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电导型CuO-BaTiO_3基薄膜的制备与CO_2气敏特性的研究 被引量:3

PREPARATION OF CuOBaTiO_3 BASED THIN FILMS OF CONDUCTANCE TYPE AND STUDY ON THE CHARACTERISTICS OF ITS CO_2 SENSITIVE
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摘要 通过溶胶凝胶技术制备了CuOBaTiO3(copperoxidebariumtitanate,CBT)基复相陶瓷薄膜,并对其CO2气体敏感特性进行了研究。以Cu(NO3)2,Ba(NO3)2及Ti(C4H9O)4为原料,以柠檬酸和乙二醇为络合剂,配制均匀溶胶。通过浸渍提拉工艺,在Al2O3基片上形成溶胶膜,经750℃,40min烧结所制备的薄膜为具有各自独立存在的、纳米晶粒尺度的CuO与BaTiO3所构成。在浓度为6%CO2气体中,对CuOBaTiO3基薄膜的气敏性能进行测试。结果表明:掺杂Sr2+和Ag表面修饰后的CuOBaTiO3薄膜,在350℃的工作温度下,灵敏度可达13,响应与恢复时间均约2s。薄膜材料较佳的灵敏性与选择性适用于CO2气体的检测。 A new kind of conductance-type CO2 sensitive thin film consisted of CuO-BaTiO3 (copper oxide-barium titanate, CBT) mixed with oxides was developed by the sol-gel technology. The CuO-BaTiO3 thin films were prepared on the Al2O3 substrates by the dip-coating method using Cu(NO3)2, Ba(NO3) 2 and Ti(C4H9O)4 as the starting materials, the citric acid and ethylene glycol as chelating agents. The film sintered at 750°C for 40 min in air atmosphere is composed of the nano-size grains of CuO and BaTiO3. CO2 sensing characteristics of the conductance-type CuO-BaTiO3 thin film were tested while the thin film with Sr2+ additive and Ag catalyst was exposed to air with 6%CO2. It is shown that the sensitivity to CO2 of the film with Sr2+ additive and surface modified by Ag can reach 13, and both response time and recover time are about 2 s at the operating temperature of 350°C. The satisfactory sensitivity and selectivity of the film materials are suitable for the CO2 detection.
出处 《硅酸盐学报》 EI CAS CSCD 北大核心 2004年第4期490-493,共4页 Journal of The Chinese Ceramic Society
基金 国家自然科学基金(59995520)重大项目 国家自然科学基金(50072014)资助项目~~
关键词 氧化铜-钛酸钡 薄膜 二氧化碳气敏 制备 Alumina Barium titanate Carbon dioxide Catalysts Chelation Chemical sensors Coating techniques Copper oxides Electric conductance Nanostructured materials Sol gels Substrates Thin films
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