摘要
用150W连续CO_2激光器为光源,以SiH_4气体为主原料,合成了超微Si、Si_3N_4、SiC粉末。研究了反应条件对超微粉性能的影响,并探索用廉价的原料代替SiH_4的可能性。该研究具有很好的工业应用前景。
The ultrsgine powders of Si, Si_3N_4 and SiC is successfully prepared with a 150W CW CO_2 laseras light source and SiH_4 as main raw-material. The influence of experimental conditions on properties of ul-trafine powders is invertigated. The possibility of substitution of SiH_4 with cheaper materials is also discussed. This study is expected to have a good prospects in industrial applications.
出处
《应用激光》
CSCD
北大核心
1992年第5期223-226,共4页
Applied Laser
关键词
激光化学
超微粉末
合成
硅系
laser chemistry
ultrafine powders
synthesis
