摘要
介绍了一种利用可编程Intel8254定时器/计数器在微机上实现准分子激光微加工过程激光外触发控制的新方法。针对准分子激光的光刻直写技术的需求特点对所使用的分频器以及8254的组合工作方式进行了研究,并在实际应用中对该外触发器的优势进行了分析。结果表明,由此方法制作的准分子激光外触发控制器具有性能可靠、结构简单和可编程控制等特点。
A new control method of excimer laser external trigging used in micro fabrication was presented,which is based on Intel 8254 and computer control technology.According to the requirement of excimer laser direct drawing process,the frequency divider and 8254 compound work mode were discussed.The advantages of external trigger were analyzed during practical application.The external trigger has the characteristics of reliable performance,simple construction and programmable controlling.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2004年第4期499-501,共3页
Journal of Optoelectronics·Laser
基金
国家自然科学基金资助项目(50175002)
国家"863"计划资助项目(2002AA404160)
北京市自然科学基金资助项目(3031001)
北京市科技新兴计划资助项目
