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RF-PECVD制备类金刚石碳膜的沉积机理 被引量:2
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作者 程宇航 吴一平 +2 位作者 陈建国 乔学亮 谢长生 《真空电子技术》 1997年第4期17-22,共6页
本文综合评述了用射频等离子体化学气相沉积(RF-PECVD)法制备类金刚石碳膜过程中的等离子体化学反应和等离子体与材料表面反应机理的研究概况。着重介绍射频CH_4等离子体中,各种离子和中性基因的产生和传输机理,以及等... 本文综合评述了用射频等离子体化学气相沉积(RF-PECVD)法制备类金刚石碳膜过程中的等离子体化学反应和等离子体与材料表面反应机理的研究概况。着重介绍射频CH_4等离子体中,各种离子和中性基因的产生和传输机理,以及等离子体与材料表面反应的动力学基本理论。 展开更多
关键词 RF-PECVD 类金刚石碳膜 等离子体反应
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Current neutralization and plasma polarization for intense ion beams propagating through magnetized background plasmas in a two-dimensional slab approximation 被引量:4
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作者 Zhang-Hu Hu Mao-Du Chen You-Nian Wang 《Frontiers of physics》 SCIE CSCD 2014年第2期226-233,共8页
A two-dimensional electromagnetic Particle-in-Cell (PIC) simulation model is proposed to study the propagation of intense, ion beams with beaIn width wb small compared to the electron skin depth c/wpe through backg... A two-dimensional electromagnetic Particle-in-Cell (PIC) simulation model is proposed to study the propagation of intense, ion beams with beaIn width wb small compared to the electron skin depth c/wpe through background plaslnas in tile presence of external applied magnetic fields. The effcctive eleetron gyrora,dius wge is found to be an important parameter for ion beam transport in the presence of magnetic fields,In the bealn regions, the background plasmas respond differently to the ion beanl of width wb〈wge and wb 〉 wge for the given magnetic field and beaan encrgy, For the case of beam width wb 〈 wge with relative weak external magnetic fiehts, the rotalion effects of plasma electrons a,re found to be signifieant and contributes to the signitica,nt enilaneeinent of the self electric and seif-magnetic fields. While for the ease of beam width wb 〉 wge with relative strong external magnetic fields, the rotation effects of plasma cleetrons are strongly inhibited and a, well neutraliza, tion of ion beam current can be found. Finally, the influences of diftiuent beam widths. beam energies and magnetic fields on the neutralization of ion bc, anl eurrellt are summarized for the eases of wb 〈 wge〈 c/wpe,wge 〈wb〈c/wbp and wb〈c/wpe〈wge. 展开更多
关键词 current neutralization ion beams magnetized plasmas Particle-in-Cell simulations
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Responses of the magnetotail plasma sheet to two interplanetary shocks:TC-1 observations 被引量:2
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作者 YAO Li ZUO PingBing +1 位作者 FENG XueShang LIU ZhenXing 《Chinese Science Bulletin》 SCIE EI CAS 2010年第6期530-538,共9页
Two interplanetary shocks are examined to determine the responses of the magnetic field and plasma in the plasma sheet upon the shock impacts by using TC-1 observational data.The two shocks are observed by WIND on Nov... Two interplanetary shocks are examined to determine the responses of the magnetic field and plasma in the plasma sheet upon the shock impacts by using TC-1 observational data.The two shocks are observed by WIND on November 7,2004.Prior to and after the shock,the IMF is either weakly southward or northward.The responses of the plasma sheet to the two shocks are intense and much similar.When the shock interacts with the magnetosphere,the magnetic field impulsively increases 1-2 min after the geomagnetic field sudden impulse (SI) judged from the Sym-H index change,and the magnetic field line is stretched.On the other hand,all of the ion density,the ion temperature,and the velocity of ion flow in the plasma sheet increase.Interestingly,quasi-periodical oscillations of the ion flow are suddenly enhanced,and the plasma flow is basically perpendicular to the local magnetic field.The responses of the magnetic field and the plasma are nearly simultaneous.The responses in the plasma sheet are probably caused by the lateral compression due to the dynamic pressure enhancement downstream the shock when the shock propagates antisunward in the magnetosheath. 展开更多
关键词 等离子体反应 等离子体片 国际货币基金组织 行星 磁尾 地磁场 准周期振荡 观测数据
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Preparation and characterization of three-dimensional micro-electrode for micro-supercapacitor based on inductively coupled plasma reactive etching technology 被引量:1
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作者 WEN ChunMing WEN ZhiYu +1 位作者 YOU Zheng WANG XiaoFeng 《Science China(Technological Sciences)》 SCIE EI CAS 2012年第7期2013-2018,共6页
The capacity of supercapacitor charge storage depends on the size of the electrode surface area and the active material on the electrodes.To enhance the charge storage capacity with a reduced volume,silicon is used as... The capacity of supercapacitor charge storage depends on the size of the electrode surface area and the active material on the electrodes.To enhance the charge storage capacity with a reduced volume,silicon is used as the electrode material,and three-dimensional electrode structure is prepared to increase the electrode surface area on the footprint area by inductively coupled plasma reactive etching(ICP) techniques.The anodic constant current deposition method is employed to deposit manganese oxide on the electrode surface as the electroactive material.For comparison,samples without slot are prepared with a two-dimensional electrode.Scanning Electron Microscopy(SEM) and Energy Dispersive Spectroscopy(EDS) are used to characterize the surface morphology of the electrode structure and the deposited electroactive material.Electrochemical properties of the electrode are characterized by the cyclic voltammetry(CV) and the constant current charge-discharge method.Experimental results show that our approach can effectively increase the electrode surface area with more electroactive substances,and hence can increase storage capacity of the micro-supercapacitor. 展开更多
关键词 Micro Electro Mechanical System(MEMS) micro-supercapacitors three-dimensional electrode inductively coupled plasma reactive etching manganese oxide silicon
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