摘要
本文描述用于检测微振动的非对称型外差激光探针系统及实验结果。实验数据表明,系统检测灵敏度为1×10^(-4)nm/(Hz)~1/2将本系统用于检测薄膜电路在交变电热下的微振动以及表面波聚焦换能器的辐射声场分布,得到满意的结果。
An asymmetrical heterodyne laser pro bo system used for detection of microvibra-tion is described. The experimental results show that a high sensitivity of about 1X 10-4nm/ Hz has been obtained. By this system, the microvibrations of thin film circuits driven by alternative voltages and the radiated aooustie field distributions of SAW focusing transducers were detected with satisfactory results.
出处
《中国激光》
EI
CAS
CSCD
北大核心
1992年第2期102-106,共5页
Chinese Journal of Lasers
关键词
激光探针
声场
材料
微振动
检测
laser heterodyne prob8,microvibration,surface acoustic fields,photoacoustio and photothermal effects, contaotless, nondestructive and nonpolluted evaluations
