摘要
Step channel direct injection(SCDI)flash memory device which had been developed changes the hot carrier injection method by making a shallow step in the middle of channel .Therefore high speed for programming,high efficiency for injection,and lower working voltage are obtained.Simulation and analysis for the proposed SCDI structure device are done and an optimization scheme to improve the utmost performance of SCDI device is given...
研制成一种台阶沟道直接注入 (SCDI)器件 ,通过在沟道的中间制作一个浅的台阶来改变热载流子的注入方式 ,从而获得了高的编程速度和注入效率 ,降低了工作电压 .并对 SCDI器件结构和常规器件结构进行了模拟分析 ,提出了改进
基金
国家重点基础研究专项经费 (批准号 :G2 0 0 0 0 3 65 )
国家自然科学基金 (批准号 :60 2 760 2 3 )资助项目~~