摘要
本文论述了激光扫描尺寸自动检测装置方面的应用问题,阐述了影响测量精度的主要因素,为该装置的进一步实用研究提供了参考。
The application problems of the laser-scanning automatic size-detector in shallow hole measurement are discussed in this paper. The prin-ciples of the non-contact shallow hole measurement setup are expoundedin detail. The major factors which influence the measurement accuracyare also analyzed so as to open a way to further investigate the practi-cal measurement apparatus.
出处
《长春光学精密机械学院学报》
1989年第4期52-58,共7页
Journal of Changchun Institute of Optics and Fine Mechanics
