A 16-channel arrayed waveguide grating(AWG)with an 800 GHz channel spacing in the O-band has been developed and fabricated based on silica planar lightwave circuit(PLC)technology.By extending the wave⁃length allocatio...A 16-channel arrayed waveguide grating(AWG)with an 800 GHz channel spacing in the O-band has been developed and fabricated based on silica planar lightwave circuit(PLC)technology.By extending the wave⁃length allocation from 8 channels to 16 channels as specified in IEEE 802.3bs,we increased the number of chan⁃nels and boosted transmission capacity to meet the 1.6 Tbps and higher-speed signal transmission requirements for future data centers.Through optimizing the AWG structure,it has achieved insertion loss(IL)better than-1.61 dB,loss uniformity below 0.35 dB,polarization-dependent loss(PDL)below 0.35 dB,adjacent channel cross⁃talk under-20.05 dB,ripple less than 0.75 dB,center wavelength offset under 0.22 nm and 1 dB bandwidth ex⁃ceeding 2.88 nm.The AWG has been successfully measured to transmit 53 Gbaud 4-level pulse amplitude modu⁃lation(PAM4)signal per channel and the total transmission speed can reach over 1.6 Tbps.展开更多
We report investigations of three types of silica-based thermo-optic modulating Mach-Zehnder interferometers(MZIs).They are widely used in optical communication and quantum photonics.Three types of MZIs are fabricated...We report investigations of three types of silica-based thermo-optic modulating Mach-Zehnder interferometers(MZIs).They are widely used in optical communication and quantum photonics.Three types of MZIs are fabricated.The waveguide structure and fabrication process are paid special attention.The power consumption is less than 250 mW for all MZIs.The polarization dependent loss(PDL)at the same attenuation using the upper heater is less than that using the lower heater for the three types of MZIs.In addition,it is found that the PDL at the same attenuation increases gradually forπ,2πand 0 phase differences.The measured response time of the three types of MZIs is less than 1.8 ms.展开更多
A 25-channel 200 GHz arrayed waveguide grating(AWG)based on Si nanowire wavegnides is designed,simulated and fab-ricated.Transfer function method is used in the simulation and error analysis of AWG with width fluctuat...A 25-channel 200 GHz arrayed waveguide grating(AWG)based on Si nanowire wavegnides is designed,simulated and fab-ricated.Transfer function method is used in the simulation and error analysis of AWG with width fluctuations.The 25-channel 200 GHz AWG exhibits central channel insertion loss of 6.7 dB,crosstalk of-13 dB,and central wavelength of 1560.55 nm.The error analysis can explain the experimental results of 25-channel 200 GHz AWG well.By using deep ul-traviolet lithography(DUV)and inductively coupled plasma etching(ICP)technologies,the devices are fabricated on sili-con-on-insulator(SOI)substrate.展开更多
Silica-based 71-channle AWGs with 0.4 nm (50 GHz) channel spacing at 1. 5445 μm have been designed and fabricated by using silica-based waveguide. Theoretical simulation and experimental results are given and compa...Silica-based 71-channle AWGs with 0.4 nm (50 GHz) channel spacing at 1. 5445 μm have been designed and fabricated by using silica-based waveguide. Theoretical simulation and experimental results are given and compared. The test results show that the fiber-to-fiber insertion loss ranges from 3.5 dB to 7.1 dB for central and peripheral output ports, respectively, the total crosstalk level is better than -32 dB, 3 dB bandwidth is 25 GHz and polarization dependence Ioss(PDL) within 3 dB bandwidth is less than 0.5 dB, which agrees well with the simulation results.展开更多
A flat response silica-based arrayed waveguide grating (AWG) with 10-channels and 0.8 nm (100 GHz) channel spacing has been designed and fabricated using multimode interferometer (MMI) at the end of input wavegu...A flat response silica-based arrayed waveguide grating (AWG) with 10-channels and 0.8 nm (100 GHz) channel spacing has been designed and fabricated using multimode interferometer (MMI) at the end of input waveguide. Proper width of MMI is theoretically optimized using beam propagation method (BPM). An AWG with a 1 6 um width MMI is fabricated experimentally. The measurement results show that the 3 clB bandwidth is 0.62 nm,insertion loss (IS) ranges from 5.2 dB to 7.5 dB,and the crosstalk is less than - 20 dB. The 3dB bandwidth,channel numbers and channel spacing of the AWG agree well with the simulation values.展开更多
A 1 550 nm long-wavelength vertical cavity surface emitting laser (VCSEL) on InP substrate is designed and fabri- cated. The transfer matrix is used to compute reflectivity spectrum of the designed epitaxial layers....A 1 550 nm long-wavelength vertical cavity surface emitting laser (VCSEL) on InP substrate is designed and fabri- cated. The transfer matrix is used to compute reflectivity spectrum of the designed epitaxial layers. The epitaxial layers mainly consist of 40 pairs of n-AlxGayIn(l-x-y)As/InP, and 6 strain compensated AlxGayln(l-x-y)As/InP quantum wells on n-InP substrate, respectively. The top distributed Bragg reflection (DBR) mirror system has been formed by fabricat- ing 4.5 pairs of SiO2/Si. The designed cavity mode is around 1 536 nm. The dip of the fabricated cavity mode is around 1 530 nm. The threshold current is 30 mA and the maximum output power is around 270 μW under CW opera- tion at room temperature.展开更多
基金Supported by the National Key Research and Development Program of China(2021YFB2800201)the Strategic Priority Research Program of Chinese Academy of Sciences(XDB43000000)。
文摘A 16-channel arrayed waveguide grating(AWG)with an 800 GHz channel spacing in the O-band has been developed and fabricated based on silica planar lightwave circuit(PLC)technology.By extending the wave⁃length allocation from 8 channels to 16 channels as specified in IEEE 802.3bs,we increased the number of chan⁃nels and boosted transmission capacity to meet the 1.6 Tbps and higher-speed signal transmission requirements for future data centers.Through optimizing the AWG structure,it has achieved insertion loss(IL)better than-1.61 dB,loss uniformity below 0.35 dB,polarization-dependent loss(PDL)below 0.35 dB,adjacent channel cross⁃talk under-20.05 dB,ripple less than 0.75 dB,center wavelength offset under 0.22 nm and 1 dB bandwidth ex⁃ceeding 2.88 nm.The AWG has been successfully measured to transmit 53 Gbaud 4-level pulse amplitude modu⁃lation(PAM4)signal per channel and the total transmission speed can reach over 1.6 Tbps.
基金supported by the National High Technology Research and Development Program of China(No.2015AA016902)the National Natural Science Foundation of China(Nos.61435013 and 61405188)the K.C.Wong Education Foundation
文摘We report investigations of three types of silica-based thermo-optic modulating Mach-Zehnder interferometers(MZIs).They are widely used in optical communication and quantum photonics.Three types of MZIs are fabricated.The waveguide structure and fabrication process are paid special attention.The power consumption is less than 250 mW for all MZIs.The polarization dependent loss(PDL)at the same attenuation using the upper heater is less than that using the lower heater for the three types of MZIs.In addition,it is found that the PDL at the same attenuation increases gradually forπ,2πand 0 phase differences.The measured response time of the three types of MZIs is less than 1.8 ms.
基金supported by the National Key Research and Development Program of China(No.2016YFB0402504)the National Natural Science Foundation of China(Nos.61435013 and 61405188)
文摘A 25-channel 200 GHz arrayed waveguide grating(AWG)based on Si nanowire wavegnides is designed,simulated and fab-ricated.Transfer function method is used in the simulation and error analysis of AWG with width fluctuations.The 25-channel 200 GHz AWG exhibits central channel insertion loss of 6.7 dB,crosstalk of-13 dB,and central wavelength of 1560.55 nm.The error analysis can explain the experimental results of 25-channel 200 GHz AWG well.By using deep ul-traviolet lithography(DUV)and inductively coupled plasma etching(ICP)technologies,the devices are fabricated on sili-con-on-insulator(SOI)substrate.
文摘Silica-based 71-channle AWGs with 0.4 nm (50 GHz) channel spacing at 1. 5445 μm have been designed and fabricated by using silica-based waveguide. Theoretical simulation and experimental results are given and compared. The test results show that the fiber-to-fiber insertion loss ranges from 3.5 dB to 7.1 dB for central and peripheral output ports, respectively, the total crosstalk level is better than -32 dB, 3 dB bandwidth is 25 GHz and polarization dependence Ioss(PDL) within 3 dB bandwidth is less than 0.5 dB, which agrees well with the simulation results.
基金Supported by the National Natural Science Foundation of China(No.60477035 ,No.60507006) and The Ministry of Science and Technology "973" Plan (No.G2000036602)
文摘A flat response silica-based arrayed waveguide grating (AWG) with 10-channels and 0.8 nm (100 GHz) channel spacing has been designed and fabricated using multimode interferometer (MMI) at the end of input waveguide. Proper width of MMI is theoretically optimized using beam propagation method (BPM). An AWG with a 1 6 um width MMI is fabricated experimentally. The measurement results show that the 3 clB bandwidth is 0.62 nm,insertion loss (IS) ranges from 5.2 dB to 7.5 dB,and the crosstalk is less than - 20 dB. The 3dB bandwidth,channel numbers and channel spacing of the AWG agree well with the simulation values.
基金supported by the National High Technology and Development Program of China(No.2015AA016902)
文摘A 1 550 nm long-wavelength vertical cavity surface emitting laser (VCSEL) on InP substrate is designed and fabri- cated. The transfer matrix is used to compute reflectivity spectrum of the designed epitaxial layers. The epitaxial layers mainly consist of 40 pairs of n-AlxGayIn(l-x-y)As/InP, and 6 strain compensated AlxGayln(l-x-y)As/InP quantum wells on n-InP substrate, respectively. The top distributed Bragg reflection (DBR) mirror system has been formed by fabricat- ing 4.5 pairs of SiO2/Si. The designed cavity mode is around 1 536 nm. The dip of the fabricated cavity mode is around 1 530 nm. The threshold current is 30 mA and the maximum output power is around 270 μW under CW opera- tion at room temperature.