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SnO_2的含量对ITO透明导电薄膜结构和光电特性的影响 被引量:4
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作者 杨田林 王爱芳 韩圣浩 《光电子技术》 CAS 2004年第2期89-92,共4页
阐述了射频磁控溅射方法制备的柔性衬底 ITO透明导电膜的结构和光电特性与靶材中 Sn O2 含量的关系。ITO靶材中 In2 O3 掺杂 Sn O2 最佳比例 (质量比 )为 7.5 % ,制备薄膜的霍耳迁移率为 89.3cm2 /( V· s) ,电阻率为 6.3× 1 0... 阐述了射频磁控溅射方法制备的柔性衬底 ITO透明导电膜的结构和光电特性与靶材中 Sn O2 含量的关系。ITO靶材中 In2 O3 掺杂 Sn O2 最佳比例 (质量比 )为 7.5 % ,制备薄膜的霍耳迁移率为 89.3cm2 /( V· s) ,电阻率为 6.3× 1 0 -4Ω· cm,在可见光范围内相对透过率为85 %左右 ,随着靶材中 Sn O2 含量增大 ,薄膜的光学带隙展宽。用不同掺杂比例的靶材制备的薄膜均为多晶纤锌矿结构 ,掺杂比例增大 ,样品的晶格常数变大 。 展开更多
关键词 ito薄膜 掺杂比例 光电特性 射频溅射
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Preparation and Characterization of CeO_2-TiO_2/SnO_2:Sb Films Deposited on Glass Substrates by R.F.Sputtering 被引量:6
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作者 ZHAO Qingnan DONG Yuhong NI Jiamiao WANG Peng ZHAO Xiujian 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2008年第4期443-447,共5页
CeO2-TiO2 films and CeO2-TiO/SnO2:Sb (6 mol%) double films were deposited on glass substrates by radio-frequency magnetron sputtering (R.F. Sputtering), using SnO2:Sb(6 mol%) target, and CeO2- TiO2 targets wit... CeO2-TiO2 films and CeO2-TiO/SnO2:Sb (6 mol%) double films were deposited on glass substrates by radio-frequency magnetron sputtering (R.F. Sputtering), using SnO2:Sb(6 mol%) target, and CeO2- TiO2 targets with different molar ratio of CeO2 to TiO2 (CeO2:TiO2-0:1.0; 0.1:0.9; 0.2:0.8; 0.3:0.7; 0.4:0.6; 0.5:0.5; 0.6:0.4; 0.7:0.3; 0.8:0.2; 0.9:0.1; 1.0:0). The films are characterized by UV-visible transmission and infrared reflection spectra, scanning electron microscopy (SEM), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD), respectively. The obtained results show that the amorphous phases composed of CeO2-TiO2 play an important role in absorbing UV, there are Ce^3-, Ce^4- and Ti^4- on the surface of the films; the glass substrates coated with CeO2-TiO2 (Ce/Ti=0.5:0.5; 0.6:0.4)/SnO2:Sb(6 mol%) double films show high absorbing UV(〉99), high visible light transmission (75%) and good infrared reflection (〉70%). The sheet resistance of the films is 30-50 Ω/□. The glass substrates coated with the double functional films can be used as window glass of buildings, automobile and so on. 展开更多
关键词 coating glass CeO2-TiO/sno2:Sb double thin films absorbing UV IR reflection R.F. sputterin
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ITO和SnO_2透明导电膜的用途与制备 被引量:1
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作者 齐甸农 《上海金属(有色分册)》 1992年第2期45-52,共8页
本文综述了ITO和SnO_2透明导电膜的用途、性能、透明导电机理及其主要的制备方法。
关键词 ito sno2 透明 导电膜
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SnO_2纳米半导体颗粒的微区电子输运特性 被引量:2
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作者 张忠锁 赵伟 +3 位作者 陈艳辉 李蕴才 黄亚彬 杜祖亮 《郑州大学学报(理学版)》 CAS 2004年第4期23-27,共5页
将 sol- gel方法制备的 Sn O2 纳米颗粒涂覆在 ITO(Indium- Tin- Oxide)导电玻璃上 ,用原子力显微镜的 I- V测试功能测试其微区电特性 .结果表明 ,不同粒度的伏 -安特性曲线具有不同的双向阈值电压 ,随颗粒度的减小 ,开启电压减小 .用... 将 sol- gel方法制备的 Sn O2 纳米颗粒涂覆在 ITO(Indium- Tin- Oxide)导电玻璃上 ,用原子力显微镜的 I- V测试功能测试其微区电特性 .结果表明 ,不同粒度的伏 -安特性曲线具有不同的双向阈值电压 ,随颗粒度的减小 ,开启电压减小 .用表面能带理论分析结果表明 ,此现象与纳米 Sn O2 颗粒度尺寸效应和氧空位有关 . 展开更多
关键词 电子输运 sno2 纳米半导体 sol-gel方法 能带理论 导电玻璃 氧空位 开启电压 阈值电压 ito
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SnO_2微晶掺杂SiO_2玻璃薄膜的制备及光谱性质的研究 被引量:1
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作者 顾少轩 赵修建 +2 位作者 周静 张枫 潘劲松 《陶瓷学报》 CAS 2000年第4期202-204,共3页
采用溶胶 -凝胶法成功地制备出SnO2 微晶掺杂SiO2 玻璃薄膜。通过X射线粉末衍射和晶胞常数计算确认了SnO2 纳米微晶均匀分布于玻璃基质中 ;由薄膜的室温透射光谱研究发现 ,随热处理温度的升高、热处理时间的延长 ,薄膜的透射光谱向长波... 采用溶胶 -凝胶法成功地制备出SnO2 微晶掺杂SiO2 玻璃薄膜。通过X射线粉末衍射和晶胞常数计算确认了SnO2 纳米微晶均匀分布于玻璃基质中 ;由薄膜的室温透射光谱研究发现 ,随热处理温度的升高、热处理时间的延长 ,薄膜的透射光谱向长波方向移动 ,表现出明显的量子尺寸效应。 展开更多
关键词 掺杂玻璃 溶胶-凝胶法 二氧化YANG 二氧化硅
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Study on the Long Term Sensing Properties of pCO_2 Sensitive Electrode
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作者 Szu-Ping Chen Jung-Chuan Chou +1 位作者 Tai-Ping Sun Shen-Kan Hsiung 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2006年第A03期217-220,共4页
In this paper,the pCO_2 sensitive electrode was studied for continuous measurement.The solid electrolyte membrane and gas-permeable membrane were coated on the surface of the pH sensitive electrode which was fabricate... In this paper,the pCO_2 sensitive electrode was studied for continuous measurement.The solid electrolyte membrane and gas-permeable membrane were coated on the surface of the pH sensitive electrode which was fabricated based on the SnO_2/ITO glass substrate.According to the experimental results,the pCO_2 sensitive electrode shows the sensitivity of about 35 mV/decade in detection range between 0.1 mmol/L and 50 mmol/L.Moreover,the investigated sensing structure exhibits the convenient and pragmatic properties of the pCO_2 measurement.In summary,the advantages of the pCO_2 sensitive electrode are low-cost and disposable based on the separative structure. 展开更多
关键词 pCO2 sensitive electrode solid electrolyte membrane gas-permeable membrane sno2/ito glass substrate
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二氧化锡覆盖层对ITO透明导电薄膜热稳定性的改良 被引量:1
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作者 于仕辉 丁玲红 张伟风 《电子元件与材料》 CAS CSCD 北大核心 2012年第7期51-54,共4页
采用射频磁控溅射法在ITO玻璃表面沉积了一层15 nm左右的SnO2薄膜。利用霍尔效应测试仪、四探针电阻测试仪、场发射电子显微镜及紫外–可见–近红外光谱仪分析了所制薄膜的电学性质、表面形貌和光学性质。结果表明,在300~600 ℃退火后... 采用射频磁控溅射法在ITO玻璃表面沉积了一层15 nm左右的SnO2薄膜。利用霍尔效应测试仪、四探针电阻测试仪、场发射电子显微镜及紫外–可见–近红外光谱仪分析了所制薄膜的电学性质、表面形貌和光学性质。结果表明,在300~600 ℃退火后镀有SnO2覆盖层的ITO(SnO2/ITO)薄膜具有相对好的热学稳定性。在600 ℃退火后,ITO薄膜的方阻和电阻率分别为88.3 Ω/□和2.5×10–3 Ω·cm,而此时,SnO2/ITO薄膜的方阻和电阻率仅为43.8 Ω/□和1.2×10–3 Ω·cm。最后,阐述了SnO2覆盖层提高ITO薄膜热稳定性的机制。 展开更多
关键词 氧化铟锡(ito) 磁控溅射 sno2 热稳定性
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Ultraviolet-shielding and conductive double functional films coated on glass substrates by sol-gel process 被引量:2
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作者 董玉红 赵青南 +1 位作者 吴硕 卢秀强 《Journal of Rare Earths》 SCIE EI CAS CSCD 2010年第S1期446-450,共5页
Ultraviolet-shielding and conductive double functional films were composed of CeO2-TiO2 film and SnO2:Sb film deposited on glass substrates using sol-gel process.Ce(NO3)3·6H2O and Ti(C4H9O4),SnCl4 and SbCl3 were ... Ultraviolet-shielding and conductive double functional films were composed of CeO2-TiO2 film and SnO2:Sb film deposited on glass substrates using sol-gel process.Ce(NO3)3·6H2O and Ti(C4H9O4),SnCl4 and SbCl3 were used as precursors of the two different functional films respectively.The CeO2-TiO2 films were deposited on glass substrates by sol-gel dip coating method,and then the SnO2:Sb films with different thickness were deposited on the pre-coated CeO2-TiO2 thin film glass substrates,finally,the substrates coated with double functional films were annealed at different temperatures.The optical and electrical properties of the CeO2-TiO2 films and the double films were measured by UV-Vis spectrometer and four probe resistance measuring instrument.The crystal structures and surface morphology of the films were characterized using XRD and optical microscope,respectively.The obtained results show that the ultraviolet-shielding rate of the glass substrates with CeO2-TiO2 films is not less than 90%,and transmittance in visible lights can reach 65%.With the thickness of the SnO2:Sb film increasing,its conductivity became better,and the surface resistance is about 260 Ω/ when the SnO2:Sb films were deposited 11 cycles of the dip on the pre-coated CeO2-TiO2 glass.The ultraviolet-shielding rate of the glass substrates with double functional films is higher than 97%,and the peak transmittance in the visible lights is 72%.Additionally,with increasing the heat treatment time,the Na+ of the glass substrates diffuses into the films,resulting in the particle size of SnO2 crystal smaller. 展开更多
关键词 ultraviolet-shielding/conductive double functional films CeO2-TiO2 sno2:Sb glass substrates sol-gel rare earths
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透明导电氧化物薄膜材料及其制备技术研究进展 被引量:11
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作者 徐慢 夏冬林 赵修建 《材料导报》 EI CAS CSCD 北大核心 2006年第F11期312-314,322,共4页
综述了透明导电氧化物(TCO)薄膜的结构、光电性能以及TCO薄膜制备技术的研究进展。ITO薄膜性能优异,是重要的平面显示器件用材料。掺铝ZnO薄膜价格低廉,是极具开发前景的ITO薄膜的替代材料。柔性衬底氧化物半导体透明导电薄膜的开发和... 综述了透明导电氧化物(TCO)薄膜的结构、光电性能以及TCO薄膜制备技术的研究进展。ITO薄膜性能优异,是重要的平面显示器件用材料。掺铝ZnO薄膜价格低廉,是极具开发前景的ITO薄膜的替代材料。柔性衬底氧化物半导体透明导电薄膜的开发和应用将扩大TCO薄膜的应用领域。 展开更多
关键词 TCO ito sno2 ZNO 光电性能 制备技术
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Effect of KOH treatment on structural and photovoltaic properties of ZnO nanorod arrays 被引量:2
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作者 周艺 李荡 +3 位作者 黄燕 何文红 肖斌 李宏 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2012年第11期2736-2741,共6页
ZnO nanorod arrays (NRs) were synthesized on the fluorine-doped SnO2 transparent conductive glass (FTO) by a simple chemical bath deposition (CBD) method combined with alkali-etched method in potassium hydroxide... ZnO nanorod arrays (NRs) were synthesized on the fluorine-doped SnO2 transparent conductive glass (FTO) by a simple chemical bath deposition (CBD) method combined with alkali-etched method in potassium hydroxide (KOH) solution. X-ray diffraction (XRD), scanning electron microscopy (SEM) and current-voltage (I-V) curve were used to characterize the structure, morphologies and optoelectronic properties. The results demonstrated that ZnO NRs had wurtzite structures, the morphologies and photovoltaic properties of ZnO NRs were closely related to the concentration of KOH and etching time, well-aligned and uniformly distributed ZnO NRs were obtained after etching with 0.1 mol/L KOH for 1 h. ZnO NRs treated by KOH had been proved to have superior photovoltaic properties compared with high density ZnO NRs. When using ZnO NRs etched with 0.1 mol/L KOH for 1 h as the anode of solar cell, the conversion efficiency, short circuit current and open circuit voltage, compared with the unetched ZnO NRs, increased by 0.71%, 2.79 mA and 0.03 V, respectively. 展开更多
关键词 ZnO nanorod arrays sno2 transparent conductive glass alkali etching structural properties photovoltaic properties solar cells
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热壁外延生长GaAs薄膜的结构特征 被引量:1
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作者 涂洁磊 林理彬 +3 位作者 陈庭金 章晨静 吴长树 施光顺 《太阳能学报》 EI CAS CSCD 北大核心 2003年第1期14-17,共4页
该文介绍以Si和SnO2 / glass两种材料为衬底 ,采用热壁外延方法 ,制得GaAs多晶薄膜。采用电子探针 (EPMA)测定薄膜的组分、表面与剖面形貌 ,x射线衍射 (XRD)分析薄膜的结构情况。结果表明该薄膜表面呈绒面结构、其晶粒为柱状结构 ,初步... 该文介绍以Si和SnO2 / glass两种材料为衬底 ,采用热壁外延方法 ,制得GaAs多晶薄膜。采用电子探针 (EPMA)测定薄膜的组分、表面与剖面形貌 ,x射线衍射 (XRD)分析薄膜的结构情况。结果表明该薄膜表面呈绒面结构、其晶粒为柱状结构 ,初步证明这种GaAs多晶薄膜有希望成为新一代廉价、高效太阳电池的候选材料。 展开更多
关键词 太阳电池 GaAs薄膜 Si或sno2/glass衬底
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玻璃熔液测温用热电偶保护管的研制 被引量:5
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作者 贾英全 《中国陶瓷》 CAS CSCD 北大核心 2000年第1期30-32,共3页
研究了氧化物添加剂对氧化锡陶瓷性能的影响。选出一种适于高温玻璃熔池测温用的热电偶保护套管材料 ,并用冷等静压法制造出该种热电偶保护套管。
关键词 氧化锡陶瓷 玻璃熔池 测温 热电偶保护管
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非晶薄膜的硬度测量
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作者 钟伯强 朱文娟 陆忠乾 《无机材料学报》 SCIE EI CAS CSCD 北大核心 1991年第3期380-381,共2页
用努普(Knoop)压痕法测量了沉积在普通玻璃上的 ITO,SnO_2和非晶硅薄膜的硬度。在0.245N 负荷下测得它们的硬度分别是7232、7987和4929MPa。这些薄膜材料的硬度取决于薄膜制备方法和制备时的工艺条件,同时也与测量方法有关。不同衬底温... 用努普(Knoop)压痕法测量了沉积在普通玻璃上的 ITO,SnO_2和非晶硅薄膜的硬度。在0.245N 负荷下测得它们的硬度分别是7232、7987和4929MPa。这些薄膜材料的硬度取决于薄膜制备方法和制备时的工艺条件,同时也与测量方法有关。不同衬底温度时沉积的非晶硅薄膜,其硬度随温度降低而减小,这与非晶硅薄膜中所含的氢的多少有关。 展开更多
关键词 ito sno2 薄膜 非晶硅 硬度
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Calibration of the Circuit Measurement for the Glucose Sensor
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作者 Jung-Chuan Chou Sung-Chih Chen 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2006年第A03期337-338,共2页
The extended gate field effect transistor (EGFET)has many advantages such as the fabrication is easy,low cost, easy to operate etc.The EGFET was applied to biosensor in recent years.In this study,the tin oxide (SnO_2)... The extended gate field effect transistor (EGFET)has many advantages such as the fabrication is easy,low cost, easy to operate etc.The EGFET was applied to biosensor in recent years.In this study,the tin oxide (SnO_2)pH sensitive membrane was deposited on ITO glass,when the surface voltage which pH membrane changes,the gate voltage and current channel of MOSFET will change immediately to detect concentration of the glucose sensor.In this study we have devoted to research about the calibration of the circuit measurement for the glucose sensor,and study the calibration system of the drift and hysteresis. 展开更多
关键词 glucose sensor extended gate field effect transistor(EGFET) sno2/ito glass DRIFT HYSTERESIS
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Extended Gate Field Effect Transistor Based Measuring of the Vitamin C content of Orange Juice
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作者 Jung-Chuan Chou 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2006年第A03期342-343,共2页
An extended-gate field effect transistor (EGFET)of SnO_2/ITO glass was applied to manufacture the vitamin C sensor.Therefore,we immobilized the ascorbate oxidase with 3-glycidoxypropyltrimethoxysilane (GPTS)method to ... An extended-gate field effect transistor (EGFET)of SnO_2/ITO glass was applied to manufacture the vitamin C sensor.Therefore,we immobilized the ascorbate oxidase with 3-glycidoxypropyltrimethoxysilane (GPTS)method to measure the different concentrations of the vitamin C solution in an optimum measurement environment.In order to find the best measurement conditions of the biosensor,we studied the vitamin C sensor in different pH values of the phosphate buffer solution (PBS).Additionally,we used experimental results to discuss the response time and response voltage to compare vitamin C with orange juice for the vitamin C sensor. 展开更多
关键词 orange juice extended-gate field effect transistor sno2/ito glass vitamin C sensor
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Study on the Real Time pH Measurement System Using for Wireless Technology
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作者 Jun-Jie Feng Jung-Chuan Chou +1 位作者 Tai-Ping Sun Shen-Kan Hsiung 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2006年第A03期244-245,共2页
The application of Bluetooth on the pH sensor was accomplished.Based on the experimental results,Bluetooth technology was used to measure pH values without limiting the distance.Moreover,Biuetooth technology provides ... The application of Bluetooth on the pH sensor was accomplished.Based on the experimental results,Bluetooth technology was used to measure pH values without limiting the distance.Moreover,Biuetooth technology provides low power, low cost and small volume,therefore,it can increase the practicability of the system.In this investigation,the pH value was detected by the SnO_2/ITO glass-based pH sensor.During the signal progress,the detected signal was transferred to the microchip PIC18.After that,the microchip was able to communicate with PC by the Bluetooth.Moreover,the microchip can diagnose the sensing signal and sends the warning signal by alert function.In addition,the part of PC has the ability to record the information,builds the database for analyzing the pH values,and provides a better long-distance monitoring system. 展开更多
关键词 bluetooth technology sno2/ito glass-based pH sensor MICROCHIP monitoring system
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超声喷雾方法制备低辐射玻璃
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作者 陈红 高锦岳 +1 位作者 温津 周大凡 《物理实验》 北大核心 2004年第12期16-19,共4页
利用超声喷雾方法在玻璃基板上喷涂SnO2 :F薄膜 ,制备了低辐射玻璃 (Low E玻璃 ) .通过光谱测量 ,得到其可见光透过率为 85 %以上 ,在近红外波段出现高反射 .利用四探针测量仪 ,测量其面电阻在 2Ω/cm2 以下 .扫描电镜测量结果表明膜的... 利用超声喷雾方法在玻璃基板上喷涂SnO2 :F薄膜 ,制备了低辐射玻璃 (Low E玻璃 ) .通过光谱测量 ,得到其可见光透过率为 85 %以上 ,在近红外波段出现高反射 .利用四探针测量仪 ,测量其面电阻在 2Ω/cm2 以下 .扫描电镜测量结果表明膜的均匀性较好 ,平均颗粒直径约在 5 0nm .利用等离子体截止波长理论 ,解释了低辐射玻璃红外反射的物理机制 . 展开更多
关键词 超声喷雾热解法 sno2:F薄膜 低辐射玻璃
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Effect of Sn^(4+) content on properties of indium tin oxide nanopowders
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作者 徐宝强 冯瑞康 +1 位作者 杨斌 邓勇 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2010年第4期643-648,共6页
Indium tin oxide(ITO)nanopowders were prepared by a modified chemical co-precipitation process.The influence of different SnO2 contents on the decomposition behavior of ITO precursors,and on the phase and morphology o... Indium tin oxide(ITO)nanopowders were prepared by a modified chemical co-precipitation process.The influence of different SnO2 contents on the decomposition behavior of ITO precursors,and on the phase and morphology of ITO precursors and ITO nanopowders were studied by X-ray diffractometry,transmission electron microscopy and differential thermal and thermogravimetry analysis methods.The TG-DSC curves show that the decomposition process of precursor precipitation is completed when the temperature is close to 600 ℃and the end temperature of decompositionis somewhat lower when the doping amount of SnO2 is increased.The XRD patterns indicate that the solubility limit of Sn4+ relates directly to the calcining temperature. When being calcined at 700℃,a single phase ITO powder with 15%SnO2(mass fraction)can be obtained.But,when the calcining temperature is higher than 800℃,the phase of SnO2 will appear in ITO nanopowders which contain more than 10%SnO2.The particle size of the ITO nanopowders is 15-25 nm.The ITO nanoparticles without Sn have a spherical shape,but their morphology moves towards an irregular shape when being doped with Sn4+. 展开更多
关键词 indium tin oxide(ito) chemical precipitation NANO-PARTICLE sno2
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WO3薄膜用于水的光电化学净化
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《水处理信息报导》 2009年第3期43-43,共1页
通过使用有机前体物逐层的刷涂和旋涂在透明底物(玻璃和F:SnO2或涂有ITO的玻璃)上制备三氧化钨。在500℃或更高温度下退火后,在所有的底物上形成单斜晶体结构的结晶WO3。密集的半单体膜如镜面,并且带隙外侧是透明的。在与含水电解... 通过使用有机前体物逐层的刷涂和旋涂在透明底物(玻璃和F:SnO2或涂有ITO的玻璃)上制备三氧化钨。在500℃或更高温度下退火后,在所有的底物上形成单斜晶体结构的结晶WO3。密集的半单体膜如镜面,并且带隙外侧是透明的。在与含水电解质汇合处的光活性扩大到470nm,在313nm处入射光子对电流的换能效率为0.9,而在436nm处高达0.1(2007.4.19)。 展开更多
关键词 WO3薄膜 电化学净化 含水 三氧化钨 sno2 晶体结构 ito 前体物
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