摘要
叙述真空管集热器用的太阳能高温选择性吸收膜氮氧化铝(AlN_xO_y)的制备及性能。采用金属铝单靶反应溅射,在铝基体上沉积吸收膜,其吸收率α_(HT)=0.94,热发射率ε_(310℃)=0.136。
This paper describes the preparation and properties of AIN_xO_y solar energy selectively absorbing films for vacuum collecting tubes. The film was deposited onto an aluminium substrate using the single aluminium target reactive megnetron sputtering. The time has the solar absorptance α_(HT)=0.94, and the thermal emittance ε_(310℃)=0.136.
出处
《真空科学与技术》
CSCD
1992年第4期329-331,共3页
Vacuum Science and Technology
