摘要
研究了梳状谐振器在大信号作用下的机电特性方程 .采用 SPICE中的多项式受控源 ,给出了其 F - I类比的大信号等效电路 ,同时根据所得到的等效电路宏模型运用 SPICE软件进行了系统级的模拟 ,并采用两种方法进行了验证 .
The electromechanical characteristic equations of the comb resonator are studied.With the introduction of polynomial controlled sources,the large-signal equivalent circuits with F-I analogy method are presented ,system-level simulation is then carried out for the macromodel with SPICE software and two methods are adopted to verify the macromodel.
基金
国家高技术研究发展计划 (课题编号 :2 0 0 2 AA40 40 10 )
教育部 ( No.0 2 16)资助项目~~
