To achieve a high precision capacitive closed-loop micro-accelerometer,a full differential CMOS based on switched-capacitor circuit was presented in this paper as the sensor interface circuit.This circuit consists of ...To achieve a high precision capacitive closed-loop micro-accelerometer,a full differential CMOS based on switched-capacitor circuit was presented in this paper as the sensor interface circuit.This circuit consists of a balance-bridge module,a charge sensitive amplifier,a correlated-double-sampling module,and a logic timing control module.A special two-path feedback circuit configuration was given to improve the system linearity.The quantitative analysis of error voltage and noise shows that there is tradeoff around circuit's noise,speed and accuracy.A detailed design method was given for this tradeoff.The noise performance optimized circuit has a noise root spectral density of 1.0 μV/Hz,equivalent to rms noise root spectral density of 1.63 μg/Hz.Therefore,the sensor's Brown noise becomes the main noise source in this design.This circuit is designed with 0.5 μm n-well CMOS process.Under a ±5 V supply,the Hspice simulation shows that the system sensitivity achieves 0.616 V/g,the system offset is as low as 1.456 mV,the non-linearity is below 0.03%,and the system linear range achieves ±5 g.展开更多
The comb capacitances fabricated by deep reactive ion etching （RIE） process have high aspect ratio which is usually smaller than 30 ： 1 for the complicated process factors, and the combs are usually not parallel du...The comb capacitances fabricated by deep reactive ion etching （RIE） process have high aspect ratio which is usually smaller than 30 ： 1 for the complicated process factors, and the combs are usually not parallel due to the well-known micro-loading effect and other process factors, which restricts the increase of the seismic mass by increasing the thickness of comb to reduce the thermal mechanical noise and the decrease of the gap of the comb capacitances for increasing the sensitive capacitance to reduce the electrical noise. Aiming at the disadvantage of the deep RIE, a novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capacitances is developed. One part of sensing of inertial signal of the micro-accelerometer is by the grid strip capacitances whose overlapping area is variable and which do not have the non-parallel plate＇s effect caused by the deep RIE process. Another part is by the sensing gap alterable capacitances whose gap between combs can be reduced by the actuators. The designed initial gap of the alterable comb capacitances is relatively large to depress the effect of the maximum aspect ratio （30 ： 1） of deep RIE process. The initial gap of the capacitance of the actuator is smaller than the one of the comb capacitances. The difference between the two gaps is the initial gap of the sensitive capacitor. The designed structure depresses greatly the requirement of deep RIE process. The effects of non-parallel combs on the accelerometer are also analyzed. The characteristics of the micro-accelerometer are discussed by field emission microscopy （FEM） tool ANSYS. The tested devices based on slide-film damping effect are fabricated, and the tested quality factor is 514, which shows that grid strip capacitance design can partly improve the resolution and also prove the feasibility of the designed silicon-glass anodically bonding process.展开更多
In recent decades,capacitive pressure sensors(CPSs)with high sensitivity have demonstrated significant potential in applications such as medical monitoring,artificial intelligence,and soft robotics.Efforts to enhance ...In recent decades,capacitive pressure sensors(CPSs)with high sensitivity have demonstrated significant potential in applications such as medical monitoring,artificial intelligence,and soft robotics.Efforts to enhance this sensitivity have predominantly focused on material design and structural optimization,with surface microstructures such as wrinkles,pyramids,and micro-pillars proving effective.Although finite element modeling(FEM)has guided enhancements in CPS sensitivity across various surface designs,a theoretical understanding of sensitivity improvements remains underexplored.This paper employs sinusoidal wavy surfaces as a representative model to analytically elucidate the underlying mechanisms of sensitivity enhancement through contact mechanics.These theoretical insights are corroborated by FEM and experimental validations.Our findings underscore that optimizing material properties,such as Young’s modulus and relative permittivity,alongside adjustments in surface roughness and substrate thickness,can significantly elevate the sensitivity.The optimal performance is achieved when the amplitude-to-wavelength ratio(H/)is about 0.2.These results offer critical insights for designing ultrasensitive CPS devices,paving the way for advancements in sensor technology.展开更多
Low-electrode capacitive deionization(FCDI)is an emerging desalination technology with great potential for removal and/or recycling ions from a range of waters.However,it still suffers from inefficient charge transfer...Low-electrode capacitive deionization(FCDI)is an emerging desalination technology with great potential for removal and/or recycling ions from a range of waters.However,it still suffers from inefficient charge transfer and ion transport kinetics due to weak turbulence and low electric intensity in flow electrodes,both restricted by the current collectors.Herein,a new tip-array current collector(designated as T-CC)was developed to replace the conventional planar current collectors,which intensifies both the charge transfer and ion transport significantly.The effects of tip arrays on flow and electric fields were studied by both computational simulations and electrochemical impedance spectroscopy,which revealed the reduction of ion transport barrier,charge transport barrier and internal resistance.With the voltage increased from 1.0 to 1.5 and 2.0 V,the T-CC-based FCDI system(T-FCDI)exhibited average salt removal rates(ASRR)of 0.18,0.50,and 0.89μmol cm^(-2) min^(-1),respectively,which are 1.82,2.65,and 2.48 folds higher than that of the conventional serpentine current collectors,and 1.48,1.67,and 1.49 folds higher than that of the planar current collectors.Meanwhile,with the solid content in flow electrodes increased from 1 to 5 wt%,the ASRR for T-FCDI increased from 0.29 to 0.50μmol cm^(-2) min^(-1),which are 1.70 and 1.67 folds higher than that of the planar current collectors.Additionally,a salt removal efficiency of 99.89%was achieved with T-FCDI and the charge efficiency remained above 95%after 24 h of operation,thus showing its superior long-term stability.展开更多
Capacitive voltage transformers (CVTs) are essential in high-voltage systems. An accurate error assessment is crucial for precise energy metering. However, tracking real-time quantitative changes in capacitive voltage...Capacitive voltage transformers (CVTs) are essential in high-voltage systems. An accurate error assessment is crucial for precise energy metering. However, tracking real-time quantitative changes in capacitive voltage transformer errors, particularly minor variations in multi-channel setups, remains challenging. This paper proposes a method for online error tracking of multi-channel capacitive voltage transformers using a Co-Prediction Matrix. The approach leverages the strong correlation between in-phase channels, particularly the invariance of the signal proportions among them. By establishing a co-prediction matrix based on these proportional relationships, The influence of voltage changes on the primary measurements is mitigated. Analyzing the relationships between the co-prediction matrices over time allows for inferring true measurement errors. Experimental validation with real-world data confirms the effectiveness of the method, demonstrating its capability to continuously track capacitive voltage transformer measurement errors online with precision over extended durations.展开更多
Flow-electrode capacitive deionization(FCDI)is a newly developed desalination technology with a high electrode loading for superior salt removal efficiency,even with high feed salinity.However,the improvement in FCDI ...Flow-electrode capacitive deionization(FCDI)is a newly developed desalination technology with a high electrode loading for superior salt removal efficiency,even with high feed salinity.However,the improvement in FCDI performance could be restricted by obstacles such as poor charge transfer in the electrode slurry and agglomeration of the electrode particles.Therefore,various FCDIelectrode materials have been studied to overcome these bottlenecks through various mechanisms.Herein,a minireview is conducted to summarize the relevant information and provide a comprehensive view of the progress in FCDI electrode materials.Flow-electrode materials can be classified into three main groups:carbon materials,metalbased materials,and carbon-metal composites.Carbonbased capacitive materials with outstanding conductivities can facilitate charge transfer in FCDI,whereas metal-based materials and carbon-metal composites with ion-intercalative behaviors exhibit high ion adsorption abilities.Additionally,carbon materials with surface function groups can enhance electrode dispersion and reach a high electrode loading by electrostatic repulsion,further upgrading the conductive network of FCDI.Moreover,magnetic carbon-metal composites can be easily separated,and the salt removal performance can be improved with magnetic fields.Different electrode materials exhibit disparate features during FCDI development.Thus,combining these materials to obtain FCDI electrodes with multiple functions may be reasonable,which could be a promising direction for FCDI research.展开更多
Hybrid capacitive deionization(HCDI)shows promise for desalinating brackish and saline water by utilizing the pseudocapacitive properties of faradaic electrodes.Organic materials,with their low environmental impact an...Hybrid capacitive deionization(HCDI)shows promise for desalinating brackish and saline water by utilizing the pseudocapacitive properties of faradaic electrodes.Organic materials,with their low environmental impact and adaptable structures,are attractive for this application.However,their scarcity of active sites and tendency to dissolve in water-based solutions remain significant challenges.Herein,we synthesized a polynaphthalenequinoneimine(PCON)polymer with stable long-range ordered framework and rough three-dimensional floral surface morphology,along with high-density active sites provided by C=O and C=N functional groups,enabling efficient redox reactions and achieving a high Na^(+)capture capability.The synthesized PCON polymer showcases outstanding electroadsorption characteristics and notable structural robustness,attaining an impressive specific capacitance of 500.45 F g^(-1) at 1 A g^(-1) and maintaining 86.1%of its original capacitance following 5000 charge–discharge cycles.Benefiting from the superior pseudocapacitive properties of the PCON polymer,we have developed an HCDI system that not only exhibits exceptional salt removal capacity of 100.8 mg g^(-1) and a remarkable rapid average removal rate of 3.36 mg g^(-1) min-1 but also maintains 97%of its initial desalination capacity after 50 cycles,thereby distinguishing itself in the field of state-ofthe-art desalination technologies with its comprehensive performance that significantly surpasses reported organic capacitive deionization materials.Prospectively,the synthesis paradigm of the double active-sites PCON polymer may be extrapolated to other organic electrodes,heralding new avenues for the design of high-performance desalination systems.展开更多
Solar-driven interface evaporation with high solar-to-steam conversion efficiency has shown great potential in seawater desalination.However,due to the influence of latent heat and condensation efficiency,the water yi...Solar-driven interface evaporation with high solar-to-steam conversion efficiency has shown great potential in seawater desalination.However,due to the influence of latent heat and condensation efficiency,the water yield from solar-driven interface evaporation remains insufficient,posing a significant challenge that requires resolution.In this work,we designed a dual-mode high-flux seawater desalination device that combines solar-driven interface evaporation and capacitive desalination.By utilizing coupled desalination materials exhibiting both photothermal conversion and capacitance activity,the device demonstrated photothermal evaporation rates of 1.41 and 0.97 kg m^(-2)h^(-1)for condensate water yield under one-sun irradiation.Additionally,the device exhibited a salt adsorption capacity of up to48 mg g^(-1)and a salt adsorption rate of 2.1 mg g^(-1)min-1.In addition,the salt adsorption capacity increased by approximately 32%under one-sun irradiation.Furthermore,photo-enhanced capacitive desalination performance was explored through numerical simulations and theoretical calculations.Theoretical calculations and characterizations confirmed that the defect energy levels formed by the introduction of sulfur vacancies can effectively widen the light absorption range,improve photothermal conversion performance,and stimulate more photoelectrons to participate in capacitive desalination.Concurrently,the electron distribution state of molybdenum disulfide with sulfur vacancies and surface defect sites contributes to ion/electron transport at the solid-liquid interface.This work provides a novel pathway for integrating solar vapor generation with other low-energy desalination technologies.展开更多
The development of intelligent electronic power systems necessitates advanced flexible pressure sensors.Despite improved compressibility through surface micro-structures or bulk pores,conventional capacitive pressure ...The development of intelligent electronic power systems necessitates advanced flexible pressure sensors.Despite improved compressibility through surface micro-structures or bulk pores,conventional capacitive pressure sensors face limitations due to their low dielectric constant and poor temperature tolerance of most elastomers.Herein,we constructed oriented polyimide-based aerogels with mechanical robustness and notable changes in dielectric constant under compression.The enhancement is attributed to the doping of surface-modified dielectric nanoparticles and graphene oxide sheets,which interact with polymer molecular chains.The resulting aerogels,with their excellent temperature resistance,were used to assemble high-performance capacitive pressure sensors.The sensor exhibits a maximum sensitivity of 1.41 kPa^(−1)over a wide working range of 0-200 kPa.Meanwhile,the sensor can operate in environments up to 150℃during 2000 compression/release cycles.Furthermore,the aerogel-based sensor demonstrates proximity sensing capabilities,showing great potential for applications in non-contact sensing and extreme environment detection.展开更多
Since conventional photocatalytic technology fails to achieve complete elimination of chlorophenol contaminants from aqueous environments,this study presents a synergistic photocatalysis-capacitive deionization(PC-CDI...Since conventional photocatalytic technology fails to achieve complete elimination of chlorophenol contaminants from aqueous environments,this study presents a synergistic photocatalysis-capacitive deionization(PC-CDI)system as an advanced solution for industrial chlorophenol wastewater remediation.The PC-CDI system,employing boron nitride/carbon nitride(BN/CN)heterojunction electrodes,demonstrates exceptional degradation performance toward chlorophenols.The high-surface-area porous BN/CN heterojunction facilitates electro-adsorption and charge carrier separation,thereby synergistically optimizing both photocatalytic(PC)and capacitive deionization(CDI)functionalities.Remarkably,the integrated system achieves a 2,4-DCP degradation efficiency of 97.15%and a 2,4,6-TCP degradation efficiency of 100%in 2 h.The CDI component enables spatial separation through the electro-adsorption of Cl^(-)ions at the anode,effectively mitigating their interference and suppressing chlorinated byproduct formation.Concurrently,the electro-adsorption of positively charged chlorophenol pollutants accelerates their diffusion to catalytic sites,promoting the reactive oxygen species(ROS)-driven degradation of chlorophenol pollutants.The PC-CDI system exhibits robust stability(>95%efficiency retention over five cycles)and broad applicability across various chlorophenol derivatives.By circumventing Cl^(-)-induced side reactions and inhibiting chlorine radical generation during photocatalysis,this strategy minimizes the environmental risks associated with chlorinated byproducts during chlorophenol wastewater treatment.These findings establish the PC-CDI system as a sustainable and eco-friendly technology for industrial wastewater treatment.展开更多
High-performance electrode materials are critical for the development of the capacitive deionization(CDI)technology for efficient water desalination.In this study,binder-free porous carbon electrodes were successfully...High-performance electrode materials are critical for the development of the capacitive deionization(CDI)technology for efficient water desalination.In this study,binder-free porous carbon electrodes were successfully prepared from the fungal hyphae sheet with the formation and growth of metal-organic framework(MOF)crystals on the surface of hyphal fibers.The continuous fungal fibrous structure with abundant surface functional groups provided an ideal supporting substrate for in-situ oriented MOF growth.The MOF-fungal hyphae derived carbon(MOF-Fhy-C)exhibited an excellent property for CDI application,such as a large accessible surface area,excellent electrical conductivity,high porosity and hydrophilicity.The MOF-Fhy-C electrode achieved an outstanding CDI performance with a salt adsorption capacity of 40.8 mg g^(-1)and an average salt adsorption rate of 1.4 mg g^(-1)min-1for treating 10 mmol L^(-1)NaCl solution at a cell voltage of 1.2 V,which are considerably higher than most of carbon-based electrodes reported in the literature.This research presents an effective strategy for fabricating freestanding CDI electrodes from fungal materials with MOF for high-performance desalination.展开更多
Conductive hydrogel membranes with nanofluids channels represent one of the most promising capacitive electrodes due to their rapid kinetics of ion transport.The construction of these unique structures always requires...Conductive hydrogel membranes with nanofluids channels represent one of the most promising capacitive electrodes due to their rapid kinetics of ion transport.The construction of these unique structures always requires new self-assembly behaviors with different building blocks,intriguing phenomena of colloidal chemistry.In this work,by delicately balancing the electrostatic repulsions between 2D inorganic nanosheets and the electrostatic adsorption with cations,we develop a general strategy to fabricate stable free-standing 1T molybdenum disulphide(MoS_(2))hydrogel membranes with abundant fluidic channels.Given the interpenetrating ionic transport network,the MoS_(2)hydrogel membranes exhibit a highlevel capacitive performance 1.34 F/cm^(2)at an ultrahigh mass loading of 11.2 mg/cm^(2).Furthermore,the interlayer spacing of MoS_(2)in the hydrogel membranes can be controlled with angstrom-scale precision using different cations,which can promote further fundamental studies and potential applications of the transition-metal dichalcogenides hydrogel membranes.展开更多
A novel capacitive pressure sensor is presented, whose sensing structure is a solid-state capacitor consisting of three square membranes with Al/SiO2/n-type silicon. It was fabricated using pn junction self-stop etchi...A novel capacitive pressure sensor is presented, whose sensing structure is a solid-state capacitor consisting of three square membranes with Al/SiO2/n-type silicon. It was fabricated using pn junction self-stop etching combined with adhesive bonding,and only three masks were used during the process. Sensors with side lengths of 1000,1200,and 1400μm were fabricated,showing sensitivity of 1.8,2.3, and 3.6fF/hPa over the range of 410～ 1010hPa, respectively. The sensi- tivity of the sensor with a side length of 1500μm is 4. 6fF/hPa,the nonlinearity is 6. 4% ,and the max hysteresis is 3.6%. The results show that permittivity change plays an important part in the capacitance change.展开更多
A novel capacitive biaxial microaccelerometer with a highly symmetrical microstructure is developed. The sensor is composed of a single seismic mass, grid strip, supporting beam, joint beam, and damping adjusting comb...A novel capacitive biaxial microaccelerometer with a highly symmetrical microstructure is developed. The sensor is composed of a single seismic mass, grid strip, supporting beam, joint beam, and damping adjusting combs. The sensing method of changing capacitance area is used in the design,which depresses the requirement of the DRIE process, and de- creases electronic noise by increasing sensing voltage to improve the resolution. The parameters and characteristics of the biaxial microaccelerometer are discussed with the FEM tool ANSYS. The simulated results show that the transverse sensitivity of the sensor is equal to zero. The testing devices based on the slide-film damping effect are fabricated, and the testing quality factor is 514, which shows that the designed structure can improve the resolution and proves the feasibility of the designed process.展开更多
The operational principle and the lumped parameters model of capacitive micro-accelerometer are introduced. The equivalent stiffness of different directions of the accelerometer is given. From the point of view of ene...The operational principle and the lumped parameters model of capacitive micro-accelerometer are introduced. The equivalent stiffness of different directions of the accelerometer is given. From the point of view of energy and mechanics, expressions of some key parameters, such as the damping, sensitivity, resolution of the accelerometer, are derived. The accelerometer noise behavior of mechanical-thermal noise in the open-loop system, along with the dynamic range of the open-loop system and closed-loop system is analyzed. The result is that the noise of the capacitive micro accelerometer is dominated by the magnitude of mechanical-thermal noise. At the same time, the magnitude of mechanical-thermal noise depends on the temperature and magnitude of mechanical damp. The result of the measurement from the implemented closed-loop microo-accelerometer system shows that the resolution is the level of rag, and the measurement range is from -50g to 50g.展开更多
A novel capacitive microwave MEMS switch with a silicon/metal/dielectric as a membrane is fabricated successfully by bonding and etching-stop process. Its principal, design, and fabricating process are described in de...A novel capacitive microwave MEMS switch with a silicon/metal/dielectric as a membrane is fabricated successfully by bonding and etching-stop process. Its principal, design, and fabricating process are described in detail. A patterned dielectric layer, Ta2O5, with dielectric constant of 24 is reached. Experiment results show this novel structure,where the switch＇s dielectric layer is not prepared on the transmission line, features very low insertion loss. The insertion loss is 0.06dB at 2GHz and lower than 0.5dB in the wider range from De up to 20GHz,especially when the transmission line metal is only 0. 5μm thick.展开更多
A new instrument called capacitive drop analyser (CDA) for measuring the physical properties of liquid is developed.A delivery head with a specialized wetting design was constructed for forming drops.The capacitive tr...A new instrument called capacitive drop analyser (CDA) for measuring the physical properties of liquid is developed.A delivery head with a specialized wetting design was constructed for forming drops.The capacitive transducer uses the delivery head as one of its plates and a cylindrical ring plate.Excellent linearity is achieved by optimising the design,with an accuracy of drop volume measurement of approximately 2 μL.It is suitable for measuring both drops in equilibrium and those in the process of growing.Its capability of real time measurement makes it particularly useful for volatile liquids,in which instance the measurement of drop volume using a flowmeter or a pump is no longer reliable.The CDA can also be used to determine concentration.It is found that concentration curve is linear for aqueous glycerol solutions although not so for aqueous ethanol solution.The CDAs capability of measuring surface tension is also explored and experimental results are presented.展开更多
Because of the low energy requirement and the environmentally safe byproducts, the capacitive deionization water desalination technology has attracted the attention of many researchers. The important requirements for ...Because of the low energy requirement and the environmentally safe byproducts, the capacitive deionization water desalination technology has attracted the attention of many researchers. The important requirements for electrode materials are good electrical conductivity, high surface area, good chemical stability and high specific capacitance. In this study, metallic nanoparticles that are encapsulated in a graphite shell(Cd doped Co/C NPs) are introduced as the new electrode material for the capacitive deionization process because they have higher specific capacitance than the pristine carbonaceous materials. Cd doped Co/C NPs perform better than graphene and the activated carbon. The introduced nanoparticles were synthesized using a simple sol gel technique. A typical sol gel composed of cadmium acetate, cobalt acetate and poly(vinyl alcohol)was prepared based on the polycondensation property of the acetates. The physiochemical characterizations that were used confirmed that the drying, grinding and calcination in an Ar atmosphere of the prepared gel produced the Cd doped Co nanoparticles, which were encapsulated in a thin graphite layer. Overall, the present study suggests a new method to effectively use the encapsulated bimetallic nanostructures in the capacitive deionization technology.展开更多
In this paper, first a circular diaphragm is modeled using the classical plate theory. An analytical solution based on differential transformation method （DTM） and Runge-Kutta method is employed for solving the gove...In this paper, first a circular diaphragm is modeled using the classical plate theory. An analytical solution based on differential transformation method （DTM） and Runge-Kutta method is employed for solving the governing differential equation for the first time. Then the influences of various parameters on central deflection of the diaphragm, stress distribution and capacitance of pressure sensor with a time-dependent pressure are examined. Several case studies are compared with simulations to confirm the proposed method. The analytical results compared with ABAQUS simulation show excellent agreement with the simulation results. This method is very promising for time saving in calculating micro-device characteristics.展开更多
In this paper, the fabrication and investigation of flexible impedance and capacitive tensile load sensors based on carbon nanotube（CNT） composite are reported. On thin rubber substrates, CNTs are deposited from sus...In this paper, the fabrication and investigation of flexible impedance and capacitive tensile load sensors based on carbon nanotube（CNT） composite are reported. On thin rubber substrates, CNTs are deposited from suspension in water and pressed at elevated temperature. It is found that the fabricated load cells are highly sensitive to the applied mechanical force with good repeatability. The increase in impedance of the cells is observed to be 2.0 times while the decrease in the capacitance is found to be 2.1 times as applied force increases up to 0.3 N. The average impedance and capacitive sensitivity of the cell are equal to 3.4 N^（-1） and 1.8 N^（-1）, respectively. Experimental results are compared with the simulated values,and they show that they are in reasonable agreement with each other.展开更多
基金Sponsored by the National High Technology Research and Development Program of China(863Program)(Grant No.2008AA042201)
文摘To achieve a high precision capacitive closed-loop micro-accelerometer,a full differential CMOS based on switched-capacitor circuit was presented in this paper as the sensor interface circuit.This circuit consists of a balance-bridge module,a charge sensitive amplifier,a correlated-double-sampling module,and a logic timing control module.A special two-path feedback circuit configuration was given to improve the system linearity.The quantitative analysis of error voltage and noise shows that there is tradeoff around circuit's noise,speed and accuracy.A detailed design method was given for this tradeoff.The noise performance optimized circuit has a noise root spectral density of 1.0 μV/Hz,equivalent to rms noise root spectral density of 1.63 μg/Hz.Therefore,the sensor's Brown noise becomes the main noise source in this design.This circuit is designed with 0.5 μm n-well CMOS process.Under a ±5 V supply,the Hspice simulation shows that the system sensitivity achieves 0.616 V/g,the system offset is as low as 1.456 mV,the non-linearity is below 0.03%,and the system linear range achieves ±5 g.
基金supported by the National Natural Science Foundation of China (No. 60506015)the Zhejiang Provincial Natural ScienceFoundation of China (No.Y107105).
文摘The comb capacitances fabricated by deep reactive ion etching （RIE） process have high aspect ratio which is usually smaller than 30 ： 1 for the complicated process factors, and the combs are usually not parallel due to the well-known micro-loading effect and other process factors, which restricts the increase of the seismic mass by increasing the thickness of comb to reduce the thermal mechanical noise and the decrease of the gap of the comb capacitances for increasing the sensitive capacitance to reduce the electrical noise. Aiming at the disadvantage of the deep RIE, a novel capacitive micro-accelerometer with grid strip capacitances and sensing gap alterable capacitances is developed. One part of sensing of inertial signal of the micro-accelerometer is by the grid strip capacitances whose overlapping area is variable and which do not have the non-parallel plate＇s effect caused by the deep RIE process. Another part is by the sensing gap alterable capacitances whose gap between combs can be reduced by the actuators. The designed initial gap of the alterable comb capacitances is relatively large to depress the effect of the maximum aspect ratio （30 ： 1） of deep RIE process. The initial gap of the capacitance of the actuator is smaller than the one of the comb capacitances. The difference between the two gaps is the initial gap of the sensitive capacitor. The designed structure depresses greatly the requirement of deep RIE process. The effects of non-parallel combs on the accelerometer are also analyzed. The characteristics of the micro-accelerometer are discussed by field emission microscopy （FEM） tool ANSYS. The tested devices based on slide-film damping effect are fabricated, and the tested quality factor is 514, which shows that grid strip capacitance design can partly improve the resolution and also prove the feasibility of the designed silicon-glass anodically bonding process.
基金supported by the National Natural Science Foundation of China(Grant No.12272369)the Strategic Priority Research Program of the Chinese Academy of Sciences(Grant No.XDB0620101).
文摘In recent decades,capacitive pressure sensors(CPSs)with high sensitivity have demonstrated significant potential in applications such as medical monitoring,artificial intelligence,and soft robotics.Efforts to enhance this sensitivity have predominantly focused on material design and structural optimization,with surface microstructures such as wrinkles,pyramids,and micro-pillars proving effective.Although finite element modeling(FEM)has guided enhancements in CPS sensitivity across various surface designs,a theoretical understanding of sensitivity improvements remains underexplored.This paper employs sinusoidal wavy surfaces as a representative model to analytically elucidate the underlying mechanisms of sensitivity enhancement through contact mechanics.These theoretical insights are corroborated by FEM and experimental validations.Our findings underscore that optimizing material properties,such as Young’s modulus and relative permittivity,alongside adjustments in surface roughness and substrate thickness,can significantly elevate the sensitivity.The optimal performance is achieved when the amplitude-to-wavelength ratio(H/)is about 0.2.These results offer critical insights for designing ultrasensitive CPS devices,paving the way for advancements in sensor technology.
基金supported by the Shenzhen Science and Technology Program(JCYJ20230808105111022,JCYJ20220818095806013)Natural Science Foundation of Guangdong(2023A1515012267)+1 种基金the National Natural Science Foundation of China(22178223)the Royal Society/NSFC cost share program(IEC\NSFC\223372).
文摘Low-electrode capacitive deionization(FCDI)is an emerging desalination technology with great potential for removal and/or recycling ions from a range of waters.However,it still suffers from inefficient charge transfer and ion transport kinetics due to weak turbulence and low electric intensity in flow electrodes,both restricted by the current collectors.Herein,a new tip-array current collector(designated as T-CC)was developed to replace the conventional planar current collectors,which intensifies both the charge transfer and ion transport significantly.The effects of tip arrays on flow and electric fields were studied by both computational simulations and electrochemical impedance spectroscopy,which revealed the reduction of ion transport barrier,charge transport barrier and internal resistance.With the voltage increased from 1.0 to 1.5 and 2.0 V,the T-CC-based FCDI system(T-FCDI)exhibited average salt removal rates(ASRR)of 0.18,0.50,and 0.89μmol cm^(-2) min^(-1),respectively,which are 1.82,2.65,and 2.48 folds higher than that of the conventional serpentine current collectors,and 1.48,1.67,and 1.49 folds higher than that of the planar current collectors.Meanwhile,with the solid content in flow electrodes increased from 1 to 5 wt%,the ASRR for T-FCDI increased from 0.29 to 0.50μmol cm^(-2) min^(-1),which are 1.70 and 1.67 folds higher than that of the planar current collectors.Additionally,a salt removal efficiency of 99.89%was achieved with T-FCDI and the charge efficiency remained above 95%after 24 h of operation,thus showing its superior long-term stability.
文摘Capacitive voltage transformers (CVTs) are essential in high-voltage systems. An accurate error assessment is crucial for precise energy metering. However, tracking real-time quantitative changes in capacitive voltage transformer errors, particularly minor variations in multi-channel setups, remains challenging. This paper proposes a method for online error tracking of multi-channel capacitive voltage transformers using a Co-Prediction Matrix. The approach leverages the strong correlation between in-phase channels, particularly the invariance of the signal proportions among them. By establishing a co-prediction matrix based on these proportional relationships, The influence of voltage changes on the primary measurements is mitigated. Analyzing the relationships between the co-prediction matrices over time allows for inferring true measurement errors. Experimental validation with real-world data confirms the effectiveness of the method, demonstrating its capability to continuously track capacitive voltage transformer measurement errors online with precision over extended durations.
基金financially supported by the National Natural Science Foundation of China(No.52374423)the Science and Technology Innovation Program of Hunan Province(No.2021RC4010)the Science and Technology Major Project of Changsha(No.kh2401030)
文摘Flow-electrode capacitive deionization(FCDI)is a newly developed desalination technology with a high electrode loading for superior salt removal efficiency,even with high feed salinity.However,the improvement in FCDI performance could be restricted by obstacles such as poor charge transfer in the electrode slurry and agglomeration of the electrode particles.Therefore,various FCDIelectrode materials have been studied to overcome these bottlenecks through various mechanisms.Herein,a minireview is conducted to summarize the relevant information and provide a comprehensive view of the progress in FCDI electrode materials.Flow-electrode materials can be classified into three main groups:carbon materials,metalbased materials,and carbon-metal composites.Carbonbased capacitive materials with outstanding conductivities can facilitate charge transfer in FCDI,whereas metal-based materials and carbon-metal composites with ion-intercalative behaviors exhibit high ion adsorption abilities.Additionally,carbon materials with surface function groups can enhance electrode dispersion and reach a high electrode loading by electrostatic repulsion,further upgrading the conductive network of FCDI.Moreover,magnetic carbon-metal composites can be easily separated,and the salt removal performance can be improved with magnetic fields.Different electrode materials exhibit disparate features during FCDI development.Thus,combining these materials to obtain FCDI electrodes with multiple functions may be reasonable,which could be a promising direction for FCDI research.
基金supported by the National Key R&D Program of China(Grant Nos.2023YFC3009900)National Natural Science Foundation of China(Grant Nos.61904116)+1 种基金Natural Science Foundation of Jiangsu Province(Grant Nos.BK20211029)the young scientific talent lifting project of Jiangsu Association for Science and Technology(Grant Nos.JSTJ-2023-018).
文摘Hybrid capacitive deionization(HCDI)shows promise for desalinating brackish and saline water by utilizing the pseudocapacitive properties of faradaic electrodes.Organic materials,with their low environmental impact and adaptable structures,are attractive for this application.However,their scarcity of active sites and tendency to dissolve in water-based solutions remain significant challenges.Herein,we synthesized a polynaphthalenequinoneimine(PCON)polymer with stable long-range ordered framework and rough three-dimensional floral surface morphology,along with high-density active sites provided by C=O and C=N functional groups,enabling efficient redox reactions and achieving a high Na^(+)capture capability.The synthesized PCON polymer showcases outstanding electroadsorption characteristics and notable structural robustness,attaining an impressive specific capacitance of 500.45 F g^(-1) at 1 A g^(-1) and maintaining 86.1%of its original capacitance following 5000 charge–discharge cycles.Benefiting from the superior pseudocapacitive properties of the PCON polymer,we have developed an HCDI system that not only exhibits exceptional salt removal capacity of 100.8 mg g^(-1) and a remarkable rapid average removal rate of 3.36 mg g^(-1) min-1 but also maintains 97%of its initial desalination capacity after 50 cycles,thereby distinguishing itself in the field of state-ofthe-art desalination technologies with its comprehensive performance that significantly surpasses reported organic capacitive deionization materials.Prospectively,the synthesis paradigm of the double active-sites PCON polymer may be extrapolated to other organic electrodes,heralding new avenues for the design of high-performance desalination systems.
基金financially supported by research grants from the Natural Science Foundation of China(52173235,22265010,12204071,62074022)National Key Research and Development Program of China(2022YFB3803300)+2 种基金Youth Talent Support Program of Chongqing(CQYC2021059206)Hainan Province Science and Technology Special Fund(ZDYF2024SHFZ038)Science and Technology Innovation and Improving Project of Army Medical University(No.2021XJS24)。
文摘Solar-driven interface evaporation with high solar-to-steam conversion efficiency has shown great potential in seawater desalination.However,due to the influence of latent heat and condensation efficiency,the water yield from solar-driven interface evaporation remains insufficient,posing a significant challenge that requires resolution.In this work,we designed a dual-mode high-flux seawater desalination device that combines solar-driven interface evaporation and capacitive desalination.By utilizing coupled desalination materials exhibiting both photothermal conversion and capacitance activity,the device demonstrated photothermal evaporation rates of 1.41 and 0.97 kg m^(-2)h^(-1)for condensate water yield under one-sun irradiation.Additionally,the device exhibited a salt adsorption capacity of up to48 mg g^(-1)and a salt adsorption rate of 2.1 mg g^(-1)min-1.In addition,the salt adsorption capacity increased by approximately 32%under one-sun irradiation.Furthermore,photo-enhanced capacitive desalination performance was explored through numerical simulations and theoretical calculations.Theoretical calculations and characterizations confirmed that the defect energy levels formed by the introduction of sulfur vacancies can effectively widen the light absorption range,improve photothermal conversion performance,and stimulate more photoelectrons to participate in capacitive desalination.Concurrently,the electron distribution state of molybdenum disulfide with sulfur vacancies and surface defect sites contributes to ion/electron transport at the solid-liquid interface.This work provides a novel pathway for integrating solar vapor generation with other low-energy desalination technologies.
基金financially supported by the National Key Research&Development Program of China(No.2022YFA1205200).
文摘The development of intelligent electronic power systems necessitates advanced flexible pressure sensors.Despite improved compressibility through surface micro-structures or bulk pores,conventional capacitive pressure sensors face limitations due to their low dielectric constant and poor temperature tolerance of most elastomers.Herein,we constructed oriented polyimide-based aerogels with mechanical robustness and notable changes in dielectric constant under compression.The enhancement is attributed to the doping of surface-modified dielectric nanoparticles and graphene oxide sheets,which interact with polymer molecular chains.The resulting aerogels,with their excellent temperature resistance,were used to assemble high-performance capacitive pressure sensors.The sensor exhibits a maximum sensitivity of 1.41 kPa^(−1)over a wide working range of 0-200 kPa.Meanwhile,the sensor can operate in environments up to 150℃during 2000 compression/release cycles.Furthermore,the aerogel-based sensor demonstrates proximity sensing capabilities,showing great potential for applications in non-contact sensing and extreme environment detection.
文摘Since conventional photocatalytic technology fails to achieve complete elimination of chlorophenol contaminants from aqueous environments,this study presents a synergistic photocatalysis-capacitive deionization(PC-CDI)system as an advanced solution for industrial chlorophenol wastewater remediation.The PC-CDI system,employing boron nitride/carbon nitride(BN/CN)heterojunction electrodes,demonstrates exceptional degradation performance toward chlorophenols.The high-surface-area porous BN/CN heterojunction facilitates electro-adsorption and charge carrier separation,thereby synergistically optimizing both photocatalytic(PC)and capacitive deionization(CDI)functionalities.Remarkably,the integrated system achieves a 2,4-DCP degradation efficiency of 97.15%and a 2,4,6-TCP degradation efficiency of 100%in 2 h.The CDI component enables spatial separation through the electro-adsorption of Cl^(-)ions at the anode,effectively mitigating their interference and suppressing chlorinated byproduct formation.Concurrently,the electro-adsorption of positively charged chlorophenol pollutants accelerates their diffusion to catalytic sites,promoting the reactive oxygen species(ROS)-driven degradation of chlorophenol pollutants.The PC-CDI system exhibits robust stability(>95%efficiency retention over five cycles)and broad applicability across various chlorophenol derivatives.By circumventing Cl^(-)-induced side reactions and inhibiting chlorine radical generation during photocatalysis,this strategy minimizes the environmental risks associated with chlorinated byproducts during chlorophenol wastewater treatment.These findings establish the PC-CDI system as a sustainable and eco-friendly technology for industrial wastewater treatment.
基金financially supported by the National Key R&D Program of China(Project 2024YFE0202100)International Collaboration Program of Huangpu District in Guangzhou(Project 2023GH13)+3 种基金the National Natural Science Foundation of China(Projects 52300153,52270128,and 52400150)the Basic and Applied Basic Research Foundation of Guangdong Government(Project 2024A050509001)Science and Technology Planning Project of Guangdong Province(Project 2024A0505090013)the Municipal Science and Technology Innovation Commission of Shenzhen Government(Projects SGDX20230116092359002 and KCXFZ20240903094205008),China。
文摘High-performance electrode materials are critical for the development of the capacitive deionization(CDI)technology for efficient water desalination.In this study,binder-free porous carbon electrodes were successfully prepared from the fungal hyphae sheet with the formation and growth of metal-organic framework(MOF)crystals on the surface of hyphal fibers.The continuous fungal fibrous structure with abundant surface functional groups provided an ideal supporting substrate for in-situ oriented MOF growth.The MOF-fungal hyphae derived carbon(MOF-Fhy-C)exhibited an excellent property for CDI application,such as a large accessible surface area,excellent electrical conductivity,high porosity and hydrophilicity.The MOF-Fhy-C electrode achieved an outstanding CDI performance with a salt adsorption capacity of 40.8 mg g^(-1)and an average salt adsorption rate of 1.4 mg g^(-1)min-1for treating 10 mmol L^(-1)NaCl solution at a cell voltage of 1.2 V,which are considerably higher than most of carbon-based electrodes reported in the literature.This research presents an effective strategy for fabricating freestanding CDI electrodes from fungal materials with MOF for high-performance desalination.
基金supported by the National Natural Science Foundation of China(Nos.22078214,21905206,and 22065013)Special Fund for Science and Technology Innovation Team of Shanxi Province(No.202204051001009)。
文摘Conductive hydrogel membranes with nanofluids channels represent one of the most promising capacitive electrodes due to their rapid kinetics of ion transport.The construction of these unique structures always requires new self-assembly behaviors with different building blocks,intriguing phenomena of colloidal chemistry.In this work,by delicately balancing the electrostatic repulsions between 2D inorganic nanosheets and the electrostatic adsorption with cations,we develop a general strategy to fabricate stable free-standing 1T molybdenum disulphide(MoS_(2))hydrogel membranes with abundant fluidic channels.Given the interpenetrating ionic transport network,the MoS_(2)hydrogel membranes exhibit a highlevel capacitive performance 1.34 F/cm^(2)at an ultrahigh mass loading of 11.2 mg/cm^(2).Furthermore,the interlayer spacing of MoS_(2)in the hydrogel membranes can be controlled with angstrom-scale precision using different cations,which can promote further fundamental studies and potential applications of the transition-metal dichalcogenides hydrogel membranes.
文摘A novel capacitive pressure sensor is presented, whose sensing structure is a solid-state capacitor consisting of three square membranes with Al/SiO2/n-type silicon. It was fabricated using pn junction self-stop etching combined with adhesive bonding,and only three masks were used during the process. Sensors with side lengths of 1000,1200,and 1400μm were fabricated,showing sensitivity of 1.8,2.3, and 3.6fF/hPa over the range of 410～ 1010hPa, respectively. The sensi- tivity of the sensor with a side length of 1500μm is 4. 6fF/hPa,the nonlinearity is 6. 4% ,and the max hysteresis is 3.6%. The results show that permittivity change plays an important part in the capacitance change.
文摘A novel capacitive biaxial microaccelerometer with a highly symmetrical microstructure is developed. The sensor is composed of a single seismic mass, grid strip, supporting beam, joint beam, and damping adjusting combs. The sensing method of changing capacitance area is used in the design,which depresses the requirement of the DRIE process, and de- creases electronic noise by increasing sensing voltage to improve the resolution. The parameters and characteristics of the biaxial microaccelerometer are discussed with the FEM tool ANSYS. The simulated results show that the transverse sensitivity of the sensor is equal to zero. The testing devices based on the slide-film damping effect are fabricated, and the testing quality factor is 514, which shows that the designed structure can improve the resolution and proves the feasibility of the designed process.
文摘The operational principle and the lumped parameters model of capacitive micro-accelerometer are introduced. The equivalent stiffness of different directions of the accelerometer is given. From the point of view of energy and mechanics, expressions of some key parameters, such as the damping, sensitivity, resolution of the accelerometer, are derived. The accelerometer noise behavior of mechanical-thermal noise in the open-loop system, along with the dynamic range of the open-loop system and closed-loop system is analyzed. The result is that the noise of the capacitive micro accelerometer is dominated by the magnitude of mechanical-thermal noise. At the same time, the magnitude of mechanical-thermal noise depends on the temperature and magnitude of mechanical damp. The result of the measurement from the implemented closed-loop microo-accelerometer system shows that the resolution is the level of rag, and the measurement range is from -50g to 50g.
文摘A novel capacitive microwave MEMS switch with a silicon/metal/dielectric as a membrane is fabricated successfully by bonding and etching-stop process. Its principal, design, and fabricating process are described in detail. A patterned dielectric layer, Ta2O5, with dielectric constant of 24 is reached. Experiment results show this novel structure,where the switch＇s dielectric layer is not prepared on the transmission line, features very low insertion loss. The insertion loss is 0.06dB at 2GHz and lower than 0.5dB in the wider range from De up to 20GHz,especially when the transmission line metal is only 0. 5μm thick.
文摘A new instrument called capacitive drop analyser (CDA) for measuring the physical properties of liquid is developed.A delivery head with a specialized wetting design was constructed for forming drops.The capacitive transducer uses the delivery head as one of its plates and a cylindrical ring plate.Excellent linearity is achieved by optimising the design,with an accuracy of drop volume measurement of approximately 2 μL.It is suitable for measuring both drops in equilibrium and those in the process of growing.Its capability of real time measurement makes it particularly useful for volatile liquids,in which instance the measurement of drop volume using a flowmeter or a pump is no longer reliable.The CDA can also be used to determine concentration.It is found that concentration curve is linear for aqueous glycerol solutions although not so for aqueous ethanol solution.The CDAs capability of measuring surface tension is also explored and experimental results are presented.
基金financially supported by the National Plan for Science & Technology (NPST), King Saud University Project No. 11-NAN1460-02
文摘Because of the low energy requirement and the environmentally safe byproducts, the capacitive deionization water desalination technology has attracted the attention of many researchers. The important requirements for electrode materials are good electrical conductivity, high surface area, good chemical stability and high specific capacitance. In this study, metallic nanoparticles that are encapsulated in a graphite shell(Cd doped Co/C NPs) are introduced as the new electrode material for the capacitive deionization process because they have higher specific capacitance than the pristine carbonaceous materials. Cd doped Co/C NPs perform better than graphene and the activated carbon. The introduced nanoparticles were synthesized using a simple sol gel technique. A typical sol gel composed of cadmium acetate, cobalt acetate and poly(vinyl alcohol)was prepared based on the polycondensation property of the acetates. The physiochemical characterizations that were used confirmed that the drying, grinding and calcination in an Ar atmosphere of the prepared gel produced the Cd doped Co nanoparticles, which were encapsulated in a thin graphite layer. Overall, the present study suggests a new method to effectively use the encapsulated bimetallic nanostructures in the capacitive deionization technology.
文摘In this paper, first a circular diaphragm is modeled using the classical plate theory. An analytical solution based on differential transformation method （DTM） and Runge-Kutta method is employed for solving the governing differential equation for the first time. Then the influences of various parameters on central deflection of the diaphragm, stress distribution and capacitance of pressure sensor with a time-dependent pressure are examined. Several case studies are compared with simulations to confirm the proposed method. The analytical results compared with ABAQUS simulation show excellent agreement with the simulation results. This method is very promising for time saving in calculating micro-device characteristics.
基金Ghulam Ishaq Khan Institute of Engineering Science and Technology, Pakistan for its support
文摘In this paper, the fabrication and investigation of flexible impedance and capacitive tensile load sensors based on carbon nanotube（CNT） composite are reported. On thin rubber substrates, CNTs are deposited from suspension in water and pressed at elevated temperature. It is found that the fabricated load cells are highly sensitive to the applied mechanical force with good repeatability. The increase in impedance of the cells is observed to be 2.0 times while the decrease in the capacitance is found to be 2.1 times as applied force increases up to 0.3 N. The average impedance and capacitive sensitivity of the cell are equal to 3.4 N^（-1） and 1.8 N^（-1）, respectively. Experimental results are compared with the simulated values,and they show that they are in reasonable agreement with each other.
