete module operates from a±5 V supply and has a measured sensitivity of 1.2 V/g with a noise of floor of 0.8μg/（Hz）;in closed-loop.The chip is fabricated in the 2μm two-metal and two-poly n-well CMOS process with an area of 15.2 mm;.These results prove that this circuit is suitable for high performance micro-accelerometer applications like seismic detection and oil exploration.
基金Project(61404122)supported by the National Natural Science Foundation of China
文摘The noise of closed loop micro-electromechanical systems(MEMS) capacitive accelerometer is treated as one of the significant performance specifications.Traditional optimization of noise performance often focuses on designing large capacitive sensitivity accelerometer and applying closed loop structure to shape total noise,but different noise sources in closed loop and their behaviors at low frequencies are seldom carefully studied,especially their behaviors with different electronic parameters.In this work,a thorough noise analysis is established focusing on the four noise sources transfer functions near 0 Hz with simplified electronic parameters in closed loop,and it is found that the total electronic noise equivalent acceleration varies differently at different frequency points,such that the noise spectrum shape at low frequencies can be altered from 1/f noise-like shape to flat spectrum shape.The bias instability changes as a consequence.With appropriate parameters settings,the 670 Hz resonant frequency accelerometer can reach resolution of 2.6 μg/(Hz)1/2 at 2 Hz and 6 μg bias instability,and 1300 Hz accelerometer can achieve 5μg/(Hz)1/2 at 2 Hz and 31 μg bias instability.Both accelerometers have flat spectrum profile from 2 Hz to 15 Hz.
文摘In order to suppress the influence of temperature changes on the performance of accelerometers,a digital quartz resonant accelerometer with low temperature drift is developed using a quartz resonator cluster as a transducer element.In addition,a digital intellectual property(IP) is designed in FPGA to achieve signal processing and fusion of integrated resonators.A testing system for digital quartz resonant accelerometers is established to characterize the performance under different conditions.The scale factor of the accelerometer prototype reaches 3561.63 Hz/g in the range of -1 g to +1 g,and 3542.5 Hz/g in the range of-10 g to+10 g.In different measurement ranges,the linear correlation coefficient R~2 of the accelerometer achieves greater than 0.998.The temperature drift of the accelerometer prototype is tested using a constant temperature test chamber,with a temperature change from -20℃ to 80℃.After temperature-drift compensation,the zero bias temperature coefficient falls to 0.08 mg/℃,and the scale factor temperature coefficient is 65.43 ppm/℃.The experimental results show that the digital quartz resonant accelerometer exhibits excellent sensitivity and low temperature drift.
文摘Along with process control,perception represents the main function performed by the Edge Layer of an Internet of Things(IoT)network.Many of these networks implement various applications where the response time does not represent an important parameter.However,in critical applications,this parameter represents a crucial aspect.One important sensing device used in IoT designs is the accelerometer.In most applications,the response time of the embedded driver software handling this device is generally not analysed and not taken into account.In this paper,we present the design and implementation of a predictable real-time driver stack for a popular accelerometer and gyroscope device family.We provide clear justifications for why this response time is extremely important for critical applications in the acquisition process of such data.We present extensive measurements and experimental results that demonstrate the predictability of our solution,making it suitable for critical real-time systems.
基金funded by the German Research Foundation[Grant Number:496846758].
文摘Objectives:Valid estimation of energy expenditure remains a challenge,particularly when using ankle-and thighworn devices.The Move 4 is a research-grade accelerometer previously tested for predicting metabolic equivalents(METs)when worn at the waist or wrist.This study aimed to calibrate and evaluate regression models to estimate METs from Move 4 data when worn at the ankle and thigh.Methods:Participants completed walking and jogging tasks under laboratory conditions while wearing Move 4 sensors and with indirect calorimetry as a reference measure.Models were calibrated using study 1(n=160)and evaluated in an independent dataset(study 2;n=15).Performance was assessed using mean absolute error(MAE),root mean square error(RMSE),and Bland-Altman analyses.Results:The MET models demonstrated strong agreement across both locations and datasets.For the thigh position,the MAE ranged from 0.60 METs(walking)to 1.38 METs(jogging),with RMSE of 0.82 and 1.70 in the evaluation data.Calibration metrics were comparable(jogging:MAE=1.24,RMSE=1.63).The ankle models showed similar accuracy,with MAEs of 0.66(walking)and 1.39(jogging),and RMSEs of 0.85 and 1.67,respectively.Systematic bias remained low(mean differences between−0.34 and−0.01 METs).Conclusions:This study provides the first calibration and evaluation for estimating METs from ankle-and thigh-worn Move 4 accelerometers.The model indicated accurate,highresolution MET estimation for walking and jogging.Future work should expand independent performance evaluations,including diverse activities such as static activities,and diverse samples under free-living conditions.
基金funded by Vietnam National Foundation for Science and Technology Development(NAFOSTED)under grant number:02/2022/TN.
文摘This study focuses on the design and validation of a behavior classification system for cattle using behavioral data collected through accelerometer sensors.Data collection and behavioral analysis are achieved using machine learning(ML)algorithms through accelerometer sensors.However,behavioral analysis poses challenges due to the complexity of cow activities.The task becomes more challenging in a real-time behavioral analysis system with the requirement for shorter data windows and energy constraints.Shorter windows may lack sufficient information,reducing algorithm performance.Additionally,the sensor’s position on the cowsmay shift during practical use,altering the collected accelerometer data.This study addresses these challenges by employing a 3-s data window to analyze cow behaviors,specifically Feeding,Lying,Standing,and Walking.Data synchronization between accelerometer sensors placed on the neck and leg compensates for the lack of information in short data windows.Features such as the Vector of Dynamic Body Acceleration(VeDBA),Mean,Variance,and Kurtosis are utilized alongside the Decision Tree(DT)algorithm to address energy efficiency and ensure computational effectiveness.This study also evaluates the impact of sensor misalignment on behavior classification.Simulated datasets with varying levels of sensor misalignment were created,and the system’s classification accuracy exceeded 0.95 for the four behaviors across all datasets(including original and simulated misalignment datasets).Sensitivity(Sen)and PPV for all datasets were above 0.9.The study provides farmers and the dairy industry with a practical,energy-efficient system for continuously monitoring cattle behavior to enhance herd productivity while reducing labor costs.
基金supported by the National Natural Science Foundation of China(42276199).
文摘In order to get rid of the dependence on high-precision centrifuges in accelerometer nonlinear coefficients calibration,this paper proposes a system-level calibration method for field condition.Firstly,a 42-dimension Kalman filter is constructed to reduce impact brought by turntable.Then,a biaxial rotation path is designed based on the accelerometer output model,including orthogonal 22 positions and tilt 12 positions,which enhances gravity excitation on nonlinear coefficients of accelerometer.Finally,sampling is carried out for calibration and further experiments.The results of static inertial navigation experiments lasting 4000 s show that compared with the traditional method,the proposed method reduces the position error by about 390 m.
基金Project supported by the National Natural Science Foundation of China(Grant No.32473216)Ningbo Youth Science and Technology Innovation Leading Talent Project(Grant No.2023QL004)。
文摘Vibration detection using sensors with both wide working frequency range,good sensitivity,and other good performances is a topic of great interest in fields such as inertial navigation,deep-sea fishing boat engines condition monitoring,seismic monitoring,attitude,and heading reference system,etc.This paper investigates two 6H-SIC MEMS diaphragms,one triangular and the other square,used in a fiber optic Fabry–Perot(FP)accelerometer in an experimental scenario.The triangular chip shows a wide working frequency range of 630 Hz–5300 Hz,a natural frequency of 44.3 k Hz,and a mechanical sensitivity of 0.154 nm/g.An optimal structure of the square chip used in a probe such as a fiber optic FP accelerometer also shows a wide working frequency range of 120 Hz–2300 Hz;a good sensitivity of 31.5 m V/g,a resonance frequency of7873 Hz,an accuracy of 0.96%F.S.,a frequency measurement error of 1.15%,and an excellent linearity of 0.9995.
基金Sponsored by the National High Technology Research and Development Program of China(863Program)(Grant No.2008AA042201)
文摘To achieve a high precision capacitive closed-loop micro-accelerometer,a full differential CMOS based on switched-capacitor circuit was presented in this paper as the sensor interface circuit.This circuit consists of a balance-bridge module,a charge sensitive amplifier,a correlated-double-sampling module,and a logic timing control module.A special two-path feedback circuit configuration was given to improve the system linearity.The quantitative analysis of error voltage and noise shows that there is tradeoff around circuit's noise,speed and accuracy.A detailed design method was given for this tradeoff.The noise performance optimized circuit has a noise root spectral density of 1.0 μV/Hz,equivalent to rms noise root spectral density of 1.63 μg/Hz.Therefore,the sensor's Brown noise becomes the main noise source in this design.This circuit is designed with 0.5 μm n-well CMOS process.Under a ±5 V supply,the Hspice simulation shows that the system sensitivity achieves 0.616 V/g,the system offset is as low as 1.456 mV,the non-linearity is below 0.03%,and the system linear range achieves ±5 g.
基金supported by the National Natural Science Foundation of China(62205377).
文摘A high precision detection technique is analyzed based on the optical micro electro-mechanical system(MEMS)accelerometer with double gratings for noise suppression and scale factor enhancement.The brief sensing model and modulation detection model are built using the phase sensitive detection,and the relationship between stimulated acceleration and system output is given.The schematics of gap modulation and light intensity modulation are analyzed respectively,and the choice of modulation frequency in the optical MEMS accelerometer system is discussed.According to the experimental results,the scale factor is improved from 15.45 V/g with the gap modulation to 18.78 V/g with the light intensity modulation,and the signal to noise ratio is improved from 42.95 dB to 81.73 dB.The overall noise level in the optical MEMS accelerometer is effectively suppressed.
文摘Device-based measurements are recommended to improve population-based physical activity(PA)surveillance.1,2However,implementation remains challenging due to lack of consensus on analytical methods,and the most widely used“generic”(absolute intensity)cut-point approach has limited generalisability to population-level free-living data.Further,current methods generally fail to account for differences in people's physical capacity.
文摘Type 2 diabetes(T2D)is a global public health issue.In 2021,537 million adults were diagnosed with T2D,corresponding to 10.5%of adults aged 20 and older.^(1)T2D increases the risks for morbidity,disability,and premature mortality,which increased by 3%between 2000 and 2019.2 Evidence is strong that maintaining a healthy diet,engaging in regular physical activity(PA),and preventing obesity can prevent or delay the incidence of T2D.
基金supported by the National Key R esearch and Development Program of China(No.2023YFF0724300)the National Natural Science Foundation of China(No.32171373)+1 种基金the Fundamental Research Funds for the Central Universities(No.YG2025QNB08)the Natural Science Foundation of Shanghai(No.23ZR1414500).
文摘Microneedle technology has undergone a paradigm shift from basic transdermal drug delivery to intelligent,closed-loop theranostic systems.Hydrogel materials have emerged as core carriers due to their excellent biocompatibility,efficient drug loading capacity,and improved patient compliance.Moreover,critical bottlenecks in hydrogel microneedles,including poor mechanical strength,burst release of drugs,and delayed response to treatment,can be addressed via cross-scale integration of nanomaterials.This review systematically outlines several multiscale engineering strategies to overcome these limitations.The construction of nanotopological networks coupled with dynamic crosslinking modulation synergistically enhances the mechanical properties,stability of drug loading,and conductivity of hydrogel microneedles.Furthermore,responsive nanocarriers equipped with biosensors help establish a closed-loop linkage between monitoring and therapeutic functions.We highlight their synergistic theranostic advantages in scenarios such as wound regulation and tumor-immune microenvironments,while revealing the role in integrating flexible electronics with wearable systems in intelligent medicine.We also summarize the research advances on the biosafety and scalable manufacturing processes of nanocomposite hydrogel m icroneedles(NHMNs),providing examples of clinical translation to elucidate the path from fundamental research to industrial implementation.As a convergence of nanotechnology,biomaterials,and flexible electronics,NHMNs provide new standards for transdermal theranostics as well as a roadmap for iterative advancement of intelligent theranostic devices in personalized medicine.Their cross-scale collaborative design,which spans from the properties of materials to the functional integration of macroscopic devices,can facilitate potential breakthroughs in next-generation closed-loop theranostic systems.
基金the National Natural Science Foundation of China(No.50775209)NCET~~
文摘A calculation and test method for the natural frequency of a high-g micro accelerometer with complex structures is presented. A universal formula for natural frequency, which can significantly simplify the structural design process, is deduced and confirmed by experiment. A simplified analytical model is established to describe the accelerometer＇s mechanical behavior and deduce the formula for the natural frequency. Finite element modeling is also conducted to evaluate the natural frequency of the micro-accelerometer and verify the formula. The results obtained from the analytical model and the finite element simulation show good agreement. Finally, a shock comparison method designed for acquiring the high frequency characteristics of the accelerometer is introduced to verify the formula by testing its actual natural frequency.
文摘In allusion to the limitations of the traditional attitude measurement system consisting of a three-axis magnetic sensor and two accelerometers on high-spinning projectile, a new scheme comprised of two magnetic sensors and two accelerometers installed in a particular way is given. The configuration of the sensors is described. The calculation method and the mathematical model of the projectile attitude based on the sensor configuration are discussed. The basic calculation method including the Magsonde Window, the proof of the ratios of maximums and minimums and the calculation of the attitude angles are analyzed in theory. Finally, the system is simulated under the given conditions. The simulation result indicates that the estimated attitude angles are in agreement with the true attitude angles.
文摘Resonant accelerometer is designed,which includes two double-ended tuning forks,a proof mass,four-leverage system amplifying inertial force,and drive/sense combs.Each tuning fork is electrostatically actuated and sensed at resonance using comb electrodes.The device is fabricated using MEMS bulk-silicon technology,whose sensitive degree is 27 3Hz/g,and the resolution is 167 8μg.
文摘A novel capacitive biaxial microaccelerometer with a highly symmetrical microstructure is developed. The sensor is composed of a single seismic mass, grid strip, supporting beam, joint beam, and damping adjusting combs. The sensing method of changing capacitance area is used in the design,which depresses the requirement of the DRIE process, and de- creases electronic noise by increasing sensing voltage to improve the resolution. The parameters and characteristics of the biaxial microaccelerometer are discussed with the FEM tool ANSYS. The simulated results show that the transverse sensitivity of the sensor is equal to zero. The testing devices based on the slide-film damping effect are fabricated, and the testing quality factor is 514, which shows that the designed structure can improve the resolution and proves the feasibility of the designed process.
文摘A tunneling accelerometer is fabricated and characterized based on the extension of the silicon-glass anodic-bonding and deep etching releasing process provided by Peking University.The tunneling current under open loop operation is tested in the air by HP4145B semiconductor analyzer,which verifies the presence of tunneling current and the exponential relationship between tunneling gap and tunneling current.The tunneling barrier is extrapolated to be from 1.182 to 2.177eV.The threshold voltages are tested to be 14～16V for most of the devices.The threshold voltages under -1,0,and +1g are tested,respectively,which shows the sensitivity of the accelerometer is about 87mV/g.
文摘This paper presents two approaches for system-level simulation of force-balance accelerometers. The derivation of the system-level model is elaborated and simulation results are obtained from the implementation of those strategies on the fabricated silicon force-balance MEMS accelerometer. The mathematical model presented is implemented in VHDL- AMS and SIMULINK TM,respectively. The simulation results from the two approaches are compared and show a slight difference. Using VHDL-AMS is flexible,reusable,and more accurate. But there is not a mature solver developed for the language and this approach takes more time, while the simulation model can be easily built and quickly evaluated using SIMULINK.
