摘要
本文提出了SnO_2:F绒面膜的三层膜模型;从表示平面波传播性质的界面矩阵和膜层矩阵出发,导出了三层膜系统的散射矩阵和总反射系数,建立了反射式椭偏术的基本公式;利用反射式椭偏光谱法,测得SnO_2:F绒面膜的厚度和色散关系.
The three-layer-film model for SnO2:F film with chorionic surfaces is suggested. Using the matrix of interface and the layer matrix representing the properties of propogation of plane waves, we have deduced the scattering matrix and the overall reflection coefficient of the three-layer structure and obtained the basic formula of the reflection ellipsometry. The dispersion relation and thickness of SnO2:F films with chorionic surfaces have been measured by using the spectroscopic reflection ellipsometry.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1992年第10期941-945,共5页
Acta Optica Sinica
关键词
绒面膜
椭偏光谱法
非镜面膜
SnO2:F film with chorionic surface, interface film, scattering matrix,spectroscopic ellipsometry.
